The Lumina Instruments AT1 introduces an innovative technology in laser scanning • Enables full surface scan and imaging of sub-nanometer

film coatings and defects • Scans and displays a 50-mm x 50-mm sample in 30

seconds • Capable on transparent, silicon, compound

semiconductor or metal substrates • Accommodates non-circular and fragile substrates • Able to separate top/bottom features on transparent

substrates • Up to 300x300 mm scan area • Can scribe location of defects for further analysis

© Copyright 2019 Lumina Instruments, All rights reserved

AT1 Thin Film Defect Optical Scanner

The AT1 has 4 detection channels for imaging of sub-nm transparent stains, particles, and crystal defects.

The polarization image generated by the AT1 is shown in the images below. Local film thickness variations as small as a few Angstroms are easily captured by the system.

4” x 8” Glass Display Full view of ITO on Glass Thin Film (~ 15 Angstrom) defects

25mm

25mm

Polarization Slope

Reflectivity Dark Field

4 Detection channels: • Polarization

(film, scratches) • Slope

(height, depth) • Reflectivity

(particles on rough surface)

• Dark Field (particles, scratches)

San Jose CA 95110 Tel +1.408.320.2938 sales@lumina-inst.com

www.lumina-inst.com

System Information

© Copyright 2019 Lumina Instruments, All rights reserved

Stress Points within Glass Substrate

TOOL SPECIFICATIONS Scan time 50mm x 50mm in 30 seconds Scan area 300x300 mm Scribe Diamond scribe - adjustable Sensitivity Film Defects <50 Angstroms Operating Temp 18 – 30o C Voltage 120 / 230 VAC Current 6 A / 4 A Weight 450 lbs / 205 kg

79”

Bumps on Sapphire

Scribed mark – water stain

Lumina scribe mark

Ridge on Sapphire

Glass crystal defect: Microscope vs Lumina Microscope Lumina AT1 image

Stain on Glass: dark on top, bright at the bottom