Semiconductor manufacturers are under constant pressure to reduce manufacturing costs, increase yield, improve quality, and decrease production cycle times to meet customers’ increasing demands. Applied PROMIS manufacturing execution system (MES) software provides real-time direct management and control over the events in the fab.

Applied PROMIS®

CONFIGURABLE MANUFACTURING EXECUTION SYSTEM

APPLIED GLOBAL SERVICES

MEETING CRITICAL CHALLENGES

Applied PROMIS software is an integrated solution that combines planning, scheduling, costing, document control, SPC, production and performance management in one comprehensive manufacturing execution system. Maximizing yields, reducing cost, optimizing equipment, and satisfying customers are just a few of the common challenges manufacturing plant managers face. Some of the more critical challenges facing semiconductor manufacturers – like getting to market quickly, responding to new opportunities, and meeting the demand for higher quality – may not originate on the shop fl oor, but are infl uenced by events that occur on the production fl oor. Applied PROMIS software optimizes every aspect of the plant’s operations from production fl oor performance to top fl oor decision-making.

ROBUST PLANT CONTROL APPLICATIONS

Applied PROMIS software provides a balance of capabilities throughout the factory, as robust on the business side as it is on the production side. Users can tailor PROMIS software by choosing from a broad set of option modules to fi ll the gap between ERP systems and the equipment controllers. PROMIS’ out-of-the-box integration framework

easily integrates 3rd party software via standard APIs and Oracle ODS. The tight integration provides a full plant solution that off ers real-time control of the most critical processes and workfl ows. This integration means fewer data entries, reduced duplication, more consistent data, tighter version control, optimum equipment utilization, better plant management, and a paperless work environment. Use of the new HTTP version of the Real-Time Integrator allows easy customization of application behavior without modifying PROMIS code.

OPEN SYSTEMS DESIGNED FOR

INTEGRATION

Applied PROMIS software is the right solution for today’s challenges. Sharing information across the enterprise, from the production fl oor to the business offi ce, PROMIS software includes applications for transferring data into and out of manufacturing systems. The PROMIS open interface easily integrates material handling, automation, scheduling, and dispatching information. PROMIS software provides the fl exibility to evolve the system over time, choosing from numerous option modules to grow the system as manufacturing operations grow. Applied PROMIS software supports industry standard gateways that interface with a range of cell controllers, robotics, and test equipment.

Applied PROMIS software optimizes every aspect of the plant’s operations from production fl oor performance to top fl oor decision-making.

BENEFITS• Reduces process cycle-time

• Improves product yield

• Maximizes equipment utilization

• Minimizes WIP distribution and inventory levels

• Reduces IT and support costs

• Provides information for agency audits

• Provides rapid time to full manufacturing production

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Applied PROMIS®

CONFIGURABLE MANUFACTURING EXECUTION SYSTEM

The PROMIS Transaction Processor (TP) and Real-Time Integrator (RTI) modules enable communications with external sys-tems such as industry tailored costing and planning applications that exchange data with ERP/MRP systems. This great-ly reduces the time and cost required to integrate manufacturing systems with business systems. Applied PROMIS soft-ware is built on an open architecture, utilizing open systems message bus and standard APIs. PROMIS manufacturing solutions are developed in conformance with the SEMI and SEMATECH CIM Application Framework, the standard for open software integration in semicon-ductor manufacturing. PROMIS open solutions are available on the most pop-ular hardware and software platforms including Open VMS on Alpha, Unix on HP, and Windows.

Applied PROMIS software provides visibility into the plant database to view product history, production plans, maintenance schedules, and performance reports.

PROMIS open solutions are available on the most popular hardware and software platforms including Open VMS on Alpha, Unix on HP, and Windows.

“OUT-OF-THE-BOX” OPERATION

Applied PROMIS software includes ready-to-use applications for defi ning, managing, automating, and controlling fab processes. Powerful process applications and reusable components mean faster defi nition and qualifi cation times. Applied PROMIS software makes it easy for semiconductor plants to get information systems up and running to volume production in a short period of time with easy to operate, user-friendly tools.

ENHANCED FLEXIBILITY

Users can quickly create and revise process plans using the PROMIS library allowing them to rapidly respond to new opportunities and changing requirements. One of the most powerful features of Applied PROMIS software is its ability to maintain a collection of “master” plans that can be modifi ed on the fl y just by changing parameter values to meet specifi c product requirements. All procedures, recipes, operations, and documents relating to manufacturing processes are version-controlled, making it easy to enforce change control and maintain documented traceability.

Conditional or alternate workfl ows are automatically implemented on the plant fl oor through electronic review, approval, and distribution of work instructions. Production parameters are used to create and manage a dynamic process that adjusts to real-time data on-the-fl y, and evolves the system over time. These production parameters are key to using qualifying and test lots to verify process or equipment, automatically feeding information back into the system for fi ne-tuning equipment and WIP levels.

PROVEN RELIABILITY

Since it’s introduction, Applied PROMIS software has been deployed in over 270 semiconductor and precision electronics manufacturers around the world. Applied PROMIS software provides innovative solutions for achieving the highest possible uptime, and supports redundant CPU’s enabling backup, archive, and upgrade without losing production time.

MEETING QUALITY STANDARDS

Applied PROMIS software provides a return on investment through WIP optimization to improve yield, reduce cycle time, increase equipment utilization, and enhance customer satisfaction.

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Applied PROMIS software provides detailed resolution and control of production to track resources in real-time and reports detailed information on WIP, inventory lev-els, and process performance measurements. The Advanced Equipment Module off ers unprecedented control of how and when equipment is used throughout the plant. The fi nite scheduling feature provides dispatching input to further optimize equipment uti-lization in response to shifting production demands. These features work together seamlessly to reduce overall cost of ownership and increase return on investment.

PROMIS production planning and maintenance scheduling software meets continuous quality improvement measures by reducing process errors. The real-time data collec-tion provides process improvement, from revision-controlled document management, to closed-loop statistical process control. With complete traceability it is easier to con-form to regulatory requirements and agency audits.

Applied PROMIS provides a wide range of features and functionality that have been proven in mission critical production environments in the worlds leading fabs.

APPLIED GLOBAL SERVICES

PROMIS production planning and maintenance scheduling software meets continuous quality improvement measures by reducing process errors.

FEATURES FUNCTIONALITY

User confi gurable objects Rapid process defi nition. Re-usable components

reduce implementation eff ort. Revisions/updates

are easier as one change may apply automatically

to many fl ows.

Conditional process fl ows Adjust down-stream processing based on lot

experience. Develop common fl ows with pre-

specifi ed variation. Document the conditions under

which various options apply.

SPC Charts and Alarm actions Embed data collection within the process steps and

automatically update SPC charts. Defi ne automatic

actions such as Tool Shutdown, Process Hold, or

invoke custom actions.

Lot and component history See component level detail: which wafer was tested,

which wafers have been split or merged, which

wafers were scrapped for which reason. Identify to

which lots a wafer has been a member.

User defi nable parameters These may be prescriptive – e.g. product

specifi c mask ID in a common Lithography fl ow

– or adaptive – either performing feed-forward

adjustment to a lot’s processing, or feed-back

changes to equipment processing. Parameters

apply to Lots, Equipment, or even to specifi c

components within a lot (perhaps to “fl ag” a

particular wafer).

Equipment preventative maintenance scheduling

Schedule maintenance based on Calendar,

number of lots processed, number of components

processed, or even the accumulation of a process

variable (e.g. Film deposited or tool Meter hours).

Assess production impact and disable the tool, or

just one chamber of the tool.

Measurement Sampling Specify whether measurements are to be performed

on the entire lot, or just a sample. Defi ne the

sampling basis, e.g. same component as measured

at prior step.

SERVICES

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Applied PROMIS®

CONFIGURABLE MANUFACTURING EXECUTION SYSTEM

APPLIED GLOBAL SERVICES

FEATURES FUNCTIONALITY

Pilot and monitoring component procedures

Defi ne the points in the process fl ow where pilot

activity must occur. Specify what happens to

the “at risk” components, while the pilot is being

processed, or if the pilot fails its measurements.

Allows separate process for pilot wafers versus the

balance of the lot.

Process timers Enforce minimum or maximum time during or

between steps – even if not adjacent. There may be

multiple timers managing a given lot. Assure the

pre-treatments do not expire, or that suffi cient time

is allowed for “curing”.

Confi gurable product Splits, Merges, and Holds

Pre-defi ne checkpoints in your process. Build in

split and merge processing at the proper point. Be

confi dent that your requirements are enforced.

Production reports Out-of-the-box reports for examining inventory

levels, WIP distribution, scrap, yield, and cycle

time performance.

Confi gurable user security Manage user authorization by function, by

factory location, by product, by process, or any

combination thereof.

Version control for objects Allows default use of a “production” version

of an object, while simultaneously supporting

different “experimental” versions. Supports the

option of automatically incorporating updated

lower level objects without having to update the

higher-level object.

Component costing and consumption Standards-based costing, with tracking of

actual activity. Allows determination of cost of

rework loops –as used by particular lots. Cost of

component usage rolled into assembled cost.