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    Nitronex

    Technologies & Costs

    DOE WorkshopApril 2009

    Presented by: Jeff Perkins

    OSRAMAixtron OSRAMCREELumileds

    45 rue Sainte Genevive, F-69006 Lyon, FranceTel : +33 472 83 01 80 - Fax : +33 472 83 01 83Web: http://www.yole.fr

    2009

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    Yole Dveloppement

    Lyon, France based market research and strategy consulting.

    Our fields of competence include: MEMS, including microfluidics , ,

    LED & Power Devices

    Advanced Packaging - 3D IC - TSV Photovoltaic

    We provide the following services: A free monthly newsletter (Micronews) with >23,000 subscribers A news and information web portal (www.i-micronews.com)

    Market & Technology reports Custom consulting:

    Market and technical evaluations and forecasts,

    Process cost evaluation & reverse costing

    Business strategy development 2009 2

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    Our Activity is Global

    40% of our business is

    30% of our business is

    in North America30% of our business is

    in Asia

    in EU Countries

    Yole Inc.Allendale, NJ

    Yole DveloppementLyon (HQ).

    Global InformationInc. (Partner)

    2009 3

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    Working Along The Value Chain

    Yole consultants provide Market Analysis,Technolo Evaluation and Business Plan Assessment for clients

    along the entire value chain.

    2009 4

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    LED Status Summary The LED market was $5.1B in 2008 with a volume of over 50 billion units. LED applications are currently dominated by portable device backlighting

    Mobile phones, PDA, GPS Higher brightness LEDs have begun to address other promising markets like

    automotive, LCD backli ht and eneral li htin . Low-end LED products account for 83% High-Brightness LEDs 15% Emerging Ultra High-Brightness products 2%

    Higher efficacy is needed for the General Lighting Market >150 lm/W has been proven with low-current LED operation (generally 20mA). Today high power LEDs have overall efficiency of 25%. To increase efficiency, 10 key technologies are in use or under investigation

    With continued development of a variety of technologies, high power LEDs with150 lm/W converting more than 50% of input watts to light can be envisioned.

    2009 5 Executive summary

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    K t i d lLED Market

    ey me r cs an p ayers

    2009

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    LED Market Overview

    Conventional LED High Brightness LED Ultra-high brightness white LED

    Specifications

    < 200 mW power 20 lm/W

    1 to 3 lm generated

    Typical epoxy housing

    Up to 1 Watt power> 30 lm/W

    5 to 30 lm generated

    Specific packaging

    up to 5 watt power> 50 lm/W

    > 100 lm generated

    Specific packaging

    A licationmarkets

    Cell phone keypad

    Cell phone backlight

    Signs

    Screen backlight

    Dashboard backlight

    Large displays

    Car head-lamps

    High-End apps

    General Illumination

    (> 10,000 units). . . . .

    2009 7 LED Market

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    Facilities - CREE

    Research Triangle Park (NC, USA)Cor orate Head uarters

    manufacturing

    Cotco (China)Production and packaging

    ,Technology center

    2009 8 CREE Business Model

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    Facilities - OSRAM

    Headquarters and manufacturing main site

    Penang (Malaysia):Second factory for surface-mounted LEDs, high-powerlaser diodes and organic LEDs

    .

    100-120M$From 2008, Penang site willalso be dedicated to LED dies

    manufacturing.

    2009 10 OSRAM Business Model

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    G l Ill i tiLED Market

    enera um na on

    2009

    General Illumination Market

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    -Worldwide Lighting Estimates

    Extrapolating from OIDA 2000 estimates , . Worldwide = US x 4 = 120,000 T lm-hrs in 2008 Growth rate was estimated at 1.2 % per year Various sources ut the market for li htin roducts near 70B.

    Solid State General Lighting market size estimates for 2012.

    Range of possible LED market penetration: Base case: Low performance, low price, low market penetration rate ->more LEDs in a single lamp Technology breakthrough case: High performance, controlled price,

    ->

    2009 12 General Illumination Market

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    pNumber of lumens for various applications

    time-to-market for mass-productionLight source# of lumen

    General Lighting

    Car HeadlampRPTVLCD backlight

    100Pocket Projector

    Car Rear lamp

    Head-up display

    2009 14

    < 10

    2007 2009< 2006 2008 > 2010LED technologies

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    100%

    Heat

    Optical Power90%80% The increasing of the input power

    produces more lumens, but lm/W ratiorops an so more ea s genera e

    Thermal management is crucial for LED60% packaging

    50%

    40%

    30%

    20%

    10%

    0%

    Average LED optical output power vs. heat

    20 mA 100 mA 350 mA 1000 mA

    2009 15 LED technologies

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    -Overall LED Performance

    -

    Epitaxy Front-End Back-End Packaging

    Substrate LED epiwafer

    LED dieDies-on-wafer

    LED lamp

    Internal QuantumEfficiency: int.

    Electrical losses: elect.Extraction

    Efficiency: extr.

    pack.

    Phosphor conversionLensesHousing

    2009 16

    total =int. x elect. x extr. x pack.

    LED technologies

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    LEDLED M n f rin

    2009

    LED technologies

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    Main Manufacturing Steps

    -

    SubstrateEpitaxy

    Buffer layer

    Epitaxy

    Active layersAlNSiC InGaNLow T GaNSa hire

    ep -wa erAlN/GaN sandwichSiliconBulk GaNComposite substrates

    -Litho, etching, metallization

    -level 0

    Back-grinding Lateral LED structureDicing, Flip-chip LED dies-on-waferLED dies Vertical LED structureLaser Lift-Off: LLODie shaping

    Binning, Pick-and-placePhosphor coating

    Back-End

    2009 19

    eve

    Sources: Yole Dveloppement Packaged LED LED lamp

    LED technologiesPackaging, Housing

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    Regular LED (white)

    -1. Substrate: Wafer inspection

    .

    3. Litho 1: Mesa design4. Mesa etching: Dry etch

    5. Ti + Ni contact deposition (PVD)

    6. Litho 2: Ti + Ni etching

    7. Dry etching Ti + Ni

    2009 20 Regular LED

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    Regular LED (white)

    -

    .

    2. Chip bonding to the cathode3. Wire bonding x2

    4. Phosphor coating

    5. Epoxy-based main lens molding

    2009 21 Regular LED

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    Regular LED (white)

    Costbreakdownfor100kx4"W earSubstrate Epitaxy

    6.1%5.7%

    OtherFE1.4%

    OtherBE Phos hor32.0%.

    2009 22 Regular LED

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    Flux

    Various techniques to improve

    Techniques to improve LED efficiency

    Material Front-End Back-End PackagingLaser Lift-Off

    New growth Photonic PhosphorsTemporary bonding

    substrates CrystalsVf

    nn ng ColourSurface Flip-Chip with

    texturing reflecting back contacts

    Transparent topcontacts

    Dicing / Scribing

    2009 23 LED technologies

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    The perfect white LED would include

    Grown on bulk or free-standing GaN substrate

    emove su s ra e no grown on u - a Vertical design with back side contact: smaller chip e s ze oes no excee x mm

    Transparent top contact (ITO or ZnO)

    Textured top surface

    Thin active layer

    2009 24 LED technologies

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    Time-to-market for LED substrates

    D

    UH

    B-L

    GaN/bulk GaN

    GaN/B-GaN/pAlNGaN/Sapphire

    B-

    LED

    GaN/SiC GaN/B-Si/pSiC

    GaN/AlN

    GaN/Sapphire

    GaN/SiC

    RegularLED

    GaN/SiliconGaN/Glass GaN/Ge

    GaN/B-Si/pSiC

    2009 25 New substrates2006 2007 20102008 2009 2011 2012

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    $

    Substrate Cost Comparison(taken from power electronics example)

    GaN/ SiC GaN/SiGaN / Sapphire

    Front-end$300

    Pack. & test: $120

    Front-end

    Pack. & test: $80

    Front-end

    Pack. & test: $80

    Epitaxy$300

    Epitaxyu

    $1,000

    4 Silicon: $25

    $300

    4 Sapphire: $150

    Total: $1,720 Total: $705Total: $830

    2009 26 Cost Breakdown

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    Laser Lift Off Technique

    The LLO technique is used to form thin GaN layers from Sapphiresubstrates to im rove both extraction and uantum efficienc .

    Using UV laser, a 50nm of the GaN structure is thermall decomposed and delaminated from the substrate.

    Main com anies that use the LLO technique: Osram

    Lumileds

    Unipress Korean companies

    2009 28 Laser lift off Technique

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    Scribing & Dicing

    LED one-step dicing is progressively replaced by a two-step methodcom risin GaN scribin and substrate cuttin .

    The GaN scribing step must be carried out with high precision. To havegood performance, the diodes must have very straight and smooth edges.This ste can be done b Laser or Diamond techni ues.

    The cutting of the substrate requires less precision and aims to separatethe diodes. Diamond saws as well as scribe (by diamond or laser) andbreak techni ues are normall used.

    Scribing Dicing

    2009 29 Sapphire Scribing

    courtesy of Oxford Lasers

    0.4mm thickSapphire Diced byUVCVL of 255nm

    courtesy of Oxford Lasers

    Scribing and Dicing

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    Binning Colour FluxVf

    Binning refers to the classification of production yields.

    Each part is binned for 3 parameters:

    Color: Dominant/Peak Wavelength or Correlated Color

    TemperatureVf: Forward Voltage

    =

    2009 30 Binning

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    Binning Colour FluxVf

    Binning operations result from a trade-off with theep axy process me.

    Binning operations add substantial cost in the LEDmanu ac ur ng process.

    Too severe binning criteria on the 3 parameters lead.

    LED design has to be done to have as few bins as.

    Vf is the easiest parameter to eliminate, so that.

    2009 31 Binning

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    Conclusions

    Market LED backli htin a lications are a rice cuttin ame

    Automotive and LCD TV backlight growing

    General lighting: breakthroughs needed 150 lm/W at high current is threshold to penetrate this market segment

    CREE, Nichia, Osram, Philips, and Toyoda Gosei Patents related to hos hor down-conversion solidif ositions

    LED Performance, Manufacturing Technology & Materials High power LEDs generate only 25% of light versus 75% of heat or s e ng one a

    everyeve

    oe manu ac ur ng o s o mprove

    efficiency and cost trade-offs occur at each level. New materials under development: 4 main trends

    Large diameter: -> 6 (GaN/silicon, GaN/Glass, composite substrates) Monolithic white LED phosphor-free (Cermet: ZnO, CRHEA, Nanovation) AlN native substrates for UV-LED manufacturing

    Single GaN substrate 2009 32 Conclusions