© intec 2000 packaging of parallel optical interconnects modules with on chip optical access...
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![Page 1: © intec 2000 Packaging of parallel optical interconnects modules with on chip optical access François Marion / Julien Routin (LETI) Ronny Bockstaele](https://reader036.vdocument.in/reader036/viewer/2022062518/56649d605503460f94a4153b/html5/thumbnails/1.jpg)
© intec 2000
Packaging of parallel optical interconnects modules with on chip optical access
François Marion / Julien Routin (LETI)
Ronny Bockstaele / Olivier Rits (IMEC)
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http://www.intec.rug.ac.be/IODATE WORKSHOP, Paris CNIT, February 20, 2003
Summary
Packaging for today Flip chip technology BGA package Alignment techniques for
fiber connector
Packaging for the future• CSP package development• Flip/chip over glass sheet
PCB
Packaged CMOS chipswith direct on chip optical access
DTA Digital technology assessment testbed
PCB
backplane
Optical pathways Optical pathways
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http://www.intec.rug.ac.be/IODATE WORKSHOP, Paris CNIT, February 20, 2003
Packaging for today
Packaging specifications
Electrical interface 296 I/O’s, LVDS signals
Optical interface 64 optical in, 64 optical out
Mechanical interface alignment of fiber connector : +/-5µm
Thermal interface 10W thermal dissipation
Hermeticity semi-hermetic packaging
Packaging specifications
PACKAGED chip
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http://www.intec.rug.ac.be/IODATE WORKSHOP, Paris CNIT, February 20, 2003
296 electrical I/Os
64 optical outputs
64 optical inputs
Thermal sink 10W
+/-5µmmechanical
guide
Packaging for today Packaging specifications
![Page 5: © intec 2000 Packaging of parallel optical interconnects modules with on chip optical access François Marion / Julien Routin (LETI) Ronny Bockstaele](https://reader036.vdocument.in/reader036/viewer/2022062518/56649d605503460f94a4153b/html5/thumbnails/5.jpg)
http://www.intec.rug.ac.be/IODATE WORKSHOP, Paris CNIT, February 20, 2003
Packaging for today Packaging specifications
![Page 6: © intec 2000 Packaging of parallel optical interconnects modules with on chip optical access François Marion / Julien Routin (LETI) Ronny Bockstaele](https://reader036.vdocument.in/reader036/viewer/2022062518/56649d605503460f94a4153b/html5/thumbnails/6.jpg)
http://www.intec.rug.ac.be/IODATE WORKSHOP, Paris CNIT, February 20, 2003
Develop reliable flip-chip technology for direct coupling of large arrays opto-chips on CMOS
Provide custom BGA package
Provide alignment aids for optical connector passive
alignment
Packaging for today Packaging specifications
DIFFERENT TASKS
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http://www.intec.rug.ac.be/IODATE WORKSHOP, Paris CNIT, February 20, 2003
Develop flip chip technology : wafer bumpingPackaging for today
DTA1 CMOS
Bumps for glass board F/C
Bumped CMOS chip
Bumps for opto chips F/C
Bumps for silicon benches F/C
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http://www.intec.rug.ac.be/IODATE WORKSHOP, Paris CNIT, February 20, 2003
Develop flip chip technology : wafer scale hybridizationPackaging for today
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http://www.intec.rug.ac.be/IODATE WORKSHOP, Paris CNIT, February 20, 2003
Post-process on CMOS wafer
Hybridize VCSEL+ photodiodechips
Bump CMOS
Underfill
THIN for butt coupling
Antireflectivecoating
Dicing + hybridizeAlignment plate
50µm
Develop flip chip technology : wafer scale hybridization
bench
bench
PIN detector
VCSEL
F/C optos and µbench on DTA1 CMOS
Packaging for today
![Page 10: © intec 2000 Packaging of parallel optical interconnects modules with on chip optical access François Marion / Julien Routin (LETI) Ronny Bockstaele](https://reader036.vdocument.in/reader036/viewer/2022062518/56649d605503460f94a4153b/html5/thumbnails/10.jpg)
http://www.intec.rug.ac.be/IODATE WORKSHOP, Paris CNIT, February 20, 2003
CUSTOM BGA PACKAGE
Provide BGA packagePackaging for today
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http://www.intec.rug.ac.be/IODATE WORKSHOP, Paris CNIT, February 20, 2003
High speed I/O’s (diff pairs)
Lo
w
spe
ed
I/O
’s
SnPb bumps(302)
Provide BGA package
Controlled geometryX,Y Z
Thermal sink
Packaging for today
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http://www.intec.rug.ac.be/IODATE WORKSHOP, Paris CNIT, February 20, 2003
Silicon bench alignement
INDEX alignement
Develop alignment techniquePackaging for today
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http://www.intec.rug.ac.be/IODATE WORKSHOP, Paris CNIT, February 20, 2003
Silicon bench for X,Y,Z alignment
Guiding pins+/- 5µm X,Y misalignment versus optos
Develop silicon bench alignment techniquePackaging for today
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http://www.intec.rug.ac.be/IODATE WORKSHOP, Paris CNIT, February 20, 2003
Develop silicon bench alignment techniquePackaging for today
AssemblageIO.exe
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http://www.intec.rug.ac.be/IODATE WORKSHOP, Paris CNIT, February 20, 2003
INDEX ALIGNMENT• Alignment is based on measurement of coordinates, not based on
mechanical contact
• Then attach using UV-curable adhesive
Package on (,) stage
Spacer plate on (X,Y,Z,) stage
CMM measuringhead
Assembly of the package using index alignment
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http://www.intec.rug.ac.be/IODATE WORKSHOP, Paris CNIT, February 20, 2003
CSP package
New concept
-Package size reduced to 15*15mm (vs. 26*28mm for « today BGA »)-Alignment pins placement made easier-NO wirebonds (increased speed)-Optics included in pathway =
-connector made easier-optical coupling made easier-hermeticity made easier
Packaging for tomorrow
CSP package
CMOS +optos
Direct hybridization of CMOS+opto on customized CSP ceramic
To PCB Optics in pathway
CSP package
![Page 17: © intec 2000 Packaging of parallel optical interconnects modules with on chip optical access François Marion / Julien Routin (LETI) Ronny Bockstaele](https://reader036.vdocument.in/reader036/viewer/2022062518/56649d605503460f94a4153b/html5/thumbnails/17.jpg)
http://www.intec.rug.ac.be/IODATE WORKSHOP, Paris CNIT, February 20, 2003
ULTIMATE : direct flip chip over glass sheet PCB
Chip on optical (glass sheet) boardPackaging for tomorrow
Silicon CMOS
Electrooptical PCB
Glass waveguide
Copper traces(Electronic)
Optical waveguides(photonic)
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http://www.intec.rug.ac.be/IODATE WORKSHOP, Paris CNIT, February 20, 2003
CONCLUSION
Conclusion :
Packaging for to-day = first packaged modules delivered
Packaging for tomorrow = development on going:
CSP (chip scale packaging)
Chip On Board packaging (glass sheet board)