just after cl -icp
Post on 16-Feb-2016
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Just After Cl -ICP. After HF etch, and 250’C 2.5h anneal. Less membrane supporting, some lines wrap and break. In some area, the Ni was totally removed. Two remaining problems:. - PowerPoint PPT Presentation
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Just After Cl-ICP
After HF etch, and 250’C 2.5h anneal
In some area, the Ni was totally removed Less membrane supporting, some lines wrap and break
Two remaining problems:1. The Ni/SiO2/HfO2 from the backside is not so easy to be fully removed,
and I could not get reproducible good TEM images.2. The Ni lines on top of the Ni are attached by the Cl-ICP etch.
Possible Solutions:
1. Dry the Ni-InGaAs bonding again with the small-window TEM grid, as well as thinner Ni layer that will not react all through the 50nm InGaAs.
2. Writing the fins with HSQ fully cover the Ni to protect it, and use thicker Ni (200 nm).
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