al parts introduction · 2006. 2. 2. · rainbow 4528 dome electrode 715-011986-018 al 6061 40...
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AL Parts IntroductionAL Parts Introduction
Semiconductor Technology America Inc.Semiconductor Technology America Inc.4773 Pacific Av, Eugene, OR 974024773 Pacific Av, Eugene, OR 97402
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LAM PARTS LISTLAM PARTS LIST
TEL PARTS LISTTEL PARTS LIST
AME PARTS LISTAME PARTS LIST
LCD PARTS LISTLCD PARTS LISTN0 PROCESS EQUIPMENT DESCRIPTION VENDOR NO. MATERIAL REMARK
1 CVD AKT1600 L1 DIFFUSER 0020-66635 AL ANODIZING SAMSUMG,HYDIS
2 CVD AKT3500 L2 DIFFUSER 0020-71967 AL ANODIZING SAMSUMG,HYDIS
3 CVD AKT4300 L3 DIFFUSER 0020-74691 AL ANODIZING SAMSUMG,HYDIS
4 CVD AKT4300 L3 SHADOW FRAME - AL ANODIZING SAMSUMG,HYDIS
5 CVD AKT5500 L4 DIFFUSER - AL ANODIZING SAMSUMG,HYDIS
6 CVD AKT5500 L4 SHADOW FRAME - AL ANODIZING SAMSUMG,HYDIS
7 CVD AKT 15K L5 DIFFUSER - AL ANODIZING SAMSUMG,HYDIS
8 CVD EUREKA P5 SHOWER HEAD 373-66-004 AL ANODIZING JUSUNG,LG PHILIPS
9 CVD AKT 15K P5 SUSCEPTER - AL ANODIZING JUSUNG,LG PHILIPS
10 CVD EUREKA P6 SHOWER HEAD 373-66-008 AL ANODIZING JUSUNG,LG PHILIPS
11 DRY ETCH PSC L3 BOTTOM ELECTRODE SP2-60824(A) AL ANODIZING SAMSUMG,HYDIS
12 DRY ETCH PSC L3 CATHODE (EMBOSS) - AL ANODIZING SAMSUMG,HYDIS
13 DRY ETCH TEL L3 BOTTOM ELECTRODE(RIE) 1A10-102253-11 AL ANODIZING SAMSUMG,HYDIS
14 DRY ETCH TEL L3 BOTTOM ELECTRODE(PE) 1A10-102023-11 AL ANODIZING SAMSUMG,HYDIS
15 DRY ETCH TEL L3TEL UPPER CATHODE 1A10-201720-13 AL ANODIZING SAMSUMG,HYDIS
16 DRY ETCH TEL L4 TEL UPPER CATHODE - AL ANODIZING SAMSUMG,HYDIS
APPLICATION
EQUIPMENTD E S C R I P T I O N
ORIGNAL
VENDOR NO.MATERIAL ANODIZING REMARKS
TEL DRM2 UNITY 85DD
ELECTRODE UPPER 1D10-201429-15 AL 6061 40 ∼ 60 ㎛ MANUFACTURE
TEL DRM2 UNITY 85 DD PART
APPLICATION
EQUIPMENTD E S C R I P T I O N
ORIGNAL
VENDOR NO.MATERIAL ANODIZING REMARKS
MXP CENTURA 5200
CHAMBER WALL LINER
0020-34694 AL 6061 40 ∼ 60 ㎛ PRODUCT & REPAIR
MXP CENTURA 5200 PART
APPLICATION
EQUIPMENTD E S C R I P T I O N
ORIGNAL
VENDOR NO.MATERIAL ANODIZING REMARKS
TEL 8500 PC UEL BODY UNITY 1810-120660-13 AL 6061 15 ∼ 30 ㎛ MANUFACTURE
TEL UNIT 8500 PART
APPLICATION
EQUIPMENTD E S C R I P T I O N
ORIGNAL
VENDOR NO.MATERIAL ANODIZING REMARKS
RAINBOW 4528 DOME ELECTRODE 715-011986-018 AL 6061 40 ∼ 60 ㎛ MANUFACTURE
LAM RAINBOW 4528 PART
APPLICATION
EQUIPMENTD E S C R I P T I O N
ORIGNAL
VENDOR NO.MATERIAL ANODIZING REMARKS
TCP 9608SECHAMBER LINER
RINGHDL96-5070L(R1) AL 6061 40 ∼ 60 ㎛ MANUFACTURE
LAM TCP 9608SE PART
APPLICATION
EQUIPMENTD E S C R I P T I O N
ORIGNAL
VENDOR NO.MATERIAL ANODIZING REMARKS
AME P-5000 SHOWER HEAD - AL 6061 15 ∼ 30 ㎛ MANUFACTURE
AME P - 5000 (CVD) PART
APPLICATION
EQUIPMENTD E S C R I P T I O N
ORIGNAL
VENDOR NO.MATERIAL ANODIZING REMARKS
AME P- 5000CHAMBER STD 200MM
0040-09094 AL 6061 - MANUFACTURE
AME P - 5000 (CVD) PART
AME DPS UPPER CHAMBER (MEATAL) PART
APPLICATION
EQUIPMENTD E S C R I P T I O N
ORIGNAL
VENDOR NO.MATERIAL ANODIZING REMARKS
CENTURA 5200 DPS UPPER CHAMBER(M) 0021-09601 AL 6061 60 ∼ 70 ㎛ MANUFACTURE
AME DPS UPPER CHAMBER(POLY) PART
APPLICATION
EQUIPMENTD E S C R I P T I O N
ORIGNAL
VENDOR NO.MATERIAL ANODIZING REMARKS
CENTURA 5200 DPS UPPER CHAMBER(P) 0020-33806 AL 6061 60 ∼ 70 ㎛ MANUFACTURE
AME E-MAX WALL LINER PART
APPLICATION
EQUIPMENTD E S C R I P T I O N
ORIGNAL
VENDOR NO.MATERIAL ANODIZING REMARKS
AME E-MAXCHAMBER WALL LINER
0040-03265 AL 6061 60 ∼ 70 ㎛ MANUFACTURE