an emerging dimension of internet-of - things...
TRANSCRIPT
An Emerging Dimension of Internet-of-Things System – Chemical MEMS Sensors
Chih-Ting LinAssociate Professor
Department of Electrical EngineeringNational Taiwan University
Outline
• Introduction•Devices for Internet-of-Thing System• CMOS Integrated Chemical Sensing System
– MEMS Chemical Sensors– CMOS-MEMS Biomolecular Sensors
• Conclusion
Introduction
• 3S in 3C– Simple– Secure– Smart
• IBM: smart planet – Ability to harness data giving competitive
advantages
• Intel: extended computing technology– Connect and enrich the lives on earth
How to be Smart?• Learning from natures
Proposed Systems• Internet of Things (IoT)•Machine-to-Machine
(M2M)
Outline
• Introduction•Devices for Internet-of-Thing System• CMOS Integrated Chemical Sensing System
– MEMS Chemical Sensors– CMOS-MEMS Biomolecular Sensors
• Conclusion
Devices for Internet-of-Thing System
• Scalable– Orders of magnitude more (volume and variety)
• Sustainable– Orders of consumption less
• Smart– Autonomous and self-regulated
Technologies in IoT Devices•Nature of de-centralization• Trend of miniaturization•Ubiquity of installation
8
Sensing
Communication
ComputationCos
t/mea
sure
men
t
Performance
9
90
250
MCU (MSP430)RF (Zigbee)
Gas Sensor (Fiagro)
Unit: mW
9
90
2.5 MCU (MSP430)
RF (Zigbee)
Gas Sensor (inkjet printed)
Unit: mW
MEMS Devices• Boost the wave of smart technologies
– Acceleration, pressure, and gyros– Developed with over 20-year MEMS research– Major at the physical quantity sensing
Freescale accelerometer STMicro gyroscope MicroSesnorSystemPressure sensor
9
Something Missing…
•Another dimension of worlds: chemical sensing– An emerging research field and market– Sensitivity, selectivity, and reliability
• In networking system– Limited resources– Local calibration– Collaborative sensing
10
Outline
• Introduction•Devices for Internet-of-Thing System• CMOS Integrated Chemical Sensing System
– MEMS Chemical Sensors– CMOS-MEMS Chemical Sensors
• Conclusion
Why Chemical Sensing in MEMS?
•Harness the momentum of CMOS industries– MEMS
12
MEMS Chemical Sensors• Surface acoustic wave (SAW) sensors
– Based on piezoelectric resonators– Different recognition materials to promote
selectivity
Afzal, et al., Analytica Chimica Acta, 2013
E-Nose Based on SAW Sensors•Multiple sensing devices for different targets
Hao et al., Sensors Actuators B, 2010Pietrantonio et al., Biosensors Bioelectronics, 2013
MEMS Chemical Sensors• Piezoresistive membrane with recognition
polymers
Guo et al., Sensors Actuators B, 2011
MEMS Chemical Sensors• Capacitive micromachined ultrasonic
transducer (CMUT)
Park et al., Sensors Actuators B, 2011
CMOS-MEMS Chemical Sensors• CMOS-MEMS capacitive humidity sensors
Lazarus et al., J Microelectromechanical Systems, 2010
CMOS-MEMS Biomolecular Sensors• CMOS compatible biomolecular detection
technology– Microcantilever biosensors
Zheng, et al., Nature Biotechnology, 2005Boisen and Thundat, Materials Today, 2009
Fully Integrated Microcantilever Biosensors
• CMOS Integrated Design– Piezoresistor can be used to monitor micro-
cantilever deflection
P-type (100) Silicon substrateField oxide 2900AWSix/Poly 1 2750A
Oxide 370AN+ Poly 2 (Resistance) 1800A
ILD-BPTEOS 4280A
M1 : TiN(ARC)/Al/TiN&Ti(glue layer) 6650A
Au/Ti 3000A+500A14430A
Etching position
Fully Integrated Microcantilever Biosensors
Huang et al., Sensors Actuators B, 2013
Fully Integrated Microcantilever Biosensors
Huang et al., Sensors Actuators B, 2013
• Fully integrated with CMOS circuits– Analog interface circuit– Full functional micro-controller
(8051 core)– 433MHz OOK TX/RX– Micro-cantilever biosensing
capability
Conclusion
• IoT systems offer a value-up momentum for MEMS technologies
• A paradigm shift for sensor designs is needed in IoT– Communication promotes collaborative sensing
• MEMS platform offers a vehicle for devices in IoTsystems– Low cost, low power, and high computational capability
• CMOS-MEMS chemical sensor is an emerging direction to enrich IoT systems