mostafa soliman, ph.d. february 9th 2015

1 Mostafa Soliman, Ph.D.

Mostafa Soliman, Ph.D.

February 9th 2015

Course objectives

Course contents

Introduction to MEMS industry

Market Shares and Revenues

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To provide students with foundational background, methods of

fabrication, and mechanisms of operation of modern MEMS-based

sensors and actuators along with their measuring instruments in

different fields of application.

To introduce the students to basic MEMS design.

To introduce the students to design different MEMS-based

measurement systems, inertial sensing systems, pressure sensing

systems, …etc.

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o Course introduction and Introduction to MEMS

o MEMS Scaling Laws

o Micromachining technology, bulk, surface, and Silicon On Insulator (SOI)

o MEMS Electromechanics, Microstructures

o MEMS Electromechanics, Damping

o Time and frequency responses of 2nd order systems

o Microactuators

o Capacitive actuation

o Thermal actuation

o Sensors

o Capacitive, Thermal, Piezoelectric, Piezoresistive sensing

o Inertial and pressure measurement systems.

Mid-Term: 15 %.

Quizzes (2-3): 5 %

Project: 10 %

Final: 70 %

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To be discussed in the class!!!

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Measurand

Physical Process

Sensor

Analog to Digital

Converter

Physical measurement Value

Signal variable

Analog Signal Processing

(e.g. Amp., Filters...etc)

Digital Signal

Processing

Display

Analog signal

Digital signal

Data Acquisition System PC/Server

MEMS is the second silicon revolution.

MEMS is fabricated by microfabrication technologies.

MEMS technology is a batch fabrication process,

same as ICs technology.

MEMS technology is mature, more than 25 years.

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Manufactured onto semiconductor material.

Used to make sensors, actuators,

accelerometers, switches, and light reflectors

Used in automobiles, aerospace technology,

biomedical applications, ink jet printers,

wireless and optical communications

Range in size from a micrometer to a

millimeter range.

Three MEMS blood pressure sensors

on a head of a pin

[Photo courtesy of Lucas

NovaSensor, Fremont, CA]

Mostafa Soliman, Ph.D.

Inertial Measurements: Accelerometers, gyroscopes, vibration sensors.

Pressure Measurements: TPMS (Tire Pressure Monitoring System) ,

disposable blood pressure sensors and various industrial applications.

Display Technology: Optical MEMS in projectors, plasma displays.

RF Technology: Tunable filters, RF switches, antennas, phase shifters,

passive components (capacitors, inductors).

Chemical Measurements: Micro-fluidics: Lab-On-Chip devices, DNA test

structures, micro-dispensing pumps, hazardous chemical and biological

agent detectors

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3-axis accelerometer

3-axix gyroscope

Module size

A conventional

gyroscopes

Aviation Missiles

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Ant Leg

Each mirror is about 17μm square!

DMD mirrors – complete DLP units have over 2 million mirrors – all functioning!

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Variable Optical Attenuators

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Scratch Drive Actuators (SDA)

SDAs push-pull a mirror

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Melting

point (°C)

Thermal

expansion

(10-6/°C)

Density

(g/cm3)

Young’s

modulus

(GPa)

Si 1415 2.5 2.4 130-169

SiN 1900 2.8 1.48 243

SiO2 1610 0.5 2.27 73

Al 660 25 2.70 70

Steel 1500-2000 12 7.9 210

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