3d componentpackaging at&s company in organicsubstrate ......presentation 3d componentpackaging...

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www.ats.net Austria Technologie & Systemtechnik Aktiengesellschaft | Fabriksgasse13 | A-8700 Leoben Tel +43 (0) 3842 200-0 | Fax +43 (0) 3842 200-216 | E-mail [email protected] www.ats.net AT&S Company Presentation 3D Component Packaging in Organic Substrate Embedded Component Mark Beesley IPC Apex 2012, San Diego

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Page 1: 3D ComponentPackaging AT&S Company in OrganicSubstrate ......Presentation 3D ComponentPackaging in OrganicSubstrate Embedded Component Mark Beesley IPC Apex 2012, San Diego. Introduction

www.ats.net Austria Technologie & Systemtechnik Aktiengesellschaft | Fabriksgasse13 | A-8700 Leoben Tel +43 (0) 3842 200-0 | Fax +43 (0) 3842 200-216 | E-mail [email protected]

www.ats.net

AT&S Company Presentation

3D Component Packagingin Organic Substrate

Embedded Component

Mark BeesleyIPC Apex 2012, San Diego

Page 2: 3D ComponentPackaging AT&S Company in OrganicSubstrate ......Presentation 3D ComponentPackaging in OrganicSubstrate Embedded Component Mark Beesley IPC Apex 2012, San Diego. Introduction

� Introduction

� Embedded Component Technology

� Process capability – feature size

� Application examples

� Highlights

ThemesThemesThemesThemes

3D Component Packaging in Organic Substrate | Mark Beesley, AT&S | IPC Apex, San Diego 2012

Page 3: 3D ComponentPackaging AT&S Company in OrganicSubstrate ......Presentation 3D ComponentPackaging in OrganicSubstrate Embedded Component Mark Beesley IPC Apex 2012, San Diego. Introduction

Why Embedded Component?

Embedded Component is an interconnect-basedsolution that drives Miniaturization; Mobility and

Sustainability

3D Component Packaging in Organic Substrate | Mark Beesley, AT&S | IPC Apex, San Diego 2012

Page 4: 3D ComponentPackaging AT&S Company in OrganicSubstrate ......Presentation 3D ComponentPackaging in OrganicSubstrate Embedded Component Mark Beesley IPC Apex 2012, San Diego. Introduction

WhatWhatWhatWhat isisisis EEEEmbedded mbedded mbedded mbedded ComponentComponentComponentComponent????

Embedding uses the space within a substrate foractive and passive components

Main providers of embedded component technology– Europe; Japan; Taiwan; Korea

3D Component Packaging in Organic Substrate | Mark Beesley, AT&S | IPC Apex, San Diego 2012

Page 5: 3D ComponentPackaging AT&S Company in OrganicSubstrate ......Presentation 3D ComponentPackaging in OrganicSubstrate Embedded Component Mark Beesley IPC Apex 2012, San Diego. Introduction

HERMESHERMESHERMESHERMES

Largest EU funded project focussed on INDUSTRIALISATION – AT&S consortiumleader; 11 partners – driving Embedded Component technology

Page 6: 3D ComponentPackaging AT&S Company in OrganicSubstrate ......Presentation 3D ComponentPackaging in OrganicSubstrate Embedded Component Mark Beesley IPC Apex 2012, San Diego. Introduction

Embedded Embedded Embedded Embedded ComponentComponentComponentComponent ---- PrinciplePrinciplePrinciplePrinciple benefitsbenefitsbenefitsbenefits

SmartphoneTablet

Medical

Automotive

Security applications

Sensor

Aerospace/space

Data Storage

3D Component Packaging in Organic Substrate | Mark Beesley, AT&S | IPC Apex, San Diego 2012

Wireless

Page 7: 3D ComponentPackaging AT&S Company in OrganicSubstrate ......Presentation 3D ComponentPackaging in OrganicSubstrate Embedded Component Mark Beesley IPC Apex 2012, San Diego. Introduction

ProductProductProductProduct familiesfamiliesfamiliesfamilies ---- Embedded Embedded Embedded Embedded ComponentComponentComponentComponent

6

SiBSystem in Board

_________________

SiPEmbedded

Component System in Package

_________________

MODULE technology

Embedded actives + passives + SMD

Mainboard technology

Embedded passives –resistors, capacitors, diodes, inductors …

3D Component Packaging in Organic Substrate | Mark Beesley, AT&S | IPC Apex, San Diego 2012

���� Relative Market Demand ����

Page 8: 3D ComponentPackaging AT&S Company in OrganicSubstrate ......Presentation 3D ComponentPackaging in OrganicSubstrate Embedded Component Mark Beesley IPC Apex 2012, San Diego. Introduction

� Introduction

� Embedded Component Technology

� Process capability – feature size

� Application examples

� Highlights

ThemesThemesThemesThemes

3D Component Packaging in Organic Substrate | Mark Beesley, AT&S | IPC Apex, San Diego 2012

Page 9: 3D ComponentPackaging AT&S Company in OrganicSubstrate ......Presentation 3D ComponentPackaging in OrganicSubstrate Embedded Component Mark Beesley IPC Apex 2012, San Diego. Introduction

Laser- Drillingof fiducials + overlay

Dielectric Printing

Assembly

Layup & Pressing

Desmearing

Laser Drilling

Component

Mechanical Drilling

Imaging

Copper plating

Stripping + Etching

Automatic Inspection

Metallization

Onward Processing – Organic Substrate

ComponentPre-process

ProcessProcessProcessProcess OverviewOverviewOverviewOverview

3D Component Packaging in Organic Substrate | Mark Beesley, AT&S | IPC Apex, San Diego 2012

Page 10: 3D ComponentPackaging AT&S Company in OrganicSubstrate ......Presentation 3D ComponentPackaging in OrganicSubstrate Embedded Component Mark Beesley IPC Apex 2012, San Diego. Introduction

Embedded uses the largest production format size of any packaging technique

Even with the advent of 18” super wafer and wafer level packaging concepts, panel packaging has a huge advantage

21” x 24” panel~ 504sqin

ECP Gen 2

18” x 24” panel~ 432sqin

ECP

18” wafer~ 254sqin

12” wafer~ 113sqin8” wafer

~ 50sqin

6” wafer~ 28sqin

Shown approximately to scale

8” strip~ 24sqin

Panel Panel Panel Panel sizesizesizesize

3D Component Packaging in Organic Substrate | Mark Beesley, AT&S | IPC Apex, San Diego 2012

Page 11: 3D ComponentPackaging AT&S Company in OrganicSubstrate ......Presentation 3D ComponentPackaging in OrganicSubstrate Embedded Component Mark Beesley IPC Apex 2012, San Diego. Introduction

Wafer-based embeddables

� Pad finish: Cu plating needed for contacting with microvias = existingprocess for WLP components

� Pad pitch: adaptation to organicsubstrate design rule through RDL

� Wafer thinning: 100-150µm

Embedded Embedded Embedded Embedded ComponentComponentComponentComponent requirementsrequirementsrequirementsrequirements

Passive discrete components

� Use of thin components with copperterminations

� Capacitors and resistors available

� Other discretes (inductors) also in development

� Component thickness 100µm – 220µm

� Case sizes 0201; 0402; above

3D Component Packaging in Organic Substrate | Mark Beesley, AT&S | IPC Apex, San Diego 2012

Page 12: 3D ComponentPackaging AT&S Company in OrganicSubstrate ......Presentation 3D ComponentPackaging in OrganicSubstrate Embedded Component Mark Beesley IPC Apex 2012, San Diego. Introduction

� 2µm primer-coated copper foil

� Low copper roughness RA < 1µm – high “etchability”

� High copper peel strength after multiple reflow cycle – supports fine-line fan out

� Easy handling - copper carrier

CopperCopperCopperCopper foilfoilfoilfoil

Image of continuous copper foil process line, source HERMES consortium

3D Component Packaging in Organic Substrate | Mark Beesley, AT&S | IPC Apex, San Diego 2012

Page 13: 3D ComponentPackaging AT&S Company in OrganicSubstrate ......Presentation 3D ComponentPackaging in OrganicSubstrate Embedded Component Mark Beesley IPC Apex 2012, San Diego. Introduction

DielectricDielectricDielectricDielectric printingprintingprintingprinting

Printing of controlled dielectric under embedded device

Key outcome – void-free, feature size, shape and volume

� Novel 3D scanner for large panels

� Determines the thickness and uniformity of the dielectric

Dielectric screen printing using optically alignedequipment in cleanroom environment

3D Component Packaging in Organic Substrate | Mark Beesley, AT&S | IPC Apex, San Diego 2012

Page 14: 3D ComponentPackaging AT&S Company in OrganicSubstrate ......Presentation 3D ComponentPackaging in OrganicSubstrate Embedded Component Mark Beesley IPC Apex 2012, San Diego. Introduction

ComponentComponentComponentComponent alignmentalignmentalignmentalignment

Optical alignment of copper plated component

� High resolution camera

� Pattern recognition of pad design

Design

� Pad diameter: 150µm

� Pitch: 175µm

� Chip size: 7 x 7 mm

3D Component Packaging in Organic Substrate | Mark Beesley, AT&S | IPC Apex, San Diego 2012

Page 15: 3D ComponentPackaging AT&S Company in OrganicSubstrate ......Presentation 3D ComponentPackaging in OrganicSubstrate Embedded Component Mark Beesley IPC Apex 2012, San Diego. Introduction

ComponentComponentComponentComponent AssemblyAssemblyAssemblyAssembly

Screenshot showing multiple embeddeddevice types in one layer

� High speed component placement equipment

� Large production formats

� Fully flexible equipment

� Accuracy c.a. 10µm true position placement

� Ability to integrate different component types in one package

3D Component Packaging in Organic Substrate | Mark Beesley, AT&S | IPC Apex, San Diego 2012

Page 16: 3D ComponentPackaging AT&S Company in OrganicSubstrate ......Presentation 3D ComponentPackaging in OrganicSubstrate Embedded Component Mark Beesley IPC Apex 2012, San Diego. Introduction

CopperCopperCopperCopper PlatingPlatingPlatingPlating

Semi-additive technology – single board processing

� Control of parameters for each panel

� Handling of thin panels

� Unique flow system

� Pulse plating for via filling

� Full traceability of process data

� Single piece flow for improved

� Flexibility

� Risk management

3D Component Packaging in Organic Substrate | Mark Beesley, AT&S | IPC Apex, San Diego 2012

Page 17: 3D ComponentPackaging AT&S Company in OrganicSubstrate ......Presentation 3D ComponentPackaging in OrganicSubstrate Embedded Component Mark Beesley IPC Apex 2012, San Diego. Introduction

1) 0402 resistor, capacitor2) 0402 resistor3) Active component4) 0402 resistor

1

2 3

4

What it looks like … #1What it looks like … #1What it looks like … #1What it looks like … #1

3D Component Packaging in Organic Substrate | Mark Beesley, AT&S | IPC Apex, San Diego 2012

Page 18: 3D ComponentPackaging AT&S Company in OrganicSubstrate ......Presentation 3D ComponentPackaging in OrganicSubstrate Embedded Component Mark Beesley IPC Apex 2012, San Diego. Introduction

What it looks like … #2What it looks like … #2What it looks like … #2What it looks like … #2

3D Component Packaging in Organic Substrate | Mark Beesley, AT&S | IPC Apex, San Diego 2012

Page 19: 3D ComponentPackaging AT&S Company in OrganicSubstrate ......Presentation 3D ComponentPackaging in OrganicSubstrate Embedded Component Mark Beesley IPC Apex 2012, San Diego. Introduction

Minimum SYSTEM footprintthrough 3D STACKING

Embedded SiP/SiB

WhatWhatWhatWhat itititit lookslookslookslooks likelikelikelike … #3… #3… #3… #3

3D Component Packaging in Organic Substrate | Mark Beesley, AT&S | IPC Apex, San Diego 2012

Page 20: 3D ComponentPackaging AT&S Company in OrganicSubstrate ......Presentation 3D ComponentPackaging in OrganicSubstrate Embedded Component Mark Beesley IPC Apex 2012, San Diego. Introduction

� Introduction

� Embedded Component Technology

� Process capability – feature size

� Application examples

� Highlights

ThemesThemesThemesThemes

3D Component Packaging in Organic Substrate | Mark Beesley, AT&S | IPC Apex, San Diego 2012

Page 21: 3D ComponentPackaging AT&S Company in OrganicSubstrate ......Presentation 3D ComponentPackaging in OrganicSubstrate Embedded Component Mark Beesley IPC Apex 2012, San Diego. Introduction

Design Design Design Design RuleRuleRuleRule evolutionevolutionevolutionevolution

Design Rule When Volume Line / space(µm)

Componentpad (µm)

Minimumpitch (µm)

Comp toComp(µm)

ECP® Corethicknessover Cu

(µm)

V1 NOWSeries 50 / 50 200 250 200 250

Proto 25 / 25 150 175 200 200

V2 IndustrialisationSeries 25 / 25 150 175 200 200

Proto 20 / 20 130 150 200 160

V2.1 DevelopmentSeries 20 / 20 130 150 100 160

Proto 15 / 15 110 125 100 130

V3 ResearchSeries 15 / 15 110 125 100 130

Proto 10 / 10 90 100 100 100

V4 ResearchSeries 10 / 10 90 100 100 100

Proto < 10 / 10 < 75 < 85 < 75 < 75

3D Component Packaging in Organic Substrate | Mark Beesley, AT&S | IPC Apex, San Diego 2012

As complexity evolves – yield must be maintained at close to 100% due to device impact on cost of scrap

Page 22: 3D ComponentPackaging AT&S Company in OrganicSubstrate ......Presentation 3D ComponentPackaging in OrganicSubstrate Embedded Component Mark Beesley IPC Apex 2012, San Diego. Introduction

� Introduction

� Embedded Component Technology

� Process capability – feature size

� Application examples

� Highlights

ThemesThemesThemesThemes

3D Component Packaging in Organic Substrate | Mark Beesley, AT&S | IPC Apex, San Diego 2012

Page 23: 3D ComponentPackaging AT&S Company in OrganicSubstrate ......Presentation 3D ComponentPackaging in OrganicSubstrate Embedded Component Mark Beesley IPC Apex 2012, San Diego. Introduction

Embedded RFID

Chip: 400µm □

Via: 50µm Ø

ValueValueValueValue addedaddedaddedadded = System in Board= System in Board= System in Board= System in Board

3D Component Packaging in Organic Substrate | Mark Beesley, AT&S | IPC Apex, San Diego 2012

Multiple devices can beembedded in a PCB

Passive devices can be assembled on an inner layer in the PCB ….

Results ����

� High performance – short, low resistance copper connections

� Smallest PCB form factor – integrated design

� Secure against reverse engineering

� Integrated RFID - a “trace-able” PCB – from first process to “in the field”

Page 24: 3D ComponentPackaging AT&S Company in OrganicSubstrate ......Presentation 3D ComponentPackaging in OrganicSubstrate Embedded Component Mark Beesley IPC Apex 2012, San Diego. Introduction

� Industrial application

� 4 embedded MOSFETs with double side interconnection

� Logic devices and passives mounted on top

� 50µm dielectric thickness− Reduction of thermal resistance

− High breakdown voltage

− 50% footprint reduction

1000µm

Industrial Power ModuleIndustrial Power ModuleIndustrial Power ModuleIndustrial Power Module

3D Component Packaging in Organic Substrate | Mark Beesley, AT&S | IPC Apex, San Diego 2012

Page 25: 3D ComponentPackaging AT&S Company in OrganicSubstrate ......Presentation 3D ComponentPackaging in OrganicSubstrate Embedded Component Mark Beesley IPC Apex 2012, San Diego. Introduction

� High end automotive application

� Embedded processor - 416 I/O

� Stacked copper filled via

� 25µm line/space on all layers

� Active and passive SMDs

� 3D routing from front to back

EngineEngineEngineEngine ControlControlControlControl ModuleModuleModuleModule

Fanout over embedded processor usingorganic substrate redistribution

3D Component Packaging in Organic Substrate | Mark Beesley, AT&S | IPC Apex, San Diego 2012

Page 26: 3D ComponentPackaging AT&S Company in OrganicSubstrate ......Presentation 3D ComponentPackaging in OrganicSubstrate Embedded Component Mark Beesley IPC Apex 2012, San Diego. Introduction

DigitalDigitalDigitalDigital AmplifierAmplifierAmplifierAmplifier

� Parasitics affecting battery life and audio quality due to long wire-bond connections

� Solution = Embed digital audio amplifier -eliminate wire-bonding

� Maximum output power: 50 W

� 4 layer construction

� Prototype level

� Device pad pitch = 100µm (no RDL)

3D Component Packaging in Organic Substrate | Mark Beesley, AT&S | IPC Apex, San Diego 2012

Page 27: 3D ComponentPackaging AT&S Company in OrganicSubstrate ......Presentation 3D ComponentPackaging in OrganicSubstrate Embedded Component Mark Beesley IPC Apex 2012, San Diego. Introduction

Application Package Size

X,Y Reduction

Package concept

Embedded Component advantage

Voltage Convertor 7mm2 40%Smallest footprint 600mA DC DCconvertor on the Market

Charge Management 20mm2 40%Stacked silicon package for advancedLi-ion battery charge management

Media module 20mm2 30%Integrated module – discrete passivesstacked on eWLP

Silicon microphone 5mm2 > 50%Superior performance MEMS withsmallest form factor

Mobile TV 20mm2 50%Single device solution for mobile TV tuner

Identification 60mm2 New feature Integrated biometric sensing

Position sensor 60mm2 50%High accuracy Hall effect sensor –advanced micro joystick application

Wireless module 20mm2 40%Stacked package for smallest footprintsolution

RampingRampingRampingRamping Smartphone Smartphone Smartphone Smartphone ApplicationsApplicationsApplicationsApplications

3D Component Packaging in Organic Substrate | Mark Beesley, AT&S | IPC Apex, San Diego 2012

Page 28: 3D ComponentPackaging AT&S Company in OrganicSubstrate ......Presentation 3D ComponentPackaging in OrganicSubstrate Embedded Component Mark Beesley IPC Apex 2012, San Diego. Introduction

� Introduction

� Embedded Component Technology

� Process capability – feature size

� Application examples

� Highlights

ThemesThemesThemesThemes

3D Component Packaging in Organic Substrate | Mark Beesley, AT&S | IPC Apex, San Diego 2012

Page 29: 3D ComponentPackaging AT&S Company in OrganicSubstrate ......Presentation 3D ComponentPackaging in OrganicSubstrate Embedded Component Mark Beesley IPC Apex 2012, San Diego. Introduction

� Embedded component (can) dramatically reduce Package and PCB form factor – attractive to smartphone; tablet; medical; mobile device segments

� Other technology benefits include performance upgrade; reliability; integrated (modular) product --- further Market ramps expected

� The technology is thrusting in to commercialisation due to capacityavailability AND leverage of existing technologies (WLP; SMT; etc)

� Design automation is available from the mainstream providers

� Supply chain is not optimised – but big strides are being made and initialproducts launched because benefits outweigh disadvantages …

� For sure a technology to watch in 2012!

HighlightsHighlightsHighlightsHighlights

3D Component Packaging in Organic Substrate | Mark Beesley, AT&S | IPC Apex, San Diego 2012

Page 30: 3D ComponentPackaging AT&S Company in OrganicSubstrate ......Presentation 3D ComponentPackaging in OrganicSubstrate Embedded Component Mark Beesley IPC Apex 2012, San Diego. Introduction

www.ats.net Austria Technologie & Systemtechnik Aktiengesellschaft | Fabriksgasse13 | A-8700 Leoben Tel +43 (0) 3842 200-0 | Fax +43 (0) 3842 200-216 | E-mail [email protected]

www.ats.net

AT&S Company Presentation

Thank you for your attention!

Mark Beesley - COO Advanced Packaging, AT&S

3D Laminate Component Packaging

@ATS_ECP

e-mail [email protected]

cell +43 676 8955 5669

web ecp.ats.net