a study of low leakage failure mechanism of x7r multilyer ceramic capacitor part1
TRANSCRIPT
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A STUDY OF LOW LEAKAGE A STUDY OF LOW LEAKAGE FAILURE MECHANISM FAILURE MECHANISM
OF MULTILAYER 7XR CERAMIC OF MULTILAYER 7XR CERAMIC CAPACITORCAPACITOR
Zhaofeng Wang Zhaofeng Wang
International Rectifier Corp.International Rectifier Corp.
ISTFA 2006
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Presentation Presentation OutlineOutline
IntroductionIntroduction Hot Spot DetectionHot Spot Detection Precision localizationPrecision localization SEM, STEM AnalysisSEM, STEM Analysis SummarySummary AcknowledgementAcknowledgement
ISTFA 2006
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Illustration of a leaky capacitor in application circuit
and its IV behavior
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Sectioning and thermal imaging to
confirm/localize the hot spot in x-direction
x
zy
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Illustration of approaching the failure site through y-direction sectioning and photon
emission micro-probing
X - direction y-direction
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Laser marks
Illustration of precision localization using Laser marking, sectioning and photon emission micro-probing
ISTFA 2006
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failure site SEM: there is no observable physical defect
ISTFA 2006
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04/09/2304/09/23 88SEM close-up showing a grain boundary micro-fracture
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High leakage (mA range) failure sites showing micro-fractures
intergranular transgranular
ISTFA 2006
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STEM image of a failure site showing compositional contrast
ISTFA 2006