2018 vacuum equipment resource directory vacuum system

2
Deposition Supplies, Gas Control, Ion/Plasma Sources, Plasma/Sputtering/Arc Components, Reclamation Services Companies Products and Services Edwards www.edwardsvacuum.com Fil-Tech www.filtech.com INFICON www.inficon.com Kurt J. Lesker Company www.lesker.com MDC Vacuum Products, LLC www.mdcvacuum.com Nor-Cal Products www.n-c.com Rocky Brook Associates, Inc. 800-547-8934 Teledyne Hastings Instruments www.teledyne-hi.com Televac www.frederickscompany.com Vacuubrand, Inc. www.vacuubrand.com/us/ Vacuum Research Corporation www.vacuumresearch.com VAT, Inc. www.vatvalve.com XEI Scientific, Inc. www.Evactron.com Deposition Supplies 1.1 Arc cathode materials 1.2 Evaporation filaments & crucibles 1.3 Evaporation materials 1.4 Sputtering target materials 1.5 Substrate materials 1.6 Single Crystal substrates 1.7 Crystals Utilized in Quartz Crystal Micro Balances 1.8 Single Crystal Standards Gas Control 2.1 Exhaust conditioning systems 2.2 Gas manifolds 2.3 Gas purifiers 2.4 Gas storage 2.5 Mass flow meters 2.6 Pressure controllers 2.7 Variable leaks Ion/Plasma Sources 3.1 Cold cathode sources 3.2 ECR sources 3.3 End Hall sources 3.4 Inductive coupled plasma 3.5 Kaufman ion guns 3.6 RF sources Plasma/Sputtering/Arc Components 4.1 Arc power supplies 4.2 DC power supplies 4.3 Microwave power supplies 4.4 RF power supplies Reclamation Services 5.1 Evaporation/sputtering materials 5.2 Vacuum pump oil Note: Only the companies who sell the products on these two pages are listed. Vacuum System Components (continued)/Vacuum Systems Accessories Companies Products and Services ANCORP www.ancorp.com Brooks www.brooks.com Busch Vacuum Pumps and Systems www.buschusa.com Edwards www.edwardsvacuum.com GNB Corporation www.gnbvalves.com Kurt J. Lesker Company www.lesker.com Leybold Vacuum USA Inc. www.leybold.com Mass-Vac, Inc. www.massvac.com MDC Vacuum Products, LLC www.mdcvacuum.com Nor-Cal Products www.n-c.com Osaka Vacuum, U.S.A., Inc. www.osakavacuum.com Sumitomo (SHI) Cryogenics of America, Inc. www.shicryogenics.com Tuthill Vacuum & Blower Systems www.tuthillvacuum.com UC Components, Inc. www.uccomponents.com Vacuubrand, Inc. www.vacuubrand.com/us/ Vacuum Instruments Corporation, LLC www.vicleakdetection.com Vacuum Research Corporation www.vacuumresearch.com Welch Vacuum – Gardner Denver www.welchvacuum.com XEI Scientific, Inc. www.Evactron.com Vacuum System Components (continued) 11.16 Heat exchangers 11.17 Mechanical components - bearings 11.18 Pumps - aspiration 11.19 Pumps - booster 11.20 Pumps - cryo, colder than -160C 11.21 Pumps - cryo, warmer than -160C 11.22 Pumps - diaphragm 11.23 Pumps - diffusion 11.24 Pumps - getter 11.25 Pumps - ion 11.26 Pumps - mechanical, oil-sealed 11.27 Pumps - mechanical, oil-free 11.28 Pumps - sorption 11.29 Pumps - turbomolecular 11.30 Traps & baffles - diffusion pumps 11.31 Traps & baffles - mechanical pumps 11.32 Traps & baffles - exhaust 11.33 Tubing, flanges, fittings & seals 11.34 Vacuum chambers 11.35 Valves (<2 inches) 11.36 Valves (>2 inches) 11.37 Valves - soft pump/let-up 11.38 Valves - ultrahigh vacuum 11.39 Valves - variable conductance 11.40 Windows Vacuum Systems Accessories 12.1 Decontaminators, Anti-contamination Systems 12.2 Plasma Cleaners 2018 Vacuum Equipment Resource Directory Benefits of Membership • Executive-level networking Quarterly statistics reports demonstrating regional and global industry trends Representation in the International Statistics on Vacuum Technology (ISVT) Working Group to ensure that the ISVT program operates to the benefit of member participants Vacuum industry resource guide that includes a buyers guide of member products and services Promotion of member company products and services via the AVEM website in the Online Buyers Guide and the Newsroom Advertising opportunities in the AVEM Resource Guide and on the AVEM website at discounted rates Member company representation at trade shows via literature displays in the AVEM booth Meetings with provocative and educational speakers Online training and education Opportunities to steer AVEM in directions that benefit the industry by participation on AVEM commiees Online career center to post job opportunities Washington alliances provide alerts to policy and regulations that may impact business operations e Association of Vacuum Equipment Manufacturers (AVEM) is the only non-profit U.S. association dedicated completely to companies that manufacture vacuum equipment and supplies that serve and advance vacuum science and technology. AVEM was founded in 1969 and is the only non-profit source for market data across the vacuum industry in North America. AVEM Mission e Association of Vacuum Equipment Manufacturers promotes member interests and provides services to enhance membership value and understanding of the global market. 2018 PUBLICATION OF THE ASSOCIATION OF VACUUM EQUIPMENT MANUFACTURERS VACUUM EQUIPMENT RESOURCE GUIDE

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Page 1: 2018 Vacuum Equipment Resource Directory Vacuum System

Deposition Supplies, Gas Control, Ion/Plasma Sources, Plasma/Sputtering/Arc Components, Reclamation Services

Companies

Products and Services

Edw

ards

ww

w.e

dwar

dsva

cuum

.com

Fil-T

ech

ww

w.fi

ltech

.com

INFI

CON

ww

w.in

ficon

.com

Kurt

J. L

eske

r Com

pany

w

ww

.lesk

er.c

om

MDC

Vac

uum

Pro

duct

s, L

LCw

ww

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vacu

um.c

om

Nor-

Cal P

rodu

cts

ww

w.n

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Rock

y Br

ook

Asso

ciat

es, I

nc.

800-

547-

8934

Tele

dyne

Has

tings

Inst

rum

ents

w

ww

.tele

dyne

-hi.c

om

Tele

vac

ww

w.fr

eder

icks

com

pany

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Vacu

ubra

nd, I

nc.

ww

w.v

acuu

bran

d.co

m/u

s/

Vacu

um R

esea

rch

Corp

orat

ion

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mre

sear

ch.c

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VAT,

Inc.

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ww

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valv

e.co

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XEI S

cien

tific,

Inc.

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com

Deposition Supplies

1.1 Arc cathode materials

1.2 Evaporation filaments & crucibles • • •1.3 Evaporation materials • • • •1.4 Sputtering target materials • • •1.5 Substrate materials

1.6 Single Crystal substrates1.7 Crystals Utilized in Quartz Crystal Micro Balances • • • •1.8 Single Crystal Standards

Gas Control

2.1 Exhaust conditioning systems

2.2 Gas manifolds • •2.3 Gas purifiers

2.4 Gas storage •2.5 Mass flow meters • •2.6 Pressure controllers • • • • • •2.7 Variable leaks • • •Ion/Plasma Sources

3.1 Cold cathode sources

3.2 ECR sources

3.3 End Hall sources

3.4 Inductive coupled plasma

3.5 Kaufman ion guns • •3.6 RF sources

Plasma/Sputtering/Arc Components

4.1 Arc power supplies

4.2 DC power supplies • •4.3 Microwave power supplies

4.4 RF power supplies • • •Reclamation Services

5.1 Evaporation/sputtering materials • •5.2 Vacuum pump oil • • • • •

Note: Only the companies who sell the products on these two pages are listed.

Vacuum System Components (continued)/Vacuum Systems Accessories

Companies

Products and Services

ANCO

RP

ww

w.a

ncor

p.co

m

Broo

ksw

ww

.bro

oks.

com

Busc

h Va

cuum

Pum

ps a

nd S

yste

ms

ww

w.b

usch

usa.

com

Edw

ards

ww

w.e

dwar

dsva

cuum

.com

GNB

Corp

orat

ion

ww

w.g

nbva

lves

.com

Kurt

J. L

eske

r Com

pany

w

ww

.lesk

er.c

om

Leyb

old

Vacu

um U

SA In

c.w

ww

.leyb

old.

com

Mas

s-Va

c, In

c.

ww

w.m

assv

ac.c

om

MDC

Vac

uum

Pro

duct

s, L

LCw

ww

.mdc

vacu

um.c

om

Nor-

Cal P

rodu

cts

ww

w.n

-c.c

om

Osak

a Va

cuum

, U.S

.A.,

Inc.

ww

w.o

saka

vacu

um.c

om

Sum

itom

o (S

HI) C

ryog

enic

s of

Am

eric

a, In

c.

ww

w.s

hicr

yoge

nics

.com

Tuth

ill V

acuu

m &

Blo

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tem

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ww

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illvac

uum

.com

UC C

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nent

s, In

c.

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w.u

ccom

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nts.

com

Vacu

ubra

nd, I

nc.

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w.v

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bran

d.co

m/u

s/

Vacu

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stru

men

ts C

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LC

ww

w.v

icle

akde

tect

ion.

com

Vacu

um R

esea

rch

Corp

orat

ion

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w.v

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mre

sear

ch.c

om

Wel

ch V

acuu

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Gar

dner

Den

ver

ww

w.w

elch

vacu

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XEI S

cien

tific,

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ww

w.E

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ron.

com

Vacuum System Components (continued)

11.16 Heat exchangers

11.17 Mechanical components - bearings •11.18 Pumps - aspiration •11.19 Pumps - booster • • • • • •11.20 Pumps - cryo, colder than -160C • • • • • •11.21 Pumps - cryo, warmer than -160C • • • • •11.22 Pumps - diaphragm • • • • •11.23 Pumps - diffusion • • • •11.24 Pumps - getter •11.25 Pumps - ion • •11.26 Pumps - mechanical, oil-sealed • • • • • • • • •11.27 Pumps - mechanical, oil-free • • • • • • •11.28 Pumps - sorption

11.29 Pumps - turbomolecular • • • • •11.30 Traps & baffles - diffusion pumps • • • • • • • •11.31 Traps & baffles - mechanical pumps • • • • • • • • • •11.32 Traps & baffles - exhaust • • • • • • • • •11.33 Tubing, flanges, fittings & seals • • • • • • • • • • •11.34 Vacuum chambers • • • • • • • •11.35 Valves (<2 inches) • • • • • • • • •11.36 Valves (>2 inches) • • • • • • • •11.37 Valves - soft pump/let-up • • • • •11.38 Valves - ultrahigh vacuum • • • • • • •11.39 Valves - variable conductance • • • • •11.40 Windows • • • •Vacuum Systems Accessories

12.1 Decontaminators, Anti-contamination Systems • •12.2 Plasma Cleaners •

2018 Vacuum Equipment Resource Directory

Benefits of Membership

• Executive-level networking

• Quarterly statistics reports demonstrating regional and global industry trends

• Representation in the International Statistics on Vacuum Technology (ISVT) Working Group to ensure that the ISVT program operates to the benefit of member participants

• Vacuum industry resource guide that includes a buyers guide of member products and services

• Promotion of member company products and services via the AVEM website in the Online Buyers Guide and the Newsroom

• Advertising opportunities in the AVEM Resource Guide and on the AVEM website at

discounted rates

• Member company representation at trade shows via literature displays in the AVEM booth

• Meetings with provocative and educational speakers

• Online training and education

• Opportunities to steer AVEM in directions that benefit the industry by participation on AVEM committees

• Online career center to post job opportunities

• Washington alliances provide alerts to policy and regulations that may impact business operations

The Association of Vacuum Equipment Manufacturers (AVEM) is the only non-profit U.S. association dedicated completely to companies that manufacture vacuum equipment and supplies that serve and advance vacuum science and technology. AVEM was founded in 1969 and is the only non-profit source for market data across the vacuum industry in North America.

AVEM Mission

The Association of Vacuum Equipment Manufacturers promotes member interests and provides services to enhance membership value and understanding of the global market.

2018 PUBLICATION OF THE ASSOCIATION OF VACUUM EQUIPMENT MANUFACTURERS

VACUUM EQUIPMENT RESOURCE GUIDE

Page 2: 2018 Vacuum Equipment Resource Directory Vacuum System

Vacuum Deposition Components, Vacuum Systems

Repair/Rebuild Equipment, Supplies/Accessories, System Monitoring and Control Note: Only the companies who sell the products on these

two pages are listed.

Companies

Products and Services

ANCO

RP

ww

w.a

ncor

p.co

m

Busc

h Va

cuum

Pum

ps a

nd S

yste

ms

ww

w.b

usch

usa.

com

Digi

Vac

ww

w.d

igiv

ac.c

om

Edw

ards

w

ww

.edw

ards

vacu

um.c

om

Fil-T

ech

ww

w.fi

ltech

.com

GNB

Corp

orat

ion

ww

w.g

nbva

lves

.com

INFI

CON

ww

w.in

ficon

.com

Kurt

J. L

eske

r Com

pany

w

ww

.lesk

er.c

om

Leyb

old

Vacu

um U

SA In

c.w

ww

.leyb

old.

com

MDC

Vac

uum

Pro

duct

s, L

LCw

ww

.mdc

vacu

um.c

om

Nor-

Cal P

rodu

cts

ww

w.n

-c.c

om

Osak

a Va

cuum

USA

, Inc

.w

ww

.asa

kava

cuum

.co.

jp/e

n/

Sum

itom

o (S

HI) C

ryog

enic

s of

Am

eric

a, In

c.

ww

w.s

hicr

yoge

nics

.com

Tele

dyne

Has

tings

Inst

rum

ents

ww

w.te

ledy

ne-h

i.com

Tele

vac

ww

w.fr

eder

icks

com

pany

.com

Tuth

ill V

acuu

m &

Blo

wer

Sys

tem

s w

ww

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illvac

uum

.com

UC C

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nent

s, In

c.

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w.u

ccom

pone

nts.

com

Vacu

ubra

nd, I

nc.

ww

w.v

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bran

d.co

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men

ts C

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n, L

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w.v

icle

akde

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ion.

com

Vacu

um R

esea

rch

Corp

orat

ion

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w.v

acuu

mre

sear

ch.c

om

VAT,

Inc.

ww

w.v

atva

lve.

com

Verit

y In

stru

men

ts, I

nc.

ww

w.v

erity

inst

.com

Wel

ch V

acuu

m –

Gar

dner

Den

ver

ww

w.w

elch

vacu

um.c

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Repair/Rebuild Equipment

6.1 Replacement parts • • • • • • • • • • • •6.2 Used vacuum equipment • • • •6.3 Refurbished equipment • • • • • • • • •6.4 Repair/maintenance at user’s site • • • • • • • • • •Supplies/Accessories

7.1 Adhesives

7.2 Cleaning and handling supplies •7.3 Exhaust scrubbers • •7.4 Fluid flow switches

7.5 Gaskets - polymer, metal • • • • • • • •7.6 Heating mantles

7.7 Oil filters • • • • • •7.8 Radiant heaters

7.9 Sealants • •7.10 Vacuum lubricants • • • • • • • • • •7.11 Vacuum pump oils • • • • • • • • •7.12 Vacuum switches • • • •System Monitoring and Control

8.1 Calibrated leaks • • • • •8.2 Capacitance diaphragm gauges • • • • • • •8.3 Gauge calibration services • • •8.4 Ionization gauges • • • • • • • • •8.5 Leak detectors - halogen •8.6 Leak detectors - helium • • • • •8.7 Microprocessor controls • • • •8.8 Plasma characterization • •8.9 Residual gas analyzers •8.10 Thermocouple/Pirani gauges • • • • • • • • • • • • •8.11 Optical Spectrometry • •8.12 PC-PLC Control of Vacuum Systems • • • • •

Note: Only the companies who sell the products on this pages are listed.

Companies

Products and Services

Busc

h Va

cuum

Pum

ps a

nd S

yste

ms

ww

w.b

usch

usa.

com

Fil-T

ech

ww

w.fi

ltech

.com

GNB

Corp

orat

ion

ww

w.g

nbva

lves

.com

INFI

CON

ww

w.in

ficon

.com

Kurt

J. L

eske

r Com

pany

w

ww

.lesk

er.c

om

Leyb

old

Vacu

um U

SA In

c.w

ww

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old.

com

MDC

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uum

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duct

s, L

LCw

ww

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vacu

um.c

om

Rock

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ook

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ciat

es, I

nc.

800-

547-

8934

Vacu

um In

stru

men

ts C

orpo

ratio

n, L

LC

ww

w.v

icle

akde

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ion.

com

Vacuum Deposition Components

9.1 Arc vaporization fixtures

9.2 Deposition rate monitors/controllers • • •9.3 Electron beam power supplies • •9.4 Electron beam sources • • • •9.5 Optical property monitors •9.6 Resistive evaporation fixtures • •9.7 Sputtering target fixtures • • •9.8 Substrate heaters • •9.9 Substrate temperature controllers • •Vacuum Systems

10.1 Air-to-Air (no load lock) •10.2 Arc melting/vaporization •10.3 Atomic Layer Deposition (ALD) • •10.4 Batch (common in & out load lock) • •10.5 Batch (one chamber) • • •10.6 Cluster tool • • • •10.7 Electron beam melting •10.8 Equipment design services • • • •10.9 In-line (separate in & out load lock) • •10.10 Ion Beam Assisted Deposition (IBAD) • • • •10.11 Ion implantation •10.12 Ion milling/etching •10.13 Ion plating •10.14 Laboratory coaters • •10.15 Laser ablation • •10.16 Low Pressure CVD (LPCVD) •10.17 Low Pressure Plasma Spray (LPPS) •10.18 Metalorganic CVD (MOCVD) •10.19 Molecular Beam Epitaxy (MBE) •

Note: Only the companies who sell the products on these two pages are listed.

Vacuum Systems (continued), Vacuum System Components

Companies

Products and Services

ANCO

RP

ww

w.a

ncor

p.co

m

Broo

ksw

ww

.bro

oks.

com

Busc

h Va

cuum

Pum

ps a

nd S

yste

ms

ww

w.b

usch

usa.

com

Digi

Vac

ww

w.d

igiv

ac.c

om

Edw

ards

w

ww

.edw

ards

vacu

um.c

om

Fil-T

ech

ww

w.fi

ltech

.com

GNB

Corp

orat

ion

ww

w.g

nbva

lves

.com

INFI

CON

ww

w.in

ficon

.com

Kurt

J. L

eske

r Com

pany

w

ww

.lesk

er.c

om

Leyb

old

Vacu

um U

SA In

c.w

ww

.leyb

old.

com

Mas

s-Va

c, In

c.

ww

w.m

assv

ac.c

om

MDC

Vac

uum

Pro

duct

s, L

LCw

ww

.mdc

vacu

um.c

om

Nor-

Cal P

rodu

cts

ww

w.n

-c.c

om

Omle

y In

dust

ries,

Inc.

w

ww

.om

ley.

com

Tele

vac

ww

w.fr

eder

icks

com

pany

.com

Tuth

ill V

acuu

m &

Blo

wer

Sys

tem

s w

ww

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illvac

uum

.com

UC C

ompo

nent

s, In

c.w

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.ucc

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nent

s.co

m

Vacu

ubra

nd, I

nc.

ww

w.v

acuu

bran

d.co

m/u

s/

Vacu

um R

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rch

Corp

orat

ion

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w.v

acuu

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Vacuum Systems (continued)

10.20 Plasma Enhanced CVD (PECVD) •10.21 Reactive Ion Etching (RIE) •10.22 Reactive Plasma Etching (RPE) •10.23 Space simulation • • • • • •10.24 Sputter deposition • • • •10.25 Surface analysis equipment • • •10.26 Ultrahigh vacuum systems • • • • •10.27 Vacuum drying & outgassing • • • • •10.28 Vacuum evaporation • • •10.29 Vacuum freeze drying •10.30 Vacuum furnaces & ovens •10.31 Vacuum - general (no chamber) • • • • • • • • •10.32 Vacuum packaging

10.33 Web coating

Vacuum System Components

11.1 Bellows Assemblies • • • • • • •11.2 Bellows, Welded • • • • • • •11.3 Chillers & refrigeration systems •11.4 Cryocoolers for traps & baffles • • •11.5 Custom fixtures & tooling • • • • •11.6 Electrical components • •11.7 Feedthrough collars • • • • •11.8 Feedthroughs - electrical • • • • • • • •11.9 Feedthroughs - fluid • • • • • •11.10 Feedthroughs - linear motion • • • • •11.11 Feedthroughs - optical • • • •11.12 Feedthroughs - radio frequency • •11.13 Feedthroughs - rotary motion • • • • •11.14 Flanges - blank • • • • • • • • •11.15 Getter materials •