anl - graphene pellicles - rvanrijn - 2ieuvi.org/twg/mask/2015/8_anl_richardrvanrijn.pdf · –...
TRANSCRIPT
GraphenePellicles
RichardvanRijn
AppliedNanolayers
• Scalableautomatedproduc;onofhighqualitygrapheneupto200mmwafersizesbyCVD
• 2DM(grapheneandrelatedmaterials)supplierofchoice– Strongverifiableautomatedqualityassurance– Robusthighvolumesupplychain– Focusonapplica;onsandintegra;onwithCMOS
• Global2DMdevicefoundry
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Technology
• Produc'onofhighqualitygrapheneon200mmwafersusingepitaxialmetalfilms– Developedfullyautomatedproduc'onpla>ormengineeredforlowestcostpercm2
– Pla>ormandmethodcompa'blewithh-BNandother2Dmaterials
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Waferscalegrapheneupto200mm
Raman
Mono-PureGraphene
SEM
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Technology
• Produc;onofhighqualitygrapheneon200mmwafersusingepitaxialmetalfilms– Developedfullyautomatedproduc;onplaTormengineeredforlowestcostpercm2
– PlaTormandmethodcompa;blewithh-BNandother2Dmaterials
• Wafertowafertransferupto200mm– Fullymechanicaltransfer– Fullautoma'on
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Wafertowafertransfer
2mm 50um
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Technology• Produc;onofhighqualitygrapheneon200mmwafersusingepitaxialmetalfilms– Developedfullyautomatedproduc;onplaTormengineeredforlowestcostpercm2
– PlaTormandmethodcompa;blewithh-BNandother2Dmaterials
• Wafertowafertransferupto200mm– Fullymechanicaltransfer– Fullautoma;on
• Automatedqualitycontrolon200mm– Ramanspectroscopy– Op'calmicroscopy
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Applica;ons
EUVpellicleAc+vedevices
SensorsOptoelectronics
RF
BEOLintegra+on
Semiconductor
ThinmembranesGenesensing
Biocompa+blecoa+ngBioI/O
PlaDormsubstrate
Biotech
Lowfric+onlayerFlexiblemembrane
SensingLabonchip
BEOLintegra+on
MEMS
Devices&sensorsAdvancedsensing
SolarpowerMembranes
AdvancedplaDorms
Defense&space
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Graphenepellicles
Advantages• Precisecontroloverthenumberoflayers• Heterostructures:incorporateotherlayerstoimprove
pellicleproper;es(h-BN)• Controlinterlayerorienta;on• Noneedtothinmembrane• SupportedANLgrapheneproventoberesistanttoEUV+H2
>24hChallenge
• Integra;onwithpelliclesupportstructure
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BoMomupconstruc+on–>buildmembranelayerbylayerusingwafertowafertransfer
Ramanqualitycontrolformonoandmul;layergraphene
Uniformcrack-freetransferon>cm-sizedomainsforboth1LandML.StrongerGpeakonMLàstrongerscaceringàmorematerialpresent.
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Ramanqualitycontrolformonoandmul;layergraphene
Uniformcrack-freetransferon>cm-sizedomainsforboth1LandML.StrongerGpeakonMLàstrongerscaceringàmorematerialpresent.NegligibleDpeakàlowdefectdensityalsoonMLSmallchangewidthG/2Dpeakànegligibleinterac;onbetweenlayers.
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Suspendedsingle-layergraphenedrumsovercavi;es
SEMofsinglelayergraphenesuspendedovera1μmdiameterholeonSiO2
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Suspendedmul;-layergraphenedrumsovercavi;es
SEMofmul;layergraphenesuspendedovera20μmdiameterholeonSiO2
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Suspendedmul;-layergraphenedrumsovermeshes
SEMofmul;layergraphenesuspendedoveramesh
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Suspendedmul;-layergrapheneover2.5mmwindow
Transmissionmicroscopyofmul;layergraphenesuspendedoveraframe
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Suspendedmul;-layergrapheneover2.5mmwindow
RamandataattwopointsoverthesuspendedmembraneClearGand2DpeakàgrapheneispresentG>2Dàmul;layergrapheneSmallDpeakàlowdefectdensity
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Nextsteps
• Increasemembranetofullsize(ANL)• Incorporateothermaterials(ANL)• Frameintegra;on(withpartners)• Membranecharacteriza;on(withpartners)
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Thankyou
AppliedNanolayersB.V.Tarweweg36534AMNijmegenTheNetherlandswww.appliednanolayers.com
PaulHedgesChiefExecu'veOfficerM+31(0)653424432p.hedges@appliednanolayers.comDr.RichardvanRijnChiefTechnologyOfficerM+31(0)[email protected]
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