lam research confidential slide - 1 transfer calibration lrt training center shaw wang
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Lam Research Confidential Slide - 1
Transfer Calibration
LRT Training Center
Shaw Wang
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Lam Research Confidential Slide - 2(v3)
Theory of Operation
All wafer locations throughout the system are defined as stations. Each robot must be calibrated (“taught”) to each station. Stations are typically defined by the wafer center at each location. The wafer center position is defined by a radial (R) and theta (T) coordinate relative
to the robot being taught. The vertical position (Z or BTO) is defined relative to the robot being taught. Which is typically defined as the wafer height that the wafer can freely enter and exit the station.
Stations with multiple slots must define the number of slots (slot) and the pitch (p) between the slots.
For stations not radially located from the robot center, the wafer path to and from the station must also be defined (via points).
For stations which require mapping, map positions must also be defined. These positions are typically defined with radial, theta and wrist coordinates.
Reference– “Transfer Calibration procedure”, 202-012898-001 Rev G
202-012898-001_g.pdf
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Lam Research Confidential Slide - 3(v3)
Transfer Calibration Fixtures
Chamber fixture
Airlock fixture
CDM (Control display module) Dummy wafer (Carbon wafer)
Dynamic Alignment ATM arm position
ATM Aligner fixture FOUP fixture Refer document:202-012898-001 version G
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Lam Research Confidential Slide - 4(v3)
Transfer Calibration Fixtures
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Lam Research Confidential Slide - 5(v3)
System Block Diagram
Motor Power
Signal Cable
Null Modem Cable
24VDC Power
Misc IOMisc IO
24VDC Power
RS-232 Serial Cable(SIO 1)
(SIO 2)
RS-232 Serial Cable
ATM Robot ControllerTerminal
Server
VTM Robot
VTM Mother Board
Aligner
ATMRobotDrive
ATM ROBOT COVER SWITCHES
LPM 1, LPM 2, LPM 3
Aligner Window
A/L1 Window, A/L2 Window
Right Side Window (Bottom)
Right Side Window (Top) Newer Systems
ATM ROBOT COVER SWITCHES
LPM 1, LPM 2, LPM 3
Aligner Window
A/L1 Window, A/L2 Window
Right Side Window (Bottom)
Right Side Window (Top) Newer Systems
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Lam Research Confidential Slide - 6(v3)
Loadport Switch 1 ,2 & 3
A/L 1 Window
Alinger Window
A/L 2 Window
Right side Window
ATM Robot Cover Switches
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Lam Research Confidential Slide - 7(v3)
Station Numbering
ATM 3Right FOUP
ATM 2Middle FOUP
ATM 1Left FOUP
ATM 7Aligner
ATM 4IMM
ATM / VTM 5Right Airlock (2)
ATM / VTM 6Left Airlock (1)
ATM 9 ATM 8
ATM 10
VTM 4PM 4
VTM 3PM 3
VTM 2PM 2
VTM 1PM 1
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Lam Research Confidential Slide - 8(v3)
Wafer Flow
Serial Processing– Poly, Exelan
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Lam Research Confidential Slide - 9(v3)
Wafer Flow
Parallel Processing– Metal/Strip, Poly/Strip
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Lam Research Confidential Slide - 10(v3)
ATM Calibration
Module station positions (R, T, Z) are taught by the user using the CDM and a fixture that is placed in the module.
Intermediate points are defined by calculations based on the nominal positions. – Intermediate points include via positions, map positions, & map via positions.– Nominal points are based off of a defined home position.
Constants are defined where possible and set based on nominal positions or values.
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Lam Research Confidential Slide - 11(v3)
VTM Calibration
Module station positions (R, T, Z) are taught by the user using the CDM and a fixture that is placed in the module.
Constants are defined were possible and set based on nominal positions or values. Each VTM position is optimized using Dynamic Alignment (can be done at
atmosphere or vacuum)– A wafer is perfectly centered in the station
• Wafer is centered either by a fixture (PM) or by the aligner (LL)– Routine is run through system software to adjust the station
• The wafer is picked• Dynamic Alignment reports a radial and theta offset (wafer center offset).• Station position (R and T) is adjusted so that the arm and the wafer line up.
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Lam Research Confidential Slide - 12(v3)
Prepare the System
2300 software ready. ATM /VTM Robots had installed. System must be leveled. Robots and aligner had been setup. Pin lifter calibrated.
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Lam Research Confidential Slide - 13(v3)
Leveling Procedure
ATM Robot Leveling. Aligner Leveling. Airlock Buffer/Cool Station Leveling. 25 slots Buffer station Leveling. LPM Installation and Leveling. KLA Metrology Station Leveling. VTM Robot End Effector Leveling for SCARA Arm. ATM Robot vacuum switch set up.
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Lam Research Confidential Slide - 14(v3)
ATM/VTM Robots Calibration
ATM-LPM. ATM-KLA Metrology Station. ATM-Airlocks. ATM-Aligner. ATM-Buffer/Cool station. VTM-Airlocks. VTM-PMs. After finished all the station, do the ironman test.
– To identify the reliability of transfer.
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Lam Research Confidential Slide - 15(v3)
Diagnose\Iron ManDiagnose\Iron Man
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Lam Research Confidential Slide - 16(v3)
Calibration Parameters
Lam Research Confidential Slide - 17
Backup – WPS System
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Lam Research Confidential Slide - 18(v3)
WPS System
Dynamic Alignment is a wafer location and centering algorithm used during wafer transfer in the VTM. Dynamic Alignment uses two sensors on each facet to determine the location of the wafer.
200mm use sensor 2 for wafer presence. 300mm use sensor 1 for wafer presence.
300mm Wafer
200mm Wafer
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Lam Research Confidential Slide - 19(v3)
WPS System
200 mm SystemConnect to Emitter Connect to Detector
AL1 S2RAL1 S2T
AL1 S1RAL1 S1T
AL2 S1RAL2 S1T
AL2 S2RAL2 S2T
PM1 S1RPM1 S1T
PM2 S1RPM2 S1T
PM3 S1RPM3 S1T
PM4 S1RPM4 S1T
PM1 S2RPM1 S2T
PM2 S2RPM2 S2T
PM3 S2RPM3 S2T
PM4 S2RPM4 S2T
WPS controlPCB
P2
P4
P6
P8
P10
P12 P11
P1
P3
P5
P7
P9
Sensor optical 12
Sensor optical 11
Sensor optical 10
Sensor optical 8
Sensor optical 7
Sensor optical 9
Sensor optical 6
Sensor optical 5
Sensor optical 4
Sensor optical 2
Sensor optical 1
Sensor optical 3
VTM Mother PCB
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Lam Research Confidential Slide - 20(v3)
WPS System
300mm System
AL1 S1TAL1 S1T
AL1 S3RAL1 S3T
AL2 S3RAL2 S3T
AL2 S1RAL2 S1T
PM1 S3RPM1 S3T
PM2 S3RPM2 S3T
PM3 S3RPM3 S3T
PM4 S3RPM4 S3T
PM1 S1RPM1 S1T
PM2 S1RPM2 S1T
PM3 S1RPM3 S1T
PM4 S1RPM4 S1T
WPS controlPCB
P2
P4
P6
P8
P10
P12 P11
P1
P3
P5
P7
P9
Sensor optical 12
Sensor optical 11
Sensor optical 10
Sensor optical 8
Sensor optical 7
Sensor optical 9
Sensor optical 6
Sensor optical 5
Sensor optical 4
Sensor optical 2
Sensor optical 1
Sensor optical 3
VTM Mother PCB
Connect to Emitter Connect to Detector
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Lam Research Confidential Slide - 21(v3)
WPS System
Location
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Lam Research Confidential Slide - 22(v3)
Component
Transducers– 24 VDC to provide light source for fiberoptics– Convert light energy into 5 VDC signal– LEDs
• Green - DC Power ON• Amber - OFF when Blocked
– Gain Adjustment - Factory Set
Transducers
Gain Adjustment
LEDs
Center Finding PCB
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Lam Research Confidential Slide - 23(v3)
Component
Detector– Receive light if not blocked by wafer
Emitter– Send light
DetectorEmitter
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Lam Research Confidential Slide - 24(v3)
DA function
Theory of Operation
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Lam Research Confidential Slide - 25(v3)
DA function
Theory of Operation
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