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    Puebla, December 2004

    ICTP Microprocessor Laboratory

    Second Central American Regional Course on Advanced VLSI Design Techniques

    Benemrita Universidad Autnoma de Puebla, Puebla, Mexico

    29 November 17 December 2004

    Introduction to Analog Design

    in SubmicronCMOS Technologies

    Giovanni AnelliCERN - European Organization for Nuclear Research

    Physics Department

    Microelectronics GroupCH-1211 Geneva 23 Switzerland

    [email protected]

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    The MOST important thing

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    A second tip

    sRC

    1

    )s(V

    )s(V)s(H

    in

    out gs

    mmax

    C

    g

    2

    1f f

    R

    kT4i2n = 2/T 2/T 2av dt)t(xT1limP

    2

    2

    2

    )x(

    e2

    1

    )x(p

    )e1(eL

    WII t

    DS

    t

    GS

    n

    V

    n

    V

    0DDS f1WLC Kg1kTn4fv 2ox am2

    in

    2

    t

    DS

    n2

    I.C.I

    q

    kTt =

    ( ) 21.C.I414

    1

    .C.I

    6

    1

    2

    1.)C.I(F

    ++

    2

    2

    BGD,n

    2

    TOT,n

    DUT,n

    )f(G

    )f(V)f(V)f(E

    =

    LW

    A

    LW

    A2

    C2

    ox+2 /

    LWtConst oxVth

    4

    N

    d)l

    d(FnL 2

    A

    dn

    A

    lR w

    22204

    0

    2

    nnh8

    qmZE =

    2

    TGSDS )VV(n2

    I =

    DSTGS

    GS

    DSm I

    n2)VV(

    nVIg === )VV(1 TGS

    0 =

    SAT_DS

    E

    SAT_DSds

    0I

    LV

    I

    1

    g

    1r =

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    The last warning before we start

    The transparencies I wil l show you are sometimes quite

    full of details. You wil l not have the time to digest all

    these details this week, but I wanted to prepare thetransparencies so that you will have a COMPLETE

    material for future reference.

    During the presentation, I will help you in identifying inthe transparencies and in the formulas the most

    important issues that you should retain.

    I also made a special effort in referencing all the sources

    (books and papers) I have been using when preparing the

    lectures. This should help you in finding easily what you

    do not find in the transparencies

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    Outline

    Semiconductor physics

    Silicon and silicon dioxide properties

    Band diagram concept

    Intrinsic and doped semiconductors

    Carrier mobility in silicon

    CMOS technology: an analog designer perspective

    The MOS transistor

    DC characteristics

    Important formulas

    Small signal equivalent circuit

    Some cross sections of real integrated circuits

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    Outline

    Semiconductor physics

    Silicon and silicon dioxide properties

    Band diagram concept

    Intrinsic and doped semiconductors

    Carrier mobility in silicon

    CMOS technology: an analog designer perspective

    The MOS transistor

    DC characteristics

    Important formulas

    Small signal equivalent circuit

    Some cross sections of real integrated circuits

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    Insulators and (semi)conductors

    S. M. Sze, Semiconductor Devices, Physics and Technology , John Wiley and Sons, 1985, p. 1

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    Physical Properties of Si and SiO2

    at room temperature (300 K)

    Y. Taur and T. H. Ning, Fundamentals of Modern VLSI Devices, Cambr idge Universi ty Press, 1998, p. 11.

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    Silicon crystalline structure

    Diamond

    lattice

    structure

    Covalentbonding

    Orbitals

    filling

    3p2

    3s2

    2p6

    2s2

    1s2

    a = 0.513 nm

    for Silicon

    NucleusS. M. Sze, Semiconductor Devices, Physics and Technology , John Wiley and Sons, 1985, p. 5.

    Linus Pauling, General Chemistry, Dover, 1988, p. 128.

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    From energy levels to bands

    Allowed

    energy levels

    E1

    E2

    E3

    En

    E0 (reference)

    222

    0

    4

    0

    2

    nnh8

    qmZE =

    putting more

    atoms together

    (and rememberingPaulis exclusion

    principle)

    Allowedenergy bandZ: atomic number

    m0: free electron mass

    q: electron charge

    0: permittivity free spaceh: Plancks constant

    n: positive integers

    (level number)

    Forbidden

    energy gap

    x

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    Energy-band diagrams

    Insulator Semiconductor Conductor Conductor

    Valence

    Band

    ConductionBand

    Energy

    Gap

    Valence

    Band

    ConductionBand

    Valence

    Band

    Conduction

    Band

    Energy Gap

    Conduction

    Band

    Empty allowed

    energy band

    Full allowed

    energy band

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    Intrinsic and doped silicon

    Y. Taur and T. H. Ning, Fundamentals of Modern VLSI Devices, Cambridge Univers ity Press, 1998, pp. 10, 13, 14.

    E. S. Yang, Microelectronic Devices, McGraw-Hill International Editions, 1988, pp. 9, 15.

    Fictitious particle

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    Donors and acceptors

    Intrinsic Semiconductor: small amount of impurit ies compared to the

    thermally generated electrons and holes

    Donor level: the allowed energy level provided by a donor is neutral

    when occupied by an electron and positively charged when empty

    Acceptor level: the allowed energy level provided by an acceptor is

    neutral when empty (= occupied by a hole) and negatively charged

    when occupied by an electron (= empty)Y. Taur and T. H. Ning, Fundamentals of Modern VLSI Devices, Cambr idge Universi ty Press, 1998, p. 15.

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    Carrier density vs Temperature

    N-type semiconductor

    Electrons are themajority carriers

    Intrinsic carrier density

    (= hole density)

    kT

    E

    vc

    2

    i

    g

    eNNn

    S. M. Sze, Semiconductor Devices, Physics and Technology , John Wiley and Sons, 1985, p. 27

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    Mobility vs T and ND

    ND: doping concentration

    EEm

    qv n

    e

    md

    vd = drift velocity

    m = mean free time between coll isionsme = conductivity effective mass

    E = electric field

    S. M. Sze, Semiconductor Devices, Physics and Technology , John Wiley and Sons, 1985, p. 33.

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    Mobility vs doping

    Y. Taur and T. H. Ning, Fundamentals of Modern VLSI Devices, Cambr idge Universi ty Press, 1998, p. 20.

    SIL

    1111 = total mobil ityL = mobil ity due tolattice scattering

    I = mobility due toimpurity scatteringS = mobil ity due tosurface scattering

    (the dominating

    factor in MOStransistors)

    It is like for resistors

    in parallel: the

    smaller dominates!

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    Carrier velocity vs Electric Field

    R. S. Muller and T. I. Kamins, Device Electronics for Integrated Circuits , 2nd Edition, John Wiley and Sons, 1986, p. 36.

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    Giovanni Anelli, CERNPuebla, December 2004

    Resistivity vs doping

    )pn(q1

    pn q = electronic charge = resistivity

    n, p = carrier concentration

    n, p = carrier mobil ity

    Y. Taur and T. H. Ning, Fundamentals of Modern VLSI Devices, Cambr idge Universi ty Press, 1998, p. 21.

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    Giovanni Anelli, CERNPuebla, December 2004

    Outline

    Semiconductor physics

    Silicon and silicon dioxide properties

    Band diagram concept

    Intrinsic and doped semiconductors

    Carrier mobility in silicon

    CMOS technology: an analog designer perspective

    The MOS transistor

    DC characteristics

    Important formulas

    Small signal equivalent circuit

    Some cross sections of real integrated circuits

    Th MOS i

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    The MOS transistor

    x

    y

    z

    GATE

    SOURCE

    DRAIN

    SUBSTRATE GSmDS

    vgi Transconductance

    Y. Tsivid is, Operation and Modeling of The MOS Transistor, 2nd edit ion, McGraw-Hill, 1999, p. 35

    CMOS t h l

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    Giovanni Anelli, CERNPuebla, December 2004

    CMOS technology

    NMOS PMOS

    GG

    n+ n+p+ p+ p+ n+

    S Dsub S D well

    n-wellp-substrate

    Polysilicon

    OxideElectrons

    Holes

    n+ source

    n+ drain

    NMOS

    layoutG

    Li d S t ti i

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    Linear and Saturation regions

    LINEAR REGION (Low VDS):

    Electrons (in l ight blue) are attracted to

    the SiO2 Si Interface. A conductive

    channel is created between source anddrain. We have a Voltage Controlled

    Resistor (VCR).

    G

    n+ n+

    S D

    SATURATION REGION (High VDS):

    When the drain voltage is high enough

    the electrons near the drain are

    insuff iciently attracted by the gate, andthe channel is pinched off. We have a

    Voltage Control led Current Source

    (VCCS).

    G

    n+ n+

    S D

    D i t D i lt

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    Drain current vs Drain voltage

    0.0E+00

    5.0E-06

    1.0E-05

    1.5E-05

    2.0E-05

    2.5E-05

    3.0E-05

    0.0 0.5 1.0 1.5 2.0 2.5

    VDS [ V ]

    IDS

    [A

    ]

    Saturation region (VCCS)

    Linear region (VCR)

    Output conductance

    @ three

    different VGS

    Locus of IDS_SAT vs VDS_SAT

    E ti t i i

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    Equations: strong inversion

    DSDS

    TGSDS V)2

    nVVV(I LINEAR REGION:

    SAT_DSTGS

    DS Vn

    VVV =

    Transconductance:

    L

    WCoxx.1g

    ggn

    m

    mbm =ox

    SiO

    oxtC

    2

    =BS

    DSmb

    V

    Ig

    =

    D i t G t lt

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    Drain current vs Gate voltage

    0.E+00

    2.E-04

    4.E-04

    6.E-04

    8.E-04

    1.E-03

    1.E-03

    1.E-03

    2.E-03

    -0.4 0.0 0.4 0.8 1.2 1.6 2.0 2.4

    VGS [ V ]

    IDS[

    A

    ]

    Subthreshold

    region

    Linearreg

    ion(green)and

    saturatio

    nregion(red)

    High field

    (vertical andlongitudinal)

    effects

    Log(I ) vs V

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    Log(IDS) vs VGS

    1.E-12

    1.E-11

    1.E-10

    1.E-09

    1.E-08

    1.E-07

    1.E-06

    1.E-05

    1.E-04

    1.E-03

    1.E-02

    -0.4 0.0 0.4 0.8 1.2 1.6 2.0 2.4

    VGS [ V ]

    IDS[

    A

    ]

    LEAKAGE

    CURRENT

    THRESHOLD

    VOLTAGE

    STRONGINVERSION

    WEAK

    INVERSION

    SUBTHRESHOLD

    SLOPE

    Equations: weak inversion

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    Equations: weak inversion

    )e1(eL

    WII t

    DS

    t

    GS

    n

    V

    n

    V

    0DDS

    then the drain current does not depend on

    VDS any longer (saturation)If tDS n4V

    t

    GSnV

    0DDS eL

    WII =t

    DS

    GS

    DSm

    n

    I

    V

    Ig =Almost like a bipolar transistor!

    K300mV25q

    kTt @

    Transcond vs Gate voltage

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    Transcond. vs Gate voltage

    0.E+00

    1.E-05

    2.E-05

    3.E-05

    4.E-05

    5.E-05

    6.E-05

    7.E-05

    8.E-05

    9.E-05

    1.E-04

    -0.35 0.05 0.45 0.85 1.25 1.65 2.05 2.45

    VGS [ V ]

    gm

    [S]

    Measurement

    made in the linear

    region

    Output conductance

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    Output conductance

    0.0E+00

    5.0E-06

    1.0E-05

    1.5E-05

    2.0E-05

    2.5E-05

    3.0E-05

    0.0 0.5 1.0 1.5 2.0 2.5

    VDS [ V ]

    IDS[

    A

    ]

    VI

    VDS

    VD

    VD

    IDS

    ID

    ID

    n+ n+

    SG

    D

    LL

    Dashed lines:ideal behavior

    L-L

    L

    V

    I

    V

    IG

    D

    out =

    =

    Equations: output conductance

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    Equations: output conductance

    )V1()VV(n2

    I DS2

    TGSDS =

    2

    SAT_DS

    2

    TGSSAT_DSnV

    2)VV(

    n2I

    ==

    nVVV TGSSAT_DS =

    0.0E+00

    5.0E-06

    1.0E-05

    1.5E-05

    2.0E-05

    2.5E-05

    3.0E-05

    0.0 0.5 1.0 1.5 2.0 2.5

    VDS [ V ]

    IDS[

    A

    ]

    SAT_DS

    DS

    DSdsout I

    VIgg =

    SAT_DS

    E

    SAT_DSds

    0I

    LVI

    1g1r =

    )N,V(fLLL

    L

    V

    1DopingDS

    DSwhere =

    Equations: addendum

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    Equations: addendum

    ( )SiSisbT VV ox

    aSi

    C

    Nq2 =Bulk effect

    Sm

    m'

    mRg1

    gg +Source parasiticresistance

    )VV(1 TGS

    0 = Vertical electricfield effect)VV(

    nL2

    1

    C

    g

    2

    1f TGS2

    gs

    mmax in s.i.Maximumfrequency

    K. R. Laker and W. M. C. Sansen, Design of Analog Integrated Circuits and Systems, McGraw-Hill, 1994, Chapter 1

    Equations: velocity saturation

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    Equations: velocity saturation

    For low values of the longitudinal electric field, the velocity of the

    carriers increases proportionally to the electric field (and the

    proportionality constant is the mobility). For high values of the electric

    field (3 V/m for electrons and 10 V/m for holes) the velocity of thecarriers saturates.

    s

    cm10v)VV(vWCI 7satTGSsatox.S.V_DS with =

    satox.S.V_m vWCg =L

    v

    2

    1

    C

    g

    2

    1f sat

    gs

    m.S.Vmax_

    g / I vs log(I / W)

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    gm / ID vs log(ID / W)

    0

    5

    10

    15

    20

    25

    30

    1E-11 1E-09 1E-07 1E-05 1E-03

    ID / W

    g

    m

    /ID

    W.I.

    M.I.

    S.I.

    &

    V.S.

    Weak Inversion (W.I.)

    t

    DSm

    n

    Ig = tD

    m

    n

    1

    I

    g

    =

    Strong Inversion (S.I.)

    DSm In

    2g=

    DSD

    m

    I

    1

    n2

    I

    g =

    Velocity Saturation (V.S.)

    satoxm vWCg =DS

    satox

    DS

    m

    I

    vWC

    I

    g =

    Log(g / ID) vs log(ID / W)

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    Log(gm / ID) vs log(ID / W)

    0.1

    1

    10

    100

    1E-11 1E-10 1E-09 1E-08 1E-07 1E-06 1E-05 1E-04 1E-03

    ID

    / W

    gm

    /ID

    Slope = - 0.5

    Strong inversion

    Slope = - 1

    Velocity saturation

    The poor PMOS transistor

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    The poor PMOS transistor

    G

    DRAIN

    SOURCE

    2

    TGSDS )VV(n2I

    DS

    TGS

    GS

    DSm

    In2

    )VV(n

    V

    Ig

    =

    ==

    -3.0E-05

    -2.5E-05

    -2.0E-05

    -1.5E-05

    -1.0E-05

    -5.0E-06

    0.0E+00

    -2.5 -2.0 -1.5 -1.0 -0.5 0.0

    VDS [ V ]

    IDS[

    A

    ]

    p+ p+ n+

    S D well VT < 0 V

    VGS < 0 V

    IDS < 0 V

    GATE WELL

    n-well

    -2.E-03

    -1.E-03

    -1.E-03

    -1.E-03

    -8.E-04

    -6.E-04

    -4.E-04

    -2.E-04

    0.E+00

    -2.4 -2.0 -1.6 -1.2 -0.8 -0.4 0.0 0.4

    VGS [ V ]

    IDS[

    A

    ]

    Small-signal equivalent circuit

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    Small signal equivalent circuit

    gsmvg 0r

    G

    S

    D

    GSmDS vgi 2

    TGSQDSQ )VV(n2

    I = This equation fixes the bias pointThis equation defines the small signal behavior

    K. R. Laker and W. M. C. Sansen, Design of Analog Integrated Circuits and Systems, McGraw-Hill, 1994, p. 24.

    Small-signal equivalent circuit

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    Giovanni Anelli, CERNPuebla, December 2004

    Small signal equivalent circuit

    gsmvg bsmbvg 0r

    sbC

    gsC

    dbCgbC

    gdC

    DG

    S

    B

    The real thing!

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    Giovanni Anelli, CERNPuebla, December 2004

    The real thing!

    SOI technology from IBMhttp://www-3.ibm.com/chips/gallery/

    The real thing!

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    Giovanni Anelli, CERNPuebla, December 2004

    The real thing!

    Metallization exampleshttp://www-3.ibm.com/chips/gallery/

    Why is CMOS so widespread?

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    Why is CMOS so widespread?

    The IC market is driven by digital circuits (memories,microprocessors, )

    Bipolar logic and NMOS - only logic had a too high

    power consumption per gate Progress in the manufacturing technology made CMOS

    technologies a reality

    Modern CMOS technologies offer excellent

    performance (especially for digital): high speed, lowpower consumption, VLSI, low cost, high yield

    CMOS technologies occupies anincreasing portion of the IC market

    and this is why we will only talk about CMOS.

    The next three lectures

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    e e ee ec u es

    Lecture 2: Noise and Matching in CMOS (Analog) Circuits

    Lecture 3: Scaling Impact on Analog Circuit Performance

    Lecture 4: Basic Building Blocks for Analog Design