advanced lens design - uni-jena.de · principal plane of one mirror inversion for an odd number of...
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www.iap.uni-jena.de
Advanced Lens Design
Lecture 13: Mirror systems
2013-01-21
Herbert Gross
Winter term 2013
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2
Preliminary Schedule
1 15.10. Introduction Paraxial optics, ideal lenses, optical systems, raytrace, Zemax handling
2 22.10. Optimization I Basic principles, paraxial layout, thin lenses, transition to thick lenses, scaling, Delano diagram, bending
3 29.10. Optimization II merit function requirements, effectiveness of variables
4 05.11. Optimization III complex formulations, solves, hard and soft constraints
5 12.11. Structural modifications zero operands, lens splitting, aspherization, cementing, lens addition, lens removal
6 19.11. Aberrations and performance Geometrical aberrations, wave aberrations, PSF, OTF, sine condition, aplanatism, isoplanatism
7 26.11. Aspheres and freeforms
spherical correction with aspheres, Forbes approach, distortion correction, freeform surfaces, optimal location of aspheres, several aspheres
8 03.12. Field flattening thick meniscus, plus-minus pairs, field lenses
9 10.12. Chromatical correction
Achromatization, apochromatic correction, dialyt, Schupman principle, axial versus transversal, glass selection rules, burried surfaces
10 17.12. Special topics symmetry, sensitivity, anamorphotic lenses
11 07.01. Higher order aberrations high NA systems, broken achromates, Merte surfaces, AC meniscus lenses
12 14.01. Advanced optimization strategies
local optimization, control of iteration, global approaches, growing requirements, AC-approach of Shafer
13 21.01. Mirror systems special aspects, bending of ray paths, catadioptric systems
14 28.01. Diffractive elements color correction, straylight suppression, third order aberrations
15 04.02. Tolerancing and adjustment tolerances, procedure, adjustment, compensators
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1. General properties
2. Image orientation
3. Telescope systems
4. Further Examples
3
Contents
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Geometry:
1. bending needs the separation of ray bundles
2. helps in folding systems to more compact size
3. switches image orientation in the plane of incidence
4. for centered usage of mirros: central obscuration,
spider legs for mounting
Correction:
1. astigmatism for oblique incidence
2. no color aberrations
3. positive contribution to Pethval curvature
4. usually more sensitive for off-axis field: coma
Miscellaneous:
1. coating is HR, mostly metallic, no ghost images
2. surface accuracy approximately 4 times more sensitive
3. only option for very large diameter (astronomy)
4. aspherical or freeform shape easier to fabricate
5. preferred as scanning or adaptive component
6. plane bending mirrors often realized as prisms
7. only option for extreme UV due to transmission problems
4
General Properties of Mirror Systems
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Mirror inverts the system: left handed into right handed coordinate system
Vectorial calculation with tensor calculus possible
Possible solutions for correct ray tracing:
1. distances negative behind the mirror
only obsvious for normal incidence
2. refractive index negative behind the mirror
seems to be unphysical, only formal solution
For complicated prisms with multiple reflections:
tunnel diagram with unfolded reflections
5
Modelling Problems with Mirrors
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Tunnel Diagram
Tunnel diagram:
Unfoldung the ray path with invariant sign of the z-component of the optical axis
Optical effect of prisms corresponds to plane parallel plates
More rigorous model:
Exact geometry of various prisms can cause vignetting
3
1 2
2
3
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Modelling a Mirror Surface
Problem in coordinate system based raytracing of mirror systems:
right-handed systems becomes left-handed
Possible solutions:
1. Folding the mirror
- light propagation direction changed
z-component inverted
- tunnel diagram for prism
2. negative refractive index
3. inversion of the x-axis
r
spherical
mirror
F
f'
zC
P=P'
folded mirror
surface
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Transformation of Image Orientation
Modification of the image orientation with four options:
1. Invariant image orientation
2. Reverted image ( side reversal )
3. Inverted image ( upside down )
4. Complete image inversion
(inverted-reverted image)
Image side reversal in the
principal plane of one mirror
Inversion for an odd number
of reflections
Special case roof prims:
Corresponds to one reflection
in the edge plane,
Corresponds to two reflections
perpendicular to the edge plane
y
x
y
x
y
x
mirror 1
mirror 2
y - z- folding
plane
z
z
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Transformation of Image Orientation
image reversion in the
folding plane
(upside down)
image
unchanged
image
inversion
original
folding planeimage reversion
perpendicular to the
folding plane
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Astigmatism of Oblique Mirrors
Mirror with finite incidence angle:
effective focal lengths
Mirror introduces astigmatism
Parametric behavior of scales astigmatism
2
costan
iRf
i
Rfsag
cos2
i
Rs
iRsi
iRss ast
cos22
coscos2
sin'
22
i0 10 20 30 40 50 60
0
0.1
0.2
0.3
0.4
0.5
0.6
0.7
0.8
0.9
1
s / R = 0.2
s / R = 0.4
s / R = 0.6
s / R = 1
s / R = 2
s' / R
s'ast
R
focal
line L
i
C
s
s'sag
mirror
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primary mirror
focus
corrector plate
y
r
a
marginal rays
field
Telescopic System Types
Cassegrain
Schiefspiegler,
obscuration-free
Ref: F. Blechinger
d1
s'2
M1
M2
p
f1
D1
D2
s2
M1
M2
M3
M1
M2
M3
Kutter Tri-Schiefspiegler Buchroeder Tri-Schiefspiegler
Schmidt
catadioptric
Maksutow
M1
M2
L1
L2L3 L4, L5
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Catadioptric Telescopes
Maksutov compact
Klevtsov
M1
M2
L1
L2L3 L4, L5
M1
L1, L2
M2
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Telescopes with tilted elements
Anastigmatic solution
for two mirrors
Schiefspiegler-Telescopes
y
y
obj
1
2
3
4
ima
d1
d2 d
3
d4
d5
object
plane
image
plane
mirror
M1, r
1
mirror
M2, r
2
d
image
22
21
dr
rr
21
21
2
2
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Xray telescopeWolter type I
Nested shells with gracing incidence
Increase of numerical aperture by several shells
Gracing Incidence-Xray Telescope
detector
hyperboloids Wolter type I
rays
paraboloids
nested cylindrical
shells
towards paraboloid
focus point
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Woltertyp
1. Paraboloid
2. Hyperboloid
Gracing Incidence-Xray Telescope
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Mangin Mirror
F
Principle:
Backside mirror, catadioptric lens
Advantages:
Mirror can be made spherical
Refractive surface corrects spherical
System can be made nearly aplanatic
-0.005 -0.0105 -0.0161/r
1
Ssph,
Scoma
40
20
0
-20
-40
corrected
coma
spherical
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Mangin Mirror
spherical
coma
astigmatism
curvature
distortion
axial
chromatic
lateral
chromatic
-0.02
0
0.02
-0.01
0
0.01
-5
0
5
-5
0
5
-5
0
5
-0.02
0
0.02
1 2 3 sum-4
-2
0
2
4
Seidel surface contributions of a real
lens:
Spherical correction perfect
Residual axial chromatic unavoidable
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Offner-System
object
image
M
r2
r1
d1
d2
-0.1
0
0.1
-0.1
0
0.1
-0.2
0
0.2
curvature
astigmatism
distortion
M11
M2 M12
sum
Concentric system of Offner:
relation
Due to symmetry:
Perfect correction of field aberrations in third order
21
212
rr
dd
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Dyson-System
T S
y
-0.10 0-0.20zmirror
object
image
rL
nr
M
Catadioptric system with m = -1 according Dyson
Advantage : flat field
Application: lithography and projection
Relation:
Residual aberration : astigmatism
ML rn
nr
1
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Lithographic Optics
H-Design
I-Design
X-Design
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EUV - Mirror System
projection
illumination
wafer
mask
source
System:
Only mirrors
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Microscope Objective Lens: Catadioptric Lenses
Catadioptric lenses:
1. Schwarzschild design: first large mirror
2. Newton design: first small mirror
Advantageous:
1. Large working distance
2. Field flattening
3. Colour correction
Drawback:
central obscuration reduces
contrast / resolution
a) Schwarzschild b) Newton
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Retro Reflecting Systems
r2
r1
M
a) BK7
c) SF59 / TIF6
10
-1
b) SF59
-1
n3
n2
n1
r3
r2
r1
Solution 2 :
Double hemisphere
Correction with two materials
Combined shells:
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Retro Reflecting Systems
r
d = r / 2
3. Solution:
Offner-setup
Only small field angles possible
4. Solution:
Gradient-index ball lens
Only academic
f
Fz
y
R
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Retro Reflecting Systems
rm
r2
5°
0°
10°
15°
20°
5. Solution:
Lens-mirror-combination
Relation for plano-convex lens :
Limitation :
Field aberrations
rn
nrm2
1
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Retro Reflecting Systems
rsph
rm
max
1.
3.2.
incoming
collimated
beam
Special version: ball lens with mirror
6. Solution: axicon
Useful only on axis
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Retro Reflecting Systems
triangular area
plane front surface
hexagonal area
corrugated front
surface
2
1
3
ray path
0 10 20 30 40 50 60 70 80 90
0.2
0.4
0.6
0.8
1
air
n = 1.5
n = 2
0 10 20 30 40 50 60 70 80 90
10-4
10-3
10-2
10-1
100
Log P()/P0P()/P0
0
7. Solution :
Corner-cube mirror
Two possible
realizations :
1. Only mirror
2. Corner filled with
glass
Material enhances
backreflection and
maximum field
3sin max
n