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1.Front 2.Side

3.Back 4.Front inner

5.Robot 6.Casette

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7.Plate 8.Wafer Enterance

9.Front_Under 10.Card Rack

11.Monitor 12.Side inner

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13.Side inner#1 14.Side inner#2

15.Back 16.Back_left#1

17.Back_left#2 18.Back_right#1

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19.Back_right#2 20.Back Inner

21.Back_under 21.Back_under_left

21.Back_under_right(UPS) 22.Right Side Inner

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23.Serial No_2005111091 24.MainBody & Operation panel

25.Operation Panel 26.Operation Panel tag

Mattson-Steag-AST2900_Power-on Test_01 Mattson-Steag-AST2900_Power-on Test_02

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Mattson-Steag-AST2900_Power-on Test_03 Mattson-Steag-AST2900_Power-on Test_04

Mattson-Steag-AST2900_Power-on Test_05 Mattson-Steag-AST2900_Power-on Test_06

Mattson-Steag-AST2900_Power-on Test_07