attocube’s cryostats attodry - qd-china.comqd-china.com/uploads/surface/attocube/attodry.pdf ·...

pioneers of precision

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attoCRYOLow Vibration Cryogenic Equipment

ATTOCUBE’S CRYOSTATS

ATTOdRY

attoDRY1000 . . . . . . . . . . . . . . . . . . . . . . . 14cryogen-free cryostats with/without superconducting magnets

attoDRY700 . . . . . . . . . . . . . . . . . . . . . . . . .18cryogen-free table-top cryostats with optical access

attoDRY2000 . . . . . . . . . . . . . . . . . . . . . . . .20cryogen-free cryostats with superconducting vector magnets

attoDRY3000 . . . . . . . . . . . . . . . . . . . . . . . .21cryogen-free Helium-3 cryostats

attoDRY4000 . . . . . . . . . . . . . . . . . . . . . . . .22cryogen-free adiabatic demagnetization refrigerator systems

attoDRY5000 . . . . . . . . . . . . . . . . . . . . . . . .23cryogen-free dilution refrigerator systems

attoDRY500 . . . . . . . . . . . . . . . . . . . . . . . . .24cryogen-free optical measurement instruments

ATTOLIQUId

attoLIQUID1000 . . . . . . . . . . . . . . . . . . . . . 28liquid Helium based superconducting magnet systems

attoLIQUID2000 . . . . . . . . . . . . . . . . . . . . . 30liquid Helium based cryostats for variable temperature operation

attoLIQUID3000 . . . . . . . . . . . . . . . . . . . . . 31Helium-3 cryostats for ultra low temperature operation

attoLIQUID5000 . . . . . . . . . . . . . . . . . . . . . 32liquid Helium based dilution refrigerators for ultra low temperature operation

attoLIQUID500 . . . . . . . . . . . . . . . . . . . . . . 33table top liquid Helium based cryostats with optical access

Choose your Type of Cryostat . . . . . . . . . . . 34finding the appropriate cryogenic system for your measurement task

Overview of available microscopes . . . . . . . 36

OPTIONS

Accessories . . . . . . . . . . . . . . . . . . . . . . . . 38optional items for attocube’s low vibration cryostats



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Temperature Range

standard edition 4 .. 300 K

General Specifications

technology low vibrationpulse-tube based closed-cycle cryostatdesigned for scanning probe microscopy applications

material of body Stainless Steel and Aluminum

top loading system quick and easy sample exchange,2”diameter probe bore fitting all attocube inserts

Performance Data

temperature range 4 .. 300 K

cool down time to 4 K (no magnet) < 5 h

cool down time to < 5 K (with CFM insert) 1 h

temperature stability < 0.1 K

Pulse Tube Based Pre-Cooler

nominal cooling power (4.2 K) > 1000 mW

power consumption 6 kW

cooling water cooling

Dimensions

cryostat (width x depth x height) 640 x 640 x 1200 mm3

System Connections

vacuum pump flange and valve included

thermometry standard feedthrough included

Options

superconducting magnet 3 .. 9 T

Available Inserts

confocal microscopes attoCFM I, attoCFM II, attoCFM III

confocal Raman microscopes attoRAMAN

atomic/magnetic force microcopes attoAFM I, attoMFM I, attoAFM III (on request)

scannning Hall probe microscopes attoSHPM

cryogenic probe station attoCPS I, attoCPS II

The attoDRY1000 is a cryogen-free cooling system setting new performance benchmarks and making possible what was considered impossible only a few years ago. The attoDRY1000 was specifically designed to provide an ultra-low vibration measurement platform for cryogenic scanning probe experiments without the need for liquid Helium.

The standard closed-cycle system enables vibration-sensitive experi-ments in a temperature range from 4 K to 300 K. The optionally available microscope inserts are cooled by a controlled exchange gas atmosphere. Superconducting magnets up to 9 T are available as an option. Due to a proprietary design, mechanical vibrations created by the pulse-tube cold-head are decoupled from the measurement platform, creating a peak-to-peak vibration amplitude of less than 4.2 nm1 at the sample location.

Despite the mechanical decoupling between coldhead and sample plat-form, the cooling performance of the attoDRY1000 is simply outstanding. Temperatures as low as 3.5 K2 and probe cooldown times as fast as 1 hour3 make cryogenic scanning probe experiments a delight. For the attoDRY1000, a wide variety of scanning probe microscopy inserts ranging from confocal (CFM) to magnetic force microscopy (MFM), as well as probe station inserts (CPS) are available.

MAIN ADVANTAGES + no liquid Helium needed + long measurement cycles+ low vibrations+ ‚set-and-forget‘ type of operation+ large bore size and sample space+ magnetic fields up to 9 T+ compact instrumental design

attoDRY1000 | Low Vibration. Cryogen-FreeHelium-free cryostats with optional superconducting magnets

PRODUCT KEY FEATURES

> cryogen-free, low vibration cryostat platform> very fast cooldown and turn-around times> temperature control range: 4 K to 300 K> optional superconducting magnets up to 9 T

BENEFITS

> scanning probe microscopy experiments in a cryogen-free, low vibration environment

> fast exchange of samples and/or scanning probe tips

> measurements at a broad range of tempe-rature and magnetic field (optional) with highest stability

APPLICATION EXAMPLES

> solid state physics and quantum dot optics> materials science research on ceramics,

polymers, additives, alloys, ..> semiconductor device characterization

COMPATIBLE MICROSCOPE SYSTEMS

> attoCFM I,attoCFM II, attoCFM III, attoRAMAN, attoAFM I, attoMFM I, attoSHPM, attoCPS I / II

1 measured in vertical direction using an attoAFMI at a bandwidth of 200 Hz2 measured at the 2nd stage platform/magnet3 measured using a standard confocal microscope insert


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attocube has devoted all of its cryogenic experience and years of devel-opment time into a cryogen-free system which is dedicated for scanning probe microscopy or other vibration sensitive experiments. At attocube, we believe that the performance of every instrument can only be judged by the measurements it is capable to deliver and not by the specs which come with it.

With measured vibration levels of less than 0.6 nm RMS at the sample lo-cation, the combination of attocube’s ultra-stable SPM modules and the

attoDRY1000’s proprietary low vibration design proves to be the perfect platform for scanning probe microscope applications (see application examples on the following page). The attoDRY1000 is currently the only proven low vibration pulse tube cooler available on the market - come and harness its power.

attoDRY1000 | Low Vibration. Cryogen-FreeHelium-free cryostats with optional superconducting magnets

Cryogen-free confocal measurements on a single quantum dot.

Magnetic Force Measurements on Bi-2212 at 4K.

The data to the left show photon anti-bunching experiments performed on a single quantum dot. Without any special effort the customer observed that the dot luminescence intensity remains constant within 14 % over 10 hours.

The data was generously provided by Benito Alén Millán, Molecular Beam Epitaxy group at the Instituto de Microelectrónica de Madrid, Spain.

In this measurement, attocube’s attoMFM Ixs within the attoDRY1000 was used to image the hexagonal vortex lattice of optimum doped Bi2Sr2CaCu2O8+δ (Bi-2212) at a temperature of 4.1 K and a magnetic field of 10 Gauss. The signal-to-noise is approx. 20:1.

attocube application labs, 2009; sample courtesy of A. Erb, Walther Meissner Institute, Germany.position (µm)

freq

uenc

y sh

ift (

mH

z)

54321

0.2

0.4

0.6

0.8

Atomic Force Measurements at 4K.

The outstanding performance of the ultra-low vibration level of the pulse-tube cooler in combination with the high stability of the AFM module allows for ultra high resolution imaging of nm-features over a wide temperature range (< 4 K .. 300 K) without the need for liquid Helium. The result on the left shows an AFM contact mode image of a Si-substrate/SiO2-layer. Height: 20 ± 2 nm recorded at 4 K.

attocube application labs, 2011.

position (µm)

profi

le h

eigh

t (nm

)

54321

0

10

20

rela

tive

inte

nsit

y

0 2 4 6 8 10

time (hours)

1.2

0.0

0.4

0.8

Peak 1Peak 2 w

avel

engt

h (n

m)

964

961

962

963

0 2 4 6 8 10

time (hours)

2 µm

2 µm

CUSTOMER FEEDBACK

Dr. Benito Alén Millán:In contrast to many other such complex pieces of equip-ment, we were able to perform our first regular measure-ments already after 2 weeks, and since then, have been very pleased with the performance of the attoDRY1000.(Molecular Beam Epitaxy group at the Instituto de Micro-electrónica de Madrid, Spain)

time [min]

100 200 300 400 500

10

100

tem

pera

ture

[K]

0

COOLDOWN TIMES


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The basic system includes the following components:

> low vibration pulse tube cooler including a low temperature compatible lens and xyz coarse positioning unit

> built-in anti-vibration system enabling high resolution confocal imaging> piezo step controller for sample coarse positioning

Options

> low temperature compatible xy scanner> piezo scan controller for fine scanning of the sample > sample heating stage to vary the temperature from 2.8 to 300 K> controller for precise control of the sample temperature

from 2.8 K to 300 K

Temperature Range

standard edition 4 K (with standard wiring)

with sample heater (optional) 4 K .. approx. 300 K

with temperature controller (optional) 4 K .. approx. 300 K, temperature controlled


material of body Aluminum

temperature isolation vacuum isolation, radiation shielded

bottom loading system quick and easy sample exchange

damping internal anti-vibration damping system

Performance Data

cool-down time < 2.5 h typically to 4 K (without load)

lowest temperature 2.8 K (without load)

temperature stability (2.8 .. 70 K) < 0.025 K without temperature controller

cooling power 10 W at 65 K, 250 mW at 4.2 K

Dimensions

diameter x height 178 x 750 mm2

mounting pole spacing 350 mm

weight 17.3 kg

Power Consumption

power consumption (compressor) 5 kW max., 3.4 kW steady state

Options

temperature controller optional

Available Inserts

confocal microscopes attoCFM I and attoCFM II

attoDRY700 | Table-top Ready. Cryogen-Freecryogen-free table top cryostats with optical access

This new pulse tube cooler system is optimized for optical (confocal) microscopy. An integrated anti-vibration system facilitates highly sen-sitive measurements in a cryogen-free environment. Together with a custom-made radiation shield, the outer vacuum casing and an exchang-able optical window, an easy integration into existing optical setups is enabled. As an additonal benefit, the slim table-top system can be mounted onto any size of optical table.

Further features such as easy sample exchange, fast cool-down and turn-around times, as well as simple operation guarantee reliable operation and efficient experiments.


> highest flexibility combined with lowest vibrations

> base temperature: 2.8 K,controllable up to 300 K

> compatible with any optical table


> confocal microscopy> solid state physics and quantum dot optics> single molecule fluorescence


> attoCFM I, attoCFM II

CUSTOMER FEEDBACK

Dr. Bernhard Urbaszek:We are pleased with the performance of the attoDRY700. The good mechanical and thermal stability ensures that over-night the selected quantum dot remains within the focus of the objective.(INSA Genie Physique, Toulouse).

0 1000

100

150

200

50

250

300

200 300

time (min)

tem

pera

ture

(K)

Cooldown times with and without microscope module

Université de Toulouse

cryostat onlyincl. CFM


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In contrast to the attoDRY1000 and 2000, the attoDRY3000 provides an extended temperature range by taking advantage of a closed circuit 3He refrigeration system in combination with a pulse-tube cooler. This unique arrangement allows the operator to achieve temperatures as low as 300 mK without the need for liquid cryogen coolants. The 3He part of the cooler is operated in single-shot mode and allows a hold time of up to 50 h (no load applied) before the 3He has to be recondensed for the next cycle.

Temperature Range

standard edition 300 mK .. 300 K


technology pulse tube cooler-based closed-cycle cryostatwith single shot ³He insert


bottom loading system sample exchange via removal of IVC

Performance Data

temperature range 300 mK .. 300 K

cooling power 100 µW at 350 mK for > 6 hrs

temperature stability +/- 3 mK at T<2 K; +/- 0.1 K at T>2 K

Further Specifications

thermometers uncalibrated RuO2 sensors and calibrated Cernox sensors on ³He pot, uncalibrated carbon sensors on sorb and other critical control elements

³He regeneration time typ. 3 hrs

sample space (diameter x height) 130 x 100 mm2

Dimensions

cryostat (diameter x height) 400 x 850 mm2

Options

superconducting magnet 3 .. 9 T

attoDRY3000cryogen-free Helium-3 cryostats

The attoDRY2000 is based on the same design as the attoDRY1000 but is equipped with a more powerful pulse tube cooler, enabling the inte-gration of large solenoids and 2D/3D vector magnets. Upon customer’s request, the attoDRY2000 can be equipped with solenoids with up to 12 T field, 2D magnets with up to 7/2 T, or 3D magnets with up to 5/1/1 T. Depending on the magnet chosen, the attoDRY2000 features either a 2” or a 1” clear bore diameter. The attoDRY2000 excels with the same ultra low vibration level as the attoDRY1000 and is therefore perfectly suited for scanning probe applications.

Temperature Range

standard edition 4 .. 300 K


technology low vibration, pulse-tube based closed-cycle cryostat,designed for scanning probe microscopy applications in high magnetic fields


top loading system quick and easy sample exchange,1” or 2” diameter probe bore fitting all attocube inserts

Performance Data

temperature range 4 .. 300 K






Dimensions


up to 12 T, 7/2 T, 5/1/1 T

Options

superconducting magnet up to 12 T, 7/2 T, 5/1/1 T


> cryogen-free, low vibration cryostat platform> specifically designed for large solenoids or

vector magnets (solenoids with up to 12 T and vector magnets with up to 7/2 T and 5/1/1 T)

> very fast cooldown and turn-around times> temperature control range: 4 K to 300 K


> attoCFM I, attoCFM II, attoCFM III, attoRAMAN, attoAFM I, attoMFM I, attoSHPM,

attoCPS I / II


> cryogen-free 3He cryostat with 50 h hold time > very fast cooldown and turn-around times> temperature control range: 300 mK to 300 K> cooling power: 100 µW at 350 mK


> attoCFM II, attoCFM III, attoSHPM

attoDRY2000 | Low Vibration. Cryogen-FreeHelium-free cryostats with customizable superconducting (vector) magnets


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The attoDRY4000 is a cryogen-free adiabatic demagnetization refrigera-tor system which operates at a temperature of 100 mK. The cryostat uses a double stage ADR salt pill with a hold time of up to 48 h at base temper-ature (without load). The attoDRY4000 provides a low level of vibration and is therefore perfectly suited for scanning probe measurements.

The attoDRY5000 is a cryogen-free dilution refrigerator unit with a base temperature of < 12 mK. While not being a top loading system, the attoDRY5000 features one of the fastest cool down times in its class, av-eraging at less than 20 h from room to base temperature. With a cooling power of up to 400 µW at 100 mK, the attoDRY5000 is capable of handling even large experiments with high specific heat or large heat loads.

Temperature Range

standard edition < 12 mK .. 300 K


technology low vibration, pulse-tube based closed-cycle dilution refrigerator for scanning probe and other applications


bottom loading system

Performance Data

temperature range < 12 mK .. 300 K

cool down time to base temperature < 20 h

cooling power 250 - 400 µW at 100 mK





Dimensions

cryostat (diameter x height) 470 x 1270 mm2

Options

superconducting magnet solenoid: up to 9 Tfield vector magnet: e.g.: 5/1/1 T

attoDRY4000cryogen-free adiabatic demagnetization refrigerator systems

attoDRY5000 | SPM Suitable. Cryogen-Freecryogen-free dilution refrigerator systems

Temperature Range

standard edition 100 mK


technology low vibration, pulse-tube based closed-cycle cryostat with ADR unit, designed for scanning probe microscopy applications at ultra-low termperature


bottom loading system access to sample via removal of IVC

Performance Data

temperature range 100 mK

cool down time to 4 K (full assembly) depending on insert

cool down time to < 5 K depending on insert






Dimensions



> cryogen-free, low vibration cryostat platform> implemented adiabatic demagnetization unit

for measurements at temperatures as low as 100 mK

> fast cooldown and turn-around times


> attoCFM II, attoAFM I


> cryogen-free dilution refrigerator unit> among the fastest cooldown and turn-around

times in its class> temperature range: < 12 mK to 300 K> compatible with superconducting solenoids

with up to 9 T


> attoCFM II, attoSHPM, attoAFM I on requestAtomic Force Measurements at 80 mK.

Contact AFM measurements have been performed with the pulse tube cooler on.

1 µm


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The attoDRY500 is a fundamentally new low temperature platform, en-abling both optical and scanning probe microscopy measurements in an ultra-stable, highly automated environment. Equipped with five optical ports, precise temperature control capabilities, and a stunning vibration level of less than 5 nm (rms at 4 K), the attoDRY500 makes most precise low temperature measurements remarkably simple and straightforward.

The attoDRY500 control unit enables fully automated pumpout, cooldown, temperature control, active warmup, clean gas purge, and system monitoring/diagnostics making it one of the most sophisticated yet easy-to-use instuments on the market. The attoDRY500 comes equipped with several positioner options, allowing the user to conduct a wide range of optical measurements. For ultimate ease of use, all control features including positioning capabilities are seamlessly included in one software package.

attoDRY500/XYZThis option comes equipped with an xyz ANP51 or ANP101 series posi-tioner stack, allowing ultra-precise xy-positioning and step-scanning of a sample in an optical beam with precise focus control in z direction. Readout encoders are available for closed-loop positioning capabilities (optional).

attoDRY500/ThetaThe CryoTheta option comes equipped with a single axis ANR51/ANR101 positioner, enabling precise angular positioning for reflective, refrac-tive, and grazing incidence measurements. A readout encoder is avail-able for closed-loop positioning capability (optional).

attoDRY500/Ext20The CryoExt20 option comes equipped with a vertical positioner with 20 mm travel range, allowing the user to position multiple samples (ref-erence samples) in the optical beam, as used e.g. in FT-IR measurements. A readout encoder is available for closed-loop positioning capability (optional).

Temperature Range

standard edition 3.5 .. 350 K


sample chamber material all non-magnetic


top loading system quick and easy sample exchange (top lid removable)

vibration isolation internal anti-vibration system

compressor variable flow rate technology for lower power consumption and extended life time

Performance Data

cool-down time < 2 h typically to 4 K (without load)

lowest temperature 3.5 K (without load)

temperature stability (3.5 .. 350 K) < 0.010 K peak to peak

cooling power 50 mW typ. at 4.2 K with five optical access ports open and radiation windows installed

Dimensions

L x W x H 91.4 x 91.4 x 108 mm3 (experimental chamber)410 x 220 486 mm3 (cryostat)

sample space Ø 53 mm, height: 40 mm tall (standard edition)

weight 18.6 kg (excluding compressor and control unit)

Power Consumption

power consumption (compressor) 1.0 .. 3.0 kW depending on user parameters

Software control

functionality sample positioning, temperature sweep and control, fully automated pumpout, cooldown, active warmup, clean gas purge, system diagnostics and monitoring

Available versions

/XYZ attoDRY500 equipped with ANPxyz101 positioners

/Theta attoDRY500 equipped with ANR101 rotator

/Ext20 attoDRY500 equipped with vertically mounted ANPx101eXT20

attoDRY500Montana Instruments CryostationTM with implemented attocube technology


> fully automized, cryogen-free system> wide sample temperature range (3.5 .. 350 K)> ultra-low vibration level at sample location

(5 nm rms at 4 K)> fully implemented positioning solution> full software control of cryostat and positi-

oners> flexible optical access through five optical

ports


> confocal microscopy > Raman measurements> single molecule fluorescence> X-ray spectroscopy and microscopy > magneto-optical Kerr effect (MOKE)> spintronics



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attocube is proud to announce the release of the attoDRY500-SPM family, currently consisting of a confocal (CFM) and an atomic force microscope (AFM). Both microscopes are fully integrated into the attoDRY500 and allow sophisticated measurements in an ultra low vibration, cryogenic environment. A proprietary design allows fast sample (AFM, CFM) and tip (AFM) exchange. Please inquire with our sales office for the implementa-tion of microscopes such as MFM or the tuning fork-based AFM III.

attoDRY500 - CFMThe attoDRY500-CFM is an ultra-stable confocal microscope in free-beam configuration, enabling a wide range of measurements such as classical pump-probe experiments, fluorescence measurements, quantum dot investigations, Raman microscopy, and many more. The microscope can be equipped with a choice of objectives with numerical apertures (NA) ranging from 0.55 to 0.95. This choice of objectives also includes the new apochromatic objectives which allow higher quality low temperature optical measurements than ever before.

attoDRY500 - AFMThe attoDRY500-AFM is an ultra-stable atomic force microscope with interferometric cantilever deflection detection. While the working prin-ciple is based on the attoAFM I, the attoDRY500-AFM has undergone a complete redesign to provide maximum ease of use combined with high-est stability and minimal turn-around times. With its self-centering and easily removable microscope head, the attoDRY500-AFM allows sample and tip exchange in a matter of seconds, making it the ideal tool for high throughput measurements in cryogenic conditions.

Temperature Range

standard edition 3.5 .. 350 K


sample chamber material all non-magnetic


top loading system quick and easy sample exchange (top lid removable)

vibration isolation internal anti-vibration system

compressor variable flow rate technology for lower power consumption and extended life time

CFM Specifications

configuration confocal microscope with free-beam optics, excitation and collection ports fully adjustable. Microscope head self-supported on microscope housing for rapid sample exchange

operation modes reflection, transmission, fluorescence

compatible objectives all low-temperature and high NA objectives

excitation source 400 .. 1500 nm, fiber coupled

sample positioning coarse positioners ANPxyz101 with piezo scanner ANSxy100; coarse range 5 x 5 x 5 mm³

sample monitoring via CCD camera (optional)

ASC400 Scan Controller for specifications please refer to the attoCONTROL section

AFM Specifications

configuration cantilever-based atomic force microscope with interferometric deflection detection. Microscope head self-supported on microscope housing for rapid tip and sample exchange

operation modes contact, non-contact, intermittent contact, ct-AFM, MFM, EFM

compatible cantilevers all standard AFM and MFM cantilevers commercially available

sample positioning coarse positioners ANPxyz101 with piezo scanner ANSxy100; coarse range 5 x 5 x 5 mm³

sample monitoring via CCD camera (optional)

ASC500 Scan Controller for specifications please refer to the attoCONTROL section

attoDRY500 - AFM

attoDRY500 - SPMconfocal and atomic force microscope based on the attoDRY500 platform

attoDRY500 - CFM



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attoDRY attoLIQUID

attoDRY1000 attoDRY2000 attoDRY3000 attoDRY4000 attoDRY5000 attoDRY700 attoDRY500 attoLIQUID1000 attoLIQUID2000 attoLIQUID3000 attoLIQUID5000 attoLIQUID500

temperature range 4 .. 300 K 4 .. 300 K 300 mK .. 300 K 100 mK 10 mK .. 300 K 2.8 .. 300 K 3.5 .. 350 K 1.8 .. 70 K 1.8 .. 300 K 300 mK .. 100 K < 25 mK 5 K .. 300 K

cryogen-free ■ ■ ■ ■ ■ ■ ■

superconducting magnets optional ■ ■ ■ ■ ■ optional optional

superconducting vector magnets

■ optional optional optional

superconducting split coil magnets

optional optional optional optional optional optional

variable temperature ■ ■ ■ ■ ■ ■ optional ■ ■ ■

top-loading (sample in exchange gas)

■ ■ ■ ■

vacuum loading (sample in vacuum)

■ ■ ■ ■ ■ ■ ■ ■

optical access to sample ■ ■ ■ ■ ■ ■ ■

ultra low vibration ■ ■ ■ ■ ■ ■ ■

integrated positioners optional optional optional optional optional ■ ■ optional

MIC compatibility

CFM I ■ ■ ■ ■ ■ ■ on request ■

CFM II / CFM III ■ / ■ ■ / ■ ■ / ■ ■ / ■ ■ / on request ■ / on request ■ / - ■ / ■ ■ / ■ ■ / ■ ■ / on request ■ / -

RAMAN ■ ■ on request on request ■ ■ on request

AFM I / MFM I ■ / ■ ■ / ■ on request ■ / - on request / - ■ / ■ ■ / ■ ■ / ■ ■ / ■ on request / - ■ / ■

AFM III /SNOM III on request on request on request ■ / ■ ■ / ■ ■ / ■ on request

SHPM ■ ■ ■ on request ■ on request ■ ■ ■ ■ on request

STM ■ ■

CPS I / CPS II ■ / ■ ■ / ■ on request on request ■ / ■ ■ / ■ on request

Choose your Type of Cryostatfinding the appropriate cryogenic system for your measurement task

rerer


PAGE 37


Confocal Microscopes Confocal Raman Microscopes

Scanning Near-Field Optical Microscopes

Magnetic Force Microscopes

Scanning Hall Probe Microscopes

Atomic Force Microscopes Scanning Tunneling Microscope

Cryogenic Probe Stations

attoCFM I attoCFM II attoCFM III attoRAMAN attoSNOM III attoMFM I attoSHPM attoAFM I attoAFM III attoAFM/STM attoAFM/CFM attoSTM I attoCPS I attoCPS II

attoDRY1000attoDRY2000

■ ■ ■ ■ on request ■ ■ ■ on request on request ■ ■

attoDRY3000 ■ ■ on request ■ on request on request on request

attoDRY4000 ■ ■ on request ■

attoDRY5000 ■ on request ■ on request

attoDRY700 ■ ■ on request on request on request on request

attoDRY500 ■ ■ on request on request ■ on request ■ on request on request

attoLIQUID1000attoLIQUID2000

■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■

attoLIQUID3000 ■ ■ ■ ■ ■ ■ ■ ■ ■ on request on request

attoLIQUID5000 on request ■ on request on request ■ on request on request on request

attloLIQUID500 ■ ■ on request ■ on request ■

Description low temperature confocal microscope, highly modular and flexible, free-beam optics

low temperature confocal microscope, highly stable and compact, fiber based

low temperature confocal microscope, optimized for transmission measurements, fiber based

low temperature confocal Raman microscope, developed for highest detection efficiency and stability

fiber based, low temperature scanning near-field optical microscope,tuning fork based

low temperature magnetic force microscope, cantilever based

low temperature scanning Hall probe microscope

low temperature atomic force microscope, cantilever based

low temperature atomic force microscope, tuning fork based

combined low temperature atomic force and scanning tunneling microscope, tuning fork based

combined low temperature atomic force and confocal microscope, tuning fork based

low temperature scanning tunneling microscope, highly compact and stable

cryogenic probe station with four ultra stable nano-manipulation stacks

highly flexible cryogenic probe station with four ultra stable nano-manipulation stacks

Overview of available microscope and probing inserts

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