a&r template 4.4 - dom.semi.orgdom.semi.org/.../$file/5411bproceduralreview.docx · web viewii....

A&R Template 4.4

Procedural Review Voting Sheet

2013 Cycle 4

REGION: North America

COMMITTEE: Information & Control

EVENT: SEMICON West 2013

DATE OF MEETING: July 10, 2013

PLACE OF MEETING: San Francisco Marriott Marquis Hotel in San Francisco, California

COMMITTEE CO-CHAIRS: Brian Rubow/Cimetrix, Jack Ghiselli/Ghiselli Consulting, Lance Rist/Industry Consultant

SEMI STAFF: Paul Trio

A&R Voter: Name/Company

Date: 201x/MM/DD

I. Document Number & Title

Document 5411B

New Standard: Specification for Equipment Energy Saving Mode Communications (EESM)

II. Tally (Staff to fill in)

Voting Tally: As-cast tally after close of voting period

A minimum of 60% of the voting interests that have voting members within the technical committee must return votes. (Regulations ¶ 9.6.1)

A&R

Not approved

Reason:

III. Rejects

Reject 1 (James Moyne - Applied Materials)

Negative 1 of Reject 1

Negative

Referenced Section

*TF/Committee to fill in if necessary

Reason

*Original negative comment and justification should be included.

1.) Section 7.4.4: “As long as the equipment control system is operational, it is responsible to continue updating the Equipment Energy Saving state, even when there are no communications.”

a. Do you mean the EnergySavingState parameter, or something else?

b. What is the “equipment control system”? Do you mean that, as long as energy is being expended by the equipment, this parameter should be kept current? … or do you mean operational? Is this chamber specific?

Withdrawal

No withdrawal made

GO TO “Related” section

x

Withdrawal document received by staff on July 9, 2013

GO TO “Final” (A)

Related

Motion and Reason

“Related” is mutually agreed upon.

*This motion can be appended to the motion for Persuasive (See Persuasive Section)

Negative is related (needs over 1/3 votes to pass)

Negative is not related (needs 2/3 or more votes to pass)

Reason

XXXX

Motion by/2nd by

Name (Company)/Name (Company)

Discussion

Result of Vote (check ONE)

XX-XX

[Negative is related] > 1/3

GO TO “Persuasive”

[Negative is not related] < 2/3

2/3=< [Negative is not related]

GO TO “Final” (B)

Persuasive

Motion and Reason

Negative is related and persuasive (needs over 1/3 votes to pass)

Negative is related and not persuasive (needs 2/3 or more votes to pass)

Reason

XXXX

Motion by/2nd by


Discussion


XX-XX

[Negative is related and persuasive] > 1/3

GO TO “Final” (E)

[Negative is related and not persuasive] < 2/3

2/3=<[Negative is related and not persuasive] <90%

GO TO “Final” (C)

90% =< [Negative is related and not persuasive]

GO TO “Not Significant Finding Option”

Not Significant Finding Option

This option can only be used “if the committee finds a negative not persuasive by a vote equal to or greater than 90% of the persons voting on the action”. (Regulations ¶ 9.5.3.3.2)

It is mutually agreed upon to term the negative “not significant”

GO TO (D)

It is mutually agreed upon to term the negative “significant”

GO TO (C)

Motion

The negative is “not significant”.

Motion by/2nd by


Vote

XX-XX Motion passed with simple majority

GO TO (D)

XX-XX Motion failed with simple majority

GO TO (C)

Final

Negative is:

x

(A)

withdrawn (counted under h in disposition)

(B)

not related (counted under i in disposition)

(C)

related and not persuasive (significant)

(D)

not significant (counted under j in disposition)

(E)

related and persuasive

DOCUMENT FAILS

Comment generated. See comment #x

A&R

Not approved

Reason:


Negative

Referenced Section


Reason


2.) [Esss.ss-RQ-00006-00]: Is this per chamber, per GEM/SECS interface, etc.? It isn’t clear to me from the definition of production equipment how this is handled in more complex multi-function and parallel function equipment.

Withdrawal

No withdrawal made


x



Related

Motion and Reason





Reason

XXXX

Motion by/2nd by


Discussion


XX-XX






Persuasive

Motion and Reason



Reason

XXXX

Motion by/2nd by


Discussion


XX-XX











GO TO (D)


GO TO (C)

Motion


Motion by/2nd by


Vote


GO TO (D)


GO TO (C)

Final

Negative is:

x

(A)


(B)


(C)


(D)


(E)


DOCUMENT FAILS


A&R

Not approved

Reason:


Negative

Referenced Section


Reason


3.) 9.2.2.4.1: “The sub-states of the EquipmentEnergySaving state are NormalOperation and NotReadyForNormalOperation”. This should be a requirement if your other sentences on states are requirements.

Withdrawal

No withdrawal made


x



Related

Motion and Reason





Reason

XXXX

Motion by/2nd by


Discussion


XX-XX






Persuasive

Motion and Reason



Reason

XXXX

Motion by/2nd by


Discussion


XX-XX











GO TO (D)


GO TO (C)

Motion


Motion by/2nd by


Vote


GO TO (D)


GO TO (C)

Final

Negative is:

x

(A)


(B)


(C)


(D)


(E)


DOCUMENT FAILS


A&R

Not approved

Reason:


Negative

Referenced Section


Reason


4.) “[Esss.ss-RQ-00022-00] When in the Sleep state, production equipment shall accept any valid Sleep command.” And “[Esss.ss-RQ-00023-00] When in the Sleep state, production equipment shall accept any valid WakeUp command received. [/RQ]” Looking through your document it seems that “accept” means “execute”. In other words it can’t refuse a command with an Ack Code (I’m not sure this is clear, but OK, I guess). However it isn’t correct to force production equipment to execute a command from the host for a function like this. There may be extenuating circumstances that will force the equipment to refuse the command (e.g., overriding safety interlocks). In that case the response (“Cannot Perform Now”) seems valid, though earlier you label that as “rejecting” a command.

Withdrawal

No withdrawal made


x



Related

Motion and Reason





Reason

XXXX

Motion by/2nd by


Discussion


XX-XX






Persuasive

Motion and Reason



Reason

XXXX

Motion by/2nd by


Discussion


XX-XX











GO TO (D)


GO TO (C)

Motion


Motion by/2nd by


Vote


GO TO (D)


GO TO (C)

Final

Negative is:

x

(A)


(B)


(C)


(D)


(E)


DOCUMENT FAILS


A&R

Not approved

Reason:


Negative

Referenced Section


Reason


5.) In general I believe there should be an opportunity for the equipment to refuse a service of this kind in any state. Energy Saving is not integrated with all sub-systems and some of these sub-systems will have priority over Energy Saving. Maybe this is the purpose of the “Not Ready for Normal Operation” state, but I don’t get that from requirement 29.

Withdrawal

No withdrawal made


x



Related

Motion and Reason





Reason

XXXX

Motion by/2nd by


Discussion


XX-XX






Persuasive

Motion and Reason



Reason

XXXX

Motion by/2nd by


Discussion


XX-XX











GO TO (D)


GO TO (C)

Motion


Motion by/2nd by


Vote


GO TO (D)


GO TO (C)

Final

Negative is:

x

(A)


(B)


(C)


(D)


(E)


DOCUMENT FAILS


A&R

Not approved

Reason:

Disposition of Reject 1

5

Original number of Negatives

(g)

5

# of Negatives withdrawn

(h)

# of Negatives found not related

(i)

# of Negatives found not significant

(j)

Final

x

g-(h+i+j)=0

Reject is Not Valid and is not included in the denominator of § VI. Approval Conditions Check

g-(h+i+j)>0

Reject is included in the denominator of § VI. Approval Conditions Check

Reject without a Negative

Not Valid

Note: If all of the negative material included with a reject vote is withdrawn, determined to be not related, or determined to be not significant, the reject vote is not valid. (Regulations ¶ 9.4.3.3)

A&R

Not approved

Reason:

IV. Comments

Comment 1a

Comment

Referenced Section


From

James Moyne - Applied Materials

Comment

1.) Section 7.4.4: “As long as the equipment control system is operational, it is responsible to continue updating the Equipment Energy Saving state, even when there are no communications.”

a. Do you mean the EnergySavingState parameter, or something else?

b. What is the “equipment control system”? Do you mean that, as long as energy is being expended by the equipment, this parameter should be kept current? … or do you mean operational? Is this chamber specific?

Discussion

TF Discussion:

· Section 7 is the Technical Overview. Since the detailed requirements are stated later in the document, the discussion is more general.

· The statement refers to the state of the state model. It says that the equipment is intended to track the state of the state model as long it is operational. The standard does not specify how the value is stored internally.

· The EnergySavingState parameter is a means to report the state to the host. It is not required as an internal variable for storing the state value.

· The “equipment control system” is simply the system that controls the equipment. This would be expected to be operational when the equipment is powered on and neither powering up (initializing) nor powering down.

TF Recommendation:

· No action needed.

Action proposed

x

The committee agreed to do one of the following actions.

*No motion is required in this step.

x

No further action was taken by the committee.

Refer to the task force for more consideration.

New Business

Other

Editorial Change

Case 1: No vote in this section :

To be included and voted on in § 5. Summary of Editorial Changes.

Case 2: Voted in this section :

Original section number and at least one full sentence are required in “FROM” and “TO” fields.

1

FROM: Section xxx

To: Section xxx

Justification (If necessary)

2

FROM: Section xxx

To: Section xxx


Motion by/2nd


Vote

XX-XX Motion passed (or failed)

A&R

Not approved

Reason:

Comment 1b

Comment

Referenced Section


From


Comment

2.) [Esss.ss-RQ-00006-00]: Is this per chamber, per GEM/SECS interface, etc.? It isn’t clear to me from the definition of production equipment how this is handled in more complex multi-function and parallel function equipment.

Discussion

TF Discussion:

· RQ-00006-00 says that “production equipment shall implement one instance” of the state model. It means exactly that.

· The state model applies to the equipment as a whole. It does not require that every subsystem reduce energy use – this may not be practical. The equipment supplier is allowed some flexibility in the application of the standard so long as it achieves a “reduction in the rate of energy use.”

TF Recommendation:

· No action needed

Action proposed

x



x



New Business

Other

Editorial Change





1

FROM: Section xxx

To: Section xxx


2

FROM: Section xxx

To: Section xxx


Motion by/2nd


Vote


A&R

Not approved

Reason:

Comment 1c

Comment

Referenced Section


From


Comment

3.) 9.2.2.4.1: “The sub-states of the EquipmentEnergySaving state are NormalOperation and NotReadyForNormalOperation”. This should be a requirement if your other sentences on states are requirements.

Discussion

TF Discussion:

· Adding such a requirement would be redundant

· RQ-00009 says NormalOperation is a sub-state of EquipmentEnergySaving

· RQ-00028 says NotReadyForNormalOperation is a sub-state for EquipmentEnergySaving

TF Recommendation:

· No action needed

Action proposed

x



x



New Business

Other

Editorial Change





1

FROM: Section xxx

To: Section xxx


2

FROM: Section xxx

To: Section xxx


Motion by/2nd


Vote


A&R

Not approved

Reason:

Comment 1d

Comment

Referenced Section


From


Comment

4.) “[Esss.ss-RQ-00022-00] When in the Sleep state, production equipment shall accept any valid Sleep command.” And “[Esss.ss-RQ-00023-00] When in the Sleep state, production equipment shall accept any valid WakeUp command received. [/RQ]” Looking through your document it seems that “accept” means “execute”. In other words it can’t refuse a command with an Ack Code (I’m not sure this is clear, but OK, I guess). However it isn’t correct to force production equipment to execute a command from the host for a function like this. There may be extenuating circumstances that will force the equipment to refuse the command (e.g., overriding safety interlocks). In that case the response (“Cannot Perform Now”) seems valid, though earlier you label that as “rejecting” a command.

Discussion

TF Discussion:

In the case of “overriding safety interlocks”, the equipment would not be in the NormalOperation state. It would be in the NotReadyForNormalOperation state where RQ-00030 and RQ-00031 say that all Sleep and WakeUp commands are to be rejected.

TF Recommendation:

Text will be improved in future ballot

Action proposed

x



x



New Business

Other

Editorial Change





1

FROM: Section xxx

To: Section xxx


2

FROM: Section xxx

To: Section xxx


Motion by/2nd


Vote


A&R

Not approved

Reason:

Comment 1e

Comment

Referenced Section


From


Comment

5.) In general I believe there should be an opportunity for the equipment to refuse a service of this kind in any state. Energy Saving is not integrated with all sub-systems and some of these sub-systems will have priority over Energy Saving. Maybe this is the purpose of the “Not Ready for Normal Operation” state, but I don’t get that from requirement 29.

Discussion

TF Discussion:

· The specification does not require all sub-systems to reduce energy consumption rate when in the sleep mode.

· When the equipment is not ready for normal operation it should be in the NotReadyForNormalOperation state where no commands can be accepted. When it is ready for normal operation, the equipment should accept commands as specified.

TF Recommendation:

· Future work to clarify request responses

Action proposed

x



x



New Business

Other

Editorial Change





1

FROM: Section xxx

To: Section xxx


2

FROM: Section xxx

To: Section xxx


Motion by/2nd


Vote


A&R

Not approved

Reason:

Comment 2a

Comment

Referenced Section


From

Song Park - Applied Materials

Comment

1. 9.2.2.7.3 states “Production equipment in the Idle state can accept a Sleep command in most circumstances.” What are some examples that are not “in most circumstances”? Let say, when the host defines EstimatedSleepPeriod of 1 minute when the tool’s duration to InitiatingSleep transition is 2 minutes, then this is still considered within the realm of “accept a Sleep command in most circumstances”?

Discussion

TF Discussion:

Yes, the equipment is responsible to determine the result of the execution of the request

TF Recommendation:

No Action needed

Action proposed

x



x



New Business

Other

Editorial Change





1

FROM: Section xxx

To: Section xxx


2

FROM: Section xxx

To: Section xxx


Motion by/2nd


Vote


A&R

Not approved

Reason:

Comment 2b

Comment

Referenced Section


From

Song Park - Applied Materials

Comment

2. EstimatedWakeDuration can have different values in the transition 3 and 4, correct? If a tool can estimate the wake duration with respect to the passage of time, we think the EstimatedWakeDuration value can change.

Discussion

TF Discussion:

Yes, they can be different base on new conditions or equipment behavior

TF Recommendation:

No action needed

Action proposed

x



x



New Business

Other

Editorial Change





1

FROM: Section xxx

To: Section xxx


2

FROM: Section xxx

To: Section xxx


Motion by/2nd


Vote


A&R

Not approved

Reason:

Comment 3

Comment

Referenced Section


From

Mitsuhiro Matsuda – Hitachi Kokusai

Comment

Comment #1 Doc. #5411B

In section 7.6.3, it is better to remove the last sentence “If the equipment is unable to initiate or execute a command requested by the host, the equipment will notify the host with the appropriate response as specified by the applicable SEMI standard.” Current E40/E94 can’t refuse host request by equipment reason, only by “parameter error” or “Queue is full”.

Discussion

TF Discussion:

· The statement in 7.6.3 is general. It does not assume that the command can be rejected. It states only that if the command is not accepted, the equipment will notify the host. The statement if not incorrect.

· Note also that this is the Technical Overview and does not contain requirements.

· Removal of the sentence would not harm the specification. It could be done in a follow-on ballot if the TF desires

TF Recommendation:

No action needed

Action proposed

x



x



New Business

Other

Editorial Change





1

FROM: Section xxx

To: Section xxx


2

FROM: Section xxx

To: Section xxx


Motion by/2nd


Vote


A&R

Not approved

Reason:

V. Summary of Editorial Changes

There were no editorial changes for ballot 5411B.

VI. Approval Conditions Check

APPROVAL CONDITION 1: All negatives have been discussed and were withdrawn, found not related, or not persuasive. (Regulations ¶ 9.6.2)

APPROVAL CONDITION 2: At least 90% of the sum of the valid accept and reject votes must be accept. (Regulations ¶ 9.6.3)

Note: if both approval conditions are not satisfied, the document fails.

A&R

Not approved

Reason:

VII. Safety Check

See § 14 of the Regulations for further information

Motion:

x

This is not a Safety Document: when all safety-related information is removed, the document is still technically sound and complete.

This is a Safety Document: when all safety-related information is removed, the document is not technically sound and complete.

Safety Checklist (Regulations ¶ 14.3) is complete and has been included with the document throughout the balloting process.

Motion by/2nd by

Jack Ghiselli (Ghiselli Consulting) / Mike Czerniak (Edwards)

Discussion

None

Vote

14-0 Motion passed

A&R

Not approved

Reason:

VIII. Intellectual Property Check

Note: This ballot may be all or part of a Standard or Safety Guideline. This IP check applies to the entire Standard or Safety Guideline. See § 15 of the Regulations for further information

x

The meeting chair asked those present in person or by electronic link, if they were aware of any potentially material patented technology or copyrighted items* in the Standard or Guideline.

x

No potentially material patented technology or copyrighted items are known

GO TO SECTION IX

Potentially material patented technology or copyrighted items are known but a Letter of Assurance (LOA) or copyright release for such material has been obtained or presented to the committee.

GO TO SECTION IX

Potentially material patented technology or copyrighted items are known but an LOA or copyright release for some of the material(s) has NOT been obtained or presented to the committee

MOTION

Ask ISC for special permission to publish

Quit activity

Wait for LOA for patented technology or release of copyrighted items.

Motion by/2nd by


Discussion

XXXX

Vote

XX-XX

Final Action

Motion Passed

Motion Failed

A&R

Not approved

Reason:

* Note: Such potentially material patented technology or copyrighted items might have become known since the Standard or Safety Guideline was last reviewed, or might become relevant due to this ballot.

IX. Action for this document

Motion

x

This document passed committee review as balloted and will be forwarded to the A&R for procedural review.

This document passed committee review with editorial changes and will be forwarded to the A&R for procedural review.

This document failed committee review and will be returned to the task force for rework.

This document failed committee review and work will be discontinued.

Motion by/2nd by

Lance Rist (Industry Consultant) / Gino Crispieri (ISMI)

Discussion

None

Vote

17-0

Final Action

x

Motion passed

Motion failed

A&R

Approved

Not approved

Reason:

A&R Ballot Report Template Revision 7.7

Accepts

(Accepts +

Valid Rejects)

Approval Rate=23/23=

100.0%

>=90%

Sheet4

Sheet1Accepts(Accepts + Valid Rejects)Approval Rate=23/23=100.0%>=90%

Sheet2

Sheet3

ReturnDistributionReturn Rate

Yellow52÷83=62.7%>=60%

Lilac & Others29

----------------------------------------------------------------------------------

Total Vote81

Reject1

Accept23

Sheet4

Sheet1ReturnDistributionReturn RateYellow52÷83=62.7%>=60%>=90%Lilac & Others29----------------------------------------------------------------------------------Total Vote81Reject1Accept23

Sheet2

Sheet3

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