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MEMS

Workshop

Additional

Collaboration

Opportunities

Breakout Group

Participants:

Bill Bader iNEMI

Keith Jackson AM Fitzgerald

Jean-Phillipe Polizzi CEA-LETI

Janusz Bryzek Fairchild

Stephen Breit Coventor

Valerie Marty HP

Michael Muller Fraunhofer IPMS

Mike Pinelis MEMS Journal

David DiPaola Dipaola Consulting

Eric Levy-Meyers MEMS Industry Group

1

Team on Additional Collaboration Opportunities

Next Areas of Collaboration to Enable Rapid Market

Growth

1. Roadmap of the critical applications and devices that constitute the

mass of the volume for the next 10 years

– Accelerometers

– Gyros

– Pressure Sensors

– Etc

2. Effect a structure and system that brings key industry players together

to identify key/common process modules required to support these

applications

– Modules should include process scope, materials, equipment and metrology

– Start with process performance specs and envelope definition

– Wafer level, chip scale integration, package development, test processes

– Key Players Include: TSMC, Intel, Global Foundries, Hankeng, ST, Bosch, ADI, TI, Silex,

Other Foundries, Samsung, Major Equipment Players Assembly and Test

3. And……develop a collaborative approach to work towards MEMS

module integration (MH, ESD, Automation, Communication Interfaces)

2

Additional Collaborative Opportunities

4. Develop next generation of simulation tools that can create virtual

data sheets:

– Simulation Tool Vendors, EDA Vendors, Foundry, & Device OEM

collaboration needed

5. Work collectively to create intelligent accurate models for

integrating ASICS and MEMS (not necessarily monolithically)

6. Identify critical industry players needed to define communication

and SW standard for MEMS devices.

7. Standardize transferring of MEMS layouts to foundries via

adoption of improved and approved layout formats.

3

Needed To Facilitate FAST Industry Growth

• Government funding support to education and research in

support of MEMS

• Curriculum development and deployment for rapidly

growing MEMS workforce.

– Technician level focused programs in multiple geographic

hubs. Lorrain CC can be the model to follow

• University investments, supported by industry partners, in

developing higher level engineering/scientist workforce

needed to design and manufacture the fastest ramping

products and processes

– Partnering of industry with schools on curriculum

development and updates is key.

4

www.inemi.org Email contacts:

Bill Bader

bill.bader@inemi.org

Bob Pfahl

bob.pfahl@inemi.org

Grace O’Malley - Europe

gomalley@inemi.org

Haley Fu - Asia

haley.fu@inemi.org