john cox advanced technology solutions, l.l.c beth tshudy

Advanced Technology Solutions, L.L.C.

John Cox

Advanced Technology Solutions, L.L.C

Beth Tshudy Analog Devices, Inc.

Tuesday, September 30, 2014

Advanced Technology Solutions, L.L.C.

Reducing Risk, Improving Safety Current Safety Controls at Analog Devices, Inc. Roof-top Silane Gas Pad Design Overview Project Team Participants

Design Phase Considerations

Code and Guidelines Excerpts

Safety Features

Project Milestones

Acknowledgements

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Responds to obsolescence of vacuum silane

Recommended for FM Global Insurance

compliance (a ‘Key Exposure’)

Advanced Technology Solutions, L.L.C.

Advanced Technology Solutions, L.L.C.

One of the greatest hazards of silane is that its behavior in air is unpredictable. Five things can happen:

– Nothing – Brown or white powder formation – Intermittent popping sounds—”poppers” – Immediate ignition-fire – Delayed Ignition-fire/explosion

Under the same conditions different results can occur

Shutdown or abrupt reduction in flow can cause ignition in atmosphere

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The majority of our systems utilized vac-silane (14 tools).

Advanced Technology Solutions, L.L.C.

ADI Stakeholders: Facilities Environmental, Health and Safety Process Engineers On-site Service Staff (contractor that changes silane cylinders)

Speciality Consultants: Advanced Technology Solutions, LLC—EHS/Code Hallam/ICS---Specialty Gas Piping & Controls External Stakeholders: Connolly Brothers, Inc. Symmes Maini & McKee Associates

Advanced Technology Solutions, L.L.C.

Review and develop options for siting the pad

Understand constraints

Understand and explore nature of catastrophic release

Research the current regulations for providing an outside storage facility that incorporate all code, safety, and environmental regulations

Determine actual process needs (present and future)

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Finalize conceptual design for filing permits with Town.

Work with local officials to educate them on ADI’s proposed risk reduction initiative (buy-in).

Solicit feedback from town officials.

EDUCATE, Educate, educate.

Advanced Technology Solutions, L.L.C.

ATS identified….

Code requirements (C)

Guideline safety recommendations (G)

Industry Best Practice (IBP)

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ATS identified 168 requirements after a thorough code review. The referenced codes and guidelines pertaining to silane gas storage and distribution are below:

ANSI/CGA-G-13 -- 2006 (American National Standards Institute / Compressed Gas Association) – Storage and Handling of Silane and Silane Mixtures;

FM Global Property Loss Prevention Data Sheets 7-7 – Semiconductor Fabrication SEMI S18 – 1102 – Environmental , Health and Safety Guideline for Silane Family Gases Handling; NFPA 318 -- Standard for the Protection of Semiconductor Fabrication Facilities NFPA 55 -- Compressed Gases and Cryogenic Fluids Code; International Fire Code: Chapter 18 (Semiconductor Fabrication Facilities), Chapter 27 (Hazardous Materials – General Provisions), Chapter 30 (Compressed Gases) and Chapter 41 (Pyrophoric Materials); and Massachusetts Building and Fire Codes. SEMI S18

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46 safety feature recommendations

were developed for use and review for FM Global and other stakeholders.

Advanced Technology Solutions, L.L.C.

Restricted Flow Orifices

Automated Cylinder Valve

Excess flow valves

UV/IR detection

Ventilation

Sprinkler protection

Closed Circuit Television

Seismic bracing and anchoring

Emergency Shut Off button

Auxillary blowers

¼” thick steel plates

Damage limiting construction

Auto-purge

Class 1, Div. 2 electrical Water mist to cool Lightening protection Safety systems on UPS

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Formal Process Hazard Analysis

Cause/Effect Matrix

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Advanced Technology Solutions, L.L.C.

Shutdown Conditions: (Typical for each GSM) 1. GSM panel flame verified 2. GSM panel heat detector tripped 3. Silane cylinder temperature > 150°F 4. GSM outlet excess flow - internal GSM safety 5. GSM outlet high delivery pressure - internal GSM safety 6. GSM EPO activation - internal GSM safety 7. VMB exhaust gas detection 8. VMB enclosure flame verified 9. VMB controller EPO activated 10. Roof Pad Exit EPO activated -shutdown all PAD GSMs 11. Security Office Pull Station (via FACP to SGMCS) -shutdown all PAD GSMs 12. Heat detectors beneath PAD in Bldg 2 ceiling tripped

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Schematics of exterior fenced structure (shell) Schematics of lower level exterior Schematics of damage limiting construction

requirements Structural support bracing Site preparation plans Utility plan Site details Schematics of all safety controls

Advanced Technology Solutions, L.L.C.

Roof steel will be installed during the Christmas shutdown week

Silane process piping will start in January 2011

Concrete slab and site work will begin April 2011

Gas equipment and the elevator should begin in May 2011

System completion and testing by July 2011

Fab tie into equipment TBD

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Includes 2 story cylinder elevator, heated slab, exhaust, 14 cylinder positions with silane auto switchover.

Advanced Technology Solutions, L.L.C.

Advanced Technology Solutions, L.L.C.

SILANE ROOF PAD

Rack 1

Side A

Side B

Flame

Detector

Ring

Blowers

25%

50%

100%

I.R.

Camera

Heat

Detector

U.V./I.R.

Detector

Storage Rack

Flame

Detector

Ring

Sprinkler

U.V./I.R.

Sensor

Gas Monitoring

Point

3-1 VMB ROOM (1-5)

ROOFTOP

At both exits

First Vision Panels (SCC)

Silane Alarms to ERT…

Rack Hazard Alarms:

• Emergency Gas Off • Excess Flow • UVIR Fault • UVIR Flame Detected • Side A standby cylinder leak • Side B standby cylinder leak • Side A High Cylinder pressure • Side B High Cylinder pressure

Regular Regular Thermal Thermal Thermal Thermal

Advanced Technology Solutions, L.L.C.