Series XGT/XGDP-E13-4A

Variations

Slit Valve/Door Valve

For 450 mmwafer

NewNewBody

thickness(mm)

For 200 mmwafer

For 300 mmwafer

For 450 mmwafer

¡46 x 236 mm¡32 x 222 mm

* Suitable for opening sizes of 70 x 500 mm and 100 x 750 mm. * Contact your SMC sales representative for other opening sizes.

70

200 300 450 Opening width (mm)

60

50

Top accessibleImproved installation and reduced maintenance time

Replaceable bellowsImproved installation and reduced maintenance time

Implemented a two-stage operating structure

Built-in end-lock mechanismHolds last gate position even after air supply source is cut-off

P.1

P.1

P.1

¡56 x 496 mm

Non-cassette type Cassette type Door valve

Slit valve

Slit valve Door valve

Slit valve Door valve

Slit valve

Slit valve

P.1211

¡50 x 336 mm

Gate Valve

Door valve

Refer to the catalog on our website or the Best Pneumatics No. 8 for details on 200 mm and 300 mm.

qRemove the body

Chamber

Machine screw

Chamber

Gate Gate

Side plate

wRemove the fixing bolt

wRemove the side plates

eRemove the gate from the body

eRemove the bellows

Top access Slit valve

Replaceable bellows Slit valve

qRemove the top plate

Gate construction for two-stage operation consisting of a direct upand down movement and a clamp operation to seal the gate.

Implemented a two-stage operating structure Slit valve Door valve

wUpward eClamp/Gate blockedqGate open

Gate

Set screw

1

Series XGT/XGD

Up

war

d

Clamp

Specifications

Door valve

SpecificationsOpening size (Height x Width) 56 mm x 496 mm

Operating environmental pressure Atmospheric pressure to 1 x 10−6 Pa (abs)

Operating pressure range 0.4 to 0.6 MPa

Leak 6.5 x 10−10 Pa·m3/s*1

Operation temperature 5 to 60°CFluid Inert gas

Mounting direction Vertical (Cylinder-underside)

End-lock mechanism With lock mechanism at closing position*2

Weight 12 kg

Auto switch None, D-A93 selectable

Connector Multiple connector or D-sub connector selectable

*1 In the case of O-ring FKM at normal temperature (Not including gas permeation)

*2 �When releasing the valve lock without an operating pressure, apply pressure to the pilot port to maintain the closed position, and then switch the operation valve before releasing the lock.

Door valve

Non-cassette type Cassette type

SpecificationsOpening size (Height x Width) 56 mm x 496 mm

Operating environmental pressure Atmospheric pressure to 1 x 10−6 Pa (abs)

Operating pressure range 0.45 to 0.6 MPa

Internal leak 6.5 x 10−10 Pa·m3/s*1

Internal leak at reversed pressure 6.5 x 10−8 Pa·m3/s*1, *2

External leak 6.5 x 10−11 Pa·m3/s*1

Operation temperatureGate part: 5 to 150°C

Actuator part: 5 to 80°CFitting/Auto switch part: 5 to 60°C

Fluid Inert gas

Mounting direction Vertical

End-lock mechanism With lock mechanism at opening/closing position*3

WeightNon-cassette type: 17 kg

Cassette type: 25 kg

Auto switch None, D-A93 selectable

Connector Multiple connector or D-sub connector selectable

*1 In the case of O-ring FKM at normal temperature (Not including gas permeation)

*2 Reversed pressure: 0.1 MPa (abs) or less.*3 �When releasing the valve lock without an operating pressure, apply

pressure to the pilot port to maintain the current condition, and then switch the operation valve before releasing the lock.

Slit valve

2

450 mm Gate Valve Series XGT/XGD

56

49670

69

485

6312

3.5

496

622

56

142.5 144

75

514

3710

7.5

485

142.5 144 69

67 (

Str

oke)

56 (

Ope

ning

siz

e)56

(O

peni

ng s

ize)

80 (

Str

oke)

74

514

37

315

5615

4

148

110

2 x ø44

496 (Opening size)

496 (Opening size)

64

Dimensions

Slit valve/XGT

Cassette type

Non-cassette type

Door valve/XGD

Series XGT/XGD