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5.2 Principles of Chemical Vapor Deposition
Figure 5.1
Figure 5.2
Figure 5.3
5.3 Experimental Approach
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5.3.1 Chemical Vapor Deposition (CVD)
5.3.2 Chemical Vapor Condensation (CVC)
Figure 5.4
5.3.3 ParticlePrecipitationAided Chemical Vapor Deposition
Figure 5.5
Figure 5.6
5.3.4 Catalytic Chemical Vapor Deposition
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Figure 5.7
5.4 Examples of Nanostructured Materials
5.4.1 Semiconductor Quantum Dots
5.4.1.1 Temperature Dependencies
Figure 5.8
5.4.1.2 Variation with AsH3 Partial Pressure
Figure 5.9
5.4.1.3 Variation with Surface Structure
n
Figure 5.10
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Figure 5.11T T
5.4.2 Ceramic Nanostructured Materials
5.4.2.1 Oxides
Figure 5.12
5.4.2.2 Carbides
Figure 5.13
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Figure 5.14
Figure 5.15
5.4.2.3 Nitrides
Figure 5.16
x y
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x y
5.4.3 Carbon Nanotubes
5.4.3.1 Dense Substrate
Figure 5.17
Figure 5.18
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5.4.3.2 Porous Substrate
Figure 5.19
Figure 5.20
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Figure 5.21
5.4.3.3 UltraFine Powder Substrates
5.4.4 Diamond
5.4.4.1 Kinetic Approach
5.4.4.2 Formation Mechanism
5.4.4.3 Enhancement of Diamond Formation
Figure 5.22
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Figure 5.23
Figure 5.24
5.5 Summary
References
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