ess 5855 surface engineering for microelectromechanical systems...

ESS 5855Surface Engineering for

Microelectromechanical Systems

Fall 2010

MMicroicroEElectrolectroMMechanicalechanical SSystemsystems

Miniaturized systems with integrated electrical and mechanical components for actuation and sensing applications

Texas Instruments, Digital Micromirror DeviceDigital Light Processor (DLP)

Microelectronics

Sensors Actuators

Physical World

MEMS

Microelectronics

Sensors Actuators

Physical World

MEMS

Introduction

• Scaling

• Swimming

Introduction

Walking on water is possible but swimming is not fun

Outline

• Introduction (3)• Capillarity (6)• Thermodynamics (3)• Electrical Double Layers (3)• Electrokinetic Phenomena (3)• van der Waals Forces (3)• Colloids and Colloidal Stability (3)

Outline

• Surfactants and Interfacial Phenomena (3)

• Characterization (3)• MEMS Reliability (3)• BioMEMS (3)• Flow and Droplet Manipulation (3)• Self Assembly (3)

Capillarity

• Surface tension• Young-Laplace equation

Capillarity

• Contact angle

Electrical Double Layers

Electrokinetic Phenomena

• Electrophoresis• Electroosmosis

van der Waals Forces

• Intermolecular attractive forces

Colloids

Surfactants

Surfactants and Interfacial Phenomena

Hydrophilic headHydrophilic head

Hydrophobic tailHydrophobic tail

CavityCavity

Lipid Lipid BilayerBilayer

Surface Treatment

(a). Au on glass side+ SAMs

θ＝110.7°Hydrophobic SAMs*

θ＝56.7°Hydrophilic SAMs(-COOH)

(b) Au on micro posts

θ＝109.9°dia: 60μm pitch:40μm

θ＝73.8°dia:80μmPitch: 180μm

(c) Au on micro posts+SAMs

θ＝143.6°Hydrophobic SAMs*dia: 60μm pitch:40μm

θ＝12.4°Hydrophilic SAMs(-COOH)dia:80μmPitch: 180μm

Controlled Interfaces

AFM

• It consists of a sensor that responds to a force and a detector that measures the sensor’s response

BioMEMS

MMicroicroEElectrolectroMMechanicalechanical SSystemsystems

Miniaturized systems with integrated electrical and mechanical components for actuation and sensing applications

Texas Instruments, Digital Micromirror DeviceDigital Light Processor (DLP)

Microelectronics

Sensors Actuators

Physical World

MEMS

Microelectronics

Sensors Actuators

Physical World

MEMS

Liquid Manipulation

Massively parallel manipulation of single cells and microparticles using optical images

Self Assembly

Current Status of Surface Related MEMS Research

MEMS 2010

885 Abstracts298 Accepted75 Oral presentations

MEMS 2009

856 Abstracts279 Accepted47 Oral presentations

MEMS 2008

778 Abstracts267 Accepted43 Oral presentations

MEMS 2007

610 Abstracts221 Accepted43 Oral presentations

MEMS 2006

789 Abstracts236 Accepted42 Oral presentations

Transducers ‘09

1300 Abstracts600 Accepted

220 Oral presentations

Transducers ‘05

1035 Abstracts514 Accepted199 Oral presentations

MicroTAS ‘08

1100 Abstracts660 Accepted

65 Oral presentations

MicroTAS ‘06

881 Abstracts (980)539 Accepted (580)66 Oral presentations

Classification• Design, Simulation, and Theoretical Concepts

with Experimental Verification• Materials and Device Characterization• Fabrication and Packaging Technologies• Biomedical/Chemical Micro Sensors and Systems• Mechanical Sensors and Systems• Micro-Actuators• Micro-Fluidic Components and Systems• Physical MEMS (Optical, Thermal, Magneto)• RF MEMS• Nanoelectromechanical Devices and Systems • Power MEMS & Energy Harvesting

Most Popular Keywords

• RF MEMS 10 - 13 - 11 - 5• Optical MEMS - 9 - 1• Resonator(s) 7 - 9 - 8 - 8• CMOS MEMS 6 - 7, Microswitch 7• Actuator 10 - 5 - 10• DNA 6, Gyroscope 7 - 6• Microfluidic(s) 4 - 9 – 16 - 14• Drug delivery 6, Carbon Nanotube - 6

Surface Related Keywords

• Surface tension - 3 - 4• Stiction - 3 - 1• Self-assembly - 4 - 8 - 9• Electro-phoresis/-osmosis - 2 - 6• Electrowetting - 4 - 6 - 3• Dielectrophoresis - 4 – 4 - 3• Droplet - 8 - 3• Particles - 7 – 3• Parylene - 8, PDMS - 6

Self Assembly and Packaging

TOWARDS OPTIMAL DESIGNS FOR SELF-ALIGNMENT IN SURFACE TENSION DRIVEN

MIRCO-ASSEMBLY

SEQUENTIAL SELF-ASSEMBLY BY CONTROLLING INTERACTIVE FORCES

BETWEEN MICROPARTICLES

NON-ROBOTIC FABRICATION OF PACKAGED MICROSYSTEMS BY SHAPE-AND-SOLDER-

DIRECTED SELF-ASSEMBLY

SELF-ASSEMBLY OF MEMS COMPONENTS IN AIR ASSISTED BY DIAPHRAGM AGITATION

FROM MICRO-PATTERNS TO NANO-STRUCTURES BY CONTROLLABLE COLLOIDAL

AGGREGATION AT AIR-WATER INTERFACE

A 3D BIOLOGICAL FILTRATION MATRIX USING SELF-ASSEMBLED MICROSPHERES

INSIDEMICROCHANNELS AND GELATIN SACRIFICIAL LAYER

Cell and Particle Handling

A MICROFLUIDIC DEVICE FOR ELECTROFUSION OF BIOLOGICAL MEMBRANES

LIPID BILAYER MICROCHAMBERS: AN OPTICAL DETECTION SYSTEM FOR MEMBRANE TRANSPORT

A CONTINUOUS CELL SEPARATION CHIP USING HYDRODYNAMIC DIELECTROPHORESIS PROCESS

MICROVISON-ACTIVATED AUTOMATIC OPTICAL MANIPULATOR FOR

MICROSCOPIC PARTICLES

Optical MEMS

LIQUID LENS TECHNOLOGY: PRINCIPLE OF ELECTROWETTING BASED LENSES AND

APPLICATIONS TO IMAGING

Electrowetting-Based Displays: Bringing Microfluidics Alive On-Screen

TUNABLE MICRODOUBLET LENS ARRAY

BioMedical Devices

PARYLENE FLEXIBLE NEURAL PROBE WITH MICRO FLUIDIC CHANNEL

COMPACT, SEAMLESS INTEGRATION OF ACTIVE DOSING AND ACTUATION WITH MICRONEEDLES

FOR TRANSDERMAL DRUG DELIVERY

DETACHABLE SILICON MICRONEEDLE STAMPS FOR ALLERGY SKIN PRICK TESTING

NANOMECHANICAL PROTEIN DETECTORSUSING ELECTROTHERMAL NANO-GAP

ACTUATORS

Actuators

ENHANCED ELECTRO-OSMOTIC PUMPING WITH LIQUID BRIDGE AND FIELD EFFECT FLOW

RECTIFICATION

NOVEL STRUCTURE FOR PASSIVE CO2 DEGASSING IN DMFC

Micropumping by Directional Growth and Hydrophobic Venting of Bubbles

ENGINEERING SURFACE ROUGHNESS TO MANIPULATE DROPLETS

IN MICROFLUIDIC SYSTEMS

Physical SensorsRF Devices and Resonators

Force & Stress Sensors

Stiction

Vapor Phase Anti-Stiction Coatings for MEMS

A Lateral, Self-cleaning, Direct Contact MEMS Switch