zeiss sigma family · and elemental analytics: sigma’s best-in-class eds geometry increases your...
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Mushroom spores imaged at 1 kV at high vacuum. These delicate, fragile structures can be imaged easily with Sigma 500 at low voltage.
Fibers with embedded silver, imaged at 1 kV at high vacuum, InLens Duo SE (left), InLens Duo BSE (right).
Combine field emission SEM (FE-SEM)
technology with advanced analytics.
Profit from proven Gemini electron optics.
Choose from a variety of detector options:
you can image particles, surfaces, and
nanostructures.
Save time with Sigma’s semi-automated
4-step workflow: Structure your image
and analysis routines and increase produc-
tivity. ZEISS SmartSEM Touch for Sigma 300
makes routine analysis straightforward
and easy through its contemporary touch
interface and a variety of automated tools.
Sigma 300 delivers excellence in price and
performance. Achieve your elemental anal-
ysis fast and convenient with Sigma 500’s
best-in-class EDS geometry. Count on
accurate, reproducible results – from any
sample, every time.
Automate and Speed up Your Workflow
Control all the functionality of your Sigma
with an easy 4-step workflow. Benefit from
fast time-to-image and save time on training.
• Navigate your sample and then set
optimal imaging conditions.
• Automatically acquire images across
multiple samples utilizing regions of
interest (ROIs).
• Get contextual visualization of your
results.
Perform Advanced Analytical Microscopy
• Combine scanning electron microscopy
and elemental analytics: Sigma’s best-in-
class EDS geometry increases your ana-
lytical productivity, especially on beam
sensitive samples.
• Get analytical data at half the probe
current and twice the speed.
• Achieve complete, shadow-free analytics
in your FE-SEM. Profit from using a
short analytical working distance of
8.5 mm and a take-off angle of 35°.
Flexible Detection for Clear Images
• Characterize all of your samples
with the latest detection technology.
• Get topographical, high resolution
information with the novel ETSE and the
InLens detector for high vacuum mode.
• Obtain crisp images in variable pressure
mode with the VPSE or the C2D detector.
• Produce high resolution transmission
images with the aSTEM detector.
• Investigate composition with the
HDBSD or the YAG detector.
ZEISS Sigma Family Your FE-SEMs for High Quality Imaging & Advanced Analytical Microscopy
10 µm
Magnetic lens
Sample
Scan coils
Gemini objective
FE-gun
Condensor
InLens SE orInLens Duo detector
Electrostatic lens
Beam booster
Based on Proven Gemini Technology
• The Gemini objective lens design
combines electrostatic and magnetic
fields to maximize optical performance
while reducing field influences at the
sample to a minimum. This enables
excellent imaging, even on challenging
samples such as magnetic materials.
• The Gemini in-lens detection concept
ensures efficient signal detection by
detecting secondary (SE) and/or back-
scattered (BSE) electrons minimizing
time-to-image.
• Gemini beam booster technology
guarantees small probe sizes and
high signal-to-noise ratios.
ZEISS Sigma Family Your FE-SEMs for High Quality Imaging & Advanced Analytical Microscopy
microscopy@zeiss.com
www.zeiss.com/sigma
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