afternoon bsac research overview
TRANSCRIPT
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BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
AfternoonBSAC Research Overview
Recent Research Results and New DirectionsSeptember 2003
Dorian Liepmann, Ph.D.Director, Berkeley Sensor and Actuator CenterLloyd Distinguished Professor of BioEngineering
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
AFTERNOON POSTER SESSION
Micro Power (12)
Micro Photonics & Adaptive Optics (5)
CAD (3)
BioMEMS and Microfluidics (32)
2
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
AFTERNOON POSTER SESSION
Micro Power (12)
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionIntegrated Electrical Power from Liquid Hydrocarbon Fueled Micro-Rotary EngineFinal devices will be lab bench and field tested for reliability.
Recent ResultsFuel delivery system fabricated500um thick NiFe structures plated900um Rotor/Housing fabrication process improved
Next Six MonthsFuel / air mixture manifoldThermal PackagingEngine health monitoring
David C. WaltherProf. Al Pisano
MEMS ROTARY ENGINE POWER SYSTEM(MEMS REPS)
APP43
900 µm900 µm
3
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionLiquid Hydrocarbon Fueled Rotary Engine that utilizes MEMS subsystems to monitor and control fuel delivery, engine health, and efficiency.
Recent ResultsNaturally aspirated engine operation on gaseous fuelsLubrication delivery identified as issue to be resolvedTight fuel/air mixture control required for operation
Next Six MonthsLiquid fuel / air mixture manifoldLubricant deliveryEngine health monitoring
Dr. David C. Walther, Sang-won Park, Bennett Sprague, Israel Figueroa, Mitchell SwangerProfs. Carlos Fernandez-Pello, Al Pisano
Liquid Fueled MEMS Enabled 12.9mm Rotary Engine Power System
CFP1
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project Descriptionlow temperature LPCVD for SiC thin filmssingle precursor 1,3-disilabutane
Recent Resultslow stress and crystalline film at 800 ºCuniform, pin-hole free, and dense filmshigh wear resistance and low frictionresilient to combustion environment
Next Six Monthsfurther wear and friction testingcoating of fully-released Si micro-Wankelengine component
M. B. J. Wijesundara, J. Zhang, and C. CarraroProfs. Roya Maboudian, Al Pisano
Silicon Carbide-coated Microcomponents for the Rotary Engine-Based Power System
APP51/RM
Uncoated
SiC coated
Wear
No wear
4
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionMillimeter-scale electric generatorRotor poles integrated into rotary engineStator assembled from discrete parts
Recent ResultsPowdered iron stator components produced with EDM and conventional machiningSome sub-assemblies constructed
Next Six MonthsComplete assembly of prototypeAssemble test standTesting and characterization
Matthew SeneskyProf. Seth Sanders
MEMS Rotary Engine Power System / Integrated Generator
APP44
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project OverviewElectroplate soft magnetic poles into silicon moldRequirements
Deposit 900 µm High saturation magnetization
Recent ResultsAttained deposits with ~1.5 Tesla saturation magnetizationElectroformed through ~500 µm silicon mold
Future WorkInvestigate the effect of proximity of the wafer features on the topography of the NiFe deposit across the wafer
Debbie G. JonesProf. Al Pisano
MEMS REPS / Soft Magnetic Pole Integration
APP48
600µm
Wankel RotorD=2.4mm H=900µm
Electric Power Generator
Soft Magnetic Pole
Si
SEM photograph of 500 µm thick silicon mold fabricated with
DRIE
Magnified photograph of electroformed NiFe
in silicon mold.
5
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionCharacterize combustion to aid in design of miniature IC engines
Recent ResultsContinued testing indicates three distinct regions of combustionIgnition energy directly controlled and measured during experimentsNew combustion chamber constructed which more closely duplicates engine design
Next Six MonthsTest new combustion chamberImprove data acquisition and control of experiments
Bennett SpragueProfs. Al Pisano, Carlos Fernandez-Pello
Ignition at the Microscale for Miniaturized Internal Combustion Engines
APP67/CFP
0.0
1.0
2.0
3.0
4.0
20 40 60 80 100 120 140 160Temperature (°C)
Pres
sure
(atm
)
Further testing needed
No Ignition
Inconsistent Ignition
Reliable Ignition
Premixed Butane and Air at Φ = 1.0 in 1.6 mm deep channel
Combustion Chamber
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionPart 1: To model the sealing around the apex seals and rotor facesPart 2: Creation of a fuel delivery system with focus on thermofluidsaspects
Recent ResultsExperiment Designed, Manufactured and Nearly CompletePreliminary design of fuel delivery system experiment
Next Six MonthsComplete Sealing ExperimentComplete design of fuel delivery system experimentBegin proof of concept experiments
Josh HeppnerProf. Al Pisano
MEMS Rotary Engine Power System: Engine Seal Modeling/MEMS Fuel Vapor Delivery by Flow Rectification
APP47
Apex
Housing Top
Housing Bottom
Leakage Paths
6
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionImplement a robust apex sealing system capable of high compression and able to withstand manual assembly
Recent ResultsRedesigned mask to reduce effects of aspect ratio dependent etchingFabricated 900µm Si rotors with in-plane cantilever apex seals
Next Six MonthsFurther develop DRIE recipes to acquire smoother and straighter apex profilesTesting of physical models
Fabian C. MartinezProf. Al Pisano
MEMS REPS / Apex Seal Design
APP 46
900 µm rotor
500 µm rotor
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Brenda HaendlerProf. Al Pisano
Project DescriptionStudy phase change of pure hydrocarbon fuels and binary mixtures of fuels in microchannelsDetermine how to hold the flow eruption front steady in one part of the evaporator channel
Recent ResultsDesigned and built a matrix of sudden expansion microchannelsPreliminary phase eruption stabilization results obtained using an external heat source
Next Six MonthsDesigning and building a new set of constant cross-section and sudden expansion microchannels with integrated heatersPreliminary testing of the channels with both pure fluids and binary mixtures
MEMS Rotary Engine Power System/ Engine Fluid Management System
APP45
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D2D1
Sudden expansion geometry
Preliminary phase eruption stabilization results
7
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionThis research aims to develop disposable microbatteries and microvehicles for MEMS/BioMEMS
Recent ResultsDemonstration of Surface Tension Propelled MicroboatsSize: 6 x 11 mm2
Maximum speed: 7.5cm/s
Next Six MonthsImprovement of microboat performance.
Ki Bang Lee and Firas SammouraProf. Liwei Lin
Disposable Microbatteries and Microvehicles for MEMS
LWL12
MicroboatMicroboat
Cellulose filmwith fuel
Velocity Profile of Various Solute Liquids
0
1
2
3
4
5
6
7
8
0 20 40 60 80 100 120 140 160
time [sec]
vel [
cm/s
ec]
Isopropanolchloroform75% acetic acid50% acetic acid25% acetic acid
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
A Micromachined Photosynthetic Fuel CellKien. B. Lam, Prof. Liwei Lin
Project DescriptionHarness algae & plant photosynthetic biosystems to convert light energy into electricityAnode/PEM/cathode fuel cell design
Recent ResultsImplemented flow-through designExtracted spinach sub-cellular thylakoids/photosystems for photo-electrical conversionPreliminary: 200 mV, 3 µA/cm2
Next Six MonthsCharacterizationIncrease open circuit voltageIncrease current density
LWL17
020406080100120140160180200
0 20 40 60
Time (min)
Voltage (mV)
Ambient Light
Direct Illumination
Dark
8
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionMulti-unit project at Berkeley to identify technology to enable domestic electricity users to make more efficient use of electric power. BSAC’s roles involve wireless revenue monitoring, with passive proximity sensing of AC voltage and current (sponsor: CA Energy Comm.)
Recent ResultsPassive proximity sensing of V and I identified; AC operation of Smart Dust motes for sensing and control
Next Six MonthsSensor design, fab, and testAnalyze A/D conversion at RF
Jonathan Foster, Justin BlackProf. Richard White
Proximity Electric Power Sensing for Demand Response Mote
RMW29
SmartDus tMEMS
BS ACS ensors
P icoRa dioLow P owe r
FBAR-MEMS
Tiny-OSFle xibility
S e ns or ne ts
De ma ndRe spons eP la tforms
Thermos ta tsMete rs
e ne rgysca ve nging
SmartDus tMEMS
BS ACS ensors
P icoRa dioLow P owe r
FBAR-MEMS
Tiny-OSFle xibility
S e ns or ne ts
De ma ndRe spons eP la tforms
Thermos ta tsMete rs
e ne rgysca ve nging
magnetic material at end of cantilever
MEMS cantilever with piezo film
Iout Iin
60 Hz AC current
120 Hz output signal
conventional appliance “zip” cord
magnetic material at end of cantilever
MEMS cantilever with piezo film
Iout Iin
60 Hz AC current
120 Hz output signal
conventional appliance “zip” cord
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
AFTERNOON POSTER SESSION
Micro Photonics & Adaptive Optics (5)
9
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionAdd flexibility to PLC devices with MEMS.MEMS switch fabric + AWG.Change of WDM input signal’s physical location → output wavelength reconfiguration.
Central component of Optical add/drop MUX.
Recent ResultsMEMS switches fabricated and testedEarly stage optical testing of system
Next Six MonthsMonolithic integration processingExtension to Photonic Bandgap Xtals
J Provine, Prof. Norman Tien
Integration of PLC with MEMS for Telecommunications
NT20
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Optical Switch Using 2-D Photonic Crystal Waveguides
Project Description:
Photonic Crystal Waveguide (PCW)
MEMS actuated 1xN switch
Aligning central waveguide array completes output pathways
Specific Results Since Last IAB:
Patterning & TransferE-beam Lithography
Single point exposure
Etch TestsSurface bulk-etch method
Direction for the Next 6 Months:
Waveguide fabrication & testing
Air gap coupling
Fabian StrongProf. Norman Tien
Actuated for Output on Ch #1
Not Actuated No Output
Actuated for Output on Ch #2
NT22
2 um
200 nm
10
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Ki Bang Lee Prof. Liwei Lin
Vertically Supported Microactuators
LWL23
Mirror
Hinge
Spring
Vd Va sinωt Substrate
Angle 1: θ Angle 2: φ
Incident light
Reflectedlight
Locking spring
Combsfor torsional motion
xyz
Stationarycomb
Stationarycomb
Scanned Laser
Project DescriptionThis research aims to develop vertically supported microactuators and optical systems on a chip for MEMS and MOEMS applications
Recent ResultsDemonstration of a vertically-supported, two-axial torsional micromirror Fabricated by surface-micromachining process Maximum optical angle: 1.68o at 2kHz
Next Six MonthsVertically-supported lens experiment
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionUsing hydrophobic effects and polymer-jet printing technology, we are developing simple yet reliable methods to fabricate in- and out-of-plane refractive microlenses for micro-optical systems
Recent ResultsFocal Length Range: 0.34 – 7.86 mmFocal Length Repeatability: 1% within chip, 5% from chip-to-chiprms Wavefront Error: /6- /80 ( =635nm) (Measured with Shack-Hartmann Sensor) All the pictures on this slide are taken through our microlens (w/o AR coating).
Next Six MonthsDevelop more optical characterization tools for microlenses.Demonstrate microlenses in an optical MEMS sensor.
Hyuck ChooProf. Richard S. Muller
3-D Refractive Microlenses and Lenslets
RSM33
11
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project Descriptionmaximizing the tunability of focal length or field of view (FOV) for stereoendoscopyminimizing optical aberrations
Recent ResultsDesign, fabrication and characterization of the microlensSeveral hundreds microns to infinity in positive and negative focal lengthLow operation pressure
Next Six MonthsCharacterization for optical aberrationCharacterization of various filling mediaIntegration at system level.
Ki-Hun JeongLuke P. Lee
Tunable Microdoublet Lens Array
LPL25
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Your artwork here, delete line around artwork after inserting. One or two pictures work just fine.
Photo of main
researcher
Elastomer microcavity for microdoublet lens
Variable curvature
Fixed curvature
10µm
-4
-3
-2
-1
0
1
2
3
4
-10 -5 0 5 10
Applied pressure (kPa)
Foca
l len
gth
(mm
)
DI water(n=1.33)Oil (n=1.52)
-4
-3
-2
-1
0
1
2
3
4
-10 -5 0 5 10
Applied pressure (kPa)
Foca
l len
gth
(mm
)
DI water(n=1.33)Oil (n=1.52)
ConvergingDiverging
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
AFTERNOON POSTER SESSION
CAD (3)
12
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
David Bindel, Jason Clark, David Garmire, Shyam Lakshmin, Jiawang NieProfs. Alice Agogino, Zhaojun Bai, James Demmel, Sanjay Govindjee, Kris Pister
Sugar
KSJP15
Project DescriptionGoal: SPICE for MEMSFast system-level simulationComparison to measurement
Recent ResultsNew circuits elements display with mechanicsVisual comparison to simulationInterface to FEA code (FEAP)
Next Six MonthsAutomate comparisonsFinish SUGAR 3.5Simple GUI
Circuits and structure now display together.
Mode1 of a 10,000 degree-of-freedom mirror.
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Raffi KamalianProfs. Alice Agogino, Jim Demmel, Kris Pister
Project DescriptionCreate useful design synthesis tools for MEMS.Develop rapid, optimal configurations for a given set of performance and constraint guidelines.
Recent ResultsAdded interactive human-evaluated evolution extension
Improves manufacturabilityAvoids non-simulatable design concerns
Fabbed Poly-MUMPS test devicesNext Six Months
Evaluate human evolution extension performanceApply synthesis tools to area minimization applicationsFab and characterize test devices
MEMS Synthesis Using Stochastic Optimization
KSJP27/JD
13
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Jason Vaughn ClarkProfs. James Demmel, Sanjay Govindjee, Kris Pister
Measuring Fundamental Properties of MEMS - ωAC
KSJP30/JD
Project DescriptionMeasure MEMS properties electronicallyUse minimal chip areaObtain many properties Characterize fabrication vs layoutCharacterize measurement vs simulation
Recent ResultsFabricated test structures (TS)Developed analysis techniquesLearned the Computer MicroVision System
Next Six MonthsTest with electronic probingVerify with Computer MicroVision SystemUse results in models to predict other TS
Measure frequencies and amplitudes. Obtain…
Young’s modulus Over/under etchBeam width DensityMass Quality factorStiffness LengthDamping Damped frequencyGap spacing Exponential constant
Excitation by viscosity/rarefaction.
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
AFTERNOON POSTER SESSION
BioMEMS and Micro Fluidics (32)
14
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
New fabrication technologyBased on biomineralization processDiatoms create SiO2 nano-structures at ambient conditionsCreated engineered 3-D structures with small features by controlling these processes
Recent ResultsExtracted protein from diatomsDesigned device for emulsion investigations
Next Six MonthsPurify proteinInvestigate behavior of the relevant protein in emulsions
William J. HoltzProfs. Roger Howe and Jay Keasling
Biomimetic Nanofabrication of Silica Structures Based on Diatoms
RTH/JDK2
Examples of diatom features
~50um
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionStorage/Accumulation of working fluid via surface energy using hydrophobic microcapillaries.Working to increase device lifetime
Recent ResultsFabricated with SAMs long-term stability not achievedFabricated with Vapor SAMs long-term stability not achievedHydrophobic surfaces are heavily dependent on underlying surface roughness & Plasma Polymerized Fluorocarbons have rotating bonds
Next Six MonthsFab. device with SAMs on smooth surfaces to mitigate contact angle Hysteresis
Eric HobbsProfs. Al Pisano, Liwei Lin
Capillary Action Accumulation Device
APP41
Photo of main researcher
15
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionDesign a low-power, low-leak microvalve suitable for wearable microfluidic devices.
Recent Results“Hole-in-the-wall” process solidifiedThird-generation gate valves fabricated
Next Six MonthsTesting
Jeremy FrankProfs. Al Pisano and Liwei Lin
Low-Power, Low-Leakage Microvalve
APP42
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionCharacterization of Small Scale Flow in NanochannelsChannel Height: 100nm, Width: 29µm
Recent ResultsChannels Fabricated (Sandia National Laboratories, New Mexico)Interfacing Manifold Designed
Next Six MonthsFabricate Pyrex ManifoldMeasure Streaming Current Under Constant Pressure, Varying Zeta Potential and Ionic StrengthUse Measurements to Deduce Flow Characteristics
Troy Lionberger, Boris StoeberProfs. Dorian Liepmann, Luke Lee
Fluid Dynamics in Nanoscale Environments
DL12
Troy Lionberger
Inlet
Outlet
?Velocity
PressureSensor
q
Hydrostatic Column (Large Reservoir)
Fg
NanochannelWaste
Microscope
Streaming Potential(Current Feedback
Measured)
Height
WidthLength
Relative Channel Axes
16
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionCharacterize λ-DNA flow through a variety of microfluidic geometries
Recent ResultsQuantified pressure drops through abrupt planar contraction geometry for water and dilute DNA solutions
Next Six MonthsExplore pressure drop behavior for high concentration DNA solutionsUse DPIV to quantify velocity profiles for contraction flows of varying DNA concentrations
Shelly GulatiProf. Dorian Liepmann
Biological Fluid Flow in MEMS
DL5
Channel centerline elongational force
Channel wall shear force
50µm
A
G
FEB
CD Flow
5µm
DNA stretching and relaxing through a micro-checkvalve
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionVascular Occlusion Detection using data obtained from the study of Sickle Cell Rheologyin Microchannels.
Recent ResultsFabricated masks and obtained qualification on relevant Microlab processing machinery.Finalized fabrication process flow.Began fabrication of the MicroarterioleBifurcation in Silicon and Pyrex.Located an appropriate pressure transducer, as well as, inlet and outlet fluidic connectors.Acquired Sickle Cell Blood for the microchannelflow experiments.
Next Six MonthsCalibrate device using microsphere seeded water.Perform experiments using Sickle Cell BloodModify the device or experiment where needed
Jennifer Simone WadeProfs. Al Pisano , Liwei Lin, Dorian Liepmann
Sickle-Cell Anemia Event Detection Sensor
APP63
Arteriole Bifurcation
Outlets
Inlets
Circular Channels of Varying Diameter
17
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
300
305
310
315
320
325
330
335
340
0.0E
+00
1.0E
-04
2.0E
-04
3.0E
-04
4.0E
-04
5.0E
-04
6.0E
-04
7.0E
-04
8.0E
-04
9.0E
-04
1.0E
-03
Time (sec)
Tem
pera
ture
(K)
Project DescriptionTo develop a 2-D micro-fluidic laser heat model with a square cross-section using CFDRCVerify numerically, analytically, and experimentally
Recent ResultsWorkable laser heat modelVerification of simulation data
Next Six MonthsExtend to 3-D modelComplete verification of 2-D model resultsComplete research
Simulation of Micro-Fluidic Laser HeatingUtilizing CFDRC
DL14
Temp. vs. Time at 10 um
(■) analytical calculations
(●) CFDRC simulation data.
David MunProf. Dorian Liepmann
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionHigh speed valve actuation based on heat-induced gel formation of triblockcopolymers (Poloxamers)
Recent ResultsCharacterization of PoloxamersIntegration of heaters and pressure sensors in microchannelsFast valve actuation (33 ms) using integrated heaters
Next Six MonthsInvestigate valve dynamics with DPIV and with integrated pressure sensorsDemonstrate micromixing
Boris StoeberProfs. Dorian Liepmann, Susan J. Muller
Microflow Control using Thermally Responsive Triblock Copolymers
DL11
18
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionPlanar micropumputilizing two in-plane flap valves and thermopneumaticactuation
Recent ResultsFluidic-resistance ratio of the valves is greater than 1300.Maximum pressure of 6.5 kPa and maximum flow rate of 5 uL/min at 132 mW.
Next Six MonthsIntegration of the micropump into a micromixer
Jeremy Frank and Stefan ZimmermannProfs. Dorian Liepmann and Al Pisano
A Planar Micropump Utilizing ThermopneumaticActuation and In-Plane Flap Valves
DL15/APP
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Stefan Zimmermann, Boris Stoeber and Doerte FienborkProfs. Dorian Liepmann
Microneedle-based Minimally Invasive Continuous Glucose Monitor
DL/LWL 1
SEM image of 270 µm long out-of-plane
microneedles
Project DescriptionSystem components:- Out-of-plane microneedles- Integrated enzyme-based
glucose sensor- Dialysis membrane
Recent ResultsSensor integrationSampling of interstitial fluid and capillary blood through out-of-plane microneedles
Next Six MonthsDesign of sharper microneedles
19
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionEnzymatic glucose sensor based on redox-induced conductivity change of PPy-MWNT nanocomposite.
Recent ResultsConductivity increases proportationally with glucose concentration.PPy-MWNT has larger detection range than than PPy alone.
Next Six MonthsCharacterization of nanocompositewith respect to: 1. MWNT concentration2. GOx concentrationCorrelate sensor performance with amperometric method
Kwok-Siong TehProf. Liwei Lin
An Integrated Polypyrrole-Carbon Nanotube (PPy-MWNT) Nanocomposite Glucose Sensor
LWL10
Pt Electrode
GOx
PPy-MWNT
1
1.02
1.04
1.06
1.08
1.1
0 5 10 15 20
PPy PPy-MWNT
Glucose Concentration [mM]
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionHuman in vitro and in vivo testing of microneedle arrays that have been mounted to a traditional plastic syringe
Recent ResultsInjection of dye suspension into human cadaver skinTen-fold increase in response time for microneedle vs. topical drug application in human volunteer
Next Six MonthsExpansion of testing to include more human subjectsConfocal microscopy of injections in cadaver skin
Raja Sivamani and Boris StoeberProfs. Dorian Liepmann and Howard Maibach
Human Testing of MEMS Syringes
DL10
Microneedles Syringe
20
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Poorya SabounchiProf. Luke P. Lee
Project DescriptionUltra-sensitive micro-calorimeter for applications of high throughput drug screening and metabolite sensing
Recent ResultsLiterature Survey Mask layout
Next Six MonthsMicrofabrication of thermopile array on the nitride membraneInitial Test for Sensor response and sensor characterization
Ultra-sensitive Micro-Calorimeter for High Throughput Drug screening
LPL31
Figure 1: Schematics of the layout of the micro-calorimeter
Si
CVD oxide Silicon nitride
n-doped poly-Sip-doped poly-Si
Photo resist Hydrophobic layer
Figure 2: Schematics of the cross-section view of the micro-calorimeter
Hot Junction
Heater
Reference Junction
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionDevelop osmotic, fluidic driving sources with various flow rates and high pressure for integrated bioassay systems
Recent ResultsPerformance characterizationDesign optimizationProcess optimization
Next Six MonthsSystem integrationSystem characterizationSystem optimization
Yu-Chuan SuProf. Liwei Lin
Water-Powered Microfluidic Devices for Diagnostic and Drug Delivery Systems
LWL7
PDMS substrate
Semipermeable membrane
Actuation membrane
Liquid channel
Intermediate layer
Cellulose acetate structure
Compartment for osmotic salt
Drug reservoir
Drug flow
Water flow
Membrane expansion
Delivery channel
Drug reservoir
Impermeable membrane
Osmotic driving agent
Semipermeable membrane
Structural layer
Delivery port
PDMS microfluidic components
Osmotic microactuator
21
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionDevelopment of a polymer-based actuators that can operate inside microfluidic systems
Recent ResultsDevelopment of a polymer-based microgripper
Next Six MonthsDevelopment of 3 DOF polymer-based microrobotic system for single cell manipulation
Nikolas ChronisProf. Luke Lee
Integrated Polymer Actuators in MicrofluidicSystems
LPL11
Cold armHot arm
Cell holder
Cr/Au
650
100
SU-8
c. Cell holder
Two ‘hot and cold arm’ actuators
8 µm
a. Cr/Au layer
Cold arm (Cr/Au)
b. SU-8 layer
Hot arm (SU-8)
Cold arm (SU-8)
Hot arm (Cr/Au) Gripper Arms
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionHigh throughput patch clampingHigh quality patch clamping Low-cost device fabrication
Recent ResultsPDMS device fabricationWell-controllable fluidic connection Cell trapping
Next Six MonthsSetting experimental set-upsGetting high sealing resistanceReducing noise levels
Jeonggi SeoProf. Luke P. Lee
Disposable Multi Patch Clamps Using Planar Fluidic Channels
LPL32
Planar Patch clamp
Cell loading reservoir
Cell flow
Cell trapping
Planar Patch clamp
Planar Patch clamp
Cell loading reservoir
Cell flow
Cell trapping
Planar Patch clamp
Cell trapping for patch clamping
22
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionDevelopment of MEMS laser scanning confocalmicroscope for micro TAS
Recent ResultsCompleted MEMS lens scanning confocalmicroscope
Next Six MonthsWrite up and graduate
Sunghoon KwonProf. Luke Lee
Vertically-Integrated Micro Confocal Imaging Array
LPL13
MEMS lens scanning confocal microscope
Objective lensScannersPinholePupil
2 mm
15 um
Reconstructed image of BSAC logo
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionMEMS Biomimetic Vision SystemCompact polymeric non-planar imagerTunable omni-directional imaging
Recent ResultsSystem modelingOptical simulationMacro-scale prototyping
Next Six MonthsBatch integration of photosensors on polymer membranePolymeric imager interfacing electronicsOptical characterization
Gang L. Liu, J. Paul Hung, and Ki-Hun JeongProf. Luke P. Lee
Bio-inspired Optical Imaging and Sensing System
LPL21
Photo of main
researcher
i R m
Ro
Lr
i R m
Ro
i R m
Ro
Lr
23
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionBiomimetic Compound EyeOmnidirectional Optical Sensor
Recent ResultsPolymer membrane fabricationThin silicon membrane on polymer
Next Six MonthsPhotodetector array on polymer membraneRaw image acquired by BIOS
Paul Hung, Gang L. LiuProf. Luke P. Lee
Biomimetic Imager as Omnidirectional Sensor (BIOS)
LPL27
Photodetector with microlens
Pneumatic pumping to inflate the polymer
Contact pad for column-row
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionEndoscopic MEMS-based OCT system for “optical biopsy”
Recent Results500µm x 500µm scanning mirrors optimized for OCT with fr between 1kHz and 10kHz
Next Six MonthsEndoscope packagingEndoscope system characterization at the Beckman Laser Institute
Daniel T. McCormickProf. Norman Tien
Minimally Invasive MEMS Based Optical Coherence Tomography for in-vivo Imaging
NT12
24
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Kurt Kramer, Luis SisonProf. Luke Lee
Project DescriptionCharacterize electrical properties of nanogap junctions Detect biomolecular interactions in situ using capacitor as a sensor
Recent ResultsStudies of electrolytes, 2 nm gold nano-particles in solutionSingle stranded DNA detection
Next Six MonthsFinish electrical characterizationDemonstrate DNA hybridization detectionStudy other biomolecular phenomena (e.g., protein digestion)
Dielectric Spectroscopy of Biomaterials Using Nanogap Junction Capacitors
LPL20
Quartz substrateQuartz substrate
n+ Poly-Si(II)(II)
LTO
n+ Poly-Si (I)
100 101 102 103 104 1050
1
2
3
4
5
6x 10-9
Freq (Hz)
ssDNA in Nanogap
Cap
acita
nce
(F)
DI0.01 mg/ml0.02 mg/ml0.04 mg/ml0.08 mg/ml0.1 mg/ml0.2 mg/ml
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.LPL22
Yang-Kyu ChoiProf. Luke Lee
Electronic Properties of DNA for Bioelectronics
Project Description
Recent Results
Next 6 Months
• Investigation of electronic properties ofstraight DNA chain and demonstration ofDNA device.
• Straightening DNA by nanogap structures.• Sub-8nm nanogap fabrication by spacer
lithography. • Metal nanogap field effect transistors • Biomolecule detection
• Demonstration of DNA devices by using semiconductor behavior.
• Detection of protein adsorption.• Metal nanogap device fabrication by
electromigration.• New proposal for metal nanogap field effect
transistor
103 104 105 1060
100
200
300
400
500
600
Nor
mai
lized
Cap
acita
nce
[pF/
Sq.]
Frequency [Hz]
Lyz_low Lyz_high Fib_low Fib_high BSA_low BSA_high
Mo Mo Mo Mo
300nm
Mo Mo Mo Mo
300nm
i-line resist
i-line resistE-beam resist
20nm Feature
i-line resist
i-line resistE-beam resist
20nm Feature
Si Si
SiNSi
100nm
Au
N+ Si
Au
N+ Si (Gate)SiO2 SiO2
Ge Source Drain
(FET)Au
N+ Si
Au
N+ Si (Gate)SiO2 SiO2
Ge Source Drain
(FET)
Detection of protein detection
Mo electrodes by electromigration
DNA FET
Dual resist process
25
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Mingqiang YiProf. Luke P. Lee
Theoretical Study of Nanogap Junction Measurement: Electrode Polarization and Dielectrophoretic Motion of DNA
LPL23
Project DescriptionStudy the ion distribution and electrical field within a nanogap filled with electrolytes
Recent ResultsObtained the electrical field and effective permittivity within the nanogap by solving Poisson-Boltamann equationCompared the analytical solution with measurements in a 22nm gap
Next Six MonthsDetection of target molecules in electrolytes by nanogap sensor
LL
Electrode I
κ-1κ-1
5 nm - 100 nm Electrode II
Diffuse layerElectrodes
0
0.5
1
1.5
2
2.5
3
3.5
0
1
2
3
4
5
6
0.0 2.0 4.0
κ L
εε e
Φ
κ L=0.1, 0.5, 1, 2, 5
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionBatch fabrication nanopillarGeometry controlSERS detection of biomolecules
Recent ResultsConformal silver depositionHigher enhancement factorDetection of Rhodamine6G
Next Six MonthsMultiplexed biomolecule recognitionIntegration with microfluidics
Gang L. Liu, Yang-Kyu Choi, and Sunghoon KwonProf. Luke P. Lee
Nanopillar Substrate for Surface-Enhanced Raman Spectroscopy
LPL18
Your artwork here, delete line around artwork after inserting. One or two pictures work just fine.
Your artwork here, delete line around artwork after inserting. One or two pictures work just fine.
Photo of main
researcher
10 00 11 0 0 1 20 0 1 3 00 14 00 15 0 0 1 6 00 17 00
2 00
4 00
6 00
8 00
1 0 00
1 2 00
Inte
nsity
[a.u
.]
R am a n sh i ft [c m -1 ]
A g o n si li co n 3 s cc m O 2 , 5 0 n m A g 4 s cc m O 2 , 5 0 n m A g 6 s cc m O 2 , 5 0 n m A g 8 s cc m O 2 , 5 0 n m A g 1 0 s cc m O 2, 5 0 n m A g
11831309
136015081579
1646
10 00 11 0 0 1 20 0 1 3 00 14 00 15 0 0 1 6 00 17 00
2 00
4 00
6 00
8 00
1 0 00
1 2 00
Inte
nsity
[a.u
.]
R am a n sh i ft [c m -1 ]
A g o n si li co n 3 s cc m O 2 , 5 0 n m A g 4 s cc m O 2 , 5 0 n m A g 6 s cc m O 2 , 5 0 n m A g 8 s cc m O 2 , 5 0 n m A g 1 0 s cc m O 2, 5 0 n m A g
11831309
136015081579
1646
10 00 11 0 0 1 20 0 1 3 00 14 00 15 0 0 1 6 00 17 00
2 00
4 00
6 00
8 00
1 0 00
1 2 00
Inte
nsity
[a.u
.]
R am a n sh i ft [c m -1 ]
A g o n si li co n 3 s cc m O 2 , 5 0 n m A g 4 s cc m O 2 , 5 0 n m A g 6 s cc m O 2 , 5 0 n m A g 8 s cc m O 2 , 5 0 n m A g 1 0 s cc m O 2, 5 0 n m A g
11831309
136015081579
1646
26
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionImmuno-activity detection Real-time on-site diagnosisParallel assay
Recent ResultsFlip-chip mount for easy handlingWireless chip feeding/controlImprovement of mod/demod scheme
Next Six MonthsTotal wireless link with chipMobile test bed systemEnhancement of the accuracy
Tugut-Sefket Aytur, Tomohiro IshikawaProfs. P. Robert Beatty, Bernhard Boser
Immuno-sensor
BEB17
Photo of main
researcher
A DA
Hall sensor
C
antibody
beadBB
antigenHXY
BZ
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionDesign and Fabrication of nanoscale probe for organelles in biological cell.Fabrication of nanowire tip by nano imprinting technologyInvestigation of the effect of RF magnetic field on biological cells.
Recent ResultsDevelopment of protocol for culturing biological cells on SiO2, Si3N4, Si, poly-Si, Al, and parylene surfaces.Designing of static magnetic field source.Cell membrane electric potential measurement.
Next Six MonthsFabrication of static magnetic field source.Designing MEMS microneedlesLearning nanoimprinting technology for nanowire fabrication.
Seung-Jae MoonProf. Al Pisano
Nanoscale RF Probing of Cells
APP65
Resonator Array
Magnetically Tagged Cell
200 nm
Macro probe station
Mitochondria
Magnetic Fields Columns
MEMS micro needleSilicon nanowire or carbon nanotube
Probe fork
Insulator material(SiO2 or Si3N4)
Metal conductor
Center MEMS microneedle
Silicon nanowireor carbon nanotube
Phospholipidcell membrane
27
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionApplication of nanoprobes for detection of cell-substrate interactions
Recent ResultsGold nanopatterns capable of being generatedSAM of biomolecules on gold substrateExperience in confocal microscopy of biological samples
Next Six MonthsObtain functional gold nanopatterneddeviceObserve living cells on device with confocal or TIR microscopyView effect of manipulation on cell response and molecular signalling
Philip J. LeeProf. Luke P. Lee
Nanoprobes for Monitoring Sub-cellular Response to Localized Surface Interactions
LPL29
Fluorescent emission Gold nanopattern
TIR Beam
Schematic diagram of local analysis of a single cell.
Use of total internal reflection (TIR) spectroscopy to analyze a nanopatterned array.
Gold nanopatternGrowing actin or
microtubuleFibroblast
cell
Adhesion site
Intracellular signaling moleculeHeat generation
by laser
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionMiniaturized reagentless sample preparation for bio-warfare detection / laboratory automation.
Recent ResultsMeasured greater than 2X increased lysis with nanostructured filters as compared with smooth-walled filters at 300 µL/min flow rate.
Next Six MonthsProject on hold (more funding and another student required for future work).
Dino Di CarloProf. Luke P. Lee
Microfluidic Cellular Manipulation for Sample Preparation Microsystems
LPL5
Flow Rate / µL min-1
Frac
tion
Free
Hem
oglo
bin
-0.01
0
0.01
0.02
0.03
0.04
0.05
0.06
0.07
0.08
0.09
0.1
0 50 100 150 200 250 300 350
lysis with nano-knives
lysis with smooth walls
-0.01
0
0.01
0.02
0.03
0.04
0.05
0.06
0.07
0.08
0 50 100 150 200 250 300 350
lysis with nano-knives
lysis with smooth walls
Flow Rate / µL min-1
Frac
tion
Free
Pro
tein
(a)
(b)
28
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project Description:Understanding Kinematics in Insect FlightSimultaneous Measurement of Multidirectional Forces using Doped Poly Strain Gauges
Recent ResultsFirst Generation Sensor Fabricated and TestedSecond Generation Sensor Fabrication in ProgressSensor Holder / Connector Designed
Next Six MonthsComplete Fabrication of Second Generation SensorInitial Test for Sensor Response and Sensor CharacterizationUse Sensors with Live Flies inside the Fly Arena
Mansoor Nasir, Kenneth Pettigrew, Boris Stoeber Prof. Dorian Liepmann
Multidirectional Force and Torque Sensor for Study of Small Scale Biomechanics
Sensor Design
Device Cross-section DL13
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionMicrofluidic device for 2D protein separationSeparate proteins by charge and size
Recent ResultsPDMS 1D separation chip fabricationIsoelectric focusing characterization
Next Six MonthsElectrokinetic focusing proof of conceptProtocol developmentIncorporate polymer monolith
Paul HungLuke P. Lee
Microfluidic-Based Two-Dimensional Protein Chip
LPL28
GND
+10V
Electric Field Lines
IEF Channel
LC Channel
GND
+10V
Electric Field Lines
IEF Channel
LC Channel
+10V
Electric Field Lines
IEF Channel
LC Channel
5mm
Sample inlet (protein standards or cell lysates)
Inert electrodes to control electrokinetic
29
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionMicro Air Particulate Sizer and Counter.Uses Corona Charging.For PM2.5 and below
Recent ResultsSuccessfully tested microfabricated corona ionizer.150mW or less and current > 40uA for single cathode .Operate with single or dual cathodes.
Next Six MonthsMore extensive study on the particulate charging and separation mechanisms.
Beelee Chua, Zhihong LiProf Norman Tien
Corona MEMS for Wide Study Area Air Particulate Monitoring
NT21
Figure 1: Top view photoprint of ionizer in operation.
Cathode Anode Grid
Corona Plasma Region
Drift Region
1mm
Figure 2: Measured corona current-voltage (I-V) curves for ionizer devices with different electrode gaps.
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
Project DescriptionResearch on portable, compact moni-tor for airborne particles employing MEMS sensors and LBNL monitor principles (thermophoretic deposition, acoustic mass measurement)Sponsor: Calif. Air Resources Bd.BSAC (prime), LBNL (subcontractor)
Recent ResultsLBNL has demonstrated concept with deposition means and quartz crystal microbalance. Can quantitate mass and discriminate particles optically.
Next Six MonthsComplete design and fab of thin-film resonators/oscillator
Justin P. BlackProf. Richard White
Portable Monitor for Airborne Particulates
RMW28
piezoelectric film
Substrate
λ/4 reflector
30
BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.
We will now recess to begin the
AFTERNOON POSTER SESSION
Return at 4:15 P.M.