angstrom sciences-cylindrical magnetrons

For more info . . .www.angstromsciences.com

Angstrom Sciences-Cylindrical Magnetrons

Business for over 20 yearsBusiness for over 20 yearsNumerous US Patents including

Profiled MagnetsTurbulent water flow

Complete Cylindrical CathodesTCO, Reactive, and Metal ApplicationsTCO, Reactive, and Metal Applications

For more info . . .www.angstromsciences.com

37 Employees37 Employees

10 CNC 10 CNC MachinistsMachinists

8 Engineering 8 Engineering StaffStaff

Angstrom Angstrom SciencesSciences

InIn--House House R&D R&D

LaboratoryLaboratory

OnOn--Site Site ManufacturingManufacturing

LaboratoryLaboratory

85% or greater target utilizationLonger run times

N V FlNarrow Vapor FluxClean and efficient sputtering

Average 20% Power SavingsAverage 20% Power SavingsOperates at lower power level

Advanced profiled Magnetic Design for optimal utilization and uniformityGas Integration Options

Argon and Reactive gas inputsArgon and Reactive gas inputsDC, Pulsed DC and MF PowerVertical and Horizontal mounting optionsAnode assembly is available

Can accommodate existing system layoutRecommendation for Optimal Uniformity

Magnet bar length: 6” overhang on each side of substrate2”-4” source to substrate

For more info . . .www.angstromsciences.com

2 4 source to substrate

Magnetics:

Profiled magnets naturally conform to the curvature of

cylindrical target

For more info . . .www.angstromsciences.com

Rotating Cylindrical Magnetron Solutions:

Rotating Cylindrical Magnetron Solutions:

R t ti C li d i l M t S l tiRotating Cylindrical Magnetron Solutions:

Rotating Cylindrical Magnetron Solutions:

Cathode Drive Overview:Cathode Drive Overview:

Cathode Drive Overview:Cathode Drive Overview:

Target Assembly Overview:Target Assembly Overview:

Target Assembly Overview:Target Assembly Overview:

Calculating Target Lifetime (Example)Calculating Target Lifetime (Example)Assumptions:

Non Reactive ProcessFilm Density = Target Densityy g y1 Cathode Putting down film layer

Calculating Target Lifetime (Example)Calculating Target Lifetime (Example)

Assumptions: Non Reactive ProcessFilm Density = Target DensityFilm Density = Target Density

Calculating Target Lifetime (Example)Calculating Target Lifetime (Example)

Calculating Target Lifetime (Example)Calculating Target Lifetime (Example)

Calculating Sputter Deposition RateCalculating Sputter Deposition Rate

Angstrom Sciences Cylindrical Magnetron ArraysAngstrom Sciences Cylindrical Magnetron Arrays

2D Magnetic Field Modeling

Angstrom Sciences Cylindrical Magnetron ArraysAngstrom Sciences Cylindrical Magnetron Arrays3D Magnetic Field Modeling

Magnet Assemblies have “interchangeable” turnaround designs that b f t d t ifi t f t tmay be manufactured to your specific type of target.

Substrate

Chamber/Zone Shielding

ASI’s patented profiled magnets reduce the gdistance between the racetracks in comparison to more conventional approaches

Cylindrical Ma

More material is directed to the substrate dramatically reducing build up

approaches

More material is directed to the substrate, dramatically reducing build-up on shields and resulting in a cleaner and more stable process that requires les power to achieve a specific deposition rate!

Static Deposition Profile for a Single Cylindrical Magnetron (10.5 deg racetrack separation for ASI vs. 14.7 deg for a “typical” cylindrical magnetron)

Angstrom Sciences Cylindrical Magnetron ArraysAngstrom Sciences Cylindrical Magnetron Arrays

1

Normalized Deposition Profile For a Dual Rotatable Magnetron

0.8

0.9

1

ASI cylindrical racetrack 

separation of 10.5 

"Typical" conventional cylindrical 

0.6

0.7

Typical 14.7

ASI 10.5

pdegrees results in~ 14% of  material deposited on 

shields

yracetrack 

separation of 14.7 degrees results in~21% of material deposit on shields

0.4

0.5

0.1

0.2

0.3

STANDARD COAT ZONE SHIELDING WIDTH

0-300 -200 -100 0 100 200 300

Angstrom Sciences Cylindrical Magnetron ArraysAngstrom Sciences Cylindrical Magnetron Arrays

3.5m Magnet Arrays for architectural Glass Coaters

Angstrom Sciences Cylindrical Magnetron ArraysAngstrom Sciences Cylindrical Magnetron Arrays

Angstrom Sciences Cylindrical Magnetron ArraysAngstrom Sciences Cylindrical Magnetron Arrays

NdFeB, Profiled magnetsd l D iModular Design

Greater target utilization (85% guaranteed!)Improved uniformityStainless steel encapsulation

Solid ConstructionSolid Construction304 Stainless Steel6061 Aluminum

DesignCompact Drive Assemblyp yQuick Target changes

2 Year WarrantyNo-cost maintenance training

“Great all around service and product” Great all around service and product Aura-Gemini Observatory

“Excellent Customer Service and contact with your Technical Staff” Staff

Eliovac

“The quality of work was exceptional, excellent custom built cathode of high quality. Greatly appreciate the time frame you g q y y pp ywere able to deliver”

Power Films, Inc.

“The product has met all our expectations. We were very The product has met all our expectations. We were very impressed with the fast completion of the project. Thank you for the extra effort and satisfactory results”

Nexx Systems