dec 15th, 2008 progress report
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Dec 15th, 2008 Progress Report. Dec 8 th – Spin Coating Dec 9 th Spectate PR Removal Perform RIE (SiO2 / SiNx), Sample Cutting, Sample Thinning/Sanding Dec 11 th – RIE (100 nm SiO2 / 500 nm SiO2) . NTU QDL Peter. - PowerPoint PPT Presentation
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Dec 15th, 2008 Progress Report
Dec 8th – Spin Coating
Dec 9th
Spectate PR Removal
Perform RIE (SiO2 / SiNx), Sample Cutting, Sample
Thinning/Sanding Dec 11th – RIE (100 nm SiO2 / 500 nm SiO2)
NTU QDL Peter
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