3.1 fscsp assy and test process flow

8/13/2019 3.1 FSCSP Assy and Test Process Flow

1/21

Folded, Stacked Chip-Scale Package(FSCSP) Assembly and Test Process

Flow


2/21

12/13/132 Intel CONFIDENTIAL. Covered by CNDA#33454

Otline

1. Assembly Process Front of Line (FOL)

End of Line (EOL)

2. Test ProcessTest Process Operations (TPO)

Finish Process Operations (FPO)

. Process !ontrols " #onitors


3/21


Assembly Process Flow

FOL EOL

Front of Line

(FOL) Assembly

are stations from

Die Prep to

Internal Visual

Inspection (IVI).

End of Line (EOL)

Assembly

are stations from

Mold to Paca!e

Visual Inspection

(PVI).


4/21


Front-o!-line (FO")

Die Preparation

Modules

Incomin!

"afer Monitor

waer

"afer #a$

"afer

Laminate

%ac!rind

Mount and

De&tape

Die Visual

Inspection

Front&of&Line

Modules

Die Attac'*+*,

"ire %ondInternal Visual

Inspection

!Con""t" o Fl$ Atta%&' De Atta%&'

and De (re"". DA 2/3 " de)endent

on "ta%*n+ %on+,raton orto) )a%*a+e

DA Fl$

A, wre

In&line stores

#ubstrate Prep

Modules

ta)e

",b"trate

-ape Prep

#ubstrate

Mar

#ubstrate

%ae


5/21


#nd-o!-"ine (#O")

Internal Visual

Inspection

-o -est

Flo$

Paca!e Visual

Inspection

End&of&Line

Modules

Pre&Mold

Plasma lean

Post&Mold

ure

Laser Mar (top)

In Mar (bottom)

"older ")&ere"

- l,%all Attac'

/eflo$

Deflu0

#a$

#in!ulationPre&Fold %ae

Pre&Fold

Plasma lean

Pre&Mold

%aeMold

old

Co$)o,nd

!Note0 For

otto$ )a%*a+e

only

Fold Ad'esi1e

Dispense2 Fold

Fold Ad&e"ve

Fold %lister

#creen

Fold ure


6/21


Front-o!-"ine (FO")AFE

INCOIN

ONITO AFE 6A

AFE

LAINATE AC7IND

AFE

O8NT

AFE

DETA(E

DIE 9I68AL

IN6(ECTION

AFEINCOIN

ONITO AFE 6A

AFE

LAINATE AC7IND

AFE

O8NT

AFE

DETA(E

DIE 9I68AL

IN6(ECTION

TA(E (E(

686TATE

A7IN

686TATE

A7E FIL ATTAC:TA(E (E(

686TATE

A7IN

686TATE

A7E FIL ATTAC:

INTENAL 9I68ALINTENAL 9I68AL

DIE ATTAC:DIE (E66IEONDIN6(ECTION ;I9< DIE ATTAC:DIE (E66IEONDIN6(ECTION ;I9 CLEAN

6OLDE

ALL

EFLOALL

ATTAC:

(E OLD A7E

(EOLD

(LA6A

CLEAN OLD

(O6T OLD

C8E

IN7A7/

LA6EA7

(E FOLD A7E

(EFOLD

(LA6A

CLEAN A8TO FOLD

FOLD

AD:E6I9E

C8E


8/21

12/13/13? Intel CONFIDENTIAL. Covered by CNDA#33454

Test Process Flow

-PO FPO

-est Process

are stations from

%urn&in to #tac

Visual Inspection.

Finis' Process

are stations from

Laser Mar to

Pacin!.


9/21

12/13/13@ Intel CONFIDENTIAL. Covered by CNDA#33454

$n-stacked Package Testing Flow

%ottom Paca!e

Post %urn&in Lo!ic lass

Assy omponent In1ty

%urn&in

#tac

-op Paca!e

Flas' lass -est


10/21


Test Process Flow

(75 6TAC7IN51OA4D LOAD 184NBIN

1OA4D

8NLOAD

(O6T 184NBIN

ELECT4ICAL

TE6TIN5

(O6T 6TAC7

A66E/1L DIE

TE6T

(4EB6TAC7

1A7E

$ottom Pac%a&e

FP

O


11/21


Package Stack %odle

#creen Print Pic 2 Place /eflo$

arrier&to&-ray-ray&to&arrier


12/21


Finish Process Flow

/9A

TO(6IDE

LA6E4/A47DE66ICANT

1A7E496I F9I (AC7

C&


13/21


FO" Process Controls ' ie Prep'pec Parameter Fre*ency 'amplin& 'i+e

,-# 1/01 is#ech All Fablots /afers per fablot32pts per afer

-afer 'a 1/014 is#ech

!*t 5*ality

All Fablots

'hiftly3 repair3con63 chan&econs*mables

afers per fablot312pts per afer

-afer Laminate 1/01/ is#ech

Lamination5*ality

All Fablots afers per fablot

$ac%&rind3 #o*nt "7etape

1/01128

1/0219

#o*nt Acc*racy

Thic%ness

TT

'hiftly3 repair3con63 chan&econs*mables

afers

/rd&s per afer3afers

7, 1/01:1 is#ech All afers 0/01 !'P3 /*nits

re;ects in a afer *nits re;ectin a lot < 1= , ofthe lot


14/21


FO" Process Controls ' Tape Prep, A &*'pec Parameter Fre*ency 'amplin& 'i+e

Tape Prep 1/042

is#ech

Tape Placement

All assy lots

Per s*bstrate reel

s*bstrates perma&

?strips per reel

'*bstrate #ar% 1/01/

is#ech

#ar% 5*ality

All assy lots s*bstrates perma&

'*bstrate Pre0ba%e

1/019>

is#ech All assy lots s*bstrates perma&

Film Attach 1/01/

is#ech

Film Placement

'hiftly3 repair3con6ersion3 chan&econs*mables87#

?* per strip32strips

7ie Attach 1/014

is#ech

,nitial dieplacement

'hiftly3 repair3con6ersion


7ie Press 1/01:

is#ech

7ie Placement

'hiftly3 repair3con6ersion3 chan&econs*mables87#


-ire $ond 1/011>

is#ech

-ire ,nte&rity

All assy lots :ires per *nit32*nits

,, 1/0

1??

is#ech All assy lots /=3 all odd strips


15/21


#O" Process Controls ' %old %ark'pec Paramete

rFre*ency 'amplin& 'i+e

Pre0#old $a%e 1/0

2/1

is#ech All assy lots strips per ma&

Pre0#old Plasma!lean

1/01?>


#old 1/012

is#ech

-iresay

Temperat*r

e

TransferTime

All assy lots

'hiftly3 repair3con6ersion3cleanin&

1=

?ires per *nit3 1*nit perpanel3 :panels per strip

1:rd&s per chase3 all chases

1 rd& per chase3 all chases

Post #old !*re 1/01?9

is#ech 'hiftly3 repair3con6ersion3cleanin&

strips per ma&

Laser #ar% 1/01//

is#ech

#ar% 7epth

All assy lots


strips per ma&

:rd&s3 *nits

,n% #ar% 1/019



16/21


#O" Process Controls + *A Singlation'pec Paramete

rFre*ency 'amplin& 'i+e

$all Attach 1/0

1/281/0242


@eflo 1/01/

is#ech

TAL

Pea% Temp

Time$eteen

All assy lots


strips per ma&

1rd&

7efl* 1/01/?


'in&*lation 1/011?8

1/019

is#ech

'1

'2

OP7 B

OP7 C

All assy lots

'hiftly3 repair3

con6ersion3blade chan&e

1= bottom3 top p%& to P,

2rd&s per *nit3 9*nits3 random

samplin&


17/21

12/13/131= Intel CONFIDENTIAL. Covered by CNDA#33454

#O" Process Controls ' Fold (!or bottom pkgonly) 'pec Parameter Fre*enc

y'amplin& 'i+e

Pre0Fold $a%e 1/01> is#ech All assy lots 1tray per lot

Pre0Fold Plasma!lean

1/01>1 is#ech All assy lots 1tray per lot

Fold 1/04? Adh -ei&ht

Di& Temp

eater Temp

Pea% Temp

'hiftly3repair3con6ersion3syrin&echan&e

2?rd&s

9rd&s

2rd&s

:rd&sPost Fold !*re 1/01>1 is#ech All assy lots 1tray per lot

P, 1/01118 20

is#ech All assy lots 1=


18/21

12/13/131? Intel CONFIDENTIAL. Covered by CNDA#33454

TFPO Process Controls'pec Parameter Fre*ency 'amplin& 'i+e

$*rn0in ?021 Elecis#ech 2= of lots 1=

Post

$*rn0in

Lo&ic8'tac%

1/04:Flash !lass>012:

Elecis#ech

!one P*ffPress*re

,np*t 7rop ei&ht

'ort 7rop ei&ht

All lots

-ee%ly

2 trays per lot < middle

and last tray1rd& for ept monitors

'tac% >04> 'tac% ei&ht

Pea% Temp

TAL

'hiftly3 repair3con6ersion3chan&econs*mables

/*nits3 random

:rd&s

:rd&s

', 20 is#ech All lots 1=

P'A7T >01/ Elecis#ech All lots 1=

Laser#ar%

>0224? #ar% 7epth 'hiftly3 repair3con6ersion3chan&econs*mables

:rd&s3 *nits

$a%e $l*# >02?1

!rit19 >022>4

is#ech All lots 1tray


19/21

12/13/131@ Intel CONFIDENTIAL. Covered by CNDA#33454

TFPO Process Controls'pec Paramete

rFre*ency

'amplin& 'i+e

E5A is#ech

Electrical5*ality

All lots 1= or 1tray per lot

$all,nspection

,!O' >091

@', >0221

is#ech

$all7imensions

Pac%a&e

7imensions

All lots 1=

#5A >09/ is#ech All lots 1=

Pac% >022Tn@

>022>Tray

>022>1$n'

>02294'traPac%

is#ech

Pac%in&5*ality

Peel $ac%Force

All lots 1=

:09inches per reel


20/21

*ack-p


21/21


FSCSP Con!igration (.-section)

Lo+%

De 1 ;Fla"&

3.1 fscsp assy and test process flow

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