anode layer ion beam sources
TRANSCRIPT
Ion beam sources
Anode layer type ion beam sources(inverted magnetron)
A wide range of applications:● sputtering of materials both dielectric and
conductive targets;● magnetron sputtering assistance;● ion cleaning, etching;● polishing;● plasma-enhanced chemical vapor
deposition (PECVD);● surface modification.
Scalable for different applications
Technical data
Parameter IBS-145 IBS-400 IBS-600 IBS-800
Supply voltage, kV 1.5..5
Mean ion energy Approx. of supply voltage½Maximum beam current, A* 0.3 1.0 1.5 2.0
Gas efficiency, mA/sccm* 10
Electrode lifetime (Ar at maximal current),
hours**200
Beam shape Hollow rectangular
Beam sized, WхT, mm 120х42 375х42 575х42 775x42
Beam divergence angle 2°
Maximum operating pressure, Pa 10
Work gas Ar, H2, He, Xe, O
2, N
2, Ne, C
xH
y, CO
2, C
xF
y
* Parameters measured in the following conditions: Argon, voltage 3 kV, chamber pressure 0.1 Pa** Electrodes are sputtered in inert gases except He only .
IBS-145
Current vs Voltage graph (IBS-145)
Gas – N2, flow rates are shown in the legend
500 1000 1500 2000 2500 3000 35000
50
100
150
200
250
300
350
400
450
0,67
0,64
0,58
0,53
0,47
0,42
0,36
0,31
Supply voltage, V
Be
am
cu
rre
nt,
mA
Current vs gas flow rate graph (IBS-145)
Supply voltage 3000 Volts
0,00 5,00 10,00 15,00 20,00 25,00 30,00 35,00 40,00 45,000
50
100
150
200
250
300
350
400
450
f(x) = 8,9x
f(x) = 10,0x
Gas flow, sccm
Be
am
cu
rre
nt,
mA
Ar
N2
IBS-600..800
Device A
IBS-400 396
IBS-600 596
IBS-800 796
Laboratory of Vacuum Technologies (© Beams&Plasmas) develops and produces vacuum equipment for coating deposition. State-of-the-art technical concepts, high reliability and capacity, as well as reasonable prices and compact sizes are distinguishing features of our machines.
● Vacuum systems process equipment (magnetrons, ion beam sources, plasma generators, vacuum system matching units, sensors and accessories)
● Engineering advice● Maintenance and repair of vacuum equipment● Modernization of the existing vacuum process equipment
Laboratory of Vacuum Technologies, LTDPhone. +7 (499) 346 2020E-mail: [email protected] address: 124460, Zelenograd, Moscow, c/o OOO LVT, suite #36 (for documents only).Legal address: 124536, Zelenograd, Moscow, 527-61.