fei quanta 250 esem basic instructions - oscar...fei quanta 250 esem basic operation manual for...

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DSUImagingFacilityFEIQuanta250ESEMBasicOperationManual

ForAssistancewithSEMPleaseContact:Dr.MuktiRanaAssociateProfessor&ChairDepartmentofPhysicsandEngineeringSCRoom216302-857-6588,mrana@desu.edu

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The chamber of the SEM is kept under vacuum.

Under Normal condition the system is logged on.

If you do not see that the system is logged on, double click on the xT Microscope icon on the desktop

Then you will see the status bar of xT microscope.

Click on start UI.

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Log-intotheMicroscopeusingthefollowing- Username:supervisorPassword:Quanta250-9923724

Makesurethatyouareinthebeamcontroltabontherightsideofthescreen.VentthechamberbyclickingontheVENTbuttontorightsideofthewindow

Insert you sample into the chamber by using one of the sample holders and double sidedtapes

ifnecessary.Usingthe“Elephant Trunk”makesurethatyoursample is lessthan10mm. Ifyouneedtochangethebaseofthesampleholderyoucandothatbyunscrewingtheboltandconelikestructure.

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Determinethetypeofsampleyouhaveandselecttheappropriatevacuumconditionsyouwilluse.Usehighvacuummodefornormalconductivesampleandlowvacuummodeforsoftoranduncoatednon- conductivesamples.YoumayalsousetheESEMmodewithPeltierStageandGSEDdetectorforsampleswhichcontainliquid.Vacuumbuttons

Next,selecttherightaccelerationvoltagefromthepulldowntablocatedjustbelowthemenubarorfromtherightsideofthebeamcontroltab.

Oncetheproperpressurehasbeenachieved,thechamberICONinthelowerrightsideofthescreenwillbefullygreen.

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TurnontheBeambyclickingontheBEAMONbutton

Thedisplayshouldlooklikethis. Scanspeedcontrol Pausereleasebutton

TopleftSEimage,ToprightBackscatter,BottomLeftisthecombinedSEandBackscatterimageandtheBottomrightisthechamberviewscope.Activateuptothreedisplaysatonetimebyselectingthedisplayandtheclickonthepausereleasebutton.Thedisplaywillstarttoscan.

Toincreaseanddecreasethescanspeedsusethearrowupanddown.

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Whileviewingthechamberscope(bottomrightscreen)pressandholdthescrollwheelbuttonandpushthemouseupwardtopositionyoursamplenearthe10mmmarkonthescreen.Itmaybenecessarytounpausethechamberscopescreenfirst.

IncreasetheMagnificationandfocustheSEimagebyusingtheUSERinterfacepanelshownbelow.F7displaysareducedscreenforeaserrealtimeadjustments.F5enlargestheactivescreentofittheentirewindow.

OncetheimageisfocusedlinktheZtoFWDbyclickingontheICONonthetoolbar

Youmayalsogotonavigationtabtoseethezdistance.

FormostoperationsitisrecommendedthataZvalueof10mmisnowsetastheworkingdistance.

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Increasemagnificationtoatleast1k(higherthebetter)andfocustheimageaswellasyoucan.Nextfromthemainmenu,selecttheBeam>DirectadjustmentsandthenstarttheLensalignbyclickingontheLENSALIGN button.

Whileobservingtheimage,placeyoumouseoverthesmallsquareboxintheLensAlignandholditdown.Movethemouseandboxwithinthefieldtoreducemovementintheimage.

TurnoftheLensAlignbycrossingitout.RefocusyouimageandincreasetheMagnificationtoabove20k(thehigherthebetter)andusingtheUserInterfacePanel,StigmatetheimageusingtheXandYcontrolsforsharpestimagepossible.F7displaysareducedscreenforeaserrealtimeadjustments.F5enlargestheactivescreentofittheentirewindow.

WhenusingtheLowVacmode,itmaybenecessarytoadjustthepressureinthechamberforahighcontrastimage.Simplyadjustthepressureuntiltheappropriatecontrasthasbeenachieved.Inmostcasespressurebetween0.83and0.53Torrwillworkwell.

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Oncethedesiredimageisachieved,pressF2orgotoscan>Photoorscan>snapshotfortakingandsavingimage.OncethescanhasstoppedadefaultdirectorywillappearintheSharedDataFolder.Storeyour imagesintheSharedFolderonly.Datawillbestoreonthecomputerontheleftsideofthe operator’sconsol.

Turnoffthebeambyclickingthebeamonbutton(itgoesfromyellowbackgroundtopuregrayonceitisturnedoff)

NeverleavetheESEMintheLOWVACorESEMmode,alwaysreturntheSEMtotheHIGHVACMode.