amec company introduction - skku

© 2017 AMEC All rights reserved. Confidential.

AMEC Company Introduction 2017.4.10



AMEC Headquarter in Shanghai

Established in 2004, AMEC occupies 28,000 m2 , including a 1,000 m2 Etch Lab, 4,500 m2 manufacturing clean room and 6,500 m2 warehouse. AMEC now has 580 employees with 10 nationalities and 18 VPs with 6 nationalities.

AMEC Video

E:/AMEC_VIDEO.mp4

E:/AMEC_VIDEO.mp4


Class 100

AMEC Building 1- Plasma Etch Lab (1000m2)


AMEC Bldg-2 Phase 1 Manufacturing Clean Room (3000m2)

Sub assembly line Chamber assembly bays

Bldg-2 Phase 2 Additional MF Clean Room 1500m2 will be ready in 2017

3

Final assembly & Test Bay

© 2017 AMEC All rights reserved. Confidential. 5

AMEC Building-2- Storage Area (6500m2)


Taiwan Chunan

AMEC MF Center

Started in 2011

Korea Osan

Application Center

Started in 2013

AMEC MF Center in Taiwan and App Center in Korea


AMEC Investors (Dec/2015)


AMEC Cayman LP

AMEC 中微国际 International

Japan Region

SEA Region

Korea Region

In Singapore

中微（上海）

AMEC

AMEC is Being Restructured to Set Up Shanghai Holding

8

Taiwan Region

China Mainland

AMEC Wisetron

Sino IC SHSVC Walden Qualcomm XC PE CICC

US Region


SEMI Distinguished Veterans Support AMEC

Koichi Suzuki Advisor Former Member of the Board of Toshiba and President of Toshiba Semiconductor Group

Albert Yu, Advisor Former Senior VP of Intel

Lip-Bu Tan Board Director Chairman of Walden International and CEO of Cadence

Joe Bronson Advisor Former Member of President Office and CFO of Applied Materials

Larry Yoshida Board Director Former President of Tokyo Electron

Susan Overstreet Advisor Former VP of Applied Materials

Dariush Rafinejad Advisor Former VP of Applied Materials

Dave Crivelli Advisor Former HR VP Novellus

Jane Evans Ryan Advisor Principal of Genuity, Advisor


AMEC Market Development Strategy

Semi

Other Micro-Fab

AMEC serves high end etch/CVD

equipment market

Semi Front End $5B

PK, LED MEMS Will be >$1B

LED Power Device Will be >$1B

Other Micro Fabrication

MOCVD

TSV

CCP Etch ICP Etch

More Etch & CVD


AMEC Etch and MOCVD Become WW Top Tier Products

CCP Etcher

> 380 Stations

Run >40M wfs

Qualified for 10nm

Selected for 7nm

ICP Etcher MOCVD

New Product with

adv. design

Start Beta eval at

China leading

foundry

1st Gen qualified at 8 China LED fabs

Processed 700K wfs 2nd Gen (28”)

qualified with volume order

TSV/MEMS

>90 stations for

CIS/MEMS etching

Production at Europe

leading MEMS Fabs

VOC

• Qualified at China leading LCD fab

• Will get volume order

AMEC is focusing on high end critical products in the fields of etch and thin film.


2004 ~2007 2008 2009 2010 2011 2012 2013 2014

成立

AMEC Customer Portfolio – 30 Customers at 39 Fabs

2015 2016


AMEC Etch and MOCVD Install Base Growth Momentum

AMEC’s D-Etch, TSV/MEMS Etcher and MOCVD products, including 753 chambers and stations, are estimated

to be shipped to 39 FABs worldwide. They produced 40M wafers with stable device yield and high uptime.

22 66 104 131

182 260

350

465

565

6 12 24 60 80 88 100 114 4 11 13 17 74

22 72

116 155

246

351

451

582

753

0

100

200

300

400

500

600

700

800

0

100

200

300

400

500

600

2009 2010 2011 2012 2013 2014 2015 2016 F'2017

AMEC Install Base by Product (Process Stations) 2009 thru 2016

D-Etch

TSV/ICP

MOCVD

Total

59%

43%

34%

29%

28%

29%


AMEC Etchers and MOCVD Installed Base （ by 12/ 2016 ）

Taiwan Fabs = 10 Stations = 290

Singapore Fabs = 2 Stations = 18

China Fabs = 22 Stations = 226

D-

Etch,

12

TSV,

6

Korea Fabs = 2 Stations = 40 D-Etch,

40

Europe Fabs = 2 Stations = 4

D-

Etch,

145

TSV /

ICP,

64

MO,

17

D-Etch,

264

TSV, 26

Russia Fabs = 1 Stations = 4 D-Etch, 4

TSV,

4

39 Production Fabs

Product D-ETCH TSV / ICP MOCVD TOTAL

Stations 465 100 17 582


AMEC Dielectric CCP Etch Products

Primo D-RIE® Provide innovative solutions for semiconductor device fabrication at 65/28nm nodes

Primo AD-RIE® Provide innovative solutions for semiconductor device fabrication at 28/15nm nodes

Primo SSC AD-RIETM

Provide innovative solutions for semiconductor device fabrication at 20/10nm nodes

Primo iDEATM

Provide innovative integrated solutions for etch and photo-resist removal

Dielectric etch tools have processed over 40 million wafers with consistently stable yield


Primo SSC-ICP Platform- High T-put, Small Footprint

Platform Foot Print

T-put: >180WPH Mechanical T-put for 6PMs Foot print: >40% Smaller than Competitors


Adv. Gate & STI

Primo nanovaTM Target Applications

Target Applications: Gate, STI, DPT/QPT, Metal HM, FinFET, Vertical NAND

FinFET

DPT / QPT

DD Metal HM

Vertical NAND

As printed Post QPT


AMEC 200mm & 300mm Primo TSV Etcher


AMEC Prismo D-Blue® MOCVD for LED and GaN Power Devices

1st Gen: 19 inch

2nd Gen: 28 inch


AMEC Has More Than 350 Suppliers Globally

Swagelok Brooks Rohm & Haas Durex FTS GreeneTweed Thermofusion Yarde BOC Valex Persimmon MKS UCT Ferrotec-US KLA CAS Morgan Ceramic

US

SKC Solmics Worldex KSM CoorsTek KoMiCo Moreco Robotstar Ilsenneo

Osaka Shinko Rorze Techno SMC Sanwa Pearl NGK Mitsui YDK MPC Horiba Fujikin Mirapro Nikkoshi TOTO NDK NHK TDK Kyocera HITACHI

Foxsemicon MIC Ares Green Chenfull SIC SCH Kova Calitech Forcera Zhongxing

越南

Global CyberSoft Rorze

Watlow Eratech ETL Cellergy CEI Professional Plastic

Japan

South Korea

Taiwan

Singapore

Vietnam

Beiyu Swagelok ENI (MKS) Injet Foxsemicon Ferrotec Techno Winway Xinya Highlight UCT TT KoMiCo Tocalo GUHE Mitsui Antai Sprint Tech Mirapro Dongda Fiesta Shijia Tianfu Dihui Bei Optic

Alcatel VAT Comet Xycarb

China

Europe > 90 Major Suppliers


AMEC Has Filed Over 1,000 Patents with 433 Granted

Gold Award 2013 by WIPO (World

Intellectual Property Office) and SIPO

(State Intellectual Property Office of

the People’s Republic of China)

The 1st Prize - Invention Patent

Award by Shanghai Municipal

Human Resources and Social

Security Bureau and SIPO

Excellent Patent Award 2014

by WIPO and SIPO

Plasma Etch (In Process + Granted) MOCVD (In Process + Granted)

China 338 + 144 38 + 55

Taiwan 131 + 133 22 + 44

JP 7 + 7 0 + 7

KR 5 + 13 5 +10

US 16 + 15 15 + 5

PCT filing 0 2 + 0

Sub-total 497 + 312 82 + 121

Total 579 + 433 = 1012


THANKS

amec company introduction - skku

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