the anti-gravity micromachine presented by: vertically challenged
Post on 22-Dec-2015
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What are Micromirrors?
• Change the angle of a reflected beam in multiplexing and de-multiplexing of optical signals
• Very precise and flawless• Aim: raise the mirror to the desired
angle
The Problem
• Vertical lift cannot be obtained through horizontal movement
• Fabrication process leads the mirror to sag down
Fixed Hinge
MirrorLever Applied
Force
Wafer
Thermal Actuators
• Make use of differing arm thickness to provide movement
• Problem: using the principles described, it is difficult to obtain vertical movement
Vertical Thermal Actuators
• Design 1: Built to provide a downward motion but is overdriven; when current is removed the actuator snaps up
202
Poly 0
Poly 2
Poly 1
More Vertical Thermal Actuators • Design 2: Provides upward motion
through the use of thin flexible connectors
202
Poly 0
Poly 2
Poly 1
Even More Vertical Thermal Actuators• Design 3: U-shaped designed to
prevent thicker arm from conforming
2
20
Poly 0
Poly 2
Poly 1
Levers
• Design 4: Downward Vertical Thermal Actuator is used to create lift by pressing down on one end of a lever
Mirror Hinge Thermal Actuator
Lever
Poly0
Poly 0
Poly 2
Poly 1
More Levers
• Design 5: Flexible connector used to transfer downward force of Vertical Thermal Actuator to a lever
Mirror Hinge Thermal Actuator
Lever
Poly0Poly 0
Poly 2
Poly 1
Linear Stepper Motor
• Makes use of 2 banks of horizontal thermal actuators to provide a drive mechanism
Torsion Hinge
• Thin flexible rods attached to mirror on either side
Mirror
Rotating Bar
Lever
Applied Force
Prevent Bar from Bowing Out
Torsion Hinge
Poly 0
Poly 2
Poly 1
Possible Issues
• Torsion hinge might break or not be flexible enough
• Actuating arms might bend• Vertical thermal actuators might not give
enough deflection
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