a three-dof compliant micromotion stage with flexure ...yy582/papers/yong_threedof.pdf · the...
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![Page 1: A three-DOF compliant micromotion stage with flexure ...yy582/Papers/Yong_threeDOF.pdf · the compliant micromotion stage is given in equation (4). 759, 063 30.7 x 106 759, 063 759,](https://reader034.vdocument.in/reader034/viewer/2022042215/5ebd411af6597443a502d4a2/html5/thumbnails/1.jpg)
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A three-DOF compliant micromotion stage with flexure hingesTien-Fu Lu; Daniel C Handley; Yuen Kuan Yong; Craig EalesThe Industrial Robot; 2004; 31, 4; ABI/INFORM Globalpg. 355
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