cmos process flo...2 ece 410, prof. f. salem/ prof. a. mason notes with updates lecture notes page...

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ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.1

CMOS Process Flow• See supplementary power point file for animated CMOS

process flow (see class ece410 website and/or* http://www.multimedia.vt.edu/ee5545/):– This file should be viewed as a slide show– It is not designed for printing

*Thanks to John Christiansen [mailto:christ24@pilot.msu.edu]

ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.2

Layout CAD Tools• Layout Editor

– draw multi-vertices polygons which represent physical design layers– Manhattan geometries, only 90º angles

• Manhattan routing: run each interconnect layer perpendicular to each other• Design Rules Check (DRC)

– checks rules for each layer (size, separation, overlap)– must pass DRC or will fail in fabrication

• Parameter Extraction– create netlist of devices (tx, R, C) and connections– extract parasitic Rs and Cs, lump values at each line (R) / node (C)

• Layout Vs. Schematic (LVS)– compare layout to schematic– check devices, connections, power routing

• can verify device sizes also– ensures layout matches schematic exactly– passing LVS is final step in layout

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ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.3

CMOS Layout Layers• Mask layers for 1 poly, 2 metal, n-well CMOS process

– Background: p-substrate– nWell– Active– Poly– pSelect– nSelect– Active Contact– Poly Contact– Metal1– Via– Metal2– Overglass

ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.4

Design Rules: Intro• Why have Design Rules

– fabrication process has minimum/maximum feature sizes that can be produced for each layer

– alignment between layers requires adequate separation (if layers unconnected) or overlap (if layers connected)

– proper device operation requires adequate separation• “Lambda” Design Rules

– lambda, λλλλ, = 1/2 minimum feature size, e.g., 0. 6µm process -> λλλλ =0.3µm– can define design rules in terms of lambdas

• allows for “scalable” design using same rules• Basic Rules

– minimum layer size/width

– minimum layer separation

– minimum layer overlap

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ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.5

Design Rules: 1• n-well

– required everywhere pMOS is needed– rules

• minimum width• minimum separation to self• minimum separation to nMOS Active• minimum overlap of pMOS Active

• Active– required everywhere a transistor is needed– any non-Active region is FOX– rules

• minimum width• minimum separation to other Active

3λλλλ

MOSIS SCMOS rules; λλλλ =0.3µµµµm for AMI C5N

10λλλλ 6λλλλ

3λλλλ

5λλλλ

ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.6

Design Rules: 2• n/p Select

– defines regions to be doped n+ and p+– tx S/D = Active AND Select NOT Poly– tx gate = Active AND Select AND Poly– rules

• minimum overlap of Active– same for pMOS and nMOS

• several more complex rules available• Poly

– high resistance conductor (can be used for short routing)– primarily used for tx gates– rules

• minimum size• minimum space to self• minimum overlap of gate• minimum space to Active

2λλλλ

2λλλλ

2λλλλ

1λλλλ

2λλλλ

gate =Active-Poly-Select

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ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.7

Design Rules: 3• Contacts

– Contacts to Metal1, from Active or Poly• use same layer and rules for both

– must be SQUARE and MINIMUM SIZED– rules

• exact size• minimum overlap by Active/Poly• minimum space to Contact• minimum space to gate

• Metal1– low resistance conductor used for routing– rules

• minimum size• minimum space to self• minimum overlap of Contact

2λλλλ

1.5λλλλ

2λλλλ2λλλλ2λλλλ

3λλλλ

1λλλλ

5λλλλ

note: due to contact sizeand overlap rules, min.active size at contact willbe 2+1.5+1.5=5λλλλ

4λλλλif wide

2λλλλ

ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.8

Design Rules: 4• Vias

– Connects Metal1 to Metal2– must be SQUARE and MINIMUM SIZED– rules

• exact size• space to self• minimum overlap by Metal1/Metal2• minimum space to Contact• minimum space to Poly/Active edge

• Metal2– low resistance conductor used for routing– rules

• minimum size• minimum space to self• minimum overlap of Via

3λλλλ

1λλλλ

see MOSIS sitefor illustrations

3λλλλ

2λλλλ

3λλλλ1λλλλ

2λλλλ2λλλλ

6λλλλif wide

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ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.9

Physical Realization of a MOSFET• nMOS Layout

– gate is intersection of Active, Poly, and nSelect– S/D formed by Active with Contact to Metal1– bulk connection formed by p+ tap to substrate

• pMOS Layout– gate is intersection of Active, Poly, and pSelect– S/D formed by Active with Contact to Metal1– bulk connection formed by n+ tap to nWell

• Effective Gate Size– S/D will diffuse under the gate

• effective channel length is less than drawn• Leff = L(drawn) - 2LD

– FOX will undercut active region• effective channel width is less than drawn• Weff = W(drawn) - ∆W

– LD and ∆ W defined by fab. process– generally taken care of by SPICE

Gate

D

SBulk

Ground

Gate

D

S Bulk

VDD

L(drawn)

LeffLD

ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.10

Substrate/well Contacts• Substrate and nWells must be

connected to the power supply within each cell– use many connections to reduce

resistance– generally place

• ~ 1 substrate contact per nMOS tx• ~ 1 nWell contact per pMOS tx

– this connection is called a tap, or plug– often done on top of VDD/Ground rails– need p+ plug to Ground at substrate– need n+ plug to VDD in nWell

n+plugto VDD

p+plugto Ground

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ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.11

Latch-Up• Latch-up is a very real, very important factor in circuit design that

must be accounted for• Due to (relatively) large current in substrate or n-well

– create voltage drops across the resistive substrate/well• most common during large power/ground current spikes

– turns on parasitic BJT devices, effectively shorting power & ground• often results in device failure with fused-open wire bonds or interconnects

– hot carrier effects can also result in latch-up• latch-up very important for short channel devices

• Avoid latch-up by– including as many substrate/well contacts as possible

• rule of thumb: one “plug” each time a tx connects to the power rail– limiting the maximum supply current on the chip

ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.12

Multiple Contacts• Each contact has a characteristic resistance, Rc• Contact resistances are much higher than the resistance

of most interconnect layers• Multiple contacts can be used to reduce resistance

– Rc,eff = Rc / N, N=number of contacts

• Generally use as many contacts as space allows

N=6

use severalContacts

in wide txs

add Viasif roomallows

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ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.13

Cell Hierarchy and Instancing• Hierarchical Design

– transistors used to build gates– gates used to build logic functions– logic functions used in larger blocks– build up in this manner to final chip level

• Each physical design file is called a “cell”– basic cells can be used to create a “cell library”

• elements of the cell library used to create all higher level cells– lower level cell is called an “instance”– construct functions by “instancing” cells into higher level cells

• details of the cell is left inside the lower level cell file• information is not copied, but referenced

transistor-levelcell

gate-level cell

function

higher level function

final chip

ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.14

Cell Concept• Instancing

– construct all blocks using instances of lower level cells• tx-level cells are called “primitives” (lowest level cells)

– allow layout optimization within each cell– eases layout effort at higher level

• higher level layout deal with interconnects rather than tx layout• Cell View

– see only I/O ports (including power), typically in Metal1– can’t see internal layer polygons of the primitive

Cell-level view of INV, NAND, and NOR primitives

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ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.15

Instancing• Ports

– all signals that connect to higher level cells– physical locations of the layout cell, typically in Metal1 or Metal2

• Metal1 vs Metal2 ports– best to keep ports in Metal1 for primitives– always try to use only the lowest level metals you can

• Building Functions from Primitives– instantiate one or more lower-level cells to from higher-level function– Example: f = a b

NOT a NAND NOTnew cell has ports a, b, f (output), VDD, Gnd

ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.16

Cell Pitch• Pitch = cell height

– Official Definition• from middle of VDD rail

to middle of Gnd rail– Our Definition

• from top of VDDto bottom of Gnd

– Considerations to set pitch• fix height for pMOS tx, nMOS tx, and some internal routing• fix height to match height of more complex cell (e.g., flip flop)

• Transistor Orientation– Horizontal (tx W run vertically)

• pitch sets max tx W• cells taller & narrow

– Vertical (tx W runs horizontally)• can increase tx W with fixed pitch• cells short & wide

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ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.17

• Metal1 routing strategy– very flexible– requires fewer metal layers– demands much chip area for routing

• High-level metal routing strategy – allows high density tx packing– minimum chip area for routing– demands several metal layers

• Inter-cell routing– always use lowest level interconnect possible

Cell Routing

☻☻�

�

☻☻

“flipped”

ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.18

Transistor Sizing• Channel Resistance (from Chapter 3)

“ON” resistance of transistors– Rn = 1/(µnCox (W/L) (VGS-Vtn) )– Rp = 1/(µpCox (W/L) (VSG-|Vtp|) )

• Cox = εox/tox [F/cm2], process constant

• Channel Resistance Analysis– R ∝ 1/W (increasing W decreases R & increases Current)– R varies with Gate Voltage, see plot above– If Wn = Wp, then Rn < Rp

• since µn > µp• assuming Vtn ~ |Vtp|

– to match resistance, Rn = Rp• adjust Wn/Wp to balance for µn > µp

VGVDD-|Vtp|Vtn

RnRp

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ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.19

Transistor Sizing• Channel Resistances

– Rn = 1/(µnCox (W/L) (VG-Vtn) )– Rp = 1/(µpCox (W/L) (VG-|Vtp|) )– Rn/Rp = µp/µn

• if Vtn = |Vtp|, (W/L)n = (W/L)p

• Matching Channel Resistance– there are performance advantage to setting Rn = Rp

• discussed in Chapter 7– to set Rn = Rp

• define mobility ratio, r = µn/µp• (W/L)p = r (W/L)n

– pMOS must be larger than nMOS for same resistance/current

• Negative Impact– ⇒ CGp = r CGn larger gate = higher capacitance

ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.20

Transistor Matching and Scaling• Channel Resistance Matching

– increase Wp so that Rn = Rp– pMOS larger than nMOS– pMOS current drive = nMOS

current drive• Scaling ratio, S

– scaling W to increase current capabilities– typically in unit steps, 1x, 2x, 4x, etc.– generally L kept at

minimum value

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ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.21

Inverter Layout Options• Layout with Horizontal Tx

– pitch sets max tx size• Layout with Vertical Tx

– allows scaling without changing pitch

• Vertical Tx with 2x scaling• Vertical Tx with Rn=Rp scaling

horizontal

vertical

matched, Rn=Rp

ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.22

Layout Alternatives

• Figure 5.44 • Figure 5.45• Figure 5.46• Figure 5.47

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ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.23

Figure 5.44 (p. 182)Layout for an electrically symmetric NOT gate.

ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.24

Figure 5.45 (p. 182)A NAND2 and NOR2 layouts using vertical FETs.

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ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.25

Figure 5.46 (p. 183)Alternate NAND2 and NOR2 cells.

ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.26

Figure 5.47 (p. 184)Complex logic gate example.

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ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.27

Hierarchical Cell Design• Figure 5.48• Figure 5.49• Figure 5.50• Figure 5.51

ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.28

Figure 5.48 (p. 185)Primitive polygon-level library entries.

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ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.29

Figure 5.49 (p. 186)Expanding the library with more complex cells.

ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.30

Figure 5.50 (p. 186)Cell hierarchy.

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ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.31

Figure 5.51 (p. 187)Effect of the flatten operation.