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Page 1: AMOLED Manufacturing Process Report...AMOLED Manufacturing Process Report. 2018. SAMPLE. AMOLED Manufacturing Process Report. · The report analyzes the structure and manufacturing

AMOLED Manufacturing Process Report

2018

SAMPLE

Page 2: AMOLED Manufacturing Process Report...AMOLED Manufacturing Process Report. 2018. SAMPLE. AMOLED Manufacturing Process Report. · The report analyzes the structure and manufacturing

AMOLED Manufacturing Process Report

· The report analyzes the structure and manufacturing process by dividing AMOLED into small &

medium-sized rigid OLED, small & medium-sized flexible OLED and large-area rigid OLED with * 6chapters. In addition, by describing the latest processes of Samsung Display and LG Display, itaims to help our customers to understand the latest process and analyze future developmentdirection.

*1) AMOLED Structure2) AMOLED Panel Manufacturing Process3) Inspection Process for Small and Medium sized AMOLED Panel4) Samsung Display’s 9 mask LTPS TFT Manufacturing process5) Samsung Display’s 13 mask LTPS TFT Manufacturing process6) LG Display’s Oxide TFT Manufacturing process

· For further details of the supply chain, emitting materials and market track, it is recommendable to refer to the reports ** mentioned below.

**1) Supply Chain Analysis 2) Emitting Material Industry 3) Material & Component Industry4) Manufacturing and Inspection Equipment Industry5) Market Track

2@ 2018. UBI Research. All rights reserved.

Page 3: AMOLED Manufacturing Process Report...AMOLED Manufacturing Process Report. 2018. SAMPLE. AMOLED Manufacturing Process Report. · The report analyzes the structure and manufacturing

Table of Contents

3@ 2018. UBI Research. All rights reserved.

1. AMOLED Structure 04

2. AMOLED Panel Manufacturing Process 20

3. Inspection Process for Small and Medium sized AMOLED Panel 88

4. Samsung Display’s 9 mask LTPS TFT Manufacturing process 99

1.1 Substrate1.2 TFT1.3 Color Filter1.4 OLED Pixel1.5 Encapsulation1.6 Touch Screen Panel1.7 Module1.8 General

2.1 Substrate2.2 TFT2.3 OLED Pixel2.4 Encapsulation2.5 Cell2.6 Module

3.1 Substrate3.2 TFT3.3 Fine Metal Mask3.4 OLED Pixel3.5 Thin Film Encapsulation3.6 Hybrid Encapsulation3.7 Laser Lift Off3.8 Cell Cutting3.9 Main OLED inspection and measuring equipment

4.1 Buffer Layer and Active Layer4.2 Gate Insulator 14.3 Gate Electrode 1 4.4 Gate Insulator 24.5 Gate Electrode 24.6 Interlayer4.7 Source / Drain Electrode4.8 Planarization layer4.9 Pixel Electrode4.10Pixel Define Layer4.11 General

Page 4: AMOLED Manufacturing Process Report...AMOLED Manufacturing Process Report. 2018. SAMPLE. AMOLED Manufacturing Process Report. · The report analyzes the structure and manufacturing

Table of Contents

4@ 2018. UBI Research. All rights reserved.

6. LG Display’s Oxide TFT Manufacturing process 151

5. Samsung Display’s 13 mask LTPS TFT Manufacturing process 1215.1 Buffer Layer and Active Layer5.2 Gate Electrode 15.3 Gate Electrode 2 5.4 Interlayer 15.5 Deep hole 15.6 Source / Drain Electrode 15.7 Interlayer 25.8 Deep hole 25.9 Source / Drain Electrode 25.10 Passivation layer5.11 Planarization layer5.12 Pixel Electrode5.13 Pixel Define Layer5.14 General

6.1 Light Shield Layer6.2 Buffer Layer and Active Layer6.3 Gate Insulator6.4 Gate Electrode 6.5 Interlayer6.6 Source / Drain Electrode6.7 Planarization layer and Color filter6.8 Pixel Electrode6.9 Pixel Define Layer6.10General

Page 5: AMOLED Manufacturing Process Report...AMOLED Manufacturing Process Report. 2018. SAMPLE. AMOLED Manufacturing Process Report. · The report analyzes the structure and manufacturing

1. AMOLED Structure

· Glass substrates are used for rigid OLED substrates.

· For flexible OLED, polyimide (PI) with high heat resistance and low thermal expansion coefficient is used since TFT is formed by high-temperature physical and chemical process on top of the substrate.

· The PI substrate is a structure in which PI and SiNx are stacked twice and SiOx is formed onthe upper side of SiNx.

Glass substrate for Rigid OLED and PI substrate for flexible OLED

5@ 2018. UBI Research. All rights reserved.

1.1 Substrate

(a) Glass substrate for Rigid OLED

(b) PI substrate for flexible OLED

Glass substrate

SiOx

SiNxPolyimide

SiNxPolyimide

Page 6: AMOLED Manufacturing Process Report...AMOLED Manufacturing Process Report. 2018. SAMPLE. AMOLED Manufacturing Process Report. · The report analyzes the structure and manufacturing

1. AMOLED Structure

TSP classification· There are two types of TSP structure: One is * add-on structure in which a film-type touch

screen is attached on the encapsulation. The other is * On-cell structure directly formed onthe encapsulation.

· The touch screen of the add-on structure and the on-cell structure has an insulator betweenthe touch electrode formed in the x-axis and the y-axis. The add-on method requires aseparate base film such as PET.

· On-cell structure is applied to Rigid OLED. For flexible OLED, add-on structure or on-cellstructure is applied.

· LG Display is developing new structured TSP to flexible OLED with touch electrode formedon the gas barrier film of hybrid encapsulation.

6@ 2018. UBI Research. All rights reserved.

1.6 Touch Screen Panel

TSP(touch screen panel) classification

(b) Rigid OLED - TFE - On-cell type(a) Rigid OLED - Frit glass encapsulation- On-cell type

(d) Flexible OLED - TFE - add-on type (c) Flexible OLED - TFE - On-cell type

(e) Flexible OLED - Hybrid encapsulation- LG Display’s TSP structure

Encapsulation glass

Glass substrate Glass substrate

Overcoat

InsulatorTSP

Carrier glass

Page 7: AMOLED Manufacturing Process Report...AMOLED Manufacturing Process Report. 2018. SAMPLE. AMOLED Manufacturing Process Report. · The report analyzes the structure and manufacturing

Structure Process

Substrate

PI coating

PI curing

SiNx deposition

SiOx deposition

7@ 2018. UBI Research. All rights reserved.

Manufacturing process of substrate for flexible OLED

* Substrate structure may vary by panel makers.

X 2

PISiNx

SiNx

PICarrier glass

SiOx

SiNx

Carrier glassPI

Carrier glassPI

PI varnish

Carrier glass

2. AMOLED Panel Manufacturing Process

PI structure for flexible OLED· Substrate for flexible OLED is first coated with PI varnish on top of the carrier glass and

thermally cured.

· SiNx is deposited on the upper side of the cured PI film.

· OLED is a three stack structure of WOLED + color filter type.

· PI varnish coating, the thermal curing process, and the SiNx deposition process are repeatedon the SiNx/PI, and then the SiOx is deposited thereon to complete the substrateproduction.

2.1 Substrate

Page 8: AMOLED Manufacturing Process Report...AMOLED Manufacturing Process Report. 2018. SAMPLE. AMOLED Manufacturing Process Report. · The report analyzes the structure and manufacturing

2. AMOLED Panel Manufacturing Process

8@ 2018. UBI Research. All rights reserved.

2.3 OLED PixelRGB OLED

RGB OLED pixel deposition process and equipment

Process EquipmentO2 or N2 plasma treat Plasma asher

HIL deposition Evaporator (open mask)

HTL deposition Evaporator (open mask)

Red OLED deposition Evaporator (FMM)

Green OLED deposition Evaporator (FMM)

Buffer layer

Plasma treatment

Open mask HIL

Open mask

FineMetal mask

HTL

Red

GreenFineMetal mask

Page 9: AMOLED Manufacturing Process Report...AMOLED Manufacturing Process Report. 2018. SAMPLE. AMOLED Manufacturing Process Report. · The report analyzes the structure and manufacturing

9@ 2018. UBI Research. All rights reserved.

3. Inspection Process for Small and Medium sized AMOLED Panel

· During TFT process, α-step and ellipsometer are used to measure the thickness, AOIequipment to inspect the pattern, and laser CVD equipment to repair the TFT by detectingdefects of signal line, respectively.

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Page 10: AMOLED Manufacturing Process Report...AMOLED Manufacturing Process Report. 2018. SAMPLE. AMOLED Manufacturing Process Report. · The report analyzes the structure and manufacturing

10@ 2018. UBI Research. All rights reserved.

3. Inspection Process for Small and Medium sized AMOLED Panel

· After completion of the TFT process, there are AOI equipment for pattern inspection, arraytester and DC tester for electrically checking the abnormality of the signal line, and laserCVD repair for repairing the signal line.

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Page 11: AMOLED Manufacturing Process Report...AMOLED Manufacturing Process Report. 2018. SAMPLE. AMOLED Manufacturing Process Report. · The report analyzes the structure and manufacturing

Process Materials Equipment

Exposure - Aligner

Hard baking - Oven

PRdeveloping TMAH Developer

Dry etching

Reactive gas(CF4, C4F4, CHF4)

Dry etcher

PRstripping

Triethanol-amine Stripper

· Deep hole 1 patterning (mask #2)

11@ 2018. UBI Research. All rights reserved.

4.2 Gate Insulator 1

4. Samsung Display’s 9 mask LTPS TFT Manufacturing process

LTPS TFT manufacturing process and equipment

Poly-SiBuffer layer

Carrier glass

Gate insulator 1PR

Poly-SiBuffer layer

Carrier glass

Gate insulator 1PR

Poly-SiBuffer layer

Carrier glass

Gate insulator 1PR

Poly-SiBuffer layer

Carrier glass

Gate insulator 1PR

Poly-SiBuffer layer

Carrier glass

Gate insulator 1

Page 12: AMOLED Manufacturing Process Report...AMOLED Manufacturing Process Report. 2018. SAMPLE. AMOLED Manufacturing Process Report. · The report analyzes the structure and manufacturing

Process Materials Equipment

Exposure - Aligner

Hard baking - Oven

PRdeveloping TMAH Developer

Wet etching

Wet chemical

Wet etcher

PRstripping

N-Methyl Pyrroli-done(NMP)

Stripper

· Gate insulator patterning (mask #3)

12@ 2018. UBI Research. All rights reserved.

6.3 Gate Insulator

6. LG Display’s Oxide TFT Manufacturing process

Buffer layer

Substrate

IGZOGate insulator

PR

Buffer layer

Substrate

IGZOGate insulator

PR

Buffer layer

Substrate

IGZOGate insulator

PR

Buffer layer

Substrate

IGZOGate insulator

PR

Buffer layer

Substrate

IGZOGate insulator

Oxide TFT manufacturing process and equipment

Light shield

Light shield

Light shield

Light shield

Light shield

Page 13: AMOLED Manufacturing Process Report...AMOLED Manufacturing Process Report. 2018. SAMPLE. AMOLED Manufacturing Process Report. · The report analyzes the structure and manufacturing

13@ 2018. UBI Research. All rights reserved.

[Attention]

1. This report is published by UBI Research.

2. Only the buyer is authorized to use this report. An unauthorized use by a third party or anexternal exposure demand compensation of 10 times the cost of the report.

3. The contents of this report can only be used with the authorization of UBI Research.

4. The intellectual property of this report remains with UBI Research. Any copyright violations(printing, copying, binding) are illegal.

Page 14: AMOLED Manufacturing Process Report...AMOLED Manufacturing Process Report. 2018. SAMPLE. AMOLED Manufacturing Process Report. · The report analyzes the structure and manufacturing

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