299 Analysis

For exact numbers check 299step.xlsx

Summary of 2991. Nb (15nm)/Al2O3(15nm;4-0nm wedge)/Co(30nm)2. Try to etch Nb with CF4

3. Seems like 3 distinct regions of etching: Pad, Wedge, No Dielectric

4. In wedge region there seems to be residue. With EDX, there seems to be excess Oxygen, Si, and Cl peaks.

5. No apparent etching of Nb or Co in wedge region.6. Try to bake the residue off, but no effect. Could be due to

higher pressure in the oven that nothing was observed.

4/29/12 EDX

EDX of etch 05/01/2012

Findings Wedge Region

1. AlO is completely etched, resolve O and Al disappearance.

2. Co didn’t get etched3. Nb same amount, but may etched but redeposited on

surface. (? Nb, NbO, NbF)4. Si peak present in the etched region of the Wedge5. Old Data (wide range) and New (narrow range) all line

up6. Al is a factor of 10 less in the shoulder than in the pad

compared the etched region.

AlO pad

1. Thick AlO on shoulder has significant counts compared to etched area.

2. No Si3. No Co difference4. Al present in shoulder region, less in the

etched region.5. O peak in shoulder, no O peak in etched region 6. No etching of Nb

All Metal

1. No Al2. No Si3. No Co difference in shoulder or etched region4. No detectable O in the etched area or

shoulder5. No difference in Nb in shoulder or etched

region

Questions

1. Nb? or NbO or NbF

299 Zygo

Sample1-1a

Sample 2

Sample 3

Sample 4

Sample 5

Sample 6

Sample 7

Sample 8

Sample 9

Baking Solution

• Attempt to get the residue off of the surface after the bake.

• Pumped oven to 100 Torr and reached a temp of 210°C

• No change to step height

Close to the thin edge

DekTek

Zygo