9/9/2015 weizmann institute of science 1 nanotechnology cleanroom design considerations scott...

04/19/23Weizmann Institute of Science1

Nanotechnology Cleanroom Nanotechnology Cleanroom Design Considerations Design Considerations

Scott Mackler Tim Loughran


OutlineOutline

How to Define the User Requirements?Basic Contaminate ControlDesign Concepts?Case Studies?Outline Requirements?

First- Tell us about your level of expertise and understanding.


What is Nanotechnology?What is Nanotechnology?

Research and technology development at the atomic, molecular or macromolecular levels

Ability to control or manipulate on the atomic scale

Creating and using structures, devices and systems that have novel properties due to their small and/or intermediate sizes


Size of NanometerSize of Nanometer 1 Nanometer = One-Billionth of a Meter Nanometer sized particles are smaller than

a living cell and can be seen only with the most powerful microscopes

Width of human hair is approx. 80,000 nanometers

The average human can see in the 80,000 nanometer range

One small dust particle seen in a ray of sun equates to approx. 60,000 nanometers

DNA is in the 2.5 nanometer range


The Scale of ThingsThe Scale of Things


Nanotechnology ApplicationsNanotechnology Applications

Creation of new materials w/ superior strength, electrical conductivity, resistance to heat and other properties

Microscopic machines, including probes that could be injected into the body for medical diagnosis and repair

Creation of “bio-chips” that detect food-borne contamination, dangerous substances in the blood or chemical warfare agents in the air


Defining a CleanroomDefining a Cleanroom

Designed, built, and operated to provide cleanliness, control, and/or isolation

Built with smooth, hard, cleanable surfaces

Air filtration system is critical – HEPA filters (High Efficiency Particulate Air)

Strict procedures control operation, personnel, process and materials


Why have a Cleanroom?Why have a Cleanroom?

To protect the product or process from contamination

To restrict access to the product or process

To contain hazards located within the cleanroom


What is Contamination?What is Contamination?

Contamination is anything (material, substance, or energy) which corrupts the process or makes the product impure by either touching or mixing with it

Solid / Liquid / GasOrganic / Non-OrganicAirborne / SurfaceChemical MakeupSize and ShapeStatic Charge + / -


How is Cleanroom How is Cleanroom Contamination Measured?Contamination Measured?

Measured in microns or micrometers1 micron = One millionth of a meterThere are 25,400 microns in an inchA human hair is approx. 75 microns in

diameterHuman eye can see particles down to

about 50 micronsBacteria is approx. 2 to 10 microns in

size


How is Cleanroom How is Cleanroom Contamination Measured?Contamination Measured?

Cleanrooms are measured in the amount of ½ micron size particles in one cubic foot of sampled air. (½ micron particle = .00001968”)


What Creates Contamination?What Creates Contamination?

Personnel activity within the cleanroom generates and transports contamination

MovingTalkingBreathingScratchingSneezing



People Contaminate!

Activity PPM

Motionless 100,000 PPM

Walking @ 2mph 5,000,000 PPM

Walking @ 3.5mph

7,000,000 PPM

Walking @ 5mph 10,000,000 PPM

Horseplay 100,000,000 PPM



People generate contamination

Skin flakes and oilSpittle (smokers especially)HairPerspirationClothing debris (lint, fibers, etc.)



Materials generate contamination

Wood productsConstruction materials (drywall, concrete dust,

etc.)PencilsDuct tapeCardboard and paperPaint and coatings



Equipment generates contamination

Electric motorsScaffoldsLaddersGang boxesBrooms, mops and dusters


What are Cleanroom What are Cleanroom Classifications?Classifications?

All cleanrooms are not built or operated to the same cleanliness standard due to the size of the devices that are being built or handled at each customers location.

ISO 14644-1, which replaces Federal Standard 209E, is the basis of Cleanroom Classification.

ISO 14644 classifies a Cleanroom based on the size and number of airborne particles


What are Cleanroom What are Cleanroom Classifications?Classifications?

Chart of ISO-14644 & FED-STD-209E classifications

ISO 14644-1 Class

FED-STD-209E Class

0.5µm particles per meter

cubed

0.5µ particles per foot cubed

8 100,000 3,520,000 100,000

7 10,000 352,000 10,000

6 1,000 35,200 1,000

5 100 3,520 100

4 10 352 10

3 1 35 1


Clean-Build Goals and Clean-Build Goals and MethodsMethods

Minimize and remove contaminants from the environment

Don’t allow contaminate into the cleanroomControl behaviors in the clean roomContinual clean-up and removal of debrisVacuuming, wet mopping, wipe downs


Clean-Build Goals and Clean-Build Goals and MethodsMethods

Neutralize the threat within the environment

Grounding (Electro-Static Discharge control)

Safety Immediate spill cleanup


Case StudiesCase Studies

Purdue University- Birck Nanotechnology Center Brookhaven National Laboratory (BNL)- Center for

Functional Nanomaterials University of North Carolina and North Carolina

AT&T- Joint School of Nanoscience and Nanoengineering (JSNN)

Iberian National Laboratory (INL)- Brage Portugal


Purdue UniversityPurdue University

Purdue Birck Nanotechnology CenterPurdue Birck Nanotechnology Center

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Weizmann Institute of Science

Purdue Birck Nanotechnology Center Purdue Birck Nanotechnology Center Cleanroom Floor PlanCleanroom Floor Plan

C2 C2

C2

C2

C2

C2 C2

C2

C2

C2

C2

C2

C2

(4 SIDES) (4 SIDES) (4 SIDES) (4 SIDES) (4 SIDES)

(4 SIDES)(4 SIDES) (4 SIDES) (4 SIDES)

(4 SIDES) (4 SIDES)

C2

(4 WALLS)

(3 WALLS) (3 WALLS)

(3 WALLS)

C2

AIRLOCKCL2015

DIFFUSION / IMPLANTCLASS 100

CL2013CHASECL2014

CHASECL2012

OXIDATION WET CHEMCLASS 100

CL2011CHASECL2010

DEPOSITIONCLASS 1000

CL2009CHASECL2008

GOWNINGCLASS 1000

CL2003

CLEAN HOUSKEEPINGCLASS 1000

CL2007

AIR

SH

OW

ER

CL2

004

AIR

LO

CK

CL2

005

CLE

AN

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USEK

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GC

LASS 1

000

CL2

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AIR

SH

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CL2

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VESTI

BU

LEC

L200

0

AIR

LO

CK

CL2

002

CHASECL2038

BAYCLASS 1000

CL2037CHASECL2036

WET CHEMCLASS 1000

CL2035CHASECL2034

CHASECL2016

LITHOGRAPHYCLASS 10CL2017

CHASECL2018

LITHOGRAPHYCLASS 10CL2019

CHASECL2020

CLUSTERCLASS 1000

CL2021CHASECL2022

DEPOSITIONCLASS 1000

CL2023CHASECL2024

DRY ETCHCLASS 1000

CL2025CHASECL2026

BAYCLASS 1000

CL2027CHASECL2028 BAY

CLASS 1000CL2029

CHASECL2030

QUARTZ CLEANCLASS 1000

CL2031

CENTER AISLECLASS 1000

CL2006CENTER AISLECLASS 1000

CL2006

CHEM BIOCLASS 1000

CL2033

BACTERIACLASS 1000

CL2033H

MAMALLIANCLASS 1000

CL2033JHSKP

CLASS 1000CL2033B

CL SUPPLYCLASS 1000

CL2033C

CHEM BIO GOWNINGCLASS 1000

CL2033A

AIR SHOWERCLASS 1000

CL2033D

DEGOWNCLASS 1000

CL2033E

CHEMISTRYCLASS 1000

CL2033G

CLASS BCLASS 1000

CL2033F

CENTER AISLECLASS 1000

CL2006

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Brookhaven National LaboratoriesBrookhaven National Laboratories

BNL Center for Functional BNL Center for Functional Nanomaterials Cleanroom Nanomaterials Cleanroom

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BNL Center for Functional BNL Center for Functional Nanomaterials Cleanroom Floor PlanNanomaterials Cleanroom Floor Plan

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UNC and NC A&TUNC and NC A&T

UNC and NC A&T Joint School of Nanoscience UNC and NC A&T Joint School of Nanoscience and Nanoengineering (JSNN) Cleanroom and Nanoengineering (JSNN) Cleanroom

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UNC and NC A&T Joint School of Nanoscience UNC and NC A&T Joint School of Nanoscience and Nanoengineering (JSNN) Cleanroom and Nanoengineering (JSNN) Cleanroom

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Iberian National LaboratoryIberian National Laboratory

Iberian National Laboratory (INL)Cleanroom Iberian National Laboratory (INL)Cleanroom

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Iberian National Laboratory (INL) Cleanroom Iberian National Laboratory (INL) Cleanroom

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Define RequirementsDefine Requirements

Functions/Processes Control Parameters Type of Room- Bay Chase vs. Ballroom Type of Systems- Air Delivery Vibration Criteria EMI Requirements Nano Bio Functions and Interface



Functional Processes:– Wet Process/Etch– Dry Etch– Photolithography– Thermal– Deposition– MBE– Inspection– Characterization– Nano Bio



Control Parameters:– ISO Class– Temperature/RH– Process Services– Exhaust Streams



Type of Rooms:– Bay/Chase– Ballroom



Type of Systems- Air Delivery:– Fan Filters– Duct Supply/Open Return– Ducted Supply/Ducted Return– Make Up Air Introduction



Vibration Criteria:– Equipment Requirements– Location within building– Adjacent spaces– Parameters (Millimeters per Second):

• 125 MPS Areas• 200 to 500 MPS Areas• Over 500 MPS Areas



EMI Requirements:– Equipment Requirements– Fields AC and/or DC (milliGAUSS)– 0.1 mG peak-to-peak



Nano Bio Functions– What is different?– How does it interface with the function fab?


ConclusionConclusion

QuestionsStated Design Parameters

9/9/2015 weizmann institute of science 1 nanotechnology cleanroom design considerations scott...

Documents

weizmann institute of

cleanroom slide

air slide

size slide

cleanroom contamination

nanometer range slide

size of nanometer

shape static charge