all-polymer based fabrication process for an all-polymer flexible and parallel optical...
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All-polymer based fabrication process for an all-polymer flexible and parallel optical interconnect
Jilin Yang, Tao Ge, Chris Summitt, Sunglin Wang, Tom Milster, Yuzuru Takashima
College of Optical Sciences, University of Arizona1630 E. University Blvd., Tucson, AZ, USA 85721
Email: [email protected]
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OutlineIntroduction
Fabrication process - Process flow
- 45 degree mirror couplers - Waveguides photomask - Alignment process
Test results
Conclusions
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Introduction
Structure of Flexible Optical Interconnect:
Advantages:
High speed Flexible Metal less Maskless lithography
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Mirror coupler
The maskless lithography tool - Modulated Scanning Laser system at 365 nm - 2.1 address unit - Writing stage with X,Y and Z controlled motion - Print via BMP virtual masks over 1 in around 20 sec
Materials - Substrate: TOPAS 5013 (TOPAS advanced polymers, Inc, Florence KY) - Cladding: Epoclad (Micro resist technology, Berlin Germany), n=1.54 - Mirror and alignment marks: WPR 5100 (JSR Corporation, Sunnyvale CA) - Waveguides: AP2210B (Fujifilm, Valhalla, NY), n=1.60
Materials
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Process flow
Si wafer
Attached by polyimide tape
Coated with WPR 5100 and exposed by maskless lithography tool
45 degree mirror couplers and alignment marks left
Coated with cladding material
Coated with AP2210B and exposed using mask lithography
Waveguides structure left after developing
Coated with top cladding material
Remove Si wafer
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45 degree mirror couplers20
100
1.5
Alignment marks
Cross section of mirror strip under SEMAngle of slope=44.3
Gray scale bitmap pattern of mirror layer (Top View)
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Waveguides photomask
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Photomask for waveguides
Fused silica substrate
E-beam Cr coating
Spin coating AZ 3312
UV laser exposure
Development
Dissolve
Wash out
Gray scale bitmap pattern of mirror layer (Top View)
Alignment marks
Alignment mark
Waveguides material10
1.5
Waveguides material Index of refraction @ 530 nmAP2210B 1.6093
Alignment mark material Index of refraction @ 530 nmWPR 5100 1.6790
Optical path difference @ 530 nm:
- Due to the transparent materials and weak phase shift of the reflection light, it’s very difficult to be detected by conventional microscopy.
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Detection microscopyPhase contrast microscopy in reflection mode
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Phase contrast technique
/2
Test results
Alignment mark
Waveguides material10
1.5
Image obtained by objective with 5X magnification and 0.11 NA
Top view
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Alignment mark
Waveguides material10
1.5
Image obtained by objective with 5X magnification and 0.11 NA
Top view
Optimization
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Alignment process
Objective
Objective
Beamsplitter
Photomask Holder
Adjustable stage
Original:
Engineered:
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Alignment process
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Conclusions
• Proposed a fabrication process of all polymer flexible optical interconnect
• Phase-based alignment marks engineering combined with phase contrast detection technique increases 93% of the image contrast of the phase-based alignment marks
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Next step
• Print the well structured waveguides
• Following the process flow to complete the fabrication of optical interconnect and test the propagation performance
Acknowledgement
Sincere appreciation to JSR Micro, Inc. for providing WPR-5100 buffer coat material in the fabrication of the mirrors.
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Thank you
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