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A Specialty NanoMaterials Product Company

Nanomanufacturing Summit 2009 - May 27-29 - Boston, MA

Sean Stewart

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$35B Market

Opportunity

Solar

Modules

Proven Ability to Generate High Value Commercial Products from Nanotechnology

A Specialty

NanoMaterials

Product

Company for

12 Years

Planar Lightwave

Circuits -

Transceivers

>$100M Revenues

>1,000 Employees

Implantable

Batteries$48M Acquisition by

Our Core Technology Expertise

Particle Deposition Dispersion

Making NanoParticles

Depositing Thin Films

Evenly Dispersing Particles in Solution

Silicon Ink

Films Phosphors Deposition

Today

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NanoParticle Manufacturing (NPM™)

Subatmospheric Process,

High Vacuum Not Required

Tightly Controlled Particle Size– 10nm < Dmean < 200nm

Narrow Particle Size Distribution– Dmax < 2 x Dmean

Gas, Vapor Aerosol Precursors

Diverse Materials Portfolio– Oxides, Nitrides, Carbides, Metals,…

– Rare earth-doping, oxidation state

– High chemical purity

High Throughput, Continuous Flow

– Reactor Modules Scaled to > 1kg/Hr

– Process Scaleable to >100T/Yr

Unparalleled Dispersion

Uniformity and Stability

Superior Surface Modification

Techniques

Laser Pyrolysis Technology Matched to Silicon

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Core Technology:Laser Reactive Deposition (LRD™)

Gas, Vapor and Aerosol

Precursor Forms Enable Wide

Range of Complex

Film Compositions

Thick Film Deposition

High Rate vs. PECVD

Single Pass at 30+ µm

Complex Compositions

Multi-Layer

Porous or Dense Films

Uniform Thickness and Composition

Variety of Substrate Materials and Geometries

Material Be Collectedas Powder

Versatile, Efficient Manufacturing Platform

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Unparalleled Composition FlexibilityGrowth Engine for New BusinessExamples from the NanoGram library

Fe, Ag, Ni, Co, Pt, Bi, Si and metal alloys

TiO2, ZnO, VO2, V2O3, V2O5, MnxOy, MoO3, FexOy, Ta2O5, NbO2, Nb2O5, Y2O3, SnO, SnO2, CuxOy, NiO, CoxOy, Ag2O, In2O3, ZrO2, SiO2, MgO, Al2O3, Er2O3, and others

LiMn2O4, Li2Mn4O9, Li4Mn5O12, LiCoO2, LiNiO2, LiAlO2, Li1+yMn2-yO4, Li4Ti5O12, Y2MoO6, Ag2V4O11, Zr0.92Y0.08O1.92,...

LiNi0.8Co0.2O2, LiNi1-yCoyO2, LiMn2-yAlyO4, LiMn2-yCoyO4, BPSG, La1-xSrxMnO3, and others

Eu:BaMgAl10O17, Er:NawAlxSiyOz, and others

V8C7, W2C, SiC, Fe3C, Fe7C3, and others

Si3N4, FeN, AlN, TiN, and others

LiFePO4, BPO4, and others

FexSy, WxSy, ZnS, and others

Li2CO3, and others

• Printable electronics

• Phosphors

• Optical devices

• Solar cells

• Self-cleaning coatings

• AR/Hard coatings

• Li-ion batteries

• Catalysts

• Photostructured glass

• Power devices

• LEDs

• Heat dissipation layers

• Fuel cells

Class Composition Applications

Metals

Metal Oxides

Binary

Ternary

Quarternary

Doped Ceramics

Carbides

Nitrides

Phosphates

Sulfides

Carbonates

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NanoParticle Manufacturing Capability

Pilot Plant with Multiple Reactors

Dispersion Capability

4,000ft2 “Wet Lab”AND

Leveraging Our Core Technology Expertise for Silicon Ink

Our Core Technology Expertise

Particle Deposition Dispersion

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Nano-Si Synthesis & Powder Morphology

Laser Pyrolysis

– Clean & high throughput

– Demonstrated n & p doped nano-Si at levels up to 1020 atm./cm3

Nano-Si powder morphology

– Spherical particles

– Narrow size distribution

– Crystalline core & amorphous shell

SiH4 nano-Si + H2

hn

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Nanoparticle-Based Silicon Ink

NanoGram Silicon Ink Solution

Direct Pattern Deposition (vs Lithography)

Direct Doping (vs Ion Implantation)

Printed Device with Poly-si Performance

Large Area Deposition (vs Vacuum-Based)

Si

Silicon Ink Formulated with n- and p-doped Si Nanoparticles

Controlled Doping

Narrow Size Distribution

High Purity

Clean Particle Surface

Laser Pyrolysis Technology Enablesn- and p-Doping During the Process

Portfolio Of Stable Dispersions

Controlled Viscous Dispersion

Enables Ink Jet and Spin-on Deposition

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NanoGram’s Nanocrystalline Silicon –Differentiated Process and Product

Factors Critical for Applicationof Silicon Nanoparticles:

– Control of Surface Oxidation

– Control of Crystallinity

– Ability to Include Dopants

NPMTM Produced Silicon Nanocrystals

Nanoparticles of Silicon Are of Interest for:– Printed Electronics

– Solar Cells

– LED Phosphors

– Fluorescent Probes In In-Vitro Diagnostics

Silicon Synthesis Processes:– Plasma Synthesis

– Electrochemical Etching

– Solution Phase Synthesis

– Laser Ablation

– Laser Pyrolysis

Plasma and Solution Phase Synthesis Processes Are:

– Not Readily Scalable

– Difficult to Control – for Size, Crystallinityand Shape

Nanogram’s NPMTM Process, Based on Laser Pyrolysis, Is Ideal for Silicon Nanoparticle Synthesis:

– Highly Efficient – Resonant Absorption bySilane Gas (SiH4)

– Scalable Production

– Produces Highly Uniform Nanocrystals

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NanoGram Silicon Ink: Unlocking thePrinted Electronics Opportunity

Nanoparticulate-Based Silicon Inks for Solution-Deposited Applications

Ideal for Low Temperature as Well as Large Area Processes

Doped and Intrinsic Silicon(p+ and n+ Available)

Ink Formulations for Solution-Based Coatings and Inkjet Printing

Stable Dispersions

Key Applications

NanoGram Silicon InkJunctions for Thin-Film

Silicon Photovoltaics

Printed Flat Panel

Display Backplanes

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Inspect

Anneal/

Recrys-

tallize

Strip/

Ash

Etch/Ion

ImplantDevelopPatterning

Spin

Photo-

Resist

DepositionClean

Conventional Process

Multiple Steps, Complex Logistics, Multiple Streams

Expensive, High Vacuum Process Equipment

Printing a TFT Back Plane; Reducing Cost by Streamlining the Manufacturing Process

Printed Process

Eliminates Process Steps, Reduces Logistics and Capital Equipment Costs

Additive Process Reduces Material Use and Environmental Impact

Inspect

Anneal/

Recrys-

tallize

DepositionClean

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Printed Electronics Requires a Complete Materials Solution

PASSIVE ELEMENTS

Conductors Ag, Cu, Ni, Fe, Co, Pt, and metal alloys

Dielectrics SiO2, Ta2O5, Si3N4, TiO2, ZrO2, Nb2O5, Y2O3, and others

Inductors Ferrite, Fe alloys (e.g.: Fe-N, Fe-Ni)

ACTIVE ELEMENTS

Semiconductors Si, Doped-Si, Nitrides, Oxynitrides, Carbides, ZnO, and others

Silicon Silicon Nitride TiO2 Nickel

Particle Size, Uniformity, Composition Purity, Dispersibility

NanoGram Core Expertise

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Extensive IP Portfolio

56 Patents Issued and Allowed in the U.S.

80 U.S. Patents Pending

51 Foreign Patents Issued

IP Portfolio

Discoveryand

License

Products

IP Portfolio Provides

Broad Application in

Use of Nanostructured

Materials Including:

Solar Cell Devices

Lithium Primary and Secondary Batteries

Capacitor Devices

Fuel Cell Devices

Electromagnetic Shielding

Photocatalysis and UV Block Agents

Polymer Nanocomposites

Refractive Index Engineering

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Outside Validation of Our Technology

Joint Development Agreement

November 2008

Recipient of DOE Energy

Innovation Award

March 2008

Thin Film Laser Reactive PV Deposition Equipment

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