501The small machine for big ideas

BAK

www.evatecnet.com

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BAK1101+501_01.10.07:501 12.7.2008 13:40 Uhr Page 1

501BAK

Complete range of process componentsThe BAK 501 is compatible with Evatec’srange of production proven process accessories including:

■ The EBS 500 electron beam gun■ Thermal sources■ Sputter sources■ Back and front side heating■ Glow discharge cleaning ■ Custom substrate holder and

handling systems

Professional process controlFrom pump down to system vent, Evatec’suser friendly Khan platform is easy to configure and ensures all process sequences conform within strict limits for best overall repeatabilities and yields.

■ Quartz and Optical Monitoring includingbroadband

■ RGA integration possible■ Full SECS GEM compatibility

Evatec Ltd.LochrietCH-8890 FlumsSwitzerlandTelephone + 41 81 720 1080Telefax + 41 81 720 1081info@evatecnet.com

www.evatecnet.com

Footprint only 2 m2

Ideal for process development or production in small substrate sizes or volumes, the BAK 501 comes with all the capability of its bigger brothers in the BAK family, at a footprint and cost to meet the tightest requirements. Simple process transfer tolarger members of the BAK family makes future scale up simple. The BAK 501 canthen be easily reconfigured for your next big idea.

Substrate size Capacity

2 inch Up to 32

4 inch Up to 8

6 inch Up to 4

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BAK1101+501_01.10.07:501 12.7.2008 13:40 Uhr Page 2