air slide table series mxq - smc pneumatics · integration of the guide rail and the table. ......

46
Functional option Adjuster option Symmetric type Integration of the guide rail and the table. Uses a recirculating linear guide for high rigidity and high precision. Air slide table for precision assembly processes. Body mounting taps High precision, compact design Improved load resistance Load resistance against sudden and excessive external forces is nearly three times greater than Series MXS. Symmetric type is also standardized. Available for all option Positioning hole Workpiece mounting taps Improved strength Dual rods Integrating table with guide rail Recirculating linear guide Wide Variety of Option Positioning hole As Z-axis for picking and placing Auto switch mounting groove Body mounting through-hole Wide variety of adjuster option Application Example For positioning of pallets on a conveyor Adjuster option and function option can be combined Twice the output of conventional cylinders End plate uses extra super duralumin. (Except the one with buffer) Made of martensitic stainless steel 2. Lateral mounting (Body through-hole) 3. Vertical mounting (Body tapped) Model MXQ12-30 MXS12-30 Repeatability Dimensions Parallelism 0.035 0.2 Height tolerance ±0.08 ±0.2 Width 46 50 Height 30 32 Overall length 86 80 Comparison of MXQ and MXS (mm) Mounting is possible from 3 directions. 1. Lateral mounting (Body tapped) With stroke adjuster With buffer mechanism With end lock Axial piping type With shock absorber Air Slide Table Series MXQ ø6, ø8, ø12, ø16, ø20, ø25 Improved workpiece mounting repeatability Auto switches can be mounted in grooves provided on the side of the body where they do not protrude. Reproducibility for mounting on the body has been improved. Wide type linear guide block body made of martensitic stainless steel 8-5-1 MX MTS MY CY MG CX D- -X 20- Data 1

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Functional optionAdjuster optionSymmetric type

Integration of the guide rail and the table.Uses a recirculating linear guide forhigh rigidity and high precision.Air slide table for precision assembly processes.

Body mounting taps

High precision, compact design Improved load resistanceLoad resistance against sudden and excessive external forces is nearly three times greater than Series MXS.

Symmetric type isalso standardized.Available for all option

Positioning hole

Workpiece mountingtaps

Improved strength

Dual rods

Integrating table with guide rail

Recirculating linear guide

Wide Variety of Option

Positioning hole

As Z-axis for pickingand placing

Auto switch mounting groove

Body mounting through-hole

Wide variety of adjuster option

Application Example

For positioning of pallets on a conveyor

Adjuster option and function option can be combined

Twice the output of conventional cylinders

End plate uses extra super duralumin.(Except the one with buffer)

Made of martensitic stainless steel

2. Lateral mounting (Body through-hole)

3. Vertical mounting (Body tapped)

Model

MXQ12-30MXS12-30

Repeatability Dimensions

Parallelism

0.035

0.2

Height tolerance

±0.08

±0.2

Width

46

50

Height

30

32

Overall length

86

80

Comparison of MXQ and MXS (mm)

Mounting is possible from 3 directions.

1. Lateral mounting (Body tapped)

With stroke adjuster With buffer mechanism

With end lock

Axial piping type

With shock absorber

Air Slide Table

Series MXQø6, ø8, ø12, ø16, ø20, ø25

Improved workpiece mounting repeatability Auto switches can be mounted in grooves

provided on the side of the body where they do not protrude.

Reproducibility for mounting on the body has been improved.

Wide type linear guide block body made of martensitic stainless steel

8-5-1

MX�

MTS

MY�

CY�

MG�

CX�

D-

-X

20-

Data

1

8-5-2

Series MXQ2

Functional OptionAdjuster Option

With Buffer Mechanism With End Lock

Axial Piping TypeApplication Example

Buffer mechanism in operational condition

Normal condition

NG

Air gripper

Workpiece

Buffermechanism

Series Variations

Adjuster at extension end Retraction end adjuster

Auto switchNormally OFF ∗ON is buffer in operation.

Auto switch

Magnet

Magnet

( )

Normally ON∗OFF is buffer in operation.( )

Bufferstroke

Locked

� Rubber stopperStandard stroke adjuster

� Shock absorberFor use in harsh conditions.Absorbs the impact at the stroke end forsmooth stopping. Improved stopping accuracy.

� Metal stopperImproved stopping accuracy.Without cushioning function for use with light loads and low speeds.

MXQ6L

MXQ8L

MXQ12L

MXQ16L

MXQ20L

MXQ25L

MXQ6

MXQ8

MXQ12

MXQ16

MXQ20

MXQ25

Standard type Symmetric type

Model

10 20 30 40 50 75 100 125 150

Ext

ensi

onen

dR

etra

ctio

n en

dBo

th e

nds

Ext

ensi

onen

dR

etra

ctio

nen

dBo

th e

nds

Ext

ensi

onen

dR

etra

ctio

nen

dBo

th e

nds

With

buf

fer

With

end l

ock

Axi

alpi

ping

typeRubber

stopperShock

absorberMetal

stopper

Adjuster optionStandard stroke (mm)

Functional option

Auto switchBore size(mm)

Reed switch• D-A9�• D-A9�VSolid state switch• D-M9�• D-M9�V2-color indication solid state• D-F9�W• D-F9�WV

6

8

12

16

20

25

Lock pistonSpring

Unlocked

Cylinder airsupply port

Speed controller

Three different types of adjusting bolt have been standardized for front end rear and double end adjusters and cushion mechanisms.

� Protects workpieces and tools, etc., by eliminating impact at the end of the extension stroke.

� Buffer unit is auto switch capable.

� Holds the cylinder’s home position to prevent dropping of the workpiece even if the air supply is cut off.

� Centralized piping in axial direction to maintain clear space around the body.

∗ The normally ON/OFF setting is changed by changing the direction of the auto switch mounting.

In workpiece insertion processes when there is a problem such as faulty positioning, the buffer mechanism absorbs the shock from the workpiece impact to prevent damage.

8-5-3

Air Slide Table Series MXQ

MX�

MTS

MY�

CY�

MG�

CX�

D-

-X

20-

Data

3

Mounting

Series MXQSpecific Product Precautions 2Be sure to read before handling.

1. Do not use in the environment, where the product could be exposed to the liquid such as cutting oil, etc.Using in the environment where the product could be exposed to cutting oil, coolant or oil, etc. could result in looseness, increased operating resistance, or air leakage, etc.

2. Do not use in the environment, where the product could be exposed directly to the foreign matters such as powder dust, blown dust, cutting chip, spatter etc.This could result in looseness and increased operating resistance, and air leakage, etc.Please consult with SMC regarding use in this kind of environment.

3. Do not use in direct sunlight.4. When there are heat sources in

the surrounding area, block off them.When there are heat sources in the surrounding area, radiated heat may cause the product’s temperature to rise and exceed the operating temperature range. Block off the heat with a cover, etc.

5. Do not subject it to excessive vibration and/or impact.Please consult with SMC regarding use in this kind of environment, as this can cause damage and malfunction.

6. Use caution for the anti-corrosiveness of linear guide section.Martensitic stainless steel is used for the rail and guide block. But, use caution that anti-corrosiveness is inferior to the austenitic stainless steel. Especially, rust may be generated in an environment where waterdrops are likely to adhere due to condensation, etc.

Operating Environment

Caution CautionCaution

Model

MXQ6MXQ8MXQ12MXQ16MXQ20MXQ25

Bolt

M3 x 0.5M4 x 0.7M5 x 0.8M6 x 1M6 x 1

M8 x 1.25

Maximum tightening torque (N·m)

0.92.14.47.47.4

18.0

Maximum screw-in depth l (mm)

568

101315

1. Front Mounting

Model

MXQ6MXQ8MXQ12MXQ16MXQ20MXQ25

Bolt

M3 x 0.5M3 x 0.5M4 x 0.7M5 x 0.8M5 x 0.8M6 x 1

Maximum tightening torque (N·m)

1.21.22.85.75.7

10.0

Maximum screw-in depth l (mm)

44.8679.5

11.5

2. Top Mounting

1. Do not replace with the bolt other than the original adjusting bolt.This could result in looseness and damage due to impact forces, etc.

2. Follow the table for tightening torque of shock absorber lock nuts.Insufficient torque will cause a decrease in the positioning accuracy.

ModelMXQ6MXQ8MXQ12MXQ16MXQ20MXQ25

Tightening torque (N·m)3.05.0

12.525.043.069.0

Caution for Adjuster OptionStroke Adjuster

l

Guide block

l

3. When stroke adjuster is adjusted, do not hit the table with the wrench.This could result in looseness.

1. The positioning hole on the table and the positioning hole at the bottom of the body do not have the same center. Use these holes during reinstallation after the table has been removed for the maintenance of an identical product.

To prevent the workpiece holding bolts from touching the end plate, use bolts that are 0.5 mm or more shorter than the maximum screw-in depth. If long bolts are used, they can touch the end plate and cause malfunction, etc.

To prevent the workpiece holding bolts from touching the guide block, use bolts that are 0.5 mm or more shorter than the maximum screw-in depth. If long bolts are used, they can touch the guide block and cause malfunction, etc.

Caution

Caution

8-5-4

4

Mounting

Series MXQSpecific Product Precautions 2Be sure to read before handling.

1. Do not use in the environment, where the product could be exposed to the liquid such as cutting oil, etc.Using in the environment where the product could be exposed to cutting oil, coolant or oil, etc. could result in looseness, increased operating resistance, or air leakage, etc.

2. Do not use in the environment, where the product could be exposed directly to the foreign matters such as powder dust, blown dust, cutting chip, spatter etc.This could result in looseness and increased operating resistance, and air leakage, etc.Please consult with SMC regarding use in this kind of environment.

3. Do not use in direct sunlight.4. When there are heat sources in

the surrounding area, block off them.When there are heat sources in the surrounding area, radiated heat may cause the product’s temperature to rise and exceed the operating temperature range. Block off the heat with a cover, etc.

5. Do not subject it to excessive vibration and/or impact.Please consult with SMC regarding use in this kind of environment, as this can cause damage and malfunction.

6. Use caution for the anti-corrosiveness of linear guide section.Martensitic stainless steel is used for the rail and guide block. But, use caution that anti-corrosiveness is inferior to the austenitic stainless steel. Especially, rust may be generated in an environment where waterdrops are likely to adhere due to condensation, etc.

Operating Environment

Caution CautionCaution

Model

MXQ6MXQ8MXQ12MXQ16MXQ20MXQ25

Bolt

M3 x 0.5M4 x 0.7M5 x 0.8M6 x 1M6 x 1

M8 x 1.25

Maximum tightening torque (N·m)

0.92.14.47.47.4

18.0

Maximum screw-in depth l (mm)

568

101315

1. Front Mounting

Model

MXQ6MXQ8MXQ12MXQ16MXQ20MXQ25

Bolt

M3 x 0.5M3 x 0.5M4 x 0.7M5 x 0.8M5 x 0.8M6 x 1

Maximum tightening torque (N·m)

1.21.22.85.75.7

10.0

Maximum screw-in depth l (mm)

44.8679.5

11.5

2. Top Mounting

1. Do not replace with the bolt other than the original adjusting bolt.This could result in looseness and damage due to impact forces, etc.

2. Follow the table for tightening torque of shock absorber lock nuts.Insufficient torque will cause a decrease in the positioning accuracy.

ModelMXQ6MXQ8MXQ12MXQ16MXQ20MXQ25

Tightening torque (N·m)3.05.0

12.525.043.069.0

Caution for Adjuster OptionStroke Adjuster

l

Guide block

l

3. When stroke adjuster is adjusted, do not hit the table with the wrench.This could result in looseness.

1. The positioning hole on the table and the positioning hole at the bottom of the body do not have the same center. Use these holes during reinstallation after the table has been removed for the maintenance of an identical product.

To prevent the workpiece holding bolts from touching the end plate, use bolts that are 0.5 mm or more shorter than the maximum screw-in depth. If long bolts are used, they can touch the end plate and cause malfunction, etc.

To prevent the workpiece holding bolts from touching the guide block, use bolts that are 0.5 mm or more shorter than the maximum screw-in depth. If long bolts are used, they can touch the guide block and cause malfunction, etc.

Caution

Caution

8-5-5

MX�

MTS

MY�

CY�

MG�

CX�

D-

-X

20-

Data

5

Caution Caution

Caution

Caution

Series MXQSpecific Product Precautions 3Be sure to read before handling.

Rubber Stopper

Caution on Mounting Adjuster Option

Shock Absorber

Model

MXQ6MXQ8MXQ12MXQ16MXQ20MXQ25

0.5

0.9

2.1

4.4

7.0

18.0

M2.5 x 6

M3 x 8

M4 x 12

M5 x 16

M6 x 16

M8 x 18

M2.5 x 8

M3 x 10

M4 x 12

M5 x 16

M6 x 16

M8 x 18

Stroke adjuster at extension end (AS) Stroke adjuster at retraction end (AT)Body mounting section Table mounting section

M2.5 x 6

M3 x 8

M4 x 10

M5 x 12

M5 x 14

M6 x 18

Thread size Thread size Thread sizeTightening torque (N·m)

0.5

0.9

2.1

4.4

7.0

18.0

Tightening torque (N·m)

0.5

0.9

2.1

4.4

4.4

7.0

Tightening torque (N·m)

Model

MXQ6MXQ8MXQ12MXQ16MXQ20MXQ25

0.5

0.9

2.1

4.4

7.0

18.0

M2.5 x 6

M3 x 8

M4 x 12

M5 x 16

M6 x 16

M8 x 18

M2.5 x 8

M3 x 10

M4 x 12

M5 x 16

M6 x 20

M8 x 20

Stroke adjuster at extension end (CS) Stroke adjuster at retraction end (CT)Body mounting section Table mounting section

M2.5 x 6

M3 x 8

M4 x 10

M5 x 12

M5 x 14

M6 x 18

Thread size Thread size Thread sizeTightening torque (N·m)

0.5

0.9

2.1

4.4

7.0

18.0

Tightening torque (N·m)

0.5

0.9

2.1

4.4

4.4

7.0

Tightening torque (N·m)

Model

MXQ8MXQ12MXQ16MXQ20MXQ25

0.9

2.1

4.4

7.0

18.0

M3 x 12

M4 x 12

M5 x 16

M6 x 18

M8 x 18

M3 x 12

M4 x 12

M5 x 16

M6 x 20

M8 x 20

Shock absorber at extension end (BS) Shock absorber at retraction end (BT)Body mounting section Table mounting section

M3 x 8

M4 x 10

M5 x 12

M5 x 14

M6 x 18

Thread size Thread size Thread sizeTightening torque (N·m)

0.9

2.1

4.4

7.0

18.0

Tightening torque (N·m)

0.9

2.1

4.4

4.4

7.0

Tightening torque (N·m)

Metal Stopper

1. Use caution that the length of the bolts for mounting on the body and the bolts for the table is different from each other in some models. Stroke adjuster at extension end (CS) of MXQ6, 8, 20 and 25 has the different length of a hexagon socket head cap screw for mounting on the body and on the table. Use sufficient care for mounting. If assembled by making an error in length, it could cause looseness or lead to malfunction.

2. Follow the table below for tightening torque of mounting bolts.Insufficient torque will cause a decrease in the positioning accuracy and lead to malfunction.

1. Use caution that the length of the bolts for mounting on the body and the bolts for the table is different from each other in some models. Stroke adjuster at extension end (AS) of MXQ6 and 8 has the different length of a hexagon socket head cap screw for mounting on the body and on the table. Use sufficient care for mounting. If assembled by making an error in length, it could cause looseness or lead to malfunction.

2. Follow the table below for tightening torque of mounting bolts.Insufficient torque will cause a decrease in the positioning accuracy and lead to malfunction.

1. Use caution that the length of the bolts for mounting on the body and the bolts for the table is different from each other in some models. Shock absorber at extension end (BS) for MXQ20 and 25 has the different length of a hexagon socket head cap screw for mounting on the body and on the table. Use sufficient care for mounting. If assembled by making an error in length, it could cause looseness or lead to malfunction.

2. Follow the table below for tightening torque of mounting bolts.Insufficient torque will cause a decrease in the positioning accuracy and lead to malfunction.

1. Do not rotate the screw set on bottom of shock absorber.This is not an adjusting screw. Turning it could cause oil leakage.

2. Do not scratch the exposed portion of the piston rod.Durability could be degraded and lead to return defect.

With Shock Absorber

Applicable sizeMXQ8MXQ12MXQ16MXQ20MXQ25

Shock absorber modelRB0805RB0806RB1007RB1411RB1412

3. Shock absorber is considered a consumable component. When energy absorption is decreased, replace it.

4. Follow the table below for tightening torque of shock absorber lock nuts.

Model

MXQ8MXQ12

Tightening torque (N·m)

1.67

3.14

10.8MXQ20MXQ25

MXQ16

Turning thebottom screw is not allowed.Piston rod

Damage is not allowed.

Caution on Adjuster Option

8-5-6

6

Series MXQSpecific Product Precautions 4Be sure to read before handling.

1. Use 2 position, 4 or 5 port solenoid valves.A malfunction may occur with a control circuit that exhausts from both ports, such as exhaust center 3 position valves.

With End Lock

Caution on Handling Functional Option

2. Be sure to use meter-out speed control valves.If it is used in meter-in speed control or without a speed controller, it may result in malfunction.

3. When releasing the end lock manually, be sure that air pressure is released.If the end lock is unlocked while the air pressure still remains, it will lead to damage a workpiece, etc. due to unexpected lurching.

How to Unlock the End Lock∗ Before proceeding, make sure that there is no

residual air pressure.

(1) Push down the lock piston pin.(2) Slide the table forward.

1. When mounting the air slide table with buffer it must be oriented as shown in the sketch below.In horizontal operation, the buffer may travel the stroke length and activate the auto switch depending on the load and the speed. Therefore, adjust the speed according to the load.

With Buffer Mechanism

2. Auto switch with buffer function: Refer to the following table for the proper mounting positions for detection at stroke end.

∗ Adjust the auto switch position according to theload and the speed.

ModelMXQ6MXQ8MXQ12MXQ16MXQ20MXQ25

A22.5455.5

10

B

3

(mm)

Vertical use

Horizontal use

W

Caution on Handling Symmetric Type

1. Maintain a minimum spacing of at least 3 mm if standard style and symmetric style are used side by side.It malfunctions if standard style and symmetric style are used close side by side.

Normally OFFdetection

Normally ONdetection

A

B

(2)

(1)

Air slide table

Recommended pneumatic circuit Allow a space of 3 mm or more for a side by side mounting.

Caution CautionCaution

8-5-7

MX�

MTS

MY�

CY�

MG�

CX�

D-

-X

20-

Data

7

Air Slide Table

Series MXQø6, ø8, ø12, ø16, ø20, ø25

Special functionType Electricalentry

Grommet

Yes

Wiring (Output)

2-wire

3-wire(NPN equivalent)

Load voltage

ACDCAuto switch model

A96

A93V

M9NV

M9PV

M9BV

F9NWV

F9PWV

F9BWV

Lead wire length (m) ∗

0.5(Nil) 3(L)

5(Z)

Relay, PLC

Applicableload

Pre-wireconnector

Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

∗ Lead wire length symbols: 0.5 m ········· Nil (Example) M9N 3 m ·········· L (Example) M9NL 5 m ·········· Z (Example) M9NZ

100 V

— 5 V

12 V

12 V

12 V

5 V, 12 V

5 V, 12 V

24 V

YesGrommet

Diagnostic indication(2-color indication)

— — —

— —

Ree

d sw

itch

Sol

id s

tate

sw

itch

A96

A93

M9N

M9P

M9B

F9NW

F9PW

F9BW

Perpendicular In-lineIndi

cato

r lig

ht

24 V

3-wire (NPN)

3-wire (PNP)

2-wire

3-wire (NPN)

3-wire (PNP)

2-wire

How to Order

10, 20, 30, 40, 5010, 20, 30, 40, 50, 7510, 20, 30, 40, 50, 75, 10010, 20, 30, 40, 50, 75, 100, 12510, 20, 30, 40, 50, 75, 100, 125, 15010, 20, 30, 40, 50, 75, 100, 125, 150

68

12162025

Bore size/Stroke (mm)

2 pcs.1 pc.

“n” pcs.

NilSn

Number of auto switches

MXQ 12 50 M9N S

Adjuster option

Functional option

AS FR

Extension endRetraction end

Both endsExtension endRetraction end

Both endsExtension endRetraction end

Both ends

ASATA

BS (1)

BT (1)

B (1)

CSCTC

Standard typeWith buffer

With end lockAxial piping type

With buffer and end lockWith buffer, Axial piping type

Nil

Nil

Adjusteroption

Functionaloption

Option Combinations

Auto switchNil Without auto switch

NilNote 2) W/ end lock is not available in Series MXQ6.

F R (2)

P FR (2)

FP

AS, CS

AT, CT

A, C

BS

BT

B

L

Standard typeSymmetric type

NilL

Symmetric type

Without adjuster

Rubber stopper

Shock absorber

Metal stopper

RelayPLC

Nil F R P FR FP

�: Available, �: Not available

(3)

(3)

(3) (3)

ICcircuit

ICcircuit

ICcircuit

∗ Solid state switches marked with “�” are produced upon receipt of order.

• Since there are other applicable auto switches than listed, refer to page 8-5-46 for details.• For details about auto switches with pre-wire connector, refer to page 8-30-52.

∗ For the applicable auto switch model, refer to the table below.

∗ For the applicable auto switch to buffer, refer to page 8-5-14. It requires to order separately.

Note 1) W/ shock absorber is not available in Series MXQ6.

Note 3) With the combination of buffer mechanism and extension end stroke adjuster, the buffer stroke decreases by the amount of stroke adjusted with the extension end stroke adjuster.

8-5-8

8

Bore size (mm)

Piping port size

Fluid

Action

Operating pressure

Proof pressure

Ambient and fluid temperature

Specifications

Air

Double acting

0.15 to 0.7 MPa

1.05 MPa

–10 to 60°C

50 to 500 mm/s(Adjuster option/Metal stopper: 50 to 200 mm/s)

Rubber bumper (Standard, Adjuster option/Rubber stopper)

Shock absorber (Adjuster option/Shock absorber)

None (Adjuster option/Metal stopper)

+1 0

Non-lube

Reed switch (2-wire, 3-wire)

Solid state switch (2-wire, 3-wire)

2-color indication solid state switch (2-wire, 3-wire)

mm

M5 x 0.8

Piston speed

MXQ6

MXQ8

MXQ12

MXQ16

MXQ20

MXQ25

Standard Stroke

Standard stroke (mm)

10, 20, 30, 40, 50

10, 20, 30, 40, 50, 75

10, 20, 30, 40, 50, 75, 100

10, 20, 30, 40, 50, 75, 100, 125

10, 20, 30, 40, 50, 75, 100, 125, 150

10, 20, 30, 40, 50, 75, 100, 125, 150

Cushion

Lubrication

Auto switch

Stroke length tolerance

6 8 12 16 20 25

Rc 1/8

Adjuster option

Option

Extension end (AS)

Retraction end (AT)

Both ends (A)

Extension end (BS)

Retraction end (BT)

Both ends (B)

Extension end (CS)

Retraction end (CT)

Both ends (C)

Rubber stopper

Shock absorber

Metal stopper

Functional option

With buffer (F)

With end lock (R)

Axial piping type (P)

Stroke adjustment

range 0 to 5 mm

W/ shock absorber is not available in Series MXQ6.

Stroke adjustment

range 0 to 5 mm

W/ end lock is not available in Series MXQ6.

Model

-X42

-X16

Anti-corrosive specifications for guide section

Metal stopper specifications

Symbol Specifications

Made to Order Specifications(For details, refer to page 8-31-1.)

For clean room specifications, refer to “Pneumatic Clean Series” catalog.

∗ For details of adjuster and functional option, refer to pages 8-5-5 to 8-5-11 in “Option Specifications”.

8-5-9

Air Slide Table Series MXQ

MX�

MTS

MY�

CY�

MG�

CX�

D-

-X

20-

Data

9

Symmetric type

Applicable bore size

Adjustment rangeNil

-X11-X12

MXQ

5 mm15 mm25 mm

68

12162025

12 X11

Adjuster option

AS

Standard

Option

6 mm 8 mm12 mm16 mm20 mm25 mm

Note 1) -X12 (adjusting range: 25 mm) is not available in Series MXQ6.Note 2) -X11 and -X12 are not available with shock absorber.Note 3) W/ Shock absorber is not available in Series MXQ6.Note 4) For dimensions, refer to pages 8-5-40 to 8-5-44.

For the symmetric type, refer to the external dimensions symmetrically.(Symmetric type is what the direction of the adjusting bolt is reversed.)

Theoretical Output

0.2

11

8

20

15

45

34

80

60

126

94

196

151

Bore size (mm)

Rod size(mm)

Piston area(mm2)

Operating direction

Operating pressure (MPa)

6

8

12

16

3

4

6

8

OUT

IN

57

42

OUT

IN

101

75

OUT

IN

226

170

OUT

IN

402

302

0.3

17

13

30

23

68

51

121

91

188

141

295

227

0.4

23

17

40

30

90

68

161

121

251

188

393

302

0.5

29

21

51

38

113

85

201

151

314

236

491

378

0.6

34

25

61

45

136

102

241

181

377

283

589

454

0.7

40

29

71

53

158

119

281

211

440

330

687

529

The dual rod ensures an output twice that of existing cylinders. (N)

Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm2)

MXQ6MXQ8MXQ12MXQ16MXQ20MXQ25

Model

Standard stroke (mm)

(g)

20 10

25 12

OUT

IN

628

471

OUT

IN

982

756

INOUT

Additional weight of adjuster option

10

100

140

335

605

1100

1750

20

120

170

340

610

1100

1750

30

140

210

380

670

1100

1750

40

180

250

450

735

1200

1950

50

200

315

490

835

1400

2400

75

385

655

1000

1750

2750

100

745

1250

2350

3450

125

1400

2650

4300

150

2900

4700

6

10

25

45

80

130

5

10

23

40

65

110

25

35

70

105

130

200

40

100

160

310

560

13 + 0.2 S

26 + 0.2 S

43 + 0.2 S

55 + 0.2 S

166 + 0.5 S

240 + 0.5 S

Axial piping type(S: Stroke (mm))

With end lock

With buffer

How to Order Stroke Adjuster (Accessory)

Weight

L

Standard typeSymmetric type

NilL

Extension endRetraction endExtension endRetraction endExtension endRetraction end

ASATBSBTCSCT

Rubberstopper

Shock absorber

Metalstopper

Type

Rubber stopper

With shock absorber

Metal stopper

Stroke adjustment range

0 to 5 mm

Refer to the dimensions on page 8-5-42.

0 to 5 mm

Stroke Adjustment Range of Adjuster Option (Identical for extension and retraction ends)

∗ Optional wide adjustment range adjuster are available with rubber stopper and metal stopper.

Option Specifications

Extra for option

Rubber stopper

Extension end Retraction end

30

47

75

170

220

23

30

53

120

140

Shock absorber

Extension end Retraction end

10

23

35

60

115

180

5

10

23

40

65

110

Metal stopper

Extension end Retraction end

Series MXQ

8-5-10

10

Table Accuracy

(mm)

Model

B side parallelism to A side

B side traveling parallelism to A side

C side perpendicularity to A side

M dimension tolerance

W dimension tolerance

Radial internal clearance (µm)

MXQ6

Refer to Table (1).

Refer to Graph (1).

0.05 mm

±0.08 mm (±0.1 mm) ∗1

±0.1 mm

Shock Absorber Specifications

Model

Bore size (mm)

Piston speed

Buffer stroke (mm)

Bufferstrokeload (N)

MXQ6

Strokeat 0 (mm)Maximumstroke

6

3

6

MXQ8

8

5

8

MXQ12

12

10

13

MXQ16

16

13

17

MXQ20

20

17

25

MXQ25

25

21

29

5 10

50 to 500 mm/s (Horizontal mounting 50 to 300 mm/s)

Type model

D-M9BV

D-M9NV

D-M9PV

Solid state switch

Specifications

With light, 2-wire

With light, 3-wire, Output: NPN

With light, 3-wire, Output: PNP

Electrical entry direction

Vertical

Model

Bore size (mm)

Piston speed

Holding force (N)

MXQ8

8

25

MXQ12

12

60

MXQ16

16

110

MXQ20

20

160

MXQ25

25

250

50 to 500 mm/s

∗ The auto switch for buffer must be ordered separately.

Note) For caution on end lock, refer to page 8-5-7.

Shock absorber model

Applicable slide table

Max. energy absorption (J)

Stroke absorption (mm)

Max. collision speed (mm/s)

Max. operating frequency (cycle/min)

Max. allowable thrust (N)

Ambient temperature range (°C)

RB0805

MXQ8

0.98

5

80

245

1.96

3.83

15

RB0806

MXQ12

RB1007

MXQ16

RB1411

MXQ20

RB1412

MXQ25

Spring force (N)

Weight (g)

Extended

Retracted

2.94

6

80

245

1.96

4.22

15

5.88

7

50 to 500

70

422

–10 to 60

4.22

6.86

25

14.7

11

45

814

6.86

15.30

65

19.6

12

45

814

6.86

15.98

65

With buffer mechanism With end lock

With End Lock Specifications

Buffer Mechanism Specifications

Applicable Auto Switch to Buffer

–4 to 0

MXQ8

–4 to 0

MXQ12

–6 to 0

MXQ16

–10 to 0

MXQ20

–12 to 0

MXQ25

–14 to 0∗1) ±0.1 mm for 75 mm or longer stroke

MXQ6

MXQ8

MXQ12

MXQ16

MXQ20

MXQ25

ModelStroke (mm)

10

0.025

0.025

0.03

0.035

0.04

0.045

20

0.03

0.03

0.03

0.035

0.04

0.045

30

0.035

0.035

0.035

0.04

0.04

0.045

40

0.04

0.04

0.04

0.045

0.045

0.05

50

0.045

0.055

0.045

0.05

0.055

0.06

75

0.065

0.065

0.065

0.07

0.07

100

0.075

0.08

0.095

0.09

125

0.095

0.105

0.115

150

0.125

0.125

Table (1) B Side Parallelism to A Side

WA

BC

M

Radialclearance

0.06

0.04

0.02

0

Trav

elin

g pa

ralle

lism

(m

m)

50 100 150Stroke (mm)

Graph (1) B Side Traveling Parallelism to A Side

Traveling parallelism:The amount of deflection on a dial gauge when the table travels a full stroke with the body secured on a reference base surface.

Note 1) For caution on handling the one with buffer mechanism, refer to page 8-5-7.Note 2) The buffer stroke decreases by the amount of stroke adjusted with the extension end stroke adjuster.

8-5-11

Air Slide Table Series MXQ

MX�

MTS

MY�

CY�

MG�

CX�

D-

-X

20-

Data

11

Table Deflection (Reference values)

Table Displacement due toPitch Moment Load

Table Displacement due toYaw Moment Load

Table Displacement due toRoll Moment Load

Load (N)

Tabl

e di

spla

cem

ent a

mou

nt (

mm

)

Load (N)

Tabl

e di

spla

cem

ent a

mou

nt (

mm

)

Load (N)

Tabl

e di

spla

cem

ent a

mou

nt (

mm

)

Load (N)

Tabl

e di

spla

cem

ent a

mou

nt (

mm

)

Load (N)

Tabl

e di

spla

cem

ent a

mou

nt (

mm

)

Load (N)

Tabl

e di

spla

cem

ent a

mou

nt (

mm

)

Lr = 40 mm

Lr = 70 mm

Load (N)

Tabl

e di

spla

cem

ent a

mou

nt (

mm

)

Load (N)

Tabl

e di

spla

cem

ent a

mou

nt (

mm

)

Load (N)

Tabl

e di

spla

cem

ent a

mou

nt (

mm

)

Lr = 90 mm

0.03

0.02

0.01

10 20 30

20 40 60

0.03

0.02

0.01

20 40 60 80 100

0.01

0.02

0.03

0.04

0.03

0.02

0.01

10 20 30

0.04

0.02

20 40 60

0.04

0.06

20 40 60 80 100

0.10

0.02

0.04

0.06

0.08

0.015

0.010

40 80 120

0.005

0.010

40 80 120

0.005

0.012

0.008

120

0.016

0.004

0.020

16040 80

0

0

0

0

0

0

0

0

0

ø8

ø12

ø6

ø8

ø12

ø6

ø8

ø12

F A

Lr

F

MXQ6-10

MXQ6-20

MXQ6-30MXQ6-50

MXQ6-40

MXQ6-10

MXQ6-20

MXQ6-30MXQ6-50

MXQ6-40

MXQ6-10

MXQ6-20

MXQ6-30

MXQ6-50

MXQ6-40

MXQ6-10

MXQ6-20

MXQ6-30

MXQ6-50

MXQ6-40

MXQ6-10MXQ6-10MXQ6-20MXQ6-20MXQ6-30MXQ6-30 MXQ6-50MXQ6-50

MXQ6-40MXQ6-40MXQ6-10MXQ6-20MXQ6-30 MXQ6-50

MXQ6-40

MXQ12-10

MXQ12-30

MXQ12-20

MXQ12-50

MXQ12-40

MXQ12-75

MXQ12-100

MXQ12-10

MXQ12-30

MXQ12-20

MXQ12-50

MXQ12-40

MXQ12-75

MXQ12-100

MXQ12-75MXQ12-75

MXQ12-10MXQ12-10

MXQ12-40MXQ12-40

MXQ12-20MXQ12-20

MXQ12-30MXQ12-30MXQ12-100MXQ12-100

MXQ12-50MXQ12-50

MXQ12-75

MXQ12-10

MXQ12-40

MXQ12-20

MXQ12-30MXQ12-100

MXQ12-50

MXQ12-100MXQ12-100MXQ12-75MXQ12-75MXQ12-50MXQ12-50MXQ12-40MXQ12-40

MXQ12-30MXQ12-30MXQ12-20MXQ12-20MXQ12-10MXQ12-10

MXQ12-100MXQ12-75MXQ12-50MXQ12-40

MXQ12-30MXQ12-20MXQ12-10

MXQ8-20MXQ8-20

MXQ8-10MXQ8-10

MXQ8-30MXQ8-30MXQ8-40MXQ8-40

MXQ8-50MXQ8-50

MXQ8-75MXQ8-75

MXQ8-20

MXQ8-10

MXQ8-30MXQ8-40

MXQ8-50

MXQ8-75MXQ8-75MXQ8-75

MXQ8-10MXQ8-10MXQ8-20MXQ8-20 MXQ8-30MXQ8-30

MXQ8-50MXQ8-50MXQ8-40MXQ8-40

MXQ8-75

MXQ8-10MXQ8-20 MXQ8-30

MXQ8-50MXQ8-40

ø6

0.05

MXQ8-10MXQ8-10

MXQ8-30MXQ8-30

MXQ8-75MXQ8-75

MXQ8-20MXQ8-20MXQ8-40MXQ8-40

MXQ8-50MXQ8-50MXQ8-10

MXQ8-30

MXQ8-75

MXQ8-20MXQ8-40

MXQ8-50

Displacement at the section indicated by the arrow when a load is applied to this section with the slide table fully extended.

Displacement at the section indicated by the arrow when a load is applied to this section with the slide table fully extended.

Displacement at “A” when a load is applied to “F” with the slide table retracted.

Series MXQ

8-5-12

12

Load (N)

Tabl

e di

spla

cem

ent a

mou

nt (

mm

)

Load (N)

Tabl

e di

spla

cem

ent a

mou

nt (

mm

)

Load (N)

Tabl

e di

spla

cem

ent a

mou

nt (

mm

)

Load (N)

Tabl

e di

spla

cem

ent a

mou

nt (

mm

)

Load (N)

Tabl

e di

spla

cem

ent a

mou

nt (

mm

)

Load (N)

Tabl

e di

spla

cem

ent a

mou

nt (

mm

)

Lr = 120 mm

Lr = 160 mm

Load (N)

Tabl

e di

spla

cem

ent a

mou

nt (

mm

)

Load (N)

Tabl

e di

spla

cem

ent a

mou

nt (

mm

)

Load (N)

Tabl

e di

spla

cem

ent a

mou

nt (

mm

)

Lr = 200 mm

0.06

0.04

0.02

50 100 200

100 200 300

0.06

0.04

0.02

100 200 300 400 500

0.04

0.06

0.08

0.10

0.08

0.04

50 100 200

0.04

100 200 300

0.08

0.12

100 200 300 400 500

0.12

0.04

0.08

0.04

0.03

100 200 300

0.02

0.04

100 200 300

0.02

0.04

0.02

600

0.06

0.08

800200 400

0

0

0

0

0

0

0

0

0

ø20

ø25

ø16

ø20

ø25

ø16

ø20

ø25

ø16

0.12

F A

Lr

F

Table Displacement due toPitch Moment Load

Table Displacement due toYaw Moment Load

Table Displacement due to Roll Moment Load

MXQ16-100MXQ16-100MXQ16-125MXQ16-125

MXQ16-75MXQ16-75MXQ16-20MXQ16-20MXQ16-30MXQ16-30

MXQ16-10MXQ16-10

MXQ16-40MXQ16-40

MXQ16-50MXQ16-50

MXQ16-100MXQ16-125

MXQ16-75MXQ16-20MXQ16-30

MXQ16-10

MXQ16-40

MXQ16-50

MXQ25-100MXQ25-100MXQ25-125MXQ25-125MXQ25-150MXQ25-150

MXQ25-50MXQ25-50MXQ25-75MXQ25-75

MXQ25-10MXQ25-10MXQ25-20MXQ25-20MXQ25-30MXQ25-30MXQ25-40MXQ25-40 MXQ25-100

MXQ25-125MXQ25-150

MXQ25-50MXQ25-75

MXQ25-10MXQ25-20MXQ25-30MXQ25-40

MXQ16-30

MXQ16-50

MXQ16-20

MXQ16-10

MXQ16-40

MXQ16-75MXQ16-100MXQ16-125

MXQ16-30

MXQ16-50

MXQ16-20

MXQ16-10

MXQ16-40

MXQ16-75MXQ16-100MXQ16-125

MXQ16-10MXQ16-10

MXQ16-20MXQ16-20

MXQ16-100MXQ16-100MXQ16-30MXQ16-30

MXQ16-50MXQ16-50

MXQ16-75MXQ16-75MXQ16-40MXQ16-40

MXQ16-125MXQ16-125

MXQ16-10

MXQ16-20

MXQ16-100MXQ16-30

MXQ16-50

MXQ16-75MXQ16-40

MXQ16-125

MXQ20-10MXQ20-10

MXQ20-50MXQ20-50

MXQ20-125MXQ20-125

MXQ20-20MXQ20-20

MXQ20-75MXQ20-75MXQ20-30MXQ20-30

MXQ20-150MXQ20-150

MXQ20-40MXQ20-40

MXQ20-100MXQ20-100

MXQ20-10

MXQ20-50

MXQ20-125

MXQ20-20

MXQ20-75MXQ20-30

MXQ20-150

MXQ20-40

MXQ20-100

MXQ25-10MXQ25-10

MXQ25-30MXQ25-30MXQ25-50MXQ25-50MXQ25-125MXQ25-125

MXQ25-150MXQ25-150MXQ25-100MXQ25-100

MXQ25-75MXQ25-75

MXQ25-20MXQ25-20

MXQ25-40MXQ25-40

MXQ25-10

MXQ25-30MXQ25-50MXQ25-125

MXQ25-150MXQ25-100

MXQ25-75

MXQ25-20

MXQ25-40

MXQ25-10

MXQ20-125MXQ20-125MXQ20-150MXQ20-150

MXQ20-50MXQ20-50

MXQ20-10MXQ20-10

MXQ20-30MXQ20-30

MXQ20-20MXQ20-20

MXQ20-100MXQ20-100

MXQ20-40MXQ20-40MXQ20-75MXQ20-75

MXQ20-125MXQ20-150

MXQ20-50

MXQ20-10

MXQ20-30

MXQ20-20

MXQ20-100

MXQ20-40MXQ20-75

150 150

0.01

400

0.06

400 500 600

0.08

MXQ25-125MXQ25-125MXQ25-100MXQ25-100MXQ25-75MXQ25-75

MXQ25-150MXQ25-150

MXQ25-50MXQ25-50

MXQ25-20MXQ25-20

MXQ25-40MXQ25-40

MXQ25-30MXQ25-30MXQ25-125MXQ25-100MXQ25-75

MXQ25-150

MXQ25-50

MXQ25-20

MXQ25-40

MXQ25-30

0.02

MXQ20-100MXQ20-100MXQ20-125MXQ20-125MXQ20-150MXQ20-150

MXQ20-10MXQ20-10MXQ20-20MXQ20-20MXQ20-30MXQ20-30

MXQ20-50MXQ20-50MXQ20-75MXQ20-75

MXQ20-40MXQ20-40 MXQ20-100MXQ20-125MXQ20-150

MXQ20-10MXQ20-20MXQ20-30

MXQ20-50MXQ20-75

MXQ20-40

Displacement at the section indicated by the arrow when a load is applied to this section with the slide table fully extended.

Displacement at the section indicated by the arrow when a load is applied to this section with the slide table fully extended.

Displacement at “A” when a load is applied to “F” with the slide table retracted.

8-5-13

Air Slide Table Series MXQ

MX�

MTS

MY�

CY�

MG�

CX�

D-

-X

20-

Data

13

Series MXQModel Selection

Model Selection Step Formula/Data Selection Example

Operating Conditions

Cylinder: MXQ16-50Cushion: Rubber stopperWorkpiece table mountingMounting: Horizontal wall mountingAverage speed: Va = 300 [mm/s]Load weight: W = 1 [kg]L1 = 10 mm L2 = 30 mm L3 = 30 mm

Kinetic Energy

Load Factor

3-1 Load Factor of Load Weight

3-2 Load Factor of the Static Moment

3-3 Load Factor of Dynamic Moment

3-4 Sum of the Load Factors

Σαn = α1 + α2 + ·········· + αn ≤ 1

1 420 2E = —— x 1 (————) = 0.088 2 1000

V = 1.4 x 300 = 420

Ea = 1x 0.11 = 0.11

Can be used based on E = 0.088 ≤ Ea = 0.11

Wa = 1 x 1 x 4 = 4 K = 1 β = 1 Wmax = 4α1 = 1/4 = 0.25

Examine My.My = 1 x 9.8 (10 + 30)/1000 = 0.39 A3 = 30May = 1 x 1 x 18 = 18 Mymax = 18 K = 1 γ = 1

α2 = 0.39/18 = 0.022

Examine Mep. (30 + 10.5)Mep = 1/3 x 16.8 x 9.8 x ——————— = 2.2 1000 We = 4/100 x 10 x 420 = 16.8 A2 = 10.5Meap = 1 x 0.7 x 18 = 12.6 K = 1 γ = 0.7Mpmax = 18α3 = 2.2/12.6 = 0.17

Examine Mey. (30 + 24.5)Mey = 1/3 x 16.8 x 9.8 x ——————— = 3.0 1000 We=168 A4 = 24.5Meay = 12.6 (Same value as Meap)α'3 = 3.0/12.6 = 0.24

Σαn = α1 + α2 + α'2 + α3 + α'3= 0.25 + 0.022 + 0.011 + 0.17 + 0.24 = 0.693 ≤ 1

And it is possible to use.

1

2

3

• Model to be used• Type of cushion• Workpiece mounting position• Mounting orientation • Average speed Va (mm/s)• Load weight W (kg): Fig. (1)• Overhang Ln (mm) Fig. (2)

Wa = K • β • Wmax Workpiece mounting coefficient K: Fig. (3) Allowable load weight coefficient β: Graph (1) Max. allowable load weight Wmax: Table (2)α1 = W/Wa

M = W x 9.8 (Ln + An)/1000 Correction value of moment center position distance An: Table (3)

Ma = K • γ • Mmax Workpiece mounting coefficient K: Fig. (3) Allowable moment coefficient γ: Graph (2) Maximum allowable moment Mmax: Table (4)

α2 = M/Ma

(Ln + An)Me = 1/3 We x 9.8 ————— 1000 Collision equivalent to impact We = ∂ • W • V

∂: Bumper coefficient Rubber stopper without adjuster = 4/100 Shock absorber = 1/100 Metal stopper= 16/100

Correction value of moment center position distance An: Table (3)

Mea = K • γ • Mmax Workpiece mounting coefficient K: Fig. (3) Allowable moment coefficient γ: Graph (2) Max. allowable moment Mmax: Graph (4)

α3 = Me/Mea

RollingYawing

Pitching

Yawing

Examine Mr.Mr = 1 x 9.8 (30 + 10.5)/1000 = 0.39 A6 = 10.5Mar = 36 Mrmax = 36 K = 1 γ = 1

α'2 = 0.39/36 = 0.011

L2 +

A5

L3

L1

Ea = K • E max

1 V 2E = —— • W (————) 2 1000 Collision speed V = 1.4Va ——∗

Workpiece mounting coefficient K: Fig. (3)

Max. allowable kinetic energy Emax: Table (1)

Kinetic energy (E) ≤ Allowable kinetic energy (Ea)

Enumerate the operating conditions considering the mounting position and workpiece configuration.

Find the kinetic energy E (J) of the load.

Find the allowable kinetic energy Ea (J).Confirm that the kinetic energy of the load does not exceed the allowable kinetic energy.

Find the allowable load weight Wa (kg).Note) No need to consider this load

factor in the case of using perpendicularly in a vertical position. (Define α1 =0.)

Find the load factor of the load weight α1.

Find the static moment M (N·m).

Find the allowable static moment Ma (N·m).

Find the load factor α2 of the static moment.

Find the dynamic moment Me (N·m).

Find the allowable dynamic moment Mea (N·m).

Find the load factor α3 of the dynamic moment.

Use is possible if the sum of the load factors does not exceed 1.

∗) Correction factor (Reference values)

8-5-14

14

SymbolAn (n = 1 to 6)EEmaxLn (n = 1 to 3)M (Mp, My, Mr)Ma (Map, May, Mar)Me (Mep, Mey)Mea (Meap, Meay)Mmax (Mpmax, Mymax, Mrmax)V

DefinitionCorrection value of moment center position distanceKinetic energyAllowable kinetic energyOverhangStatic moment (Pitch, Yaw, Roll)Allowable static moment (Pitch, Yaw, Roll)Dynamic moment (Pitch, Yaw) Allowable dynamic moment (Pitch, Yaw) Maximum allowable moment (Pitch, Yaw, Roll)Collision speed

Unitmm

JJ

mmN·mN·mN·mN·mN·m

mm/s

SymbolVaWWaWeWmaxαβγK

DefinitionAverage speedLoad weightAllowable load weightWeight equivalent to impactMax. allowable load weightLoad factorAllowable load weight coefficientAllowable moment coefficientWorkpiece mounting coefficient

Unitmm/s

kgkgkgkg————

Symbol

MXQ6MXQ8MXQ12MXQ16MXQ20MXQ25

Model101.42.04.7

13 19 32

Table (4) Maximum Allowable Moment: Mmax (N·m)

Table (3) Correction Value of Moment Center Position Distance: An (mm)

Table (1) Allowable Kinetic Energy: Emax (J) Table (2)Maximum Allowable Load Weight: Wmax (kg)

Allo

wab

le lo

ad w

eigh

t coe

ffici

ent:

β 1.0

0.7

0.5

0.4

0.3

0.2

50 100 200 300 500 700Average speed Va (mm/s)

Graph (1) Allowable Load Weight Coefficient: β

Allo

wab

le m

omen

t coe

ffici

ent:

γ 1.0

0.7

0.5

0.4

0.3

0.2

50 100 200 300 500 700Average speed Va (mm/s) Collision speed V (mm/s)

Graph (2) Allowable Moment Coefficient: γ

Fig. (1) Load Weight: W (kg)

Fig. (2) Overhang: Ln (mm), Correction Value of Moment Center Position Distance: An (mm)

W

W

Pitch moment Yaw moment Roll moment

Sta

tic m

omen

tA

djus

ting

bolt

Note) Static moment: Moment generated by gravityDynamic moment: Moment generated by impact when colliding with stopper

MXQ6MXQ8MXQ12MXQ16MXQ20MXQ25

Model

1014.516.521 27 29.535.5

Correction value of moment center position distance (Refer to Figure (2).)

MXQ6MXQ8MXQ12MXQ16MXQ20MXQ25

Model

0.612469

MXQ6MXQ8MXQ12MXQ16MXQ20MXQ25

ModelAllowable kinetic energy

Without adjusterRubber stopper

0.0180.0270.0550.11 0.16 0.24

Maximum allowable load weight

Fig. (3) Workpiece Mounting Coefficient: K

W

W

Table mounting

End plate mounting

K = 1

K = 0.6

W

Mp

L1 A1

W

Mp

L1 A2

Mep

A2

L3

Mey

L2A

4

W

My

L2 A3

W

My

L2 A4

W

Mr

L3 A5

W

Mr

L3 A6

0.0180.0270.0550.11 0.16 0.24

Shock absorber—

0.0540.11 0.22 0.32 0.48

Metal stopper0.0090.0130.0270.0550.0800.12

Adjuster option

A1, A3

Stroke (mm) A2 A4 A5 A6

2014.516.521 27 29.535.5

3014.518.521 27 29.535.5

4018.520.525 27 29.535.5

5018.528 25 30 33.543

75—

28.534 33 37.543

100——

34 42.553.550

125———

42.555 64

150————

56.564

6 7 9

10.514 16.5

13.516 19.524.530 37

13.516 19.524.530 37

6 7 9

10.514 16.5

Stroke (mm)201.42.04.7

13 19 32

301.42.84.7

13 19 32

402.83.77.2

13 19 32

502.87.97.2

18 27 52

75—7.9

15 23 36 52

100——15428478

125——— 42 84140

150————

84140

103.55.1

11 31 47 81

203.55.1

11 31 47 81

303.56.0

11 31 47 81

405.16.9

13 31 47 81

505.17.4

13 36 57

110

75—7.4

14 41 66

110

100—— 14 41 75130

125——— 41 75130

150———— 75130

Pitch/Yaw moment: Mpmax/MymaxStroke (mm)

Roll moment: Mrmax

Note) For A2, A4, A5 and A6, there is no difference in the corrected values due to the stroke.

Caution The maximum operating speed for metal stopper is 200 mm/s.

W

Note) No need to consider this load factor in the case of using perpendicularly in a vertical position.

Note) Use the average speed when calculating static moment.Use the collision speed when calculating dynamic moment.

8-5-15

Air Slide Table Series MXQ

MX�

MTS

MY�

CY�

MG�

CX�

D-

-X

20-

Data

15

Dimensions: MXQ6

Model F2225212627

N44666

G 613—1121

H2326—2828

NN22333

I 9 9 916 9

J1727374865

K21.531.541.551.561.5

Z41.551.561.579.589.5

M4252628090

ZZ4858688696

MXQ6-10MXQ6-20MXQ6-30MXQ6-40MXQ6-50

Basic style

4-M2.5 x 0.45 thread depth 3.5

4-M2.5 x 0.45 thread depth 2.5

Section AA´ Section BB´

Adjuster at extension end

Retraction end adjuster

ø3 depth 2.5+0.03 0

2N – 1 x F

3

d

epth

2.5

+0.

03 0

ø3H9 depth 2.5+0.025 0

3H9

dep

th 2

.5+

0.02

5 0

(mm)

GA1313293949

HA1626202828

Z

ZZ

Max. 10 (Retraction end adjuster)6IJ

10.5 5.5

6 (A

djus

ter

at e

xten

sion

end

)

3

2 6

131620

3-M3 x 0.5 thread depth 5

1

19.5 (Adjuster at extension end)

5.5

3.5

2-M2.5 x 0.45 thread depth 3

Operating port 2-M5 x 0.8

5.5

10

13.5

20

4

9

4

N-M3 x 0.5 thread depth 4

14 271.

5

31

5.5 3

1512

18.2

0.3

F

11

5 M

12.5K

6.53

3.5

20

Bottom view of MXQ6-30

10.5 5.5

ø6.

5

ø7

ø3.

2

ø3.

2

ø6.

5

ø7

NN-M4 x 0.7 thread depth 8

(NN – 1) x H G

B

H

A

4

HA GA

B´A´

12

0.5

Note)

Note) Refer to the bottom view of MXQ6-30.

Note)

∗ For detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster.Rubber stopper (P.8-5-40)Metal stopper (P. 8-5-43)

Series MXQ

8-5-16

16

∗ Other dimensions are the same as basic style.

∗ Other dimensions are the same as basic style.

With buffer (ø6): MXQ6-��F

3-M3 x 0.5 thread depth 5

266.

3

Operating port 2-M5 x 0.8

Axial piping type (ø6): MXQ6-��P

8

4 28

22

0.3

19.2

1630

8

5.5

12

12

12.5

8-5-17

Air Slide Table Series MXQ

MX�

MTS

MY�

CY�

MG�

CX�

D-

-X

20-

Data

17

4-M2.5 x 0.45 thread depth 3.5

4-M2.5 x 0.45 thread depth 2.56.5

Section AA´ Section BB´

Adjuster at extension end

Retraction end adjuster

ø3 depth 2.5+0.03 0

3

d

epth

2.5

+0.

03 0

ø3H9 depth 2.5+0.025 0

3H9

dep

th 2

.5+

0.02

5 0

Z

ZZ

Max. 10(Retraction end adjuster)

6IJ

6 (A

djus

ter

at e

xten

sion

end

)

19.5 (Adjuster at extension end)

3

2 6

131620

3-M3 x 0.5 thread depth 5

15.

53.

5

2-M2.5 x 0.45 thread depth 3Operating port 2-M5 x 0.8

5.5

10 13.5

20

4

9

4

N-M3 x 0.5 thread depth 4

14 271.

5

31

5.5 3

1512

18.2

0.3

F

2N – 1 x F

11

5 M

12.5K

3 3.5

20

Bottom view of MXQ6L-30

10.5 5.5

ø3.

2

ø6.

5 ø7

10.5 5.5

ø3.

2

ø6.

5 ø7

NN-M4 x 0.7 thread depth 8

(NN – 1) x H G

H

4

HA GA

BA

12

Dimensions: MXQ6L/Symmetric Type

Model F2225212627

N44666

G 613—1121

H2326—2828

NN22333

I 999

169

J1727374865

K21.531.541.551.561.5

Z41.551.561.579.589.5

M4252628090

ZZ4858688696

MXQ6L-10MXQ6L-20MXQ6L-30MXQ6L-40MXQ6L-50

Basic style

(mm)

GA1313293949

HA1626202828

0.5

Note)

Note) Refer to the bottom view of MXQ6L-30.

Note)

∗ For detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster.Rubber stopper (P. 8-5-40)Metal stopper (P. 8-5-43)

Series MXQ

8-5-18

18

3-M3 x 0.5 thread depth 5

Operating port 2-M5 x 0.8

8

4

0.3

19.2

∗ Other dimensions are the same as basic style.

∗ Other dimensions are the same as basic style.

With buffer (ø6): MXQ6L-��F

Axial piping type (ø6): MXQ6L-��P

266.

3

5.5

12

28

22

12

12.5

1630

8

8-5-19

Air Slide Table Series MXQ

MX�

MTS

MY�

CY�

MG�

CX�

D-

-X

20-

Data

19

4-M3 x 0.5 thread depth 4

NA-M3 x 0.5 thread depth 3.5

Section AA´ Section BB´

Adjuster at extension end

Retraction end adjuster

ø3 depth 3+0.03 0

2N – 1 x F

ø3H9 depth 3+0.025 0

Z

ZZ

Max. 11 (Retraction end adjuster)8IJ

12.5 5.7

6.5

(Adj

uste

r at

ext

ensi

on e

nd)

3.5

2 7

62327

3-M4 x 0.7 thread depth 6

1

22.5 (Adjuster at extension end)

6.5

416

2-M3 x 0.5 thread depth 4

Operating port 2-M5 x 0.8

6.5

12

24

5

10

4

N-M3 x 0.5 thread depth 5

16 321

36

6.5 3.5

1715

21.2

0.3

F

12

3

d

epth

3+

0.03

0

6 M

14.6K73.8

14.6KA73.8

4

23

Bottom view of MXQ8-30

ø6.

5

ø7ø3.

2

12.5 5.7

ø6.

5

ø7ø3.

2

NN-M4 x 0.7 thread depth 8

(NN – 1) x H G

BH

A

4

HA GAB´

143H

9

d

epth

3+

0.02

5 0

Dimensions: MXQ8

Model F252526324650

N446666

G 714— 8 831

H2528—312930

NN223344

I111012141312

J 17 28 40 52 78105

K23.533.543.553.563.588.5

Z 45.5 55.5 69.5 83.5108.5134.5

M 46 56 70 84109135

ZZ 53 63 77 91116142

MXQ8-10MXQ8-20MXQ8-30MXQ8-40MXQ8-50MXQ8-75

Basic style

GA131429393761

HA192827315860

NA444488

KA————

82.5112.5

0.7

Note)

Note) Refer to the bottom view of MXQ8-30.

Note)

∗ For detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster.Rubber stopper (P. 8-5-40)Metal stopper (P. 8-5-43)

(mm)

Series MXQ

8-5-20

20

Extension end20

Retraction end20

Stroke Adjustable Range(mm)

∗ Other dimensions are the same as basic style.

∗ Other dimensions are the same as basic style.

With shock absorber (ø8): MXQ8-��BS/BT/B

With buffer (ø8): MXQ8-��F

∗ Other dimensions are the same as basic style.

With end lock (ø8): MXQ8-��R

∗ Other dimensions are the same as basic style.

Axial piping type (ø8): MXQ8-��P

3-M4 x 0.7 thread depth 6

Shock absorber at extension end

Shock absorber at retraction end

316.

340

.53

Operating port 2-M5 x 0.8

Operating port 2-M5 x 0.8

10

5 28.5

25Max. 23

Maximum 328

25

22

22.5

0.3

22.2

11.5

1

2434

12

6.5

15

12

16

14.5

4

17.5

8-5-21

Air Slide Table Series MXQ

MX�

MTS

MY�

CY�

MG�

CX�

D-

-X

20-

Data

21

4-M3 x 0.5 thread depth 4

NA-M3 x 0.5 depth 3.5

Section AA´ Section BB´

Adjuster at extension end

Retraction end adjuster

ø3 depth 3+0.03 0

3

d

epth

3+

0.03

0

ø3H9 depth 3 +0.025 0

ZZZ

Max. 11 (Retraction end adjuster)

8IJ

6.5

(Adj

uste

r at

ext

ensi

on e

nd)

22.5 (Adjuster at extension end)

3.5

2 762327

3-M4 x 0.7 thread depth 6

16.

54

2-M3 x 0.5 thread depth 4 Operating port 2-M5 x 0.8

6.5

12 16

24

5

10

4

N-M3 x 0.5 thread depth 5

16 321

366.5 3.5

1715

21.2

0.3

F

2N – 1 x F

12

6 M

14.6KA

14.6K

3.8 7

3.8 7

4

23

Bottom view of MXQ8L-30

12.5 5.7

ø3.

2

ø6.

5 ø7

12.5 5.7

ø3.

2

ø6.

5 ø7

NN-M4 x 0.7 thread depth 8

(NN – 1) x H G

B´HA´

4

HA GA

BA

143H

9

d

epth

3+

0.02

5 0

Dimensions: MXQ8L/Symmetric Type

Model F252526324650

N446666

G 714— 8 831

H2528—312930

NN223344

I111012141312

J 17 28 40 52 78105

K23.533.543.553.563.588.5

Z 45.5 55.5 69.5 83.5108.5134.5

M 46 56 70 84109135

ZZ 53 63 77 91116142

MXQ8L-10MXQ8L-20MXQ8L-30MXQ8L-40MXQ8L-50MXQ8L-75

Basic style

(mm)

GA131429393761

HA192827315860

NA444488

KA————

82.5112.5

0.7

Note)

Note) Refer to the bottom view of MXQ8L-30.

Note)

∗ For detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster.Rubber stopper (P. 8-5-40)Metal stopper (P. 8-5-43)

Series MXQ

8-5-22

22

3-M4 x 0.7 thread depth 6

Shock absorber at extension end

Shock absorber at retraction end

6.3

3140

.53

Operating port 2-M5 x 0.8

Operating port 2-M5 x 0.8

10

5 28.5

25

Max. 23

Maximum 328

25

22

22.5

0.3

22.2

11.5

1

2434

12

6.5

15

12

16

14.5

4

17.5

∗ Other dimensions are the same as basic style

∗ Other dimensions are the same as basic style.

With shock absorber (ø8): MXQ8L-��BS/BT/B

With buffer (ø8): MXQ8L-��F

∗ Other dimensions are the same as basic style.

With end lock (ø8): MXQ8L-��R

∗ Other dimensions are the same as basic style.

Axial piping type (ø8): MXQ8L-��P

Extension end20

Retraction end20

Stroke Adjustable Range(mm)

8-5-23

Air Slide Table Series MXQ

MX�

MTS

MY�

CY�

MG�

CX�

D-

-X

20-

Data

23

4-M4 x 0.7 thread depth 6

NA-M4 x 0.7 thread depth 4

Section AA´ Section BB´

Adjuster at extension end

Retraction end adjusterø4H9 depth 4+0.030

0

ø4H9 depth 4+0.030 0

ZZZ

Max. 13 (Retraction end adjuster)10IJ

16 8

10 (

Adj

uste

r at

ext

ensi

on e

nd)

4.75

2 9.5

92939

3-M5 x 0.8 thread depth 8

1

29.5 (Adjuster at extension end)

85

2-M4 x 0.7 thread depth 6 Operating port 2-M5 x 0.8

8.5

14.5

19.5

29

5

13

5

N-M4 x 0.7 thread depth 5

20 392.

5

46

8 4.5

2220

27.2

0.3

F

2N – 1 x F16

4H9

dep

th 4

+0.

030

0

8 M

18.5K8.55

18.5KA8.55

4.8

30

Bottom view of MXQ12-40

ø8.

5

ø9ø4.

2

16 8

ø8.

5

ø9ø4.

2

NN-M5 x 0.8 thread depth 10

(NN – 1) x H G

BH

A

5

HA GA

B´A´

194H

9

d

epth

4+

0.03

0 0

Dimensions: MXQ12

Model F28283834343636

N 4 4 4 6 6 810

G181820— 92312

H323240—393636

NN2223345

I12121415131717

J 34 34 42 58 70110135

K 26.5 36.5 46.5 56.5 66.5 91.5116.5

Z 66 66 76 93103147172

M 67 67 77 94104148173

ZZ 76 76 86103113157182

MXQ12-10MXQ12-20MXQ12-30MXQ12-40MXQ12-50MXQ12-75MXQ12-100

Basic style

(mm)

GA18182038485984

HA32324039397272

NA4444488

KA—————

117.5142.5

1

Note)

Note) Refer to the bottom view of MXQ12-40.

Note)

∗ For detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster.Rubber stopper (P. 8-5-40)Metal stopper (P. 8-5-43)

Series MXQ

8-5-24

24

3-M5 x 0.8 thread depth 8

Shock absorber at extension end Shock absorber at retraction end

416.

3

513

Operating port 2-M5 x 0.8

Operating port 2-M5 x 0.8

13

5 37

29.5 Max. 18

Maximum 3010

29.5

29

0.3

29.2

10

2943

14.5

8.5

20

13

22

16.5

5

22

∗ Other dimensions are the same as basic style.

∗ Other dimensions are the same as basic style.

With shock absorber (ø12): MXQ12-��BS/BT/B

With buffer (ø12): MXQ12-��F

∗ Other dimensions are the same as basic style.

With end lock (ø12): MXQ12-��R

∗ Other dimensions are the same as basic style.

Axial piping type (ø12): MXQ12-��P

Extension end18

Retraction end18

Stroke Adjustable Range(mm)

8-5-25

Air Slide Table Series MXQ

MX�

MTS

MY�

CY�

MG�

CX�

D-

-X

20-

Data

25

Max. 13 (Retraction end adjuster)

10IJ

4-M4 x 0.7 thread depth 6

NA-M4 x 0.7 thread depth 4

Section AA´ Section BB´

Adjuster at extension end

Retraction end adjuster

ø4H9 depth 4+0.030 0

4H9

de

pth

4+0

.030

0

ø4H9 depth 4+0.030 0

Z

ZZ10

(A

djus

ter

at e

xten

sion

end

)

29.5 (Adjuster at extension end)

4.75

2 9.5

92939

3-M5 x 0.8 thread depth 8

18

5

2-M4 x 0.7 thread depth 6 Operating port 2-M5 x 0.8

8.5

14.5

19.5

29

5

13

5N-M4 x 0.7 thread depth 5

20 392.

5

46

8 4.5

2220

27.2

0.3

F2N – 1 x F

16

8 M

18.5KA

18.5K

5 8.5

5 8.5

4.8 30

Bottom view of MXQ12L-40

16 8

ø4.

2

ø8.

5 ø9

16 8

ø4.

2

ø8.

5 ø9

NN-M5 x 0.8 thread depth 10

(NN – 1) x H G

B´H

5

HA GA

BA

194H

9

dept

h 4

+0.0

30 0

Dimensions: MXQ12L/Symmetric Type

Model F28283834343636

N 4 4 4 6 6 810

G181820— 92312

H323240—393636

NN2223345

I12121415131717

J 34 34 42 58 70110135

K 26.5 36.5 46.5 56.5 66.5 91.5116.5

Z 66 66 76 93103147172

M 67 67 77 94104148173

ZZ 76 76 86103113157182

MXQ12L-10MXQ12L-20MXQ12L-30MXQ12L-40MXQ12L-50MXQ12L-75MXQ12L-100

Basic style

(mm)

GA18182038485984

HA32324039397272

NA4444488

KA—————

117.5142.5

1

Note)

Note) Refer to the bottom view of MXQ12L-40.

Note)

∗ For detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster.Rubber stopper (P. 8-5-40)Metal stopper (P. 8-5-43)

Series MXQ

8-5-26

26

3-M5 x 0.8 thread depth 8

Shock absorber at extension endShock absorber at retraction end

6.3

4151

3

Operating port 2-M5 x 0.8

Operating port 2-M5 x 0.8

13

5 37

29.5 Max. 18

Maximum 3010

29.5

29

0.3

29.2

10

2943

14.5

8.5

20

13

22

16.5

5

22

∗ Other dimensions are the same as basic style.

∗ Other dimensions are the same as basic style.

With shock absorber (ø12): MXQ12L-��BS/BT/B

With buffer (ø12): MXQ12L-��F

∗ Other dimensions are the same as basic style.

With end lock (ø12): MXQ12L-��R

∗ Other dimensions are the same as basic style.

Axial piping type (ø12): MXQ12L-��P

Extension end18

Retraction end18

Stroke Adjustable Range(mm)

8-5-27

Air Slide Table Series MXQ

MX�

MTS

MY�

CY�

MG�

CX�

D-

-X

20-

Data

27

4-M5 x 0.8 thread depth 7

NA-M5 x 0.8 thread depth 6.5

Section AA´ Section BB´

Adjuster at extension end

Retraction end adjusterø5H9 depth 5+0.030

0

ø5H9 depth 5+0.030 0

ZZZ

Max. 12 (Retraction end adjuster)12IJ

21 9

12.5

(A

djus

ter

at e

xten

sion

end

)

5.5

3 11

133545

3-M6 x 1 thread depth 10

1

36.5 (Adjuster at extension end)

115.

5

2-M5 x 0.8 thread depth 8

Operating port 2-M5 x 0.8

11

14.5

24.5

29

6.5

14

6

N-M5 x 0.8 thread depth 6

24 493.

5

58

11 5.5

2824

.5

33.7

0.3

F

2N – 1 x F21

5H9

dep

th 5

+0.

030

0

10 M

21K105.5

21KA105.5

5.5

37

Bottom view of MXQ6-30

ø9.

5

ø10

.5

ø5.

1

21 9

ø9.

5

ø10

.5

ø5.

1

NN-M6 x 1 thread depth 12

(NN – 1) x H G

BH

A

6

HA GA

B´A´

245H

9

dept

h 5

+0.

030

0

Dimensions: MXQ16

Model F3838485840464444

N 4 4 4 4 6 6 810

G18181919—213617

H39394858—524444

NN22223345

I1212121220151823

J 40 40 50 60 68105145165

K 28 38 48 58 68 93118143

Z 77 77 87 97113145188213

M 78 78 88 98114146189214

ZZ 89 89 99109125157200225

MXQ16-10MXQ16-20MXQ16-30MXQ16-40MXQ16-50MXQ16-75MXQ16-100MXQ16-125

Basic style

(mm)

GA 18 18 19 19 48 73 80105

HA3939485845528888

NA44448888

∗ For detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster.Rubber stopper (P. 8-5-40)Metal stopper (P. 8-5-43)

KA————

91123166191

1

Note)

Note) Refer to the bottom view of MXQ16-50.

Note)

Series MXQ

8-5-28

28

3-M6 x 1 thread depth 10

Shock absorber at extension end

Shock absorber at retraction end

526.

3

65.5

Operating port 2-M5 x 0.8

Operating port 2-M5 x 0.8

15.5

6.5 41

36.5 Maximum 20

Maximum 3412

36.5

30

0.3

35.7

12.5

4254

21

11

26

14

25

21

6

29

∗ Other dimensions are the same as basic style.

∗ Other dimensions are the same as basic style.

With shock absorber (ø16): MXQ16-��BS/BT/B

With buffer (ø16): MXQ16-��F

∗ Other dimensions are the same as basic style.

With end lock (ø16): MXQ16-��R

∗ Other dimensions are the same as basic style.

Axial piping type (ø16): MXQ16-��P

Extension end22

Retraction end22

Stroke Adjustable Range(mm)

8-5-29

Air Slide Table Series MXQ

MX�

MTS

MY�

CY�

MG�

CX�

D-

-X

20-

Data

29

Max. 12 (Retraction end adjuster)

12IJ

4-M5 x 0.8 thread depth 7

NA-M5 x 0.8 thread depth 6.5

Section AA´ Section BB´

Adjuster at extension end

Retraction end adjuster

ø5H9 depth 5+0.030 0

ø5H9 depth 5+0.030 0

ZZZ

12.5

(A

djus

ter

at e

xten

sion

end

)

36.5 (Adjuster at extension end)

5.5

3 11

3-M6 x 1 thread depth 10

111

5.5

2-M5 x 0.8 thread depth 8 Operating port 2-M5 x 0.8

11

14.5

24.5

29

6.5

14

6

N-M5 x 0.8 thread depth 6

24 493.

5

5811 5.5

2824

.5

33.7

0.3

2N – 1 x F

21

5H9

de

pth

5+0

.030

0

10 M

21KA

21K

5.5 10

5.5 10

5.5 37

Bottom view of MXQ16L-50

21 9

ø5.

1

ø9.

5

ø10

.5

21 9

ø5.

1

ø9.

5

ø10

.5

NN-M6 x 1 thread depth 12

(NN – 1) x H G

B´HA´

6

HA GA

BA

24

5H9

de

pth

5+0

.030

0

Dimensions: MXQ16L/Symmetric Type

Model F3838485840464444

N 4 4 4 4 6 6 810

G18181919—213617

H39394858—524444

NN22223345

I1212121220151823

J 40 40 50 60 68105145165

K 28 38 48 58 68 93118143

Z 77 77 87 97113145188213

M 78 78 88 98114146189214

ZZ 89 89 99109125157200225

MXQ16L-10MXQ16L-20MXQ16L-30MXQ16L-40MXQ16L-50MXQ16L-75MXQ16L-100MXQ16L-125

Basic style

(mm)

GA 18 18 19 19 48 73 80105

HA3939485845528888

NA44448888

KA————

91123166191

F

1

133545

Note)

Note) Refer to the bottom view of MXQ16L-50.

Note)

∗ For detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster.Rubber stopper (P. 8-5-40)Metal stopper (P. 8-5-43)

Series MXQ

8-5-30

30

Maximum 3412

36.5

3-M6 x 1 thread depth 10

Shock absorber at extension end Shock absorber at retraction end

6.3

52

65.5

Operating port 2-M5 x 0.8

Operating port 2-M5 x 0.8

15.5

6.5 41

36.5 Maximum 20

30

0.3

35.7

12.5

4254

21

11

26

14

25

21

6

29

∗ Other dimensions are the same as basic style.

∗ Other dimensions are the same as basic style.

With shock absorber (ø16): MXQ16L-��BS/BT/B

With buffer (ø16): MXQ16L-��F

∗ Other dimensions are the same as basic style.

With end lock (ø16): MXQ16L-��R

∗ Other dimensions are the same as basic style.

Axial piping type (ø16): MXQ16L-��P

Extension end22

Retraction end22

Stroke Adjustable Range(mm)

8-5-31

Air Slide Table Series MXQ

MX�

MTS

MY�

CY�

MG�

CX�

D-

-X

20-

Data

31

4-M5 x 0.8 thread depth 8

NA-M6 x 1 thread depth 6

Section AA´ Section BB´

Adjuster at extension end

Retraction end adjuster

ø5H9 depth 5+0.030 0

ø5H9 depth 5+0.030 0

ZZZ

Max. 14 (Retraction end adjuster)13IJ

2610.5

14.5

(Adj

uste

r at e

xten

sion

end

)6.5

2.5 13

123648

3-M6 x 1 thread depth 13

1.5

45.5 (Adjuster at extension end)

13.5

6.5

2-M6 x 1 thread depth 7 Operating port 2-Rc 1/8

14

17.5

30

35

7

18

6

N-M5 x 0.8 thread depth 8

301.

5

603

70

15 6

3331

41.5

0.5

F

2N -1 x F27

5H9

de

pth

5+0

.030

0

13 M

25K126.5

25KA126.5

6.5

46

Bottom view of MXQ6-30

ø9.

5

ø11

ø5.

1

26 10.5

ø9.

5

ø11ø5.

1

NN-M6 x 1 thread depth 12

(NN-1) x H G

BH

A

6

HA GA

B´A´

29

5H9

de

pth

5+0

.030

0

Dimensions: MXQ20

Model F454048584255505562

N444466888

G22222222—17183756

H46464656—56565962

NN222233444

I161616161823251821

J 46 46 46 56 72100155190215

K 31 41 51 61 71 96121146171

Z 92.5 92.5 92.5102.5120.5153.5210.5238.5266.5

M 94 94 94104122155212240268

ZZ108108108118136169226254282

MXQ20-10MXQ20-20MXQ20-30MXQ20-40MXQ20-50MXQ20-75MXQ20-100MXQ20-125MXQ20-150

Basic style

(mm)

GA 18 18 18 22 48 73 74 96118

HA 50 50 50 56 48 56112118124

NA444448888

KA—————

126183211239

Note)

Note) Refer to the bottom view of MXQ20-50.

Note)

∗ For detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster.Rubber stopper (P. 8-5-40)Metal stopper (P. 8-5-43)

Series MXQ

8-5-32

32

3-M6 x 1 thread depth 13

Shock absorber at extension end

Shock absorber at retraction end

6511

.578

.5

Operating port 2-Rc 1/8

Operating port 2-Rc 1/8

18

7 44.5

46.50.5 0.5Max. 35

Maximum 5413

46.5

30.5

0.5

42.5

163560

17.5

20

33

26

14

32

8

34

∗ Other dimensions are the same as basic style.

∗ Other dimensions are the same as basic style.

With shock absorber (ø20): MXS20-��BS/BT/B

With buffer (ø20): MXQ20-��F

∗ Other dimensions are the same as basic style.

With end lock (ø20): MXQ20-��R

∗ Other dimensions are the same as basic style.

Axial piping type (ø20): MXQ20-��P

Extension end35

Retraction end35

Stroke Adjustable Range(mm)

8-5-33

Air Slide Table Series MXQ

MX�

MTS

MY�

CY�

MG�

CX�

D-

-X

20-

Data

33

Max. 14 (Retraction end adjuster)

13IJ

4-M5 x 0.8 thread depth 8

NA-M6 x 1 thread depth 6

Section AA´ Section BB´

Adjuster at extension end

Retraction end adjuster

ø5H9 depth 5+0.030 0

ø5H9 depth 5+0.030 0

Z

ZZ

14.5

(A

djus

ter

at e

xten

sion

end

)

45.5 (Adjuster at extension end)

6.5

2.5 13

123648

3-M6 x 1 thread depth 13

1.5

13.5

6.5

2-M6 x 1 thread depth 7

Operating port 2-Rc 1/8

14

17.5

35

30

7

18

6

N-M5 x 0.8 thread depth 8

301.

5

603

70

15 6

3331

41.5

0.5

F2N – 1 x F

27

5H9

dep

th 5

+0.0

30 0

13 M

25KA

25K

6.5 12

6.5 12

6.5 46

Bottom view of MXQ20L-50

26 10.5

ø5.

1

ø9.

5

ø11

26 10.5

ø5.

1

ø9.

5

ø11

NN-M6 x 1 thread depth 12

(NN – 1) x H G

B´HA´

6

HA GA

BA

29

5H9

dep

th 5

+0.0

30 0

Dimensions: MXQ20L/Symmetric Type

Model F454048584255505562

N444466888

G22222222—17183756

H46464656—56565962

NN222233444

I161616161823251821

J 46 46 46 56 72100155190215

K 31 41 51 61 71 96121146171

Z 92.5 92.5 92.5102.5120.5153.5210.5238.5266.5

M 94 94 94104122155212240268

ZZ108108108118136169226254282

MXQ20L-10MXQ20L-20MXQ20L-30MXQ20L-40MXQ20L-50MXQ20L-75MXQ20L-100MXQ20L-125MXQ20L-150

Basic style

(mm)

GA 18 18 18 22 48 73 74 96118

HA 50 50 50 56 48 56112118124

NA444448888

KA—————

126183211239

Note)

Note) Refer to the bottom view of MXQ20L-50.

Note)

∗ For detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster.Rubber stopper (P. 8-5-40)Metal stopper (P. 8-5-43)

Series MXQ

8-5-34

34

∗ Other dimensions are the same as basic style.

∗ Other dimensions are the same as basic style.

With shock absorber (ø20): MXQ20L-��BS/BT/B

With buffer (ø20): MXQ20L-��F

∗ Other dimensions are the same as basic style.

With end lock (ø20): MXQ20L-��R

∗ Other dimensions are the same as basic style.

Axial piping type (ø20): MXQ20L-��P

3560 17.5

Maximum 5413

3-M6 x 1 thread depth 13

Shock absorber at extension end

Shock absorber at retraction end

11.5

6578

.5

Operating port 2-Rc 1/8

Operating port 2-Rc 1/8

18

7 44.5

46.50.5

46.50.5Max. 35

30.5

0.5

42.5

16

14

32

20

26

8

33

34

Extension end35

Retraction end35

Stroke Adjustable Range(mm)

8-5-35

Air Slide Table Series MXQ

MX�

MTS

MY�

CY�

MG�

CX�

D-

-X

20-

Data

35

6H9

dep

th 6

+0.0

30 0

ZZZ

4-M6 x 1 thread depth 10

NA-M8 x 1.25 thread depth 8

Section AA´ Section BB´

Adjuster at extension endRetraction end adjusterø6H9 depth 6+0.030

0

ø6H9 depth 6+0.030 0

Max. 17 (Retraction end adjuster)15IJ

32 11.5

16.5

(A

djus

ter

at e

xten

sion

end

)

8

4 16

225065

3-M8 x 1.25 thread depth 15

1.5

54.5 (Adjuster at extension end)

168

2-M8 x 1.25 thread depth 9 Operating port 2-Rc 1/8

17

22 37

44

6.5

21.5

7

N-M6 x 1 thread depth 11

361.

5

743

84

20 6.5

4038

49.5

0.5

F

2N – 1 x F

30

6H9

dep

th 6

+0.0

30 0

15 M

31K158

31KA158

855

35

Bottom view of MXQ25-75

ø11

ø12ø6.

632 11.5

ø11

ø12

NN-M8 x 1.25 thread depth 16

(NN – 1) x H G

BH

A

7

HA GA

B´A´

Dimensions: MXQ25

Model F554655657560486065

N444446888

G2323232332—443156

H5555556580—446666

NN222223444

I161616161631201818

J 56 56 56 66 90100150205230

K 35 45 55 65 75100125150175

Z105.5105.5105.5115.5139.5164.5203.5256.5281.5

M107107107117141166205258283

ZZ123123123133157182221274299

MXQ25-10MXQ25-20MXQ25-30MXQ25-40MXQ25-50MXQ25-75MXQ25-100MXQ25-125MXQ25-150

Basic style

(mm)

GA 23 23 23 23 32 72 88 97122

HA 55 55 55 65 80 65 88132132

NA444444888

KA——————

170223248

ø6.

6

Note)

Note) Refer to the bottom view of MXQ25-75.

Note)

∗ For detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster.Rubber stopper (P. 8-5-40)Metal stopper (P. 8-5-43)

Series MXQ

8-5-36

36

3-M8 x 1.25 thread depth 15

Shock absorber at extension end

Shock absorber at retraction end

7911

.5

94

Operating port 2-Rc 1/8

Operating port 2-Rc 1/8

21.5

6.5 50

35

54.5 Max. 29

Maximum 5215

54.5

0.5

49.5

16.5

4474

22

20

37

32

17

40

8

40

∗ Other dimensions are the same as basic style.

∗ Other dimensions are the same as basic style.

With shock absorber (ø25): MXQ25-��BS/BT/B

With buffer (ø25): MXQ25-��F

∗ Other dimensions are the same as basic style.

With end lock (ø25): MXQ25-��R

∗ Other dimensions are the same as basic style.

Axial piping type (ø25): MXQ25-��P

Extension end35

Retraction end35

Stroke Adjustable Range(mm)

8-5-37

Air Slide Table Series MXQ

MX�

MTS

MY�

CY�

MG�

CX�

D-

-X

20-

Data

37

Max. 17 (Retraction end adjuster)

15IJ

4-M6 x 1 thread depth 10

NA-M8 x 1.25 thread depth 8

Section AA´ Section BB´

Adjuster at extension end

Retraction end adjusterø6H9 depth 6+0.030 0

ø6H9 depth 6+0.030 0

Z

ZZ16

.5 (A

djus

ter a

t ext

ensio

n en

d)

54.5 (Adjuster at extension end)

8

4 16

7

225065

3-M8 x 1.25 thread depth 15

1.5

168

2-M8 x 1.25 thread depth 9 Operating port 2-Rc 1/8

22

37

44

6.521.5

N-M6 x 1 thread depth 11

361.

5

743

8420 6.5

4038

49.5

0.5

F

2N – 1 x F

30

6H9

dep

th 6

+0.0

30 0

15 M

31KA

31K

8 15

8 15

8

55

Bottom view of MXQ25L-75

32 11.5

ø11 ø12

32 11.5

ø11 ø12

NN-M8 x 1.25 thread depth 16

(NN – 1) x H G

B´HA´

7

HA GA

BA

35

17

6H9

dep

th 6

+0.

030

0

Dimensions: MXQ25L/Symmetric Type

Model F554655657560486065

N444446888

G2323232332—443156

H5555556580—446666

NN222223444

I161616161631201818

J 5656566690

100150205230

K 35 45 55 65 75100125150175

Z105.5105.5105.5115.5139.5164.5203.5256.5281.5

M107107107117141166205258283

ZZ123123123133157182221274299

MXQ25L-10MXQ25L-20MXQ25L-30MXQ25L-40MXQ25L-50MXQ25L-75MXQ25L-100MXQ25L-125MXQ25L-150

Basic style

(mm)

GA 23 23 23 23 32 72 88 97122

HA55555565806588132132

NA444444888

KA——————

170223248

ø6.

6

ø6.

6

Note)

Note) Refer to the bottom view of MXQ25L-75.

Note)

∗ For detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster.Rubber stopper (P. 8-5-40)Metal stopper (P. 8-5-43)

Series MXQ

8-5-38

38

4474

22

Maximum 5215

54.5

3-M8 x 1.25 thread depth 15

Shock absorber at extension end

Shock absorber at retraction end

11.5

79

94

Operating port 2-Rc 1/8

Operating port 2-Rc 1/8

21.5

6.5 50

54.5 Max. 29

350.5

49.5

16.5

17

40

20

32

8

37

40

∗ Other dimensions are the same as basic style.

∗ Other dimensions are the same as basic style.

With shock absorber (ø25): MXQ25L-��BS/BT/B

With buffer (ø25): MXQ25L-��F

∗ Other dimensions are the same as basic style.

With end lock (ø25): MXQ25L-��R

∗ Other dimensions are the same as basic style.

Axial piping type (ø25): MXQ25L-��P

Extension end35

Retraction end35

Stroke Adjustable Range(mm)

8-5-39

Air Slide Table Series MXQ

MX�

MTS

MY�

CY�

MG�

CX�

D-

-X

20-

Data

39

External Dimensions of Adjuster

Extension End

Applicable size

MXQ6(L)

MXQ8(L)

MXQ12(L)

MXQ16(L)

MXQ20(L)

MXQ25(L)

Model

MXQ-AS6(L)

MXQ-AS6(L)-X11

MXQ-AS8(L)

MXQ-AS8(L)-X11

MXQ-AS8(L)-X12

MXQ-AS12(L)

MXQ-AS12(L)-X11

MXQ-AS12(L)-X12

MXQ-AS16(L)

MXQ-AS16(L)-X11

MXQ-AS16(L)-X12

MXQ-AS20(L)

MXQ-AS20(L)-X11

MXQ-AS20(L)-X12

MXQ-AS25(L)

MXQ-AS25(L)-X11

MXQ-AS25(L)-X12

5

15

5

15

25

5

15

25

5

15

25

5

15

25

5

15

25

Strokeadjustment range

(mm)

Body mounting section Table mounting section

A

6

7

9.5

11

13

16

Retraction End

Applicable size

MXQ6(L)

MXQ8(L)

MXQ12(L)

MXQ16(L)

MXQ20(L)

MXQ25(L)

Model

MXQ-AT6(L)

MXQ-AT6(L)-X11

MXQ-AT8(L)

MXQ-AT8(L)-X11

MXQ-AT8(L)-X12

MXQ-AT12(L)

MXQ-AT12(L)-X11

MXQ-AT12(L)-X12

MXQ-AT16(L)

MXQ-AT16(L)-X11

MXQ-AT16(L)-X12

MXQ-AT20(L)

MXQ-AT20(L)-X11

MXQ-AT20(L)-X12

5

15

5

15

25

5

15

25

5

15

25

5

15

25

5

15

25

Strokeadjustment range

(mm)

B C F G M

M5 x 0.8

M6 x 1

M8 x 1

M10 x 1

M12 x 1.25

M14 x 1.5

P ∗1)

M2.5 x 6

M3 x 8

M4 x 12

M5 x 16

M6 x 16

M8 x 18

H J K Q ∗1)

M2.5 x 8

M3 x 10

M4 x 12

M5 x 16

M6 x 16

M8 x 18

16.5

26.5

19.5

29.5

39.5

23.5

33.5

43.5

24.5

34.5

44.5

27.5

37.5

47.5

32.5

42.5

52.5

D

A

17.5

21

28

33.5

41

49

B C F G H J K ∗1) ED

M5 x 0.8

M6 x 1

M8 x 1

M10 x 1

M12 x 1.25

M14 x 1.5

M2.5 x 6

M3 x 8

M4 x 10

M5 x 12

M5 x 14

M6 x 18

Body mounting section

Table mounting section

E

19

22

29

36

45

54

8

9

14

17

20

22

7

7.5

11

13.5

16

18

7

8

12

14

17

19

2.5

3

4

5

6

6

12.5

14.6

18.5

21

25

31

6

7

10.5

13

16

17

8.3

9.8

12.7

15

18

20

∗1) Size of hexagon socket head cap screw∗2) It is also available in the symmetric type.

For “How to Order”, refer to page 8-5-10. Dimensions are the same as standard type.

MXQ-AT25(L)

MXQ-AT25(L)-X11

MXQ-AT25(L)-X12

19

22

29

35.5

44.5

53.5

10.5

12.5

16

20

25

31

8

10

16

17

23

28

16.5

26.5

19.5

29.5

39.5

23.5

33.5

43.5

24.5

34.5

44.5

27.5

37.5

47.5

32.5

42.5

52.5

6

8

10

12

13

15

7

8

12

14

17

19

2.5

3

4

5

6

6

∗1) Size of hexagon socket head cap screw∗2) It is also available in the symmetric type.

For “How to Order”, refer to page 8-5-10. Dimensions are the same as standard type.

Rubber Stopper (AS/AT)

H

J

Q

K

AB

E

P

M

G

D

F

C

E

J

F

BC

DH

G

AK

(mm)

(mm)

Series MXQ

8-5-40

40

Dimensions of Adjusting Bolt/Rubber Stopper

Applicable bore size (mm)Adjustment rangeNil

-X11-X12

MXQ

5 mm15 mm25 mm

MXQ6 MXQ8 MXQ12 MXQ16 MXQ20 MXQ25

ø6 ø8 ø12 ø16 ø20 ø25

12 X11

How to Order Adjusting Bolt/Rubber Stopper

Applicable size

MXQ6(L)

MXQ8(L)

MXQ12(L)

MXQ16(L)

MXQ20(L)

MXQ25(L)

Model

MXQ-A627

MXQ-A627-X11

MXQ-A827

MXQ-A827-X11

MXQ-A827-X12

MXQ-A1227

MXQ-A1227-X11

MXQ-A1227-X12

MXQ-A1627

MXQ-A1627-X11

MXQ-A1627-X12

MXQ-A2027

MXQ-A2027-X11

MXQ-A2027-X12

MXQ-A2527

MXQ-A2527-X11

MXQ-A2527-X12

5

15

5

15

25

5

15

25

5

15

25

5

15

25

5

15

25

Strokeadjustment range

(mm)A B

2.5

3

4

5

6

6

C

716.5

26.5

19.5

29.5

39.5

23.5

33.5

43.5

24.5

34.5

44.5

27.5

37.5

47.5

32.5

42.5

52.5

8

12

14

17

19

MD

3

3.5

4

4

5

6

M5 x 0.8

M6 x 1

M8 x 1

M10 x 1

M12 x 1.25

M14 x 1.5

A 27

B D C

A

M

∗ -X12 (adjusting range: 25 mm) is not available in Series MXQ6.∗ For dimensions, refer to the figure above. ∗ Symmetric type is also the same.

(mm)

8-5-41

Air Slide Table Series MXQ

MX�

MTS

MY�

CY�

MG�

CX�

D-

-X

20-

Data

41

Extension End

Applicable size

MXQ8(L)MXQ12(L)MXQ16(L)MXQ20(L)MXQ25(L)

Model

MXQ-BS8(L)

MXQ-BS12(L)

MXQ-BS16(L)

MXQ-BS20(L)

MXQ-BS25(L)

Strokeadjustment range

(mm)

Body mounting section Table mounting section

A

Retraction End

Applicable size

MXQ8(L)MXQ12(L)MXQ16(L)MXQ20(L)MXQ25(L)

Model

MXQ-BT8(L)

MXQ-BT12(L)

MXQ-BT16(L)

MXQ-BT20(L)

MXQ-BT25(L)

20

18

22

35

35

Strokeadjustment range

(mm)

B C F G MM8 x 1

M8 x 1

M10 x 1

M14 x 1.5

M14 x 1.5

P *1)

M3 x 12

M4 x 12

M5 x 16

M6 x 18

M8 x 18

H J K Q ∗1)

M3 x 12

M4 x 12

M5 x 16

M6 x 20

M8 x 20

D

A B C E1 G H J K ∗1) ED

M8 x 1

M8 x 1

M10 x 1

M14 x 1.5

M14 x 1.5

Body mounting section Table mounting section

E

∗1) Size of hexagon socket head cap screw∗2) It is also available in the symmetric type.

For “How to Order”, refer to page 8-5-10.Dimensions are the same as standard type.

∗1) Size of hexagon socket head cap screw∗2) It is also available in the symmetric type.

For “How to Order”, refer to page 8-5-10.Dimensions are the same as standard type.

With Shock Absorber (BS/BT)

23

28

33.5

43

49

24.5

29

35.5

46

53.5

12.5

16

20

26

31

14

16

17

25

28

40.8

40.8

46.7

67.3

67.3

5

6

7

11

12

F

8

10

12

13

15

12

12

14

19

19

1.4

1.4

1.4

12

12

M3 x 8

M4 x 10

M5 x 12

M5 x 14

M6 x 18

20

18

22

35

35

7

9.5

11

13

16

24.5

29

36

46

54

14

14

17

22

22

12.5

11

13.5

17.5

18

LE140.8

40.8

46.7

67.3

67.3

5

6

7

11

12

12

12

14

19

19

1.4

1.4

1.4

12

12

16.6

20.5

23

27

33

8

11

13.5

17

19

12

13

16

22

22

14.6

18.5

21

25

31

MXQ-BT20(L)MXQ-BT25(L)

H

MXQ-BT8(L)MXQ-BT12(L)MXQ-BT16(L)

MXQ-BS8(L)MXQ-BS12(L)MXQ-BS16(L)

MXQ-BS20(L)MXQ-BS25(L)

G

D

F

C

G

P

M

E E1

B

A

Q

J

H

L

K

J

EF

E1D

AK

H

BC

G

External Dimensions of Adjuster

(mm)

(mm)

Series MXQ

8-5-42

42

External Dimensions of Adjuster

Extension End

Applicable size

MXQ6(L)

MXQ8(L)

MXQ12(L)

MXQ16(L)

MXQ20(L)

MXQ25(L)

Model

MXQ-CS6(L)

MXQ-CS6(L)-X11

MXQ-CS8(L)

MXQ-CS8(L)-X11

MXQ-CS8(L)-X12

MXQ-CS12(L)

MXQ-CS12(L)-X11

MXQ-CS12(L)-X12

MXQ-CS16(L)

MXQ-CS16(L)-X11

MXQ-CS16(L)-X12

MXQ-CS20(L)

MXQ-CS20(L)-X11

MXQ-CS20(L)-X12

MXQ-CS25(L)

MXQ-CS25(L)-X11

MXQ-CS25(L)-X12

5

15

5

15

25

5

15

25

5

15

25

5

15

25

5

15

25

Strokeadjustment range

(mm)

Body mounting section Table mounting section

A

6

7

9.5

11

13

16

Retraction End

Applicable size

MXQ6(L)

MXQ8(L)

MXQ12(L)

MXQ16(L)

MXQ20(L)

MXQ25(L)

Model

MXQ-CT6(L)

MXQ-CT6(L)-X11

MXQ-CT8(L)

MXQ-CT8(L)-X11

MXQ-CT8(L)-X12

MXQ-CT12(L)

MXQ-CT12(L)-X11

MXQ-CT12(L)-X12

MXQ-CT16(L)

MXQ-CT16(L)-X11

MXQ-CT16(L)-X12

MXQ-CT20(L)

MXQ-CT20(L)-X11

MXQ-CT20(L)-X12

5

15

5

15

25

5

15

25

5

15

25

5

15

25

5

15

25

Strokeadjustment range

(mm)

B C F G M

M5 x 0.8

M6 x 1

M8 x 1

M10 x 1

M12 x 1.25

M14 x 1.5

P *1)

M2.5 x 6

M3 x 8

M4 x 12

M5 x 16

M6 x 16

M8 x 18

H J K Q ∗1)

M2.5 x 8

M3 x 10

M4 x 12

M5 x 16

M6 x 20

M8 x 20

15.5

25.5

18

28

38

22

32

42

23

33

43

27

37

47

30

40

50

D

A

17.5

21

28

33.5

41

49

B C F G H J K ∗1) ED

M5 x 0.8

M6 x 1

M8 x 1

M10 x 1

M12 x 1.25

M14 x 1.5

M2.5 x 6

M3 x 8

M4 x 10

M5 x 12

M5 x 14

M6 x 18

Body mounting section

Table mounting section

E

19

22

29

36

45

54

8

9

14

17

20

22

7

7.5

11

13.5

16

18

7

8

12

14

17

19

2.5

3

4

5

6

6

14.5

16.6

20.5

23

27

33

7

8

11

13.5

17

19

8.3

9.8

13

16

22

22

MXQ-CT25(L)

MXQ-CT25(L)-X11

MXQ-CT25(L)-X12

19

22

29

35.5

44.5

53.5

10.5

12.5

16

20

25

31

8

10

16

17

23

28

15.5

25.5

18

28

38

22

32

42

23

33

43

27

37

47

30

40

50

6

8

10

12

13

15

7

8

12

14

17

19

2.5

3

4

5

6

6

Metal Stopper (CS/CT)

L

12.5

14.6

18.5

21

25

31

AB

E

P

M

G

D

F

C

E

J

F

BC

DH

G

AK

Q

J

H

L

K

∗1) Size of hexagon socket head cap screw∗2) It is also available in the symmetric type.

For “How to Order”, refer to page 8-5-10. Dimensions are the same as standard type.

∗1) Size of hexagon socket head cap screw∗2) It is also available in the symmetric type.

For “How to Order”, refer to page 8-5-10. Dimensions are the same as standard type.

(mm)

(mm)

8-5-43

Air Slide Table Series MXQ

MX�

MTS

MY�

CY�

MG�

CX�

D-

-X

20-

Data

43

Dimensions of Adjusting Bolt/Metal Stopper

Applicablesize

MXQ6(L)

MXQ8(L)

MXQ12(L)

MXQ16(L)

MXQ20(L)

MXQ25(L)

Model

MXQ-A638

MXQ-A638-X11

MXQ-A838

MXQ-A838-X11

MXQ-A838-X12

MXQ-A1238

MXQ-A1238-X11

MXQ-A1238-X12

MXQ-A1638

MXQ-A1638-X11

MXQ-A1638-X12

MXQ-A2038

MXQ-A2038-X11

MXQ-A2038-X12

MXQ-A2538

MXQ-A2538-X11

MXQ-A2538-X12

5

15

5

15

25

5

15

25

5

15

25

5

15

25

5

15

25

Strokeadjustment range

(mm)A B

2.5

3

4

5

6

6

C

715.5

25.5

18

28

38

22

32

42

23

33

43

27

37

47

30

40

50

8

12

14

17

19

MD

3

3.5

4

4

5

6

M5 x 0.8

M6 x 1

M8 x 1

M10 x 1

M12 x 1.25

M14 x 1.5

C

A

DMB

How to Order Adjusting Bolt/Metal Stopper

Applicable bore size (mm)Adjustment rangeNil

-X11-X12

MXQ

5 mm15 mm25 mm

MXQ6MXQ8MXQ12MXQ16MXQ20MXQ25

ø6 ø8 ø12 ø16 ø20 ø25

12 X11A 38

∗ -X12 (adjusting range: 25 mm) is not available in Series MXQ6.∗ For dimensions, refer to the figure above. ∗ Symmetric type is also the same.

(mm)

Series MXQ

8-5-44

44

Construction

No.q

w

e

r

t

y

DescriptionBodyTable End plateGuide blockCoverReturn guideScraperRodPiston assembly Rod coverSeal supportHead capFloating bushingRod bumperEnd bumperSteel ballsParallel pinPiston sealRod sealO-ring

u

i

o

!0

!1

!2

!3

!4

!5

!6

!7

!8

!9

@0

Aluminum alloyStainless steelAluminum alloyStainless steelSynthetic resinSynthetic resin

Stainless steel, NBRStainless steel

Aluminum alloyBrass

Synthetic resinStainless steelPolyurethanePolyurethane

High carbon chrome bearing steel

Stainless steelNBRNBRNBR

MaterialHard anodizedHeat treated

Hard anodizedHeat treated

With magnet on one side

AnodizedElectroless nickel plated

Note

Component Parts

No.@1

@2

@3

@4

@5

DescriptionEnd plateSpring collarHead capSpringMagnet

Aluminum alloyStainless steelStainless steelStainless steel

Rare earth

Material NoteHard anodized

Component Parts: With Buffer

Replacement Parts: Seal Kit

68

12162025

Bore size (mm)

No.@6

@7

@8

@9

#0

#1

#2

#3

#4

#5

#6

DescriptionLocking bodyTable support Rod coverPiston rodBushingBlanking plug Return springPiston sealRod sealO-ringO-ring

Aluminum alloyCarbon steel

Aluminum alloyStainless steelAluminum alloy

BrassStainless steel

NBRNBRNBRNBR

MaterialHard anodized

Anti-corrosive treated

ChromatedElectroless nickel plated

Note

Component Parts: With End Lock

No.#7

#8

#39

$0

$1

$2

$3

$4

DescriptionAxial piping plate PipeBushingStudO-ringO-ringGasketO-ring

Aluminum alloyAluminum alloyAluminum alloy

BrassNBRNBR

NBR, Stainless steelNBR

MaterialHard anodizedHard anodized

ChromatedElectroless nickel plated

Note

Component Parts: Axial Piping Type

With buffer With end lock Axial piping type

Kit no.

MXQ6-PSMXQ8-PSMXQ12-PSMXQ16-PSMXQ20-PSMXQ25-PS

Contents

Set of nos. above

!8 to @0

(1 set)

Replacement Parts:Seal Kit for Axial Piping Type

68

12162025

Bore size (mm) Kit no.

MXQ6P-PSMXQ8P-PSMXQ12P-PSMXQ16P-PSMXQ20P-PSMXQ25P-PS

Contents

Set of nos. above!8 to @0, $1 to $4

Replacement Parts: Seal Kit for with End Lock

812162025

Bore size (mm) Kit no.

MXQ8R-PSMXQ12R-PSMXQ16R-PSMXQ20R-PSMXQ25R-PS

Contents

Set of nos. above

!8 to @0

#3 to #6

w

Set of nos. above!8 to @0, $1 to $4

u y

t

!6 r

!5

!3

e

!1 !9 !0 i !4 o !8 q @0

!2

@3 @1 @4 @5 @2 #0 #1 #6 #5 @6 #2

#3

#4

@8

@9

@7

!7

$4 #8 $0 $3 $2

#7

$1

#9

∗ Seal kit includes these seals to provide as a set. Order the seal kit, based on each bore size.

8-5-45

Air Slide Table Series MXQ

MX�

MTS

MY�

CY�

MG�

CX�

D-

-X

20-

Data

45

Proper Auto Switch Mounting Position (Detection at stroke end)

MXQ6MXQ8MXQ12MXQ16MXQ20MXQ25

6

7.5

11.5

16.5

19

22

Reed Switch: D-A90, D-A93, D-A96, D-A90V, D-A93V, D-A96V

10

5.5

8

24.5

30.5

43.5

52.5

20

5.5

8

14.5

20.5

33.5

42.5

30

5.5

12

14.5

20.5

23.5

32.5

125

51.5

74.5

88.5

75

32

40.5

33.5

39.5

46.5

100

40.5

51.5

71.5

60.5

Stroke

BStroke

E

Model A40

13.5

16

21.5

20.5

33.5

32.5

50

13.5

31

21.5

26.5

31.5

46.5

150

77.5

88.5

10 20 30 125

75

100

40 50 150

MXQ6

MXQ8

MXQ12

MXQ16

MXQ20

MXQ25

10

11.5

15.5

20.5

23

27

Solid State Switch: D-M9B, D-M9N, D-M9P, D-F9BW, D-F9NW, D-F9PW

10

9.5

12

28.5

34.5

47.5

56.5

20

9.5

12

18.5

24.5

37.5

46.5

30

9.5

16

18.5

24.5

27.5

36.5

125

55.5

78.5

92.5

75

36

44.5

37.5

43.5

50.5

100

44.5

55.5

75.5

64.5

Stroke

BStroke

E

Model A40

17.5

20

25.5

24.5

37.5

36.5

50

17.5

35

25.5

30.5

35.5

50.5

150

81.5

92.5

10 20 30 125

75

100

40 50 150

Solid State Switch: D-M9BV, D-M9NV, D-M9PV, D-F9BWV, D-F9NWV, D-F9PWV

–0.5

3.5 (1)

6 (3.5) 22.5

(20) 28.5

(26) 41.5

(39) 50.5

(48)

3.5 (1)

6 (3.5) 12.5

(10) 18.5

(16) 31.5

(29) 40.5

(38)

3.5 (1) 10 (7.5) 12.5

(10) 18.5

(16) 21.5

(19) 30.5

(28)

11.5 (9) 14

(11.5) 19.5

(17) 18.5

(16) 31.5

(29) 30.5

(28)

11.5 (9) 29

(26.5) 19.5

(17) 24.5

(22) 29.5

(27) 44.5

(42)

30 (27.5)

38.5 (36)

31.5 (29)

37.5 (35)

44.5 (42)

38.5 (36)

49.5 (47)

69.5 (67)

58.5 (56)

49.5 (47)

72.5 (70)

86.5 (84)

77.5 (75)

77.5 (75)

–0.5 –0.5 7.5 7.5

2 2 6 10 25

18.5 8.5 8.5 15.5 15.5

24.5 14.5 14.5 14.5 20.5

37.5 27.5 17.5 27.5 25.5

46.5 36.5 26.5 26.5 40.5

26

34.5 34.5

27.5 45.5 45.5

33.5 65.5 68.5 73.5

40.5 54.5 82.5 73.5

∗ ( ): Denotes D-A93.

A E

B

Caution

MXQ6MXQ8MXQ12MXQ16MXQ20MXQ25

10

11.5

15.5

20.5

23

27

10

9.5

12

28.5

34.5

47.5

56.5

20

9.5

12

18.5

24.5

37.5

46.5

30

9.5

16

18.5

24.5

27.5

36.5

125

55.5

78.5

92.5

75

36

44.5

37.5

43.5

50.5

100

44.5

55.5

75.5

64.5

Stroke

BStroke

E

Model A40

17.5

20

25.5

24.5

37.5

36.5

50

17.5

35

25.5

30.5

35.5

50.5

150

81.5

92.5

10

1.5

4

20.5

26.5

39.5

48.5

20

1.5

4

10.5

16.5

29.5

38.5

30

1.5

8

10.5

16.5

19.5

28.5

125

47.5

70.5

84.5

75

28

36.5

29.5

35.5

42.5

100

36.5

47.5

67.5

56.5

40

9.5

12

17.5

16.5

29.5

28.5

50

9.5

27

17.5

22.5

27.5

42.5

150

75.5

75.5

Mounting of Auto Switch Operating Range

Set screw (included with auto switch)

Auto switch

Watchmakers’ screwdriver

Other than the applicable auto switches listed in “How to Order”, the following auto switches can be mounted.For detailed specifications, refer to page 8-30-1.

∗ Normally closed (NC = b contact), solid state switch (D-F9G/F9H type) are also available. For details, refer to page 8-30-31.

Type Model Features

Without indicator light

Electrical entry(Fetching direction)

D-A90D-A90V

Grommet (In-line)Grommet (Perpendicular)

Reed switch

D-A9/A9�VD-M9�/M9�VD-F9�W/F9�WV

6

4.5

2 (2.5)

8

5

2.5 (2.5)

12

6

3 (3)

16

7

4 (3)

20

8

6 (3.5)

25

9

6 (3.5)

Applicable bore size (mm)Auto switch model

Auto Switch Mounting Tool• When tightening the auto switch mounting screw

(included with auto switch), use a watchmakers’ screwdriver with a handle about 5 to 6 mm in diameter.

Tightening Torque• Use a torque of approximately 0.05 to 0.1 N·m. As a

guide, it can be tightened about 90° past the position at which tightening can be felt.

Note) Figures in parentheses are the cases for D-M9�, D-M9�V switch types.

Series MXQ

8-5-46

46