baoanjsc · variations space-saving rohs 12 mm 19.5 mm 3 mm 8.5 mm zp3 zp3 ø2 ø4 ø1.5 ø2 ø3.5...

Variations

Space-saving

RoHS

19.5 mm12 mm

3 mm8.5 mm

ZP3 ZP3

ø4ø2

ø1.5 ø2 ø3.5 ø4 ø6 ø8 ø10 ø13 ø16

ø2 piping reduces working space!

Pad diameter ø1.5 added!

ZP3 Series

Vacuum Pad

ø1.5, ø2, ø3.5, ø4, ø6, ø8, ø10, ø13, ø16

Area

75%reduced

Pad unit

Overall length is shortened.

With adapter9 mm shortened

ZP(Current model)

Area

28.26 mm2Area

113.04 mm2

Type

Flat

Flatwith groove

Bellows

Pad diameter

Barb fitting Barb fittingOne-touch fitting One-touch fitting

• Male thread• Female thread• Barb fitting (Applicable tubing: ø2)• One-touch fitting

(Applicable tubing: ø2)

• Female thread• Barb fitting (Applicable tubing: ø2)• One-touch fitting (Applicable tubing: ø2)

Vertical Lateral

11 mm shortened

In the case of Flat type (Pad diameter: ø2)

ø2 x 7 pcs. ø4 x 7 pcs.

Actual sizeActual size

ZP(Current model)

Max. Max.

297

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

ø1.5, ø2, ø3.5

ø4, ø6, ø8ø10, ø13, ø16

ZP3Stroke

3

6

10

15

20

25

Overall length (mm)

40

46

56

59

66.5

—

ZPStroke

3

6

10

15

20

25

Overall length (mm)—

78.5

109.5

114.5

—124.5

3

—

6

—

10

—

—

15

—

—

20

—

—

New shape for connecting with the adapter prevents the pad from coming off.

Easier identificationSMC logo mark

ZP3 ZP 3 mm 6 mm 10 mm 15∗ mm 20∗ mm

55.5 mm

shortened

Adsorption surface is shot-blasted

Micro-dents and bumps on the surface facilitate easy removal.

Less contact surface with the workpiece makes it easy to remove.

With groove

Overall length is shortened.

Max.

Pad diameter ø8, Flat, With one-touch fitting

Pad diameter Buffer specifications

Rotating, Non-rotating

Rotating

Rotating, With bushing

Non-rotating

Stroke (mm)

Male thread Female thread

Barb fitting One-touch fitting

Excellent functions

Excellent functions Construction to prevent pad from coming off

Pad diameter

from ø1.5

Fixing boss allows easy mounting and repeatability.Fixing boss

Compact buffer body

∗ Lateral vacuum inlet

Short stroke type: 3 mm added

Buffer stroke (∗ With bushing)

Wide selection of pipingFor ø2 piping!

298

Bellows

Flat with groove

For adsorption ofgeneral workpiecesFor adsorption of workpieces with flat and notdeformed surface

For a workpiece which is likely to deform For releasing a workpiece certainly

For adsorption of work pieces with inclined surface

Flat

Vertical

Vertical

Lateral

Construction P.364

Adapter Applicable Pad List P.365

Buffer Applicable Pad List P.366

Mounting Adapter Part No. P.370

Buffer Assembly Part No. P.372

Lateral

PageVacuum inlet direction Buffer attachment Vacuum inlet

Without buffer(with adapter)

Male thread

Female thread

Barb fitting

One-touch fitting

M3, M5

M3, M5

ø2, ø4, ø6

Soft nylon/Polyurethane tubing ø4, ø6

Polyurethane tubing ø2

Stroke with buffer 3 mm 6 mm10 mm15 mm20 mm



Female thread

Barb fitting

One-touch fitting

M3, M5

ø2, ø4, ø6

Without buffer(with adapter) Soft nylon/

Polyurethane tubing be ø4, ø6


Female thread

Barb fitting

One-touch fitting

M3, M5

ø2, ø4, ø6

Stroke with buffer 3 mm 6 mm10 mm15 mm20 mm



Female thread

Barb fitting

One-touch fitting

M3, M5

ø2, ø4, ø6

P.326

P.338

P.348

P.354

NBR

Silicone rubber

Urethane rubber

FKM

Conductive NBR

Conductive silicone rubber

P.324

Pad diameterMaterial PageType

ZP3-T -

JJBKZP3-T - -

ZP3-Y - -

ZP3-Y - -J

JBK

Series Variations

ø1.5 ø2 ø3.5 ø4 ø6 ø8 ø10 ø13 ø16

299

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

1 P.301

3 P.308

4 P.308

5 P.309

6 P.311

7 P.315

8 P.316

2 P.301

C O N T E N T S

Vacuum Pad Selection Procedures Points for Selecting Vacuum Pads A. Theoretical Lifting Force B. Shear Force and Moment Applied to Vacuum Pad Lifting Force and Vacuum Pad Diameter 1. Theoretical Lifting Force Vacuum Pad Type Vacuum Pad Material Rubber Material and Properties Color and Identification Buffer Attachment Pad Selection by Workpiece Type Vacuum Pad Durability

Calculating Vacuum Ejector and Switching Valve Size with the Formula

Leakage Volume from Conductance of Workpiece Leakage Volume from Adsorption Test

Relationship between Vacuum Pressure and Response Time after Supply Valve (Switching Valve) is Operated Calculating Adsorption Response Time with the Formula Adsorption Response Time from the Selection Graph

Safety Measures Precautions on Vacuum Equipment Selection Vacuum Ejector or Pump and Number of Vacuum Pads Vacuum Ejector Selection and Handling Precautions Supply Pressure of Vacuum Ejector Timing for Vacuum Generation and Suction Verification A. Timing for Vacuum Generation B. Suction Verification C. Set Pressure for Vacuum Pressure Switch Dust Handling of Vacuum Equipment

Transfer of Semiconductor Chips

Selection Graph Glossary of Terms Countermeasures for Vacuum Adsorption System Problems (Troubleshooting) Non-conformance Examples Time of Replacement of Vacuum Pad

Features and Precautions for Vacuum Adsorption

Selection of Vacuum Ejector and Vacuum Switching Valve

Leakage Volume during Workpiece Adsorption

Adsorption Response Time

Precautions on Vacuum Equipment Selection and SMC’s Proposal

Vacuum Equipment Selection Example

Data

Vacuum Pad Selection

Vacuum Equipment

Model Selection

300

1

2

Features and Precautions for Vacuum Adsorption

Points for Selecting Vacuum PadsA. Theoretical Lifting Force

• The theoretical lifting force is determined by vacuum pressure and adsorption area of the vacuum pad. • Since the theoretical lifting force is the value measured at the static state, the safety factor responding to the actual

operating conditions must be estimated in the actual operation. • It is not necessarily true that higher vacuum pressure is better. Extremely high vacuum pressure may cause problems.

• When the vacuum pressure is unnecessarily high, pads are likely to be worn out earlier or cracked, causing shorter pad service life.Doubling the vacuum pressure makes the theoretical lifting force double, while to doubling the pad diameter makes the theoretical lifting force quadruple.

• When the vacuum pressure (set pressure) is high, it makes not only response time longer, but also the necessary energy to generate a vacuum larger.

Example) Theoretical lifting force = Pressure x Area

Pad diameterArea (cm2) Vacuum pressure

[-40 kPa]Vacuum pressure

[-80 kPa]

ø20

ø40

3.14

12.56

Theoretical lifting force12 N




4 times

2 times

Vacuum adsorption system as a method to hold a workpiece has the following features.

• Easy construction • No need for accurate positioning• Compatible with any place where adsorption is possible. • Compatible with soft and easily-deformed work pieces

However, special care is required in the following conditions.

• Workpiece may drop under certain conditions since it is transferred being adsorbed. • Liquid or foreign matter around the workpiece may be sucked into the equipment.• Large adsorption area is necessary to get large gripping force. • Vacuum pad (rubber) may deteriorate.

Fully understand the features above and select the equipment that suits your operating conditions.

Model Selection

Before selecting the product model, read “How to Order”, “Vacuum Equipment Precautions”, and “Safety Instructions.”The operating range and performance data and values shown in this catalog are the guidelines for selecting a model. In actual operation, there is a possibility that a general specification is not applicable due to unexpected factors or conditions. Before using the product, determine whether or not the values shown in this catalog are applicable to expected usage, and accept all danger and responsibility caused thereby. SMC cannot take any responsibility for any items which are not shown in this catalog.

Vacuum Pad Selection Procedures1) Fully taking into account the balance of a workpiece, identify the suction position, number of pads and applicable pad diameter (or pad area).

∗ When selecting the model based on product weight, there is a possibility that the workpiece cannot be adsorbed or it is dropped depending on the operating conditions (workpiece balance, transfer acceleration, pressure or friction force applied to the workpiece during transfer etc.).

2) Find the theoretical lifting force from the identified adsorption area (pad area x number of pads) and vacuum pressure, and then find the lifting force considering actual lifting and safety factor of transfer condition.∗ Use the calculated values as a guideline (reference value) and check the actual values by performing a suction test as necessary.

3) Determine the necessary pad diameter (pad area) and suction position (workpiece balance) so that the lift force is larger than weight of the workpiece.

4) Determine the pad form and materials, and the necessity of buffer based on the operating environment, and the workpiece shape and materials.

5) This product is not designed to hold a vacuum.6) Perform a suction test with actual equipment to determine whether or not the product can be used.

The above shows selection procedures for general vacuum pads; thus, they will not be applicable for all pads. Customers are required to conduct a test on their own and to select applicable suction conditions and pads based on the test results.

Vacuum Pad Selection

301

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

A

B. Shear Force and Moment Applied to Vacuum Pad

• Vacuum pads are not resistant to shear force (parallel force with adsorption surface) and moment.• Minimize the moment applied to the vacuum pad with the position of the workpiece center of gravity in mind.• The acceleration rate of the movement must be as small as possible, and make sure to take into consideration the wind

pressure and impact. If measures to slow down the acceleration rate are introduced, safety to prevent the workpiece from dropping will improve.

• Avoid lifting the workpiece by adsorbing the vertical side with a vacuum pad (vertical lifting) if possible. When it is unavoidable, a sufficient safety factor must be secured.

To lift a workpiece vertically, make sure to take into consideration the acceleration rate, wind pressure, impact, etc., in addition to the mass of the workpiece. (Refer to Fig. 1)Because the pads are susceptible to moments, mount the pad so as not to allow the workpiece to create a moment. (Refer to Fig. 2)When a workpiece that is suspended horizontally is moved laterally, the workpiece could shift depending on the extent of the acceleration rate or the size of the friction coefficient between the pad and the workpiece. Therefore, the acceleration rate of the lateral movement must be minimized. (Refer to Fig. 3)

Make sure that the pad's suction surface is not larger than the surface of the workpiece to prevent vacuum leakage and unstable picking.

As a rule, the unit must be installed horizontally. Although a diagonal or a vertical installation should be avoided whenever possible, if the unit must be installed in such a manner, be certain to guarantee guide and absolute safety.

If multiple pads are used for transferring a flat object with a large surface area, properly allocate the pads to maintain balance. Also make sure that the pads are aligned properly to prevent them from becoming disengaged along the edges.

Provide an auxiliary device (example: a guide for preventing the workpieces from dropping) as necessary.

Horizontal lifting Vertical lifting

Lifting Force, Moment, Horizontal Force

Loading by acceleration and wind pressure lifting

Lifting direction

Pad

Fig

. 1

Pad positioning

Pad Pad

Caution for friction force between pad andworkpiece

Pad

Balance of Pad and Workpiece

Pad

Caution

Guide for drop prevention

Pad

Caution

Guide for drop prevention

Mounting Position

Pad

Guide

Fig

. 2

Fig

. 3

Model Selection

302

Pad diameter (mm)Pad area S (cm2)

ø80.50

ø10 ø13 ø16 ø20 ø25 ø32 ø40 ø500.79 1.33

ø1.50.02

ø4 ø60.13 0.28 2.01 3.14 4.91 8.04 12.6 19.6

Vacuumpressure

(kPa)

(N)

−85−80−75−70−65−60−55−50−45−40

0.150.140.130.120.110.110.100.090.080.07

ø20.030.270.250.240.220.200.190.170.160.140.13

ø3.50.100.820.770.720.670.630.580.530.480.430.38

1.071.000.940.880.820.750.690.630.570.50

2.402.262.121.981.841.701.551.411.271.13

4.24.03.73.53.23.02.72.52.22.0

6.66.25.85.55.14.74.33.93.53.1

111010

9.3 8.6 8.0 7.3 6.7 6.0 5.3

1716151413121110

9.0 8.0

26252322201817151412

41393634312927242219

68646056524844403632

106100

94 87 81 75 69 62 56 50

166157147137127117107

98 88 78

Pad diameter (mm)Pad area S (cm2)

ø125122.7

ø150 ø250 ø300 ø340176.6

ø6331.2

ø80 ø10050.2 78.5 490.6 706.5 907.5

Vacuumpressure

(kPa)

−85−80−75−70−65−60−55−50−45−40

265250234218203187172156140125

427402377351326301276251226201

667628589550510471432393353314

1043 982 920 859 798 736 675 614 552 491

150114131325123611481060 971 883 795 706

4170392536803434318929442698245322081962

ø200314.02669251223552198204118841727157014131256

6005565252994946459242393886353331792826

7714726068066353589954454991453840843630

Pad diameter (mm)Pad area S (cm2) 0.44 0.52 0.76

2 x 40.07

3.5 x 7 4 x 10 5 x 10 6 x 10 4 x 20 5 x 20 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 300.21 0.36 0.94 1.12 1.46 1.16

Vacuumpressure

(kPa)

−85−80−75−70−65−60−55−50−45−40

0.600.560.530.490.460.420.390.350.320.28

1.791.681.581.471.371.261.161.050.950.84

3.02.82.72.52.32.11.91.81.61.4

3.73.53.33.02.82.62.42.21.91.7

4.44.13.93.63.33.12.82.62.32.0

6.46.05.75.34.94.54.13.83.43.0

7.97.57.06.56.15.65.14.74.23.7

9.58.98.47.87.26.76.15.65.04.4

12.411.610.910.2 9.4 8.7 8.0 7.3 6.5 5.8

9.89.28.78.17.56.96.35.85.24.6

1.4412.211.510.810.0 9.3 8.6 7.9 7.2 6.4 5.7

1.7214.613.712.912.011.110.3 9.4 8.6 7.7 6.8

2.2619.218.016.915.814.613.512.411.310.1 9.0

30 x 5013.07112105 98 92 85 79 72 66 59 53

(N)

(N)

Horizontal lifting Vertical lifting

This type of application should basically be avoided.

Pad Diameter (ø1.5 to ø50)

Pad Diameter (ø63 to ø340)

Oval Pad (2 x 4 to 8 x 30, 30 x 50)

W = P x S x 0.1 x 1t

WPSt

Lifting Force and Vacuum Pad Diameter

1. Theoretical Lifting Force

• Set the vacuum pressure below the pressure that has been stabilized after adsorption.• However, when a workpiece is permeable or has a rough surface, note that the vacuum pressure drops since the workpiece

takes air in. In such a case, carry out an adsorption test for confirmation.• The vacuum pressure when using an ejector is approximately –60 kPa as a guide.

The theoretical lifting force of a pad can be found by calculation or from the theoretical lifting force table.

: Lifting force (N): Vacuum pressure (kPa): Pad area (cm2): Safety factor Horizontal lifting: 4 or more Vertical lifting: 8 or more

The theoretical lifting force (not including the safety factor) is found from the pad diameter and vacuum pressure. The required lifting force is then found by dividing the theoretical lifting force by the safety factor t.

Lifting force = Theoretical lifting force ÷ t

Model Selection

PadCalculation

Theoretical Lifting Force

(1) Theoretical Lifting Force (Theoretical lifting force = P x S x 0.1)

303

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

ApplicationPad shape

FlatTo be used when adsorption surface of work is flat and not deformed.

Flat with ribTo be used when work is likely to deform or in the case of releasing work certainly.

Deep To be used when work is curved shape.

BellowsTo be used when there is not enough space to install buffer or adsorption surface of work is slanted.

OvalTo be used when work has limited adsorption surface or long in length and work is required to locate precisely.

ApplicationPad shape

Ball jointTo be used when adsorption surface of work is not horizontal.

Long stroke bufferTo be used when work height is not even or cushioning toward work is required.

Large To be used when work is heavy weight.

ConductiveAs one of the countermeasures against the static electricity, rubber material with reduced resistance is used. For antistatic measures

Pad Type

Vacuum Pad Type• Vacuum pads are available in flat, deep, bellows, thin flat, with rib, and oval types, etc. Select the optimal shape in accordance

with the workpiece and operating environment. Please contact SMC for shapes not included in this catalog.

Vacuum Pad Material• It is necessary to determine vacuum pad materials carefully taking into account the workpiece shape, adaptability in the

operating environment, effect after being adsorbed, electrical conductivity, etc. • Based on the workpiece transfer example for each material, select after confirming the characteristics (adaptability) of rubber.

Vacuum Pad/Example of Workpiece Transfer

MaterialApplication Material

NBR Transfer of general workpieces, Corrugated board, Veneer plate, Iron plate and others

Silicone rubber Semiconductor, Removing from die-casting, Thin workpieces, Food processor

Urethane rubber Corrugated board, Iron plate, Veneer plate

FKM Chemical workpieces

Conductive NBR General workpieces of semiconductor (Static electricity resistance)

Conductive silicone rubber Semiconductor (Static electricity)

Model Selection

304

Pure gum property (specific gravity)

Impact resilience

Abrasion resistance

Tear resistance

Flex crack resistance

Volume resistivity (Ωcm)

Heat aging

Weather resistance

Ozone resistance

Gas permeability resistance

Gasoline/Gas oil

Benzene/Toluene

Alcohol

Ether

Ketone (MEK)

Ethyl acetate

Water

Organic acid

Strong alkali

Weak alkali

1.00-1.20

120

0

—

to

to

to

to to

0.95-0.98

to to to

200

−30

—

to to

to

1.00-1.30

60

0

—

to

to

to

1.80-1.82

250

0

—

to

to

to

to

0.86-0.87

150

−20

—

to

1.00-1.20

100

0

104 or less

to

to

to

to to

0.95-0.98

to to to

200

−10

104 or less

to to

to

∗ The indicated physical properties, chemical resistance and other numerical values are only approximate values used for reference. They are not guaranteed values. · The above general characteristics may change according to the working conditions and the working environment. · When determining the material, carry out adequate confirmation and verification in advance. · SMC will not bear responsibility concerning the accuracy of data or any damage arising from this data.

Note) The hardness of rubber shall conform to JIS K 6253. The hardness of sponge shall conform to SRIS 0101.

0.161g/cm3

to

120

−20

3.8 x 104

0.4g/cm3

to

180

−30

4.8 x 104

Rubber Material and Properties

1.15-1.25

150

−40

—

to

to to to

to

Color and Identification (ZP/ZP2)

Color and Identification (ZP3)

Identification(Dot or stamp)

Color of rubber

A60/S A50/S A50/S A50/S A50/S 20 15Rubber hardness HS (±5°) A50/S

Other than Heavy duty A40/S

Heavy duty A50/SA60/S

= Excellent --- Not affected at all, or almost no effect= Good --- Affected a little, but adequate resistance depending on conditions= Better not to use if possible= Unsuitable for usage. Severely affected.

Generalname NBR

(Nitrile rubber)Silicone rubber Urethane rubber

FKM(Fluororubber)

Conductive NBR(Nitrile rubber)

Conductivesilicone rubber

Color of rubber

Identification (Dot)

Rubber hardness HS (±5°)

Black White Brown Black Black Black

— — —

A60/S

· Silver 1 dot · Pink 1 dot· Green 1 dot

Main features

NBR(Nitrilerubber)

Siliconerubber

Good oil resistance, abrasion resistance, and aging resistance

Excellent heat resistance, and cold resistance

Urethanerubber

Excellent mechanical strength

FKM(Fluororubber)

Best heat resistance, and chemical resistance

EPR(Ethylene-propylene

rubber)

Good aging resistance, ozone resistance, and electrical properties

ConductiveNBR

(Nitrilerubber)

Good oil resistance, abrasion resistance, and aging resistance. Conductive

Conductivesiliconerubber

Very excellent heat resistance, and cold resistance. Conductive

ConductiveCR sponge(Chloroprene

sponge)

Excellent impact resilience, and sound insulation. Flame retardance

Conductivesiliconesponge

Excellent heat insulation, and impact resilience

CR(Chloroprene

rubber)

Well balanced weather resistance, ozone resistance, and chemical resistance

Generalname

Black White Brown Black Black Black Black Black Black Black

— — —· Silver 1 dot · Silver 2 dots

— —· Green 1 dot·

· Red 1 dot·

·

Maximum operationtemperature °CMinimum operationtemperature °C

Organic acid of high concentration Organic acid of lowconcentration

Generalname

Phys

ical p

ropert

ies

of ble

nded g

um

Chem

ical r

esi

stance

Oil

resi

stance

Alk

alin

e r

esi

stance

Aci

d r

esi

stance

NBR(Nitrilerubber)

Siliconerubber

Urethanerubber

FKM(Fluoro-rubber)

EPR(Ethylene-propylene

rubber)

ConductiveNBR

(Nitrilerubber)

Conductivesiliconerubber

ConductiveCR sponge(Chloroprene

sponge)

Conductivesiliconesponge

CR(Chloroprene

rubber)

Model Selection

305

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

If a soft workpiece such as vinyl, paper, or thin sheet is picked up, the vacuum pressure could cause the workpiece to deform or wrinkle. In such a case, it will be necessary to use a small pad or a ribbed pad and reduce the vacuum pressure.

When pushing a pad to a workpiece, make sure not to apply an impact or a large force which would lead to premature deformation, cracking, or wearing of the pad. The pad should be pushed against the workpiece to the extent that its skirt portion deforms or that its ribbed portion comes into slight contact with the workpiece.Especially, when using a smaller diameter pad, make sure to locate it correctly.

Buffer Attachment• Choose buffer type when the workpieces are of varying heights, the workpieces are fragile, or you need to reduce the impact

to the pad. If rotation needs to be limited, use non-rotating buffer.

When the workpieces are of varying heights, use the buffer type pad with built-in spring. The spring creates a cushion effect between the pad and the workpieces. If rotation needs to be limited further, use non-rotating buffer type.

Pad Selection by Workpiece Type• Carefully select a pad for the following workpieces.

To pick a permeable workpiece such as paper, select a pad with a small diameter that is sufficient to lift the workpiece. Because a large amount of air leakage could reduce the pad’s suction force, it may be necessary to increase the capacity of an ejector or vacuum pump or enlarge the conductance area of the piping passage.

When a workpiece with a large surface area such as sheet glass or PCB is suspended, the workpiece could move in a wavelike motion if a large force is applied by wind pressure or by an impact. Therefore, it is necessary to ensure the proper allocation and size of pads.

2. Flat Plate Workpiece

Unsteady Distance between Pad and Workpiece

1. Porous Workpiece

3. Soft Workpiece

Porous work

Vinyl, paper, etc.

Pad

4. Impact to Pad

Plate glass, circuit board, etc.

Model Selection

Notes for AttachmentThe buffer is manufactured for the purpose of protecting the pad from impact when the pad is applied to a workpiece. An eccentric load applied to the buffer caused by piping (tubing) or the position of the attachment, or an improper tightening torque used when the buffer is attached may lead to poor sliding or a shortened product life. Also, minimize the load in the lateral direction.

Tube Piping ReferencePrevent eccentric loads caused by piping (tubing) from being applied to the buffer. Route the tube piping with some degree of freedom, and ensure that it extends in the direction of the fitting. Also, make adjustments as required as the long piping, piping bundles, piping material, etc., may become a load.

Use the buffer within the stroke.

Decide the positionnot to strike

306A

The main adsorption marks are as follows:

• Need to be careful of the vacuum pad (rubber) deterioration.• When the vacuum pad is used continuously, the following problems may occur.

1) Wear-out of the adsorption surface. Shrinkage of the pad dimensions, sticking of the part where the rubber materials come into contact with each other (bellows pad)

2) Weakening of the rubber parts (skirt of the adsorption surface, bending parts, etc.)* It may occur at an early stage depending on the operating conditions (high vacuum pressure, suction time [vacuum holding],

etc.).• Decide when to replace the pads, referring to the signs of deterioration, such as changes in the appearance due to wear,

reduction in the vacuum pressure or delay in the transport cycle time.

Vacuum Pad Durability

Before suction After suction Countermeasure

P Mark due to deformed (lined) workpiece

1) Reduce the vacuum pressure.If lifting force is inadequate, increase the number of pads.

2) Select a pad with a smaller center area.

Suction conditions Workpiece: Vinyl Vacuum pad: ZP20CS Vacuum pressure: –40 kPa

P Mark due to components contained in the rubber pad (material) moving to the workpiece.

Use the following products.1) Mark-free NBR pad2) ZP2 series

• Stuck fluororesin pad• Resin attachment

Suction conditions Workpiece: Glass Vacuum pad: ZP20CS Vacuum pressure: –40 kPa

P A mark which remains on the r o u g h s u r f a c e o f t h e workpiece due to wear-out of the rubber (pad material).

Use the following products.1) ZP2 series

• Stuck fluororesin pad• Resin attachment

Suction conditions Workpiece: Resin plate (Surface roughness 2.5 m) Vacuum pad: ZP20CS Vacuum pressure: –80 kPa

Model Selection

5. Adsorption Mark

307

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

Selection of Vacuum Ejector and Vacuum Switching Valve3

Leakage Volume during Workpiece Adsorption4

Leakage Volume from Conductance of Workpiece

Leakage Volume from Adsorption Test

Air could be drawn in depending on the type of workpiece. As a result, the vacuum pressure in the pad becomes reduced and the amount of vacuum that is necessary for adsorption cannot be attained. When this type of workpiece must be handled, it is necessary to select the proper size of the ejector and the vacuum switching valve by taking into consideration the amount of air that could leak through the workpiece.

Leakage volume QL = 55.5 x CL

QL: Leakage volume L/min (ANR) CL: Conductance between workpiece and pad, and workpiece opening area [dm3/(s·bar)]

As described in the illustration below, pick up the workpiece with the ejector, using an ejector, pad and a vacuum gauge.

At this time, read vacuum pressure P1, obtain the suction flow rate from the flow rate characteristics graph for the ejector that is being used, and render this amount as the leakage of the workpiece.

Exercise: Using a supply pressure of 0.45 MPa, when the ejector (ZH07S) picks up a workpiece that leaks air, the vacuum gauge indicated a pressure of –53 kPa. Calculate the leakage volume from the workpiece.

<Selection Procedure>When obtaining the suction flow rate at a vacuum pressure of –53 kPa from the ZH07DS flow rate characteristics graph, the suction flow rate is 5 L/min (ANR).

Leakage volume ≈ Suction flow rate 5 L/min (ANR)

PadPad

Ventilation workpiece Rough workpiece surface

Vacuum pressure: P1

Pad

Workpiece

Calculating Vacuum Ejector and Switching Valve Size with the FormulaAverage suction flow rate for achieving adsorption response time

Max. suction flow rateQmax = (2 to 3) x Q L/min (ANR)

<Selection Procedure>

• EjectorSelect the ejector with the greater maximum suction flow rate from the Qmax indicated above.

• Direct operation valve

∗ Select a valve (solenoid valve) having a conductance that is greater than that of the conductance C formula given above from the related equipment (page 793).

Q : Average suction flow rate L/min (ANR)V : Piping capacity (L)T1 : Arrival time to stable Pv 63% after adsorption (sec)T2 : Arrival time to stable Pv 95% after adsorption (sec)QL : Leakage volume during workpiece adsorption L/min (ANR) Note 1)

Q = ——— + QL

T2 = 3 x T1

V x 60

T1

Conductance C = ———— [dm3/(s·bar)]Qmax55.5

Note 1) QL: 0 when no leakage occurs during adsorbing a workpiece.If there is leakage during adsorbing a workpiece, find the leakage volume based on “4. Leakage Volume during Workpiece Adsorption.”

Note 2) Tube piping capacity can be found in “8. Data: Piping Capacity by Tube I.D. (Selection Graph (2)).”

Suction flow rate

Vacu

um p

ress

ure

Air consu

mption

ZH07BS, ZH07DSFlow rate CharacteristicsSupply pressure 0.45 MPaExhaust Characteristics

Supply pressure (MPa) Suction flow rate (L/min (ANR))

Vac

uum

pre

ssur

e (k

Pa)

Vac

uum

pre

ssur

e (k

Pa)

Suc

tion

flow

rat

e (L

/min

(A

NR

))A

ir co

nsum

ptio

n (L

/min

(A

NR

))

Model Selection

308

Adsorption Response Time5

When a vacuum pad is used for the adsorption transfer of a workpiece, the approximate adsorption response time can be obtained (the length of time it takes for the pad’s internal vacuum pressure to reach the pressure that is required for adsorption after the supply valve vacuum switching valve has been operated). An approximate adsorption response time can be obtained through formulas and selection graphs.

Relationship between Vacuum Pressure and Response Time after Supply Valve (Switching Valve) is Operated

The relationship between vacuum pressure and response time after the supply valve (switching valve) is operated as shown below.

Vacuum Pressure and Response Time after Supply Valve (Switching Valve) is Operated

Calculating Adsorption Response Time with the FormulaAdsorption response times T1 and T2 can be obtained through the formulas given below.

For the conductance, the equivalent conductance can be found in “8. Data: Conductance by Tube I.D. (Selection Graph (3)).”

T1 : Arrival time to 63% of final vacuum pressure Pv (sec)T2 : Arrival time to 95% of final vacuum pressure Pv (sec)Q1

: Average suction flow rate L/min [ANR]

Calculation of average suction flow rate • Ejector

Q1 = (1/2 to 1/3) x Ejector max. suction flow rate L/min [ANR] • Vacuum pump

Q1 = (1/2 to 1/3) x 55.5 x Conductance of vacuum pump [dm3/(s·bar)]D : Piping diameter (mm)L : Length from ejector and switch valve to pad (m)V : Piping capacity from ejector and switching valve to pad (L)Q2 : Max. flow from ejector and switching valve to pad by piping system

Q2 = C x 55.5 L/min [ANR]Q : Smaller one between the Q1 and Q2 L/min [ANR]C : Conductance of piping [dm3/(s·bar)]

Adsorption response time T1 = ———

Adsorption response time T2 = 3 x T1

Piping capacity

V = —— D2 x L x –––– (L)

V x 60Q

3.144

11000

Vacuum System Circuit

Pv: Final vacuum pressureT1 : Arrival time to 63% of final vacuum pressure PvT2 : Arrival time to 95% of final vacuum pressure Pv

Arrival time (sec)

Supply valve(Switching valve)

operation

Vac

uum

pre

ssur

e (P

)

PP

Switching valveSwitching valve

Pad Pad

WorkWork

Model Selection

309

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

Max

. suc

tion

flow

rat

e Q

(L/

min

(A

NR

))

Piping capacity

Arrival time of vacuum pressure (63%) T1 (sec)

Arrival time of vacuum pressure (95%) T2 (sec)

Adsorption Response Time from the Selection Graph

1. Tube Piping CapacityPiping capacity from the ejector and switching valve at vacuum pump to the pad can be found in “8. Data: Piping Capacity by Tube I.D. (Selection Graph (2)).”

2. Obtain the adsorption response times.By operating the supply valve (switching valve) that controls the ejector (vacuum pump), the adsorption response times T1 and T2 that elapsed before the prescribed vacuum pressure is reached can be obtained from the Selection Graph (1).

Val

ve c

ondu

ctan

ce =

Q55

.5[d

m3 /(

s·ba

r)]

Selection Graph (1) Adsorption Response Time

∗ Conversely, the size of the ejector or the size of the switching valve of the vacuum pump system can be obtained from the adsorption response time.

How to read the graphExample 1: For obtaining the adsorption response time until the pressure in the piping system with a piping capacity of 0.02 L is discharged to 63% (T1) of the final vacuum pressure through the use of the vacuum ejector ZH07S with a maximum suction flow rate of 12 L/min (ANR).

<Selection Procedure>From the point at which the vacuum ejector’s maximum vacuum suction flow rate of 12 L/min (ANR) and the piping capacity of 0.02 L intersect, the adsorption response time T1 that elapses until 63% of the maximum vacuum pressure is reached can be obtained. (Sequence in Selection Graph (1), ) T1 ≈ 0.3 seconds.

Example 2: For obtaining the discharge response time until the internal pressure in the 5 L tank is discharged to 95% (T2) of the final vacuum pressure through the use of a valve with a conductance of 3.6 [dm3/(s·bar)].

<Selection Procedure>From the point at which the valve’s conductance of 3.6 [dm3/(s·bar)] and the piping capacity of 5 L intersect, the discharge response time (T2) that elapses until 95% of the final vacuum pressure is reached can be obtained. (Sequence in Selection Graph (1), ) T2 ≈ 12 seconds.

Model Selection

310

P

P PP

Vacuum line

PPP

Tank

PPP

P P

When more than one pad is attached to a single ejector, if one of the workpieces becomes detached, the vacuum pressure will drop, causing other workpieces to become detached. Therefore, the countermeasures listed below must be taken.• Adjust the needle valve to minimize the

pressure fluctuation between adsorption and non-adsorption operations.

• Provide a vacuum switching valve to each individual pad to minimize the influences on other pads if an adsorption error occurs.

Ideally, one pad should be used for each line.

When more than one pad is attached to a single vacuum line, take the countermeasures listed below.• Adjust the needle valve to minimize the

pressure fluctuation between adsorption and non-adsorption operation.

• Include a tank and a vacuum pressure reduction valve (vacuum pressure regulator valve) to stabilize the source pressure.

• Provide a vacuum switching valve to each individual pad to minimize the influences on other pads if an adsorption error occurs.

Ideally, one pad should be used for each ejector.

Vacuum Ejector or Pump and Number of Vacuum PadsEjector and number of pads Vacuum pump and number of pads

Precautions on Vacuum Equipment Selection and SMC’s Proposal6

Safety Measures• Make sure to provide a safe design for a vacuum pressure drop due to a disruption of power supply, or a lack of supply air.

Drop prevention measures must be taken in particular when dropping a workpiece presents some degree of danger.

Precautions on Vacuum Equipment Selection

• During the adsorption and transfer of a workpiece, verification of the vacuum switch is recommended.

• In addition, visually verify the vacuum gauge when handling a heavy or a hazard-ous item.

• Install a filter (ZFA, ZFB, ZFC series) before the pressure switch if the ambient air is of low quality.

Use a suction filter (ZFA, ZFB, ZFC series) to protect the switching valve and to prevent the ejector from becoming clogged. Also, a suction filter must be used in a dusty environment. If only the unit's filter is used, it will become clogged quickly.

As a countermeasure for power outages, select a supply valve that is normally open or one that is equipped with a self-holding function.

Be aware that the composite conductance consisting of the areas from the pad to the ejector of a vacuum switching valve does not decrease.

For the release valve, select a 2/3 port valve with a low vacuum specification. Also, use a needle valve to regulate the release flow rate.

Model Selection

311

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

P

Vacuumpressure

Leakage

Model Selection

• If the vacuum ejector makes an intermittent noise (abnormal noise) from exhaust at a certain supply pressure, the vacuum pressure will not be stable. It will not be any problem if the vacuum ejector is used under this condition. However, if the noise is disturbing or might affect the operation of the vacuum pressure switch, lower or raise supply pressure a little at a time, and use in an air pressure range that does not produce the intermittent noise.

Supply Pressure of Vacuum Ejector• It is recommended to use the vacuum ejector at the standard supply pressure.

The maximum vacuum pressure and suction flow rate can be obtained when the vacuum ejector is used at the standard supply pressure, and as a result, adsorption response time also improves. From the viewpoint of energy-saving, it is the most effective to use the ejector at the standard supply pressure. Since using it at an excessive supply pressure may cause the ejector performance to lower, it is recommended to use at the standard supply pressure.

The vacuum pressure varies in accordance with the leakage volumes indicated in the above diagrams.If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is –20 kPa q → w → e, and for the L type it is –33 kPa q' → w' → e'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is –80 kPa r → t → y, and for the L type it is –47 kPa r' → t' → y'. Thus, if the leakage volume is 30 L/min (ANR) the L type can attain a higher vacuum pressure, and if the leakage volume is 5 L/min (ANR), the S type can attain a higher vacuum pressure.Thus, during the selection process, make sure to take the flow rate characteristics of the high vacuum type (S type) and the high flow type (L type) into consideration in order to select the type that is optimal for your application.

Vacuum Ejector Selection and Handling Precautions

Ejector Selection

There are 2 types of ejector flow rate characteristics: the high vacuum type (S type) and the high flow type (L type). During the selection, pay particular attention to the vacuum pressure when adsorbing workpieces that leak.

High Vacuum TypeFlow Rate Characteristics/ZH13S

High Flow TypeFlow Rate Characteristics/ZH13L

Vac

uum

pre

ssur

e (k

Pa)

Vac

uum

pre

ssur

e (k

Pa)

Suction flow rate (L/min (ANR)) Suction flow rate (L/min (ANR))

Ejector Nozzle Diameter Selection

If a considerable amount of leakage occurs between the workpiece and the pad, resulting in incomplete adsorption, or to shorten the adsorption and transfer time, select an ejector nozzle with a larger diameter from the ZH, ZR, or ZL series.

Manifold Use

Individual exhaust Centralized exhaust

If there are a large number of ejectors that are linked on a manifold and operate simultaneously, use the built-in silencer type or the port exhaust type.

If there are a large number of ejectors that are linked on a manifold, which exhaust collectively, install a silencer at both ends. If the exhaust must be discharged outdoors through piping, make the diameter of the piping larger to control its back pressure to 5 kPa or less so that the back pressure will not affect the operation of the ejectors.

312

During adsorption During vacuum release

Cylinder UP

Cylinder DOWN

Cylinder switch

Supply valve

Release valve

V port vacuum pressure

Vacuum pressure switch

Vacuum pressure switch set value

By lowering the setting of the vacuum switch, the takt time can be shortened.

Atmospheric pressure

Vacuumpressure atoperation

When adsorbing and transferring a workpiece, verify at the vacuum pressure switch as much as possible (In addition, visually verify the vacuum gauge, especially when handling a heavy or a hazardous item.).

Approx. ø1 adsorption nozzleThe difference in pressure between ON and OFF becomes small depending on the capacity of the ejector and vacuum pump. In such a case, it is necessary to use the digital pressure switch ZSE10 or ZSE30A with a fine smallest settable increment or a flow switch for flow rate detection. Note) • A vacuum generator with a large suction capacity will not

be detected properly, so an ejector with an appropriate capacity must be selected.

• Since the hysteresis is small, vacuum pressure must be stabilized.

Vacuum pressure switchZSE10, ZSE30A

Flow sensorPFMV

Vacuum pressure gaugeGZ46

Refer to the Best Pneumatics No. 8 for details.

Timing Chart Example

Timing for Vacuum Generation and Suction Verification

A. Timing for Vacuum GenerationThe time for opening/closing the valve will be counted if a vacuum is generated after the adsorption pad descends to adsorb a workpiece. Also, there is a timing delay risk for the generating vacuum since the operational pattern for the verification switch, which is used for detecting the descending vacuum pad, is not even.To solve this issue, we recommend that vacuum be generated in advance, before the vacuum pad begins to descend to the workpiece. Adopt this method after confirming that there will be no misalignment resulting from the workpiece’s light mass.

B. Suction VerificationWhen lifting the vacuum pad after absorbing a workpiece, confirm that there is a suction verification signal from the vacuum pressure switch, before the vacuum pad is lifted. If the vacuum pad is lifted, based on the timing of a timer, etc., there is a risk that the workpiece may be left behind.In general adsorption transfer, the time for adsorbing a workpiece is slightly different since the position of the vacuum pad and the workpiece are different after every operation. Therefore, program a sequence in which the suction completion is verified by a vacuum pressure switch, etc. before moving to the next operation.

C. Set Pressure for Vacuum Pressure SwitchSet the optimum value after calculating the required vacuum pressure for lifting a workpiece.If a higher pressure than required is set, there is a possibility of being unable to confirm the suction even though the workpiece is adsorbed. This will result in a suction error.When setting vacuum pressure switch set values, you should set using a lower pressure, with which a workpiece can be adsorbed, only after considering the acceleration or vibration when a workpiece is transferred. The set value of the vacuum pressure switch shortens the time to lift a workpiece. Since the switch detects whether the workpiece is lifted or not, the pressure must be set high enough to detect it.

Vacuum Pressure Switch (ZSE Series), Flow Sensor (PFMV Series), Vacuum Pressure Gauge (GZ Series)

Model Selection

313

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

Qmax

55.5C =

Dust Handling of Vacuum Equipment• When the vacuum equipment is used, not only the workpiece, but also dust in the surrounding environment is taken in the

equipment. Preventing the intrusion of dust is required more than for any other pneumatic equipment. Some of SMC’s vacuum equipment comes with a filter, but when there is a large amount of dust, an additional filter must be installed.

• When vaporized materials such as oil or adhesive are sucked into the equipment, they accumulate inside, which may cause problems.

• It is important to prevent dust from entering the vacuum equipment as much as possible.(1) Make sure to keep the working environment and surrounding area of the workpiece clean so that dust will not be sucked

in the equipment.(2) Check the amount and types of dust before using the equipment and install a filter, etc., in the piping when necessary. (3) Conduct a test and make sure that operating conditions are cleared before using the equipment.(4) Perform filter maintenance depending on the amount of dirt.(5) Filter clogging generates a pressure difference between the adsorption and ejector parts. This requires attention, since

clogging can prevent proper adsorption from being achieved.

Air Suction Filter (ZFA, ZFB, ZFC Series)

• To protect the switching valve and the ejector from becoming clogged, a suction filter in the vacuum circuit is recommended.• When using an ejector in a dusty environment, the unit’s filter will become clogged quickly, so it is recommended that the ZFA, ZFB or ZFC

series be used concurrently.

Vacuum Line Equipment Selection

Determine the volume of the suction filter and the conductance of the switching valve in accordance with the maximum suction flow rate of the ejector and the vacuum pump. Make sure that the conductance is greater than the value that has been obtained through the formula given below. (If the devices are connected in series in the vacuum line, their conductances must be combined.)

Qmax: Max. suction flow rate L/min (ANR)C: Conductance [dm3/(s·bar)]

Model Selection

314

Vacuum Equipment Selection Example7 Transfer of Semiconductor Chips

Selection conditions:

(1) Workpiece: Semiconductor chipsDimensions: 8 mm x 8 mm x 1 mm, Mass: 1 g

(2) Vacuum piping length: 1 m(3) Adsorption response time: 300 msec or less

1. Vacuum Pad Selection

(1) Based on the workpiece size, the pad diameter is 4 mm (1 pc.).

(2) Using the formula on page 303, confirm the lifting force.

W = P x S x 0.1 x 1/t W = 1 g = 0.0098 N0.0098 = P x 0.13 x 0.1 x 1/4 S = π/4 x (0.4)2 = 0.13 cm2

P = 3.0 kPa t = 4 (Horizontal lifting)

According to the calculation, –3.0 kPa or more of vacuum pressure can adsorb the workpiece.

(3) Based on the workpiece shape and type, select:Pad type: Flat with groovePad material: Silicone rubber

(4) According to the results above, select a vacuum pad part number ZP3-04UMS.

2. Vacuum Ejector Selection

(1) Find the vacuum piping capacity.Assuming that the tube I.D. is 2 mm, the piping capacity is as follows:

V = π/4 x D2 x L x 1/1000 = π/4 x 22 x 1 x 1/1000= 0.0031 L

(2) Assuming that leakage (QL) during adsorption is 0, find the average suction flow rate to meet the adsorption response time using the formula on page 308.

Q = (V x 60) /T1 + QL = (0.0031 x 60) /0.3 + 0 = 0.62 LFrom the formula on page 308, the maximum suction flow rate Qmax is

Qmax = (2 to 3) x Q = (2 to 3) x 0.62 = 1.24 to 1.86 L/min (ANR)

According to the maximum suction flow rate of the vacuum ejector, a nozzle with a 0.5 diameter can be used.If the vacuum ejector ZX series is used, representative model ZX105 can be selected. (Based on the operating conditions, specify the complete part number for the vacuum ejector used.)

3. Adsorption Response Time Confirmation

Confirm the adsorption response time based on the characteristics of the vacuum ejector selected.(1) The maximum suction flow rate of the vacuum ejector ZX105 is 5 L/min (ANR). From the formula on page 309,

the average suction flow rate Q1 is as follows:

Q1 = (1/2 to 1/3) x Ejector max. suction flow rate = (1/2 to 1/3) x 5 = 2.5 to 1.7 L/min (ANR)

(2) Next, find the maximum flow rate Q2 of the piping. The conductance C is 0.22 from the Selection Graph (3). From the formula on page 309, the maximum flow rate is as follows:

Q2 = C x 55.5 = 0.22 x 55.5 = 12.2 L/min (ANR)(3) Since Q2 is smaller than Q1, Q = Q1.

Thus, from the formula on page 309, the adsorption response time is as follows:

T = (V x 60)/Q = (0.0031 x 60)/1.7 = 0.109 seconds= 109 msec

It is possible to confirm that the calculation result satisfies the required specification of 300 msec.

Model Selection

315

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

10

4

2

1

0.6

0.4

0.2

0.1

0.5 1 5 10 202 3

0.06

0.04

8

5

3

4.54

7.56.5

2.52.18

6

2

A

B

Data8

Pip

ing

capa

city

V (

L)

Tube I.D.

Tube length L (m)

How to read the graphExample: For obtaining the capacity of tube I.D. ø5 and 1 meter length <Selection Procedure>By extending leftward from the point at which the 1 meter tube length on the horizontal axis intersects the line for a tube I.D. ø5, the piping capacity approximately equvalent to 0.02 L can be obtained on the vertical axis.Piping capacity ≈ 0.02 L

Selection Graph (3) Conductance by Tube I.D.

How to read the graphExample: Tube size ø8/ø6 and 1 meter length

<Selection Procedure>By extending leftward from the point at which the 1 meter tube length on the horizontal axis intersects the line for a tube I.D. ø6, the equivalent conductance approximately 3.6 [dm3/(s·bar)] can be obtained on the vertical axis.Equivalent conductance ≈ 3.6 [dm3/(s·bar)]

Selection GraphSelection Graph (2) Piping Capacity by Tube I.D.

Tube I.D. ø9

Equ

ival

ent c

ondu

ctan

ce [d

m3 (s

·bar

)]

Tube length (m)

Model Selection

316

Glossary of Terms

(Max.) suction flow rate

Maximum vacuum pressure

Air consumption

Standard supply pressure

Exhaust characteristics

Flow rate characteristics

Vacuum pressure switch

(Air) supply valve

(Vacuum) release valve

Flow adjustment valve

Pilot pressure

External release

Vacuum port

Exhaust port

Supply port

Back pressure

Leakage

Response time

Average suction flow rate

Conductive pad

Vacuum pressure

Ejector

Air suction filter

Terms Description

Volume of air taken in by the ejector. The maximum value is the volume of air taken in without having anything connected to the vacuum port.

The maximum value of the vacuum pressure generated by the ejector

The compressed volume of air consumed by the ejector

The optimal supply pressure for operating the ejector

The relationship between the vacuum pressure and the suction flow rate when the supply pressure to the ejector has been changed.

The relationship between the vacuum pressure and the suction flow rate with the standard supply pressure supplied to the ejector.

Pressure switch for verifying the adsorption of a workpiece

Valve for supplying compressed air to the ejector

Valve for supplying positive pressure or air for breaking the vacuum state of the adsorption pad

Valve for adjusting the volume of air for breaking the vacuum

Pressure for operating the ejector valve

The action of breaking the vacuum using externally supplied air instead of using the ejector unit

Port for generating vacuum

Port for exhausting air consumed by the ejector, and air taken in from the vacuum port.

Port for supplying air to the ejector

Pressure inside the exhaust port

The entry of air into the vacuum passage, such as from an area between a workpiece and a pad, or between a fitting and a tube. The vacuum pressure decreases when leakage occurs.

The time from the application of the rated voltage to the supply valve or release valve,until V port pressure reaches the specified pressure.

The suction flow rate by the ejector or pump for calculating the response speed. It is 1/2 to 1/3 of the maximum suction flow rate.

A low electrical resistance pad for electrostatic prevention measure

Any pressure below the atmospheric pressure. When the atmospheric pressure is used as a reference, the pressure is presented by –kPa (G), and when the absolute pressure is used as a reference, the pressure is represented by kPa (abs).When referencing a piece of vacuum equipment such as an ejector, the pressure is generally represented by –kPa.

A unit for generating vacuum by discharging the compressed air from a nozzle at a high speed, based on the phenomenon in which the pressure is reduced when the air around the nozzle is sucked.

Vacuum filter provided in the vacuum passage for preventing the dust intrusion into the ejector, vacuum pump, or peripheral equipment

Model Selection

317

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

Condition & Descriptionof improvement Contributing factor Countermeasure

Initial adsorption problem(During trial operation)

Adsorption area is small.(Lifting force is lower than the workpiece mass.)

Recheck the relationship between workpiece mass and lifting force.• Use a vacuum pad with a large adsorption area.• Increase the quantity of vacuum pads.

Vacuum pressure is low.(Leakage from adsorption surface)(Air permeable workpiece)

Eliminate (reduce) leakage from adsorption surface. • Reconsider the shape of a vacuum pad.Check the relationship between suction flow rate and arrival pressure of vacuum ejector.• Use a vacuum ejector with a high suction flow rate.• Increase adsorption area.

Vacuum pressure is low.(Leakage from vacuum piping)

Repair leakage point.

Internal volume of vacuum circuit is large.

Check the relationship between internal volume of the vacuum circuit and suction flow rate of the vacuum ejector.• Reduce internal volume of the vacuum circuit.• Use a vacuum ejector with a high suction flow rate.

Pressure drop of vacuum piping is large.

Reconsider vacuum piping.• Use a shorter or larger tube (with appropriate diameter).

Inadequate supply pressure of vacuum ejector

Measure supply pressure in vacuum generation state.• Use standard supply pressure.• Reconsider compressed air circuit (line).

Clogging of nozzle or diffuser(Infiltration of foreign matter during piping)

Remove foreign matter.

Supply valve (switching valve) is not being activated.

Measure supply voltage at the solenoid valve with a tester.• Reconsider electric circuits, wiring and connectors.• Use in the rated voltage range.

Workpiece deforms during adsorption.

Since a workpiece is thin, it deforms and leakage occurs.• Use a pad for adsorption of thin objects.

Late vacuum achieving time(Shortening of response time)

Internal volume of vacuum circuit is large.

Check the relationship between internal volume of the vacuum circuit and suction flow rate of the vacuum ejector.• Reduce internal volume of the vacuum circuit.• Use a vacuum ejector with a high suction flow rate.

Pressure drop of vacuum piping is large.

Reconsider vacuum piping.• Use a shorter or larger tube (with appropriate diameter).

Using the product as close to the highest vacuum power in the specifications.

Set vacuum pressure to minimum necessary value by optimizing the pad diameter etc. As the vacuum power of an ejector (venturi) rises, the vacuum flow actually lowers. When an ejector is used at its highest possible vacuum value, the vacuum flow will lower. Due to this, the amount of time needed to achieve adsorption is lengthened.One should consider an increase in the diameter of the ejector nozzle or an increase the size of the vacuum pad utilized in order to lower the required vacuum pressure, maximum the vacuum flow, and speed up the adsorption process.

Setting of vacuum pressure switch is too high.

Set to suitable setting pressure.

Fluctuation in vacuum pressure

Fluctuation in supply pressure Reconsider compressed air circuit (line).(Addition of a tank etc.)

Vacuum pressure may fluctuate under certain conditions due to ejector characteristics.

Lower or raise supply pressure a little at a time, and use in a supply pressure range where vacuum pressure does not fluctuate.

Occurrence of abnormal noise (intermittent noise) from exhaust of vacuum ejector

Intermittent noise may occur under certain conditions due to ejector characteristics.

Lower or raise supply pressure a little at a time, and use in a supply pressure range where the intermittent noise does not occur.

Air leakage from vacuum port of manifold type vacuum ejector

Exhaust air from the ejector enters the vacuum port of another ejector that is stopped.

Use a vacuum ejector with a check valve.(Please contact SMC for the part number of an ejector with a check valve.)

P Countermeasures for Vacuum Adsorption System Problems (Troubleshooting)

Model Selection

318

Model Selection

Condition & Descriptionof improvement Contributing factor Countermeasure

Adsorption problem over time(Adsorption is normal during trial operation.)

Clogging of suction filter Replace filters.Improve installation environment.

Clogging of sound absorbing material

Replace sound absorbing materials.Add a filter to supply (compressed) air circuit.Install an additional suction filter.

Clogging of nozzle or diffuser Remove foreign matter.Add a filter to supply (compressed) air circuit.Install an additional suction filter.

Vacuum pad (rubber) deterioration, cracking, etc.

Replace vacuum pads.Check the compatibility of vacuum pad material and workpiece.

Workpiece is not released.

Inadequate release flow rate Open release flow adjustment needle.Vacuum pressure is high.Excessive force (adhesiveness of the rubber + vacuum pressure) is applied to the pad (rubber part).

Reduce the vacuum pressure.If inadequate lifting force causes a problem in transferring the workpieces, increase the number of pads.

Effects due to static electricity Use a conductive pad.Adhesiveness of the rubber increases due to the operating environment or wearing of the pad.• Adhesiveness of the rubber

material is high.• Adhesiveness increases due to

wearing of the vacuum pad (rubber).

Replace pads.Reconsider the pad material and check the compatibility of pad material and workpiece.Reconsider the pad form.(Changes to rib, groove, blast options)Reconsider the pad diameter and quantity of pads.

319

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

P Non-conformance Examples

Model Selection

Phenomenon Possible causes CountermeasureNo problem occurs during the test, but adsorption becomes unstable after starting operation.

• Setting of the vacuum switch is not appropriate. Supply pressure is unstable. Vacuum pressure does not reach the set pressure.

• There is leakage between the workpiece and the vacuum pad.

1) Set the pressure for the vacuum equipment (supply pressure, if using an ejector) to the necessary vacuum pressure during the adsorption of the workpieces. And set the set pressure for the vacuum switch to the necessary vacuum pressure for adsorption.

2) It is presumed that there was leakage during the test, but it was not serious enough to prevent adsorption. Reconsider the vacuum ejector and the shape, diameter, and material of the vacuum pad.Reconsider the vacuum pad.

Adsorption becomes unstable after replacing the pad.

• Initial setting conditions (vacuum pressure, vacuum switch setting, height of the pad) have changed. Settings have changed because the pad was worn out or had permanent setting due to the operating environment.

• When the pad was replaced, leakage was generated from the screw connection part, or the engagement between the pad and the adapter.

1) Reconsider the operating conditions including vacuum pressure, the set pressure of the vacuum switch, and the height of the pad.

2) Reconsider the engagement.

Identical pads are used to adsorb identical workpieces, but some of the pads cannot adsorb the workpieces.

• There is leakage between the workpiece and the vacuum pad.

• The supply circuit for the cylinder, the solenoid valve and the ejector is in the same pneumatic circuit system. The supply pressure decreases when they are used simultaneously. (Vacuum pressure does not increase.)

• There is leakage from the screw connection part or the engagement between the pad and the adapter.

1) Reconsider the pad diameter, shape, material, vacuum ejector (suction flow rate), etc.

2) Reconsider the pneumatic circuit.3) Reconsider the engagement.

Generation of sticking of bellows of the bellows pad and/or recovery delays.(It may occur at an early stage.)

When the vacuum pad (bellows type) reaches the end of its life, weakening of bent parts, wearing, or sticking of rubber parts occurs.

The operating conditions will determine the product life.Inspect it sufficiently and determine the replacement time.• Replace pads.• Reconsider the diameter, form, and material of vacuum pads.• Reconsider the quantity of vacuum pads.

Vacuum pressure is higher than necessary, so excessive force (adhesiveness of the rubber + vacuum pressure) is applied to the pad (rubber part).

Reduce the vacuum pressure. If inadequate lifting force causes a problem in transferring the workpieces due to the reduction of vacuum pressure, increase the number of pads.

Load is applied to the bellows due to the following operations, leading to sticking of rubber parts or reduction of the pad recovery performance.• Pushing exceeding pad displacement

(operating range), external load.• Workpiece holding/waitingWaiting 10 seconds or more while the workpiece is being held

* Even when under 10 seconds, pads sticking or a recovery delay issues may occur earlier depending on the operating environment and operating method.

Longer workpiece holding times lead to longer recovery times and a shorter life.

Reduce the load applied to the pad.• Review the equipment so that an external load

exceeding the pad displacement (operating range) is not applied.

• Avoid workpiece holding and waiting.The operating conditions will determine the product life. Inspect it and determine the replacement time.

The product life is shortened after replacement of the product (pad, buffer, etc.).

• The settings of the product changed.• Tube had been pulled.

Unbalanced load in clockwise direction increased.• The transfer speed increased.• The workpiece to be transferred was changed.

(Shape, center of gravity, weight, etc.)• The mounting orientation was at an angle.• The operating environment changed.• The buffer (mounting nut) was not

tightened with the appropriate torque.

If the problem (cannot adsorb) does not occur when starting operation, the product may reach the end of its life due to the customer's specification conditions.Reconsider the piping and operation (specifications).The selected model may not be appropriate for the current workpiece to be transferred or the specifications.Select the product model again by reconsidering the pad shape, diameter, quantity, and suction balance.

Pad comes out from the adapter during operation.Cracks are generated on the pad.

Load is applied to the pad (rubber part) due to the following factors.• Inadequate lifting force• Incorrect suction balance• Loads due to transfer acceleration are not

considered when selecting the product model.

The selected model may not be appropriate for the current workpiece to be transferred or the specifications.Select the product model again by reconsidering the pad shape, diameter, quantity, and suction balance.

320

Model Selection

Phenomenon Possible causes CountermeasureCracks are generated on the rubber (NBR, conduc-tive NBR).

• The product is operated in an ozone envi-ronment.

• An ionizer is used.* This phenomenon occurs earlier if

pushing or the high vacuum pressure is used.

Reconsider the operating environment.Reconsider the materials to be used.

Even when a mark-free pad is used, the pad end wears out quickly. (Suction marks are generated.)

If the pad adsorbs a highly clean work-piece, slippage is minimized, and a load (impact) is applied to the pad end.

Use the following products.• Stuck fluororesin pad• Clean attachment

Even when a mark-free pad is used, suction marks are generated.

• Incorrect application(The mark was generated due to a deformation.)

• Contamination (insufficient cleaning) on the pad when installing the equipment, dust in the operating environment etc.

Check the mark generated on the workpiece.1) Mark due to deformed (lined) workpiece

Reconsider the pad diameter, form, material, vacuum ejector (suction flow rate), etc.

2) Mark due to worn rubberReconsider the pad diameter, form, material, vacuum ejector (suction flow rate), etc.

3) Mark generated by moving componentsIf the suction mark disappears or becomes smaller after wiping with cloth or waste cloth (without using solu-tions), clean the pad as it may have been contaminated.Refer to "Cleaning method (Mark-free NBR pad)" on page 559 of this catalog.

321

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

When mounted with the nut, sometimes the buffer operation is not smooth, or the buffer does not slide.[Possible causes]• The tightening torque of the nut for mounting the buffer is too high.• Particles stuck to the sliding surface, or it is scratched.• Lateral load applied to the piston rod, causing eccentric wearing.

[Remedy]Tighten the nut to the recommended tightening torque.The nut may become loose depending on the operating conditions and environment. Be sure to perform regular maintenance.

How to Replace the Pad

Remove bolts with a hex. key wrench from the pad underside. Tighten new pad with the bolts ensuring there is no gap between the adapter plate and the pad.

Gap

Adapter plateAdapter plate

Mark

Pad

Hexagon socket head cap screw

Model Selection

ZP3

Product part no.Product specifications

Pad diameter Mounting thread sizeNut tightening torque

ZP3-∗(015 to 035) U∗

ZP3-∗(04 to 16) UM,B∗ZP3-∗(10 to 16) UM,B∗

M6 x 0.75M8 x 0.75

M8 x 0.75

ø1.5 to ø3.5

ø4 to ø16 2.0 to 2.5 N·m

2.0 to 2.5 N·m1.5 to 1.8 N·m

ZP/ZP2


Pad diameter Mounting thread sizeNut tightening torque

ZP (02 to 08) U, BZP (10 to 16) UT, CZP (2004 to 4010) U

M8 x 1

M10 x 1

M14 x 1

ø2 to ø162004 to 4010

ø10 to ø32

ø20 to ø50

1.5 to 2.0 N·m

2.5 to 3.5 N·m

6.5 to 7.5 N·m

Heavy-duty Pad


Pad diameter Mounting thread size Buffer body materialNut tightening torque

ZP (40/50) HZP (40/50) HB M18 x 1.5

M18 x 1.5

M22 x 1.5

Aluminum alloyBrassSteel



9.5 to 10.5 N·m28 to 32 N·m48 to 52 N·m

9.5 to 10.5 N·m28 to 32 N·m48 to 52 N·m

9.5 to 10.5 N·m45 to 50 N·m75 to 80 N·m

ø40, ø50

ø63, ø80

ø100, ø125

Heavy-duty Ball Joint Pad


Pad diameter Mounting thread size Buffer body materialBrassSteelBrassSteelBrassSteel

Nut tightening torque

ZP2-F (40/50) HZP2-F (40/50) HB M18 x 1.5

M22 x 1.5

M22 x 1.5

ø40, ø50

ø63, ø80

ø100, ø125

28 to 32 N·m48 to 52 N·m45 to 50 N·m75 to 80 N·m45 to 50 N·m75 to 80 N·m

ZP (10 to 32) U, C, B, DZP (10 to 16) FZP (40, 50) U, C, B, DZP (20 to 50) F

ZP (63/80) HZP (63/80) HB

ZP (100/125) HZP (100/125) HB

ZP2-F (63/80) HZP2-F (63/80) HBZP2-F (100/125) HZP2-F (100/125) HB

JJBJF

JJBJF

JJBJF

JBJFJBJFJBJF

322

Time of Replacement of Vacuum PadThe vacuum pad is disposable. Replace it on a regular basis.Continued use of the vacuum pad will cause wear and tear on the adsorption surface, and the exterior dimensions will gradually get smaller and smaller. As the pad diameter gets smaller, lifting force will decrease, though adsorption is possible.It is extremely difficult to provide advice on the frequency of vacuum pad exchange. This is because there are numerous factors at work, including surface roughness, operating environment (temperature, humidity, ozone, solvents, etc.), and operating conditions (vacuum pressure, workpiece weight, pressing force of the vacuum pad on the workpiece, presence or absence of a buffer, etc.).(Weakening of bent parts, wear, or sticking of rubber parts may occur with the bellows type pad.)Thus, the customer should decide when the vacuum pad should be exchanged, based on its condition at time of initial use.The bolt may become loose depending on the operating conditions and environment. Be sure to perform regular maintenance.

Product specifications

Pad diameter Product part no. Bolt

Bolt tightening torque

ø40, ø50

ø63, ø80

ø100, ø125ZP (100/125) HZP (100/125) HB

M3 x 8

M4 x 8

M5 x 10

0.7 to 0.9 N·m

0.9 to 1.1 N·m

2.3 to 2.7 N·m

Tighten the nut to the recommended tightening torque.

ZP (40/50) HZP (40/50) HBZP (63/80) HZP (63/80) HB

Recommended Tightening Torque for Replacement of Heavy-duty Pad

Model Selection

323

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

ø3

ø2

ø1.5

0.3

10.

5

ø2

ø1.5

ø0.8

3

ø3

ø2

ø1.5

10.

5

0.3

ø2.5

ø2

ø0.8

3

ø3

ø2

ø1.5

3

ø0.8

ø3.5

ø4

0.3

0.5

1

ø7

ø5

ø3

21.

5

0.5

ø4.5

ø4

ø1.2

ø7

ø5

ø3

21.

5

0.8

ø6.5

ø6

ø2

6

ø7

ø5

ø3

21.

5

0.8

ø8.5

ø8

ø2

66

ZP3 015 U

NSUF

GNGS

Pad materialMaterialSymbol

NBRSilicone rubber

Urethane rubberFKM

Conductive NBRConductive silicone rubber

N

01502035040608101316

ø1.5ø2

ø3.5ø4ø6ø8

ø10ø13ø16

Pad diameterPad diameterSymbol

015

——

02

——

035

——

04

—

06

—

08

—

10

—

13

—

16

—

ø1.5, ø2, ø3.5, ø4, ø6, ø8, ø10, ø13, ø16

Dimensions: Pad Unit

ZP3-015U [Weight: 0.1 g] ZP3-02U [Weight: 0.1 g] ZP3-035U [Weight: 0.1 g]

ZP3-04UM [Weight: 0.3 g] ZP3-06UM [Weight: 0.3 g] ZP3-08UM [Weight: 0.3 g]

Compact PadPad

diameter

Symbol/Type

U: FlatUM: Flat with

grooveB: Bellows

How to Order

Pad unit

Pad type—Pad diameterPad diameter

(Symbol)Pad typeU (Flat)UM (Flat with groove)B (Bellows)

∗Sales unitø1.5 to ø8 : 10 pcs.ø10 to ø16 : 5 pcs.

Flat

Flat with

groove

324

ø9ø6ø4

22

1

ø11ø10

ø2

7

ø9ø6

ø4

7

ø14ø13

ø2

1.2

22

7

ø4ø6ø9

22

1.2

ø17ø16

ø2

ø7ø5

ø3

21.

5

2.2

ø9

ø4

ø1.8

8

ø6ø4

22

2

ø11ø10ø6

ø2

10

ø7ø5

ø3

8

ø7ø6

ø3.4

ø2

3 1.5

2

ø9

ø8ø5.2ø2

3

8

ø7ø5

ø3

21.

5

ø9ø6ø4

10

22

2

ø14ø13ø8.4ø3

10

ø4ø6ø9

22

2

ø17

ø16ø11.4ø3

ø4.5

0.4

1.5

ø1.5ø0.8

ø2

R

R

R

1.4

3.5

R R

R

R

R

ø5ø3

ø1.8

RR

R

R

ø6ø4

ø1.8

1.8

4

R

Dimensions: Pad Unit

ZP3-10UM [Weight: 0.6 g] ZP3-13UM [Weight: 0.7 g] ZP3-16UM [Weight: 0.8 g]

ZP3-04B [Weight: 0.3 g] ZP3-06B [Weight: 0.3 g] ZP3-08B [Weight: 0.4 g]

ZP3-10B [Weight: 0.8 g] ZP3-13B [Weight: 1.0 g] ZP3-16B [Weight: 1.1 g]

Pad Mounting DimensionsIf an adapter will be made by the customer, design the adapter with the dimensions shown below.

Applicable pad015U/02U/035U

Applicable pad04UM/06UM/08UM/04B/06B/08B

Applicable pad10UM/13UM/16UM/10B/13B/16B

Note) R part has to be smooth with no corners. *Refer to pages 370 and 371 for applicable adapter.

Bellows

Flat with

groove

Pad Unit ZP3 Series

325

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

M3 x 0.5

8

32.

52.

5

2.5

2.5

ø2

0.3

M3 x 0.5

8

0.3

ø2

M3 x 0.5

3

8

ø4

ø3.5

0.3

ø1.5

ø0.8

ø2.5

ø0.8 ø0.8

2.5

2.5

3

ZP3-T015U-A3[Weight: 0.6 g]



ZP3 T 015 U A6

NSUF

GNGS

Pad material ()

NBRSilicone rubber

Urethane rubberFKM


Symbol Material

N

Mounting thread size

B3

A3∗ A5∗A6

A10A12 B3∗ B5∗

ø1.5to ø3.5

M3 x 0.5M5 x 0.8M6 x 0.75M10 x 1M12 x 1M3 x 0.5M5 x 0.8

————

ø4 to ø8

————

ø10to ø16

————

B3B5U2U4U6020406

A6———

015

——

02

——

035

——

04

—

06

—

08

—

10

—

13

—

16

—

Pad type—Pad diameter

Pad typePad diameter

(Symbol)

U (Flat)UM (Flat with groove)B (Bellows)


(Symbol)


A10———

A12—

∗1 Polyurethane tube piping∗2 Soft nylon/Polyurethane tube piping

Note 1) in the table indicates the pad material.Note 2) in the table indicates the vacuum inlet.Note 3) Fitting is ordered separately.

Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83, 02: KJH02-M5

ZP3-T (015/02/035) U-A3ZP3-T (015/02/035) U-B3ZP3-T (015/02/035) U-A6-

ZP3-(015/02/035)U


Suffix of how to order () U2: M-3AU-2,U4: M-3AU-4-X83 02: KJH02-M3,04: KJH04-M3-X83

ZP3-T (10/13/16) UM-A5ZP3-T (10/13/16) B-A5ZP3-T (10/13/16) UM-B5ZP3-T (10/13/16) B-B5ZP3-T (10/13/16) UM-A12-ZP3-T (10/13/16) B-A12-ZP3-T (10/13/16) UM-A12-04ZP3-T (10/13/16) B-A12-04ZP3-T (10/13/16) UM-A12-06ZP3-T (10/13/16) B-A12-06


Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5

ø1.5 to ø3.5Pad diameter

Flat

Vacuum inlet direction

TSymbol Direction

Vertical

08101316

ø8ø10ø13ø16

015020350406

ø1.5ø2

ø3.5ø4ø6

Symbol Pad diameter Symbol Pad diameterPad diameter

How to Order

Vertical vacuum inlet/With adapter

Vacuum inlet ()

Symbol Vacuum inlet

Nil


A3/A5/B3/B5

Replacement Part No.Pad diameter: ø1.5 to ø3.5

Model Pad unit part no. Adapter part no.

Pad diameter: ø4 to ø8Model Pad unit part no. Adapter part no.

ZP3-T (04/06/08) UM-A5ZP3-T (04/06/08) B-A5ZP3-T (04/06/08) UM-B5ZP3-T (04/06/08) B-B5ZP3-T (04/06/08) UM-A10-ZP3-T (04/06/08) B-A10-ZP3-T (04/06/08) UM-A10-04ZP3-T (04/06/08) B-A10-04


ZP3- (10/13/16) UMZP3- (10/13/16) BZP3- (10/13/16) UMZP3- (10/13/16) BZP3- (10/13/16) UMZP3- (10/13/16) BZP3- (10/13/16) UMZP3- (10/13/16) BZP3- (10/13/16) UMZP3- (10/13/16) B

ZP3A-T3-A5

ZP3A-T3-B5

ZP3A-T3-A12-B5

ZP3A-T3-A12-04

ZP3A-T3-A12-06

ZP3A-T1-A3ZP3A-T1-B3

ZP3A-T1-A6-B3

ZP3A-T2-A5

ZP3A-T2-B5

ZP3A-T2-A10-B5

ZP3A-T2-A10-04

ZP3- (04/06/08) UMZP3- (04/06/08) BZP3- (04/06/08) UMZP3- (04/06/08) BZP3- (04/06/08) UMZP3- (04/06/08) BZP3- (04/06/08) UMZP3- (04/06/08) B

Dimensions/With Adapter: Vacuum Inlet Vertical

Width across flat 5 Width across flat 5

SymbolMounting

Thread size

Male thread

Female thread

M3 x 0.5 female threadM5 x 0.8 female threadø2 tubing/barb fitting ∗1ø4 tubing/barb fitting ∗2ø6 tubing/barb fitting ∗2

ø2 tubingø4 tubingø6 tubing

—

∗ indicates vacuum inlet symbol is "Nil".

Width across flat 5

Pad type

ZP3 Series

326

32

22

12

15

M6 x 0.75 M3 x 0.5

3.5

0.3

ø2

ø1.5

ø0.8

M6 x 0.75 M3 x 0.5

3.5

0.3

ø2

ø2.5

ø0.8

22

M6 x 0.75 M3 x 0.5

3.5

0.3

ø4

ø3.5

ø0.8

ø0.9

(6.5

)

ø1.2

(7.4

) (10)

(13.

7)

3.5

8.5

3

ø3.5

ø4

0.3

3.5

8.5

3

0.3

ø2

3.5

8.5

3

0.3

ø2

M3 x 0.5

ø1.5

ø0.8

M3 x 0.5

ø2.5

ø0.8

M3 x 0.5

ø0.8

10

32

12

15

10

32

12

15

1022

ZP3-T015U-A6-B3[Weight: 2.8 g]



M-3AU-2 [Weight: 0.7 g]∗2

ZP3-T015U-A6-U2ZP3-T02U-A6-U2ZP3-T035U-A6-U2

ZP3-T015U-A6-U4ZP3-T02U-A6-U4ZP3-T035U-A6-U4

M-3AU-4-X83 [Weight: 0.7 g]∗2

ZP3-T015U-B3[Weight: 0.9 g]



KJH02-M3 [Weight: 1.1 g]∗2

ZP3-T015U-A6-02ZP3-T02U-A6-02ZP3-T035U-A6-02

ZP3-T015U-A6-04ZP3-T02U-A6-04ZP3-T035U-A6-04

KJH04-M3-X83 [Weight: 1.9 g]∗2

Width across flat 5 Width across flat 5 Width across flat 5

Width across flat 8

Width across flat 5

Width across flat 8

Width across flat 5

Width across flat 8

Width across flat 5

Vacuum Inlet Dimensions

Width across flat 4.5

Bar

b f

itti

ng

Width across flat 5

On

e-to

uch

fit

tin

g

Width across flat 5.5 Width across

flat 8

∗1 Refer to "ZP3-TU-A6-B3" for dimensions.∗2 When calculating the weight, add the weight of the fitting to "ZP3-TU-A6-B3".

VerticalDimensions/With Adapter: Vacuum Inlet

ø1.5 to ø3.5Pad diameter

FlatPad type

ZP3 SeriesWith Adapter: Vacuum Inlet Vertical

327

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

62.

53

11.5

M5 x 0.80.

5

ø4.5

ø1.26

2.5

3

11.5

M5 x 0.8

0.8

ø6.5

62.

53

11.5

M5 x 0.8

0.8

ø8.5

ø1.8ø1.8

ø6 ø8ø4

6

13.5

M5 x 0.8

50.

5

ø4.5

ø1.2

6

13.5

M5 x 0.8

50.

8

ø6.5

ø1.8

6

13.5

M5 x 0.8

50.

8

ø8.5

ø1.8

ø4 ø6 ø8

ZP3-T04UM-A5[Weight: 1.7 g]



ZP3-T04UM-B5[Weight: 2.3 g]






ø4 to ø8Pad diameter

Flat with groovePad type

ZP3 Series

328

ZP3-T08UM-A10-04[Weight: 10.2 g]



20

12

14

63

3

M10 x 1

M5 x 0.8

5

ø4.5

M10 x 1

20

12

14

63

3

ø6.5

5

M5 x 0.8 M5 x 0.8

M10 x 1

20

33

12

14

222

6

ø8.5

5

0.5

ø4

ø1.2 ø1.8

ø6

0.8

0.8

ø8

ø1.8

(6.5

)

ø0.9(8

.7)

(8.5

)

ø1.8

M10 x 1ø8

0.5

ø4.5

ø4

ø1.2

33

122

617

23

M10 x 1ø8

0.8

ø6.5

ø6

ø1.8

33

1217

2

6

23

M10 x 1ø8

0.8

ø8.5

ø8

ø1.8

33

122

17

23

6


Bar

b f

itti

ng

On

e-to

uch

fit

tin

g


ZP3-T04UM-A10-B5[Weight: 11.0 g]



M-5AU-2 [Weight: 1.5 g]∗2 M-5AU-4-X83 [Weight: 1.6 g]∗2

∗1 Refer to "ZP3-TUM-A10-B5" for dimensions.∗2 When calculating the weight, add the weight of the fitting to "ZP3-TUM-A10-B5".




Width across flat 14


Width across flat 7

Width across flat 7


Width across flat 7

Width across flat 7

Width across flat 7

Width across flat 7

Width across flat 14 Applicable tubing: ø4

Width across flat 7

Width across flat 7



Width across flat 7

ZP3-T04UM-A10-02ZP3-T06UM-A10-02ZP3-T08UM-A10-02

ZP3-T04UM-A10-U4ZP3-T06UM-A10-U4ZP3-T08UM-A10-U4



329

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

7

14.5

M5 x 0.8

5

1.2

ø17

ø1.8

7

14.5

M5 x 0.8

51.

2

ø14

ø1.8

ø11

ø1.8

7

14.5

M5 x 0.8

51

ø16ø13ø10

72.

53

12.5

M5 x 0.8

1.2

ø17

ø1.8

72.

53

12.5

M5 x 0.8

1.2

ø14

ø1.8

72.

53

12.5

M5 x 0.8

1

ø11

ø1.8

ø16ø13ø10














Flat with groovePad typeDimensions/With adapter: Vacuum inlet Vertical

ZP3 Series

330

30

1218

22

7

5

30

1812

7

ø11

ø10

M12 x 1

M5 x 0.8 M5 x 0.8

M12 x 1

5ø14

ø13

ø1.8 1 ø1.8

1.2

30

1812

7

5 5 5

ø17

ø16

ø1.8

M5 x 0.8

5

1.2

M12 x 1

ø0.9

(6.5

)

(8.5

)

ø1.8ø2.5

(10.

5)

(8.7

)

22

22







Bar

b f

itti

ng







M-5AU-4-X83 [Weight: 1.6 g]∗2


M-5AU-6-X83 [Weight: 1.8 g]∗2



ZP3-T10UM-A12-02ZP3-T13UM-A12-02ZP3-T16UM-A12-02



Width across flat 7


On

e-to

uch

fit

tin

g

Width across flat 7

∗1 Refer to "ZP3-TUM-A12-B5" for dimensions.∗2 When calculating the weight, add the weight of the fitting to "ZP3-TUM-A12-B5".



331

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3




M12 x 1

1.2

ø17ø16

ø1.8

22

57

1218

33

1.2

M12 x 1

ø13ø14

ø1.8

22

57

1218

33

M12 x 1

1

ø11ø10

ø1.8

22

57

1218

3333

.2

1812

75 5 5

22

ø11

ø10

ø1.8 1

M12 x 1

2218

12

7

33.2

ø14

ø13

ø1.8

1.2

M12 x 1

33.2

22

7

1218

M12 x 1

ø17

ø16

ø1.8

1.2













Applicable tubing: ø6 Applicable tubing: ø6 Applicable tubing: ø6





Flat with groovePad typeDimensions/With Adapter: Vacuum Inlet Vertical

ZP3 Series

332

M5 x 0.8

38

2.5

13.5

ø4.5

ø4

ø1.8

M5 x 0.8

38

2.5

13.5

3

ø7

ø6

ø3.4

ø1.8

M5 x 0.8

38

2.5

13.5

3

ø9

ø8

ø5.2

ø1.8

2.2

M5 x 0.8

5

2.2

8

15.5

ø4.5

ø4

ø1.8

M5 x 0.8

53

8

15.5

ø7

ø6

ø3.4

ø1.8

8

15.5

M5 x 0.8

53

ø9

ø8

ø5.2

ø1.8

Width across flat 7

Width across flat 7

Width across flat 7

Width across flat 7

Width across flat 7 Width across

flat 7

ZP3-T04B-A5[Weight: 1.7 g]



ZP3-T04B-B5[Weight: 2.3 g]




BellowsPad typeVerticalDimensions/With Adapter: Vacuum Inlet


333

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

A

ZP3-T08B-A10-04[Weight: 10.3 g]

ZP3-T06B-A10-04[Weight: 10.2 g]

ZP3-T04B-A10-04[Weight: 10.2 g]

M10 x 1

33

8

12

22

ø1.8

ø4

ø4.5

2.2

5

M5 x 0.8

M10 x 1

M5 x 0.8

5

83

3

12

22

3

ø7

ø6

ø3.4

ø1.8

M10 x 1

M5 x 0.8

5

3

ø9

ø8

ø5.2

ø1.8

82

22

12

14

2

14

2

14 33

(6.5

)

ø0.9

ø1.8

(8.7

)

(8.5

)

M10 x 1

ø8

2.2

ø4.5

ø4

ø1.8

33

122

178

25 M10 x 1

ø8

3

ø7

ø6

ø3.4

ø1.8

33

122

178

25 M10 x 1

ø8

3

ø9

ø8

ø5.2

ø1.8

33

122

178

25


Width across flat 7

Bar

b f

itti

ng

On

e-to

uch

fit

tin

g

ZP3-T04B-A10-B5[Weight: 11.0 g]




ZP3-T04B-A10-U2ZP3-T06B-A10-U2ZP3-T08B-A10-U2



ZP3-T04B-A10-02ZP3-T06B-A10-02ZP3-T08B-A10-02

∗1 Refer to "ZP3-TB-A10-B5" for dimensions.∗2 When calculating the weight, add the weight of the fitting to "ZP3-TB-A10-B5".


BellowsPad type


Width across flat 7


Width across flat 7


Width across flat 7

Width across flat 7

Width across flat 7


Width across flat 7


Width across flat 7


Width across flat 7


ZP3 Series

334

52

M5 x 0.8

10

17.5

ø11

ø10

ø6

ø1.8

5

M5 x 0.8

17.5

10

ø14

ø13

ø8.4

ø1.8

2

5

M5 x 0.8

17.5

10

ø17

ø16

ø11.4

ø1.8

2

M5 x 0.8

310

2.5

15.5

ø11

ø10ø6

ø1.8

2

ø14

ø13

ø8.4

ø1.8

2

102.

5

15.5

3

M5 x 0.8

ø17

ø16

ø11.4

ø1.8

2

M5 x 0.8

310

2.5

15.5








BellowsPad type









335

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3


Bar

b f

itti

ng

33

ø11

ø10

ø6

ø1.8

25

M5 x 0.8

1815

10

M12 x 1

22

18

33

15

10M12 x 1

M5 x 0.8

ø14

ø13

ø8.4

ø1.8

2

18

33

15

10

5 5 5

M12 x 1

M5 x 0.8

5

2

ø17

ø16

ø11.4

ø1.85

(6.5

)

ø0.9

(8.5

)

ø1.8

(10.

5)

(8.7

)

ø2.5












M-5AU-4-X83 [Weight: 1.6 g]∗2


M-5AU-6-X83 [Weight: 1.8 g]∗2



ZP3-T10B-A12-02ZP3-T13B-A12-02ZP3-T16B-A12-02


BellowsPad type

On

e-to

uch

fit

tin

g

∗1 Refer to "ZP3-TB-A12-B5" for dimensions.∗2 When calculating the weight, add the weight of the fitting to "ZP3-TB-A12-B5".


Width across flat 7


Width across flat 7

ZP3 Series

336

M12 x 1

ø17ø16

ø11.4ø1.8

2

105

15

22

1836

M12 x 1

ø142

ø13ø8.4

ø1.8

105

15

22

1836

M12 x 1

2

ø11ø10ø6

ø1.8

105

15

22

1836

M12 x 1

1015

36.2

18

22

ø11ø10

ø6ø1.8

2

36.2

1510

ø14ø13ø8.4

ø1.8

2

M12 x 1

2218

36.2

1510

5 5 5

M12 x 1

2218

ø17ø16

ø11.4ø1.8

2

ZP3-T10B-A12-06[Weight: 18.3 g]

ZP3-T13B-A12-06[Weight: 18.5 g]

ZP3-T16B-A12-06[Weight: 18.6 g]

ZP3-T16B-A12-04[Weight: 20.7 g]

ZP3-T13B-A12-04[Weight: 20.6 g]

ZP3-T10B-A12-04[Weight: 20.4 g]







Applicable tubing: ø6 Applicable tubing: ø6 Applicable tubing: ø6







BellowsPad typeVerticalDimensions/With Adapter: Vacuum Inlet


337

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

ZP3 T 015 U J 3 B3N

B3B5U2U4U6020406

M3 x 0.5M5 x 0.8

ø2 tubing ∗1ø4 tubing ∗2ø6 tubing∗2


———

ø4 to ø8

ø1.5to ø3.5

———

ø10to ø16

—

Vacuum inlet ()

Symbol Connection

Female thread

Barb fitting

One-touch fitting

01502035040608101316

ø1.5ø2

ø3.5ø4ø6ø8

ø10ø13ø16

Pad diameterSymbol Pad diameter

JJBK

Buffer specifications ()Rotating

Rotating, With bushingNon-rotating

∗Refer to the "Specifications" below, for applicable stroke.

3 6101520

———

ø1.5 to ø3.5J J JBK K

———

ø4 to ø16

——

———

015

——

02

——

035

——

04

—

06

—

08

—

10

—

13

—

16

—


(Symbol)


NSUF

GNGS

Pad material ()

NBRSilicone rubber

Urethane rubberFKM


Symbol Material

T

Vacuum inlet directionSymbol

VerticalDirection

JKJ

JBK

ø1.5 to ø3.5

ø4 to ø16

M6 x 0.751.5 to 1.8

2.0 to 2.50.2

0.5

0.4

M8 x 0.75

3, 6

3, 6, 1015, 20

3, 6, 10, 15, 20


Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 02: KJH02-M5,04: KJH04-M5



Vertical vacuum inlet/With buffer



(Symbol)



Stroke ()—Buffer specifications

Stroke

Specifications

Stroke(mm)

Tightening torque (N·m) Mounting Spring reactive force

At 0 stroke (N) At full stroke (N)

Replacement Part No.


Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5

ZP3 Series

How to Order

Pad diameter Buffer specifications

Pad diameter: ø1.5 to ø3.5Model

ZP3-T(015/02/035)U(J/K)3-ZP3-T(015/02/035)U(J/K)6- ZP3-(015/02/035)U ZP3B-T1(J/K)3-B3

ZP3B-T1(J/K)6-B3

Pad diameter: ø4 to ø8

ZP3-T(04/06/08)UM(J/K)3-ZP3-T(04/06/08)B(J/K)3-ZP3-T(04/06/08)UM(J/K)6-ZP3-T(04/06/08)B(J/K)6-ZP3-T(04/06/08)UM(J/K)10-ZP3-T(04/06/08)B(J/K)10-ZP3-T(04/06/08)UM(JB/K)15-ZP3-T(04/06/08)B(JB/K)15-ZP3-T(04/06/08)UM(JB/K)20-ZP3-T(04/06/08)B(JB/K)20-

ZP3-(04/06/08)UMZP3-(04/06/08)BZP3-(04/06/08)UMZP3-(04/06/08)BZP3-(04/06/08)UMZP3-(04/06/08)BZP3-(04/06/08)UMZP3-(04/06/08)BZP3-(04/06/08)UMZP3-(04/06/08)B

ZP3B-T2A(J/K)3-B5

ZP3B-T2A(J/K)6-B5

ZP3B-T2A(J/K)10-B5

ZP3B-T2A(JB/K)15-B5

ZP3B-T2A(JB/K)20-B5

Buffer assembly part no. Note 3)Pad unit part no.

Model Buffer assembly part no. Note 3)Pad unit part no.

Pad diameter: ø10 to ø16Model Buffer assembly part no. Note 3)Pad unit part no.

ZP3-T(10/13/16)UM(J/K)3-ZP3-T(10/13/16)B(J/K)3-ZP3-T(10/13/16)UM(J/K)6-ZP3-T(10/13/16)B(J/K)6-ZP3-T(10/13/16)UM(J/K)10-ZP3-T(10/13/16)B(J/K)10-ZP3-T(10/13/16)UM(JB/K)15-ZP3-T(10/13/16)B(JB/K)15-ZP3-T(10/13/16)UM(JB/K)20-ZP3-T(10/13/16)B(JB/K)20-


ZP3B-T2B(J/K)3-B5

ZP3B-T2B(J/K)6-B5

ZP3B-T2B(J/K)10-B5

ZP3B-T2B(JB/K)15-B5

ZP3B-T2B(JB/K)20-B5

338

ADB

22

ø2

ø1.5

ø0.8 0.3

M6 x 0.75

ø5

ø2.5

ø0.8

ø2

0.3

3

ADB

22

ø5

M6 x 0.75

ø5

22

3

ADB

M6 x 0.75

0.3ø0.8

ø4

ø3.5

3

(10)

(6.5

)(7

.4)

ø0.9

ø1.2

(13.

7)

ø7

3

0.3

M8 x 0.75

ø2

ø0.8

ø1.5

3

A

22

DB

0.3

3

ø7

22

DBA

3

ø0.8

ø2

ø2.5

M3 x 0.5M3 x 0.5

M3 x 0.5 M3 x 0.5 M3 x 0.5 M3 x 0.5

ø7

3

M8 x 0.75

M8 x 0.75

0.3

ø4

ø3.5

ø0.8

3

A

22

DB

A 710

B2431

D1014

A 710

B2431

D1014

A 710

B2431

D1014

3.44.4

3.44.4

3.44.4

A 811

B26.533

D11 14.5

A 811

B26.533

D11 14.5

A 811

B26.533

D11 14.5

6.88.2

6.88.2

6.88.2

Pad diameter ø1.5 to ø3.5

ZP3-T015UJ-B3 ZP3-T015UK-B3 ZP3-T02UJ-B3 ZP3-T02UK-B3

Width across flat 4

Width across flat 8

Width across flat 6Width across flat 10


Width across flat 4

Width across flat 8

Width across flat 6



Dimensions (per stroke) Dimensions (per stroke) Dimensions (per stroke) Dimensions (per stroke)Model Model Model ModelWeight (g) Weight (g) Weight (g) Weight (g)

ZP3-T015UJ3-B3ZP3-T015UJ6-B3

ZP3-T015UK3-B3ZP3-T015UK6-B3


ZP3-T02UK3-B3ZP3-T02UK6-B3

Note) in the table indicates the pad material "N, S, U, F, GN, GS."




ZP3-T035UJ-B3 ZP3-T035UK-B3

Width across flat 4

Width across flat 8

Width across flat 6



Dimensions (per stroke) Dimensions (per stroke)Model Weight (g)



Model Weight (g)ZP3-T035UK3-B3ZP3-T035UK6-B3


Vacuum Inlet DimensionsBarb fitting One-touch fitting

ZP3-T015U-U2ZP3-T02U-U2ZP3-T035U-U2

ZP3-T015U-02ZP3-T02U-02ZP3-T035U-02



ZP3-T015U-U4ZP3-T02U-U4ZP3-T035U-U4

ZP3-T015U-04ZP3-T02U-04ZP3-T035U-04

M-3AU-2 [Weight: 0.7 g]∗2 KJH02-M3 [Weight: 1.1 g]∗2


M-3AU-4-X83 [Weight: 0.7 g]∗2 KJH04-M3-X83 [Weight: 1.9 g]∗2

∗1 Refer to "ZP3-TU-B3" for dimensions.∗2 When calculating the weight, add the weight of the fitting to "ZP3-TU-B3".

FlatPad type

3, 6 mmStrokeVerticalDimensions/With Buffer: Vacuum Inlet

ZP3 SeriesWith Buffer: Vacuum Inlet Vertical

339

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

6

AB

D2

2

4

ø4.5 ø6.5

6

AB

22D

M5 x 0.8M5 x 0.8

0.8

0.5

ø4ø1.2

ø6ø1.8

M8 x 0.75

4

6

AB 2

2

D

ø8.5ø8

ø1.8

0.8

4

M5 x 0.8

ø7

(6.5

)

ø0.9

(8.5

)

ø7 ø7

M8 x 0.75

M8 x 0.75

ø1.8

(8.7

)(1

3.9)

A

111418

B

30.53747

D

1114.520.5

Dimensions (per stroke)

Model

ZP3-T04UM3-B5ZP3-T04UM6-B5ZP3-T04UM10-B5

Note 1) in the table indicates the pad material "N, S, U, F, GN, GS."Note 2) The symbol "" indicates buffer type "J" or "K".

A

111418

B

30.53747

D

1114.520.5


Model



A

111418

B

30.53747

D

1114.520.5

7.4 8.610.5

7.4 8.610.5

7.4 8.610.5

7.3 8.610.5

7.3 8.610.5

7.3 8.610.5

Weight (g)Rotating

(J)Non-rotating

(K)ZP3-T06UM3-B5ZP3-T06UM6-B5ZP3-T06UM10-B5

ModelWeight (g)



Weight (g)

Rotating(J)

Non-rotating(K)

Rotating(J)

Non-rotating(K)




M-5AU-4-X83 [Weight: 1.6 g]∗2

ZP3-T04UMJ-B5 ZP3-T04UMK-B5 ZP3-T06UMJ-B5 ZP3-T06UMK-B5


Width across flat 7


Width across flat 7

ZP3-T08UMJ-B5 ZP3-T08UMK-B5



flat 7

Width across flat 7

Width across flat 7

Width across flat 8

∗1 Refer to "ZP3-TUM-B5" for dimensions.∗2 When calculating the weight, add the weight of the fitting to "ZP3-TUM-B5".

Pad diameter ø4 to ø8Pad type

3, 6, 10 mm

Flat with grooveStroke


ZP3-T04UM-U2ZP3-T06UM-U2ZP3-T08UM-U2

ZP3-T04UM-02ZP3-T06UM-02ZP3-T08UM-02



Dimensions/With Buffer: Vacuum Inlet Vertical

ZP3 Series

340

4

ø6.5

ø6

ø1.80.

8

6

12

AB

22

10

M8 x 0.75

4

M5 x 0.8ø7

6

12

AB

ø8.5ø8

ø1.8

0.8

M8 x 0.75

M5 x 0.8ø7

4

2210

BA

126

ø4.5

M8 x 0.75

22

10

ø1.2

ø4

0.5

M5 x 0.8ø7

(6.5

)

(8.7

)

ø0.9

(8.5

)

(13.

9)

ø1.8

Width across flat 6Width across flat 10 Bushing

Bushing

Width across flat 7


Bushing

Width across flat 7


Bushing

Width across flat 7

KJH02-M5 [Weight: 1.9 g]∗2M-5AU-2 [Weight: 1.5 g]∗2

A

36.544

B

5562.5

A

36.544

B

5562.5

A

36.544

B

5562.5

10.310.9

10.310.9

10.310.9

12.313.4

12.313.4

12.313.4



15, 20 mmStroke

Flat with groove

ZP3-T04UMJB-B5 ZP3-T04UMK-B5 ZP3-T06UMJB-B5 ZP3-T06UMK-B5

ZP3-T04UM15-B5ZP3-T04UM20-B5

ModelWeight (g)


Rotating(J)

Non-rotating(K)

Note 1) in the table indicates the pad material "N, S, U, F, GN, GS."

Note 2) The symbol "" indicates buffer type "JB" or "K".

Model

Weight (g)Dimensions (per stroke)

Rotating(J)

Non-rotating(K)

ZP3-T06UM15-B5ZP3-T06UM20-B5Note 1) in the table indicates the pad material "N,

S, U, F, GN, GS."Note 2) The symbol "" indicates buffer type "JB" or "K".

ZP3-T08UMJB-B5 ZP3-T08UMK-B5

Model

Dimensions (per stroke)Weight (g)

Rotating(J)

Non-rotating(K)

ZP3-T08UM15-B5ZP3-T08UM20-B5Note 1) in the table indicates the pad material "N,

S, U, F, GN, GS."Note 2) The symbol "" indicates buffer type "JB" or "K".




Width across flat 7

Width across flat 7

KJH04-M5 [Weight: 2.4 g]∗2M-5AU-4-X83 [Weight: 1.6 g]∗2

Width across flat 7

Width across flat 8



VerticalDimensions/With Buffer: Vacuum Inlet


341

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

7

AB 2

2D

M5 x 0.8

ø74

M8 x 0.75

ø1.8

ø11

ø10

1

4

M5 x 0.8

ø7

1.2ø1.8

ø14

ø13

7

AB 2

2D

M8 x 0.75

4

ø17

1.2ø1.8

ø16

72

2DA

B

M8 x 0.75

M5 x 0.8

ø7

(10.

5)

ø2.5

(14.

7)(1

3.9)

(8.5

)

ø1.8

(8.7

)

ø0.9

(6.5

)

Width across flat 6



Width across flat 6






A

121519


Note 2) The symbol "" indicates buffer type "J" or "K".

B

31.53848

D

1114.520.5

Model



A

121519

B

31.53848

D

1114.520.5



Model



A

121519

B

31.53848

D

1114.520.5

8.4 9.611.7

8.5 9.711.8

8.6 9.811.9

8.3 9.611.7

8.4 9.711.8

8.5 9.811.9

ZP3-T10UMJ-B5 ZP3-T10UMK-B5 ZP3-T13UMJ-B5 ZP3-T13UMK-B5





Width across flat 7

Width across flat 7



Width across flat 7

Width across flat 8




Width across flat 7


M-5AU-6-X83 [Weight: 1.8 g]∗2 KJH06-M5 [Weight: 3.3 g]∗2

ZP3-T16UMJ-B5 ZP3-T16UMK-B5



Model





3, 6, 10 mm

Flat with grooveStroke

Weight (g)Rotating

(J)Non-rotating

(K)

Weight (g)Rotating

(J)Non-rotating

(K)

Weight (g)Rotating

(J)Non-rotating

(K)

Dimensions/With Buffer: Vacuum Inlet Vertical

ZP3 Series

342

ø11

7

13

AB

22

10

M5 x 0.8ø7

M8 x 0.75

41ø1.8

ø107

13

AB

22

10

ø14ø13

ø1.8

1.2

M8 x 0.75

4

M5 x 0.8ø7

ø17

7

13

AB

ø1.8

ø16

1.2

M8 x 0.75

M5 x 0.8ø7

4

22

10 (6.5

)

ø0.9

(8.5

)

ø1.8

ø2.5

(10.

5)

(14.

7)(1

3.9)

(8.7

)

A

37.545

B

5663.5

13.316.4

15.316.4

A

37.545

B

5663.5

13.216.3

15.216.3


A

37.545

B

5663.5

13.116.2

15.116.2



Pad diameter ø10 to ø16Flat with groovePad type

15, 20 mmStroke

ModelWeight (g)

Rotating(J)

Non-rotating(K)



ModelWeight (g)

Rotating(J)

Non-rotating(K)







Width across flat 7

Width across flat 7




Width across flat 7

Width across flat 8




Width across flat 7







ModelWeight (g)

Rotating(J)

Non-rotating(K)


VerticalDimensions/With Buffer: Vacuum Inlet

ZP3-T10UMJB-B5 ZP3-T10UMK-B5 ZP3-T13UMJB-B5 ZP3-T13UMK-B5

Width across flat 6

Width across flat 10 Bushing

Bushing


Width across flat 6


Bushing


ZP3-T16UMJB-B5 ZP3-T16UMK-B5

Width across flat 6


Bushing



343

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

M5 x 0.8ø7

4

22

M8 x 0.75

2.2

ø4.5

ø4

ø1.8

8

AD

B

4

M5 x 0.8ø7

8

A

B

D

3

ø7

ø6

ø3.4

ø1.8

M8 x 0.75

22

ø9

ø8

ø5.2

ø1.8

3

8

A

B

D

22

M8 x 0.75

4

M5 x 0.8

ø7

ø0.9

(6.5

)

(8.7

)(1

3.9)

ø1.8

(8.5

)


ModelWeight (g)

∗1 Refer to "ZP3-TB-B5" for dimensions.∗2 When calculating the weight, add the weight of the fitting to "ZP3-TB-B5".

A

131620

B

32.539 49

D

1114.520.5

A

131620

B

32.539 49

D

1114.520.5

A

131620

B

32.539 49

D

11 14.520.5

7.4 8.610.5

7.5 8.710.6

7.4 8.610.5

7.3 8.610.5

7.4 8.710.6

7.3 8.610.5

ZP3-T04B3-B5ZP3-T04B6-B5ZP3-T04B10-B5





3, 6, 10 mm

BellowsStrokeDimensions/With Buffer: Vacuum Inlet Vertical

ZP3-T04BJ-B5 ZP3-T04BK-B5 ZP3-T06BJ-B5 ZP3-T06BK-B5

Width across flat 6


Width across flat 7

Width across flat 6


Width across flat 7

Weight (g)Rotating (J) Non-rotating (K)Model




Weight (g)Rotating (J) Non-rotating (K)Model

ZP3-T04B-U2ZP3-T06B-U2ZP3-T08B-U2


ZP3-T04B-02ZP3-T06B-02ZP3-T08B-02

Width across flat 7




Width across flat 7

Width across flat 8

ZP3-T04B-04ZP3-T06B-04ZP3-T08B-04

Width across flat 7

Dimensions (per stroke)Weight (g)

Rotating (J) Non-rotating (K)Model

ZP3-T08BJ-B5 ZP3-T08BK-B5

Width across flat 6


Width across flat 7

ZP3 Series

344

M8 x 0.75

4

M5 x 0.8ø7

M5 x 0.8ø7

22

10A

B

814

2.2

ø4.5

ø4

ø1.8

ø7

ø6

ø3.4

ø1.83

814

AB

22

10

M8 x 0.75

M8 x 0.75

M5 x 0.8ø7

2210

BA

148

3

ø9

ø8

ø5.2

ø1.8

44

ø0.9

(6.5

)

(8.7

)


(8.5

)

(13.

9)

ø1.8

Bushing

Bushing

Width across flat 7

A

38.546

B

5764.5

10.411.0

12.413.5

A

38.546

B

5764.5

10.310.9

12.313.4

A

38.546

B

5764.5

10.310.9

12.313.4



Pad diameter ø4 to ø8BellowsPad type


ZP3-T04BJB-B5 ZP3-T04BK-B5 ZP3-T06BJB-B5 ZP3-T06BK-B5

Width across flat 6


Bushing

Width across flat 7

Width across flat 6



ModelWeight (g)

Rotating(J)

Non-rotating(K)

ZP3-T04B15-B5ZP3-T04B20-B5




ModelWeight (g)

Rotating(J)

Non-rotating(K)

ZP3-T06B15-B5ZP3-T06B20-B5



ZP3-T04B-02ZP3-T06B-02ZP3-T08B-02

Width across flat 7

Width across flat 7



Width across flat 7

Width across flat 8


ZP3-T04B-04ZP3-T06B-04ZP3-T08B-04

Bushing

Bushing

Width across flat 7



ZP3-T08BJB-B5 ZP3-T08BK-B5

Width across flat 6



ModelWeight (g)

Rotating(J)

Non-rotating(K)

ZP3-T08B15-B5ZP3-T08B20-B5


345

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

M5 x 0.8ø7

4

ø11

ø10

ø6

ø1.8

2

10

A

M8 x 0.75

22

D

B

ø14

ø13

ø8.4

ø1.8

2

M5 x 0.8ø7

4

10

A

B

D

22

M8 x 0.75

M5 x 0.8ø7

4

ø17

ø16

ø11.4

ø1.8

2

10

M8 x 0.75

DA

B

22 (6

.5)

(8.5

)(1

0.5)

(8.7

)(1

4.7)

(13.

9)

ø0.9

ø1.8

ø2.5

Width across flat 6



Width across flat 6





ZP3-T10B-02ZP3-T13B-02ZP3-T16B-02

Width across flat 7




Width across flat 7

Width across flat 8

ZP3-T10B-04ZP3-T13B-04ZP3-T16B-04

Width across flat 7


ZP3-T10B-06ZP3-T13B-06ZP3-T16B-06

Width across flat 7



A

151822

B

34.541 51

D

11 14.520.5

8.6 9.711.7

8.5 9.711.7

A

151822

B

34.541 51

D

11 14.520.5

8.7 9.811.8

8.6 9.811.8

A

151822

B

34.541 51

D

11 14.520.5

8.8 9.911.9

8.7 9.911.9

ZP3-T10BJ-B5 ZP3-T10BK-B5 ZP3-T13BJ-B5 ZP3-T13BK-B5


ZP3-T10B3-B5ZP3-T10B6-B5ZP3-T10B10-B5Note 1) in the table indicates the pad material "N,

S, U, F, GN, GS."Note 2) The symbol "" indicates buffer type "J" or "K".

Weight (g)Rotating

(J)Non-rotating

(K)Model




Weight (g)Rotating

(J)Non-rotating

(K)Model


Width across flat 6



ZP3-T16BJ-B5 ZP3-T16BK-B5




Weight (g)Rotating

(J)Non-rotating

(K)Model


3, 6, 10 mm

BellowsStrokeDimensions/With Buffer: Vacuum Inlet Vertical

ZP3 Series

346

M5 x 0.8ø7

4

M8 x 0.75

ø11

ø10

ø6

ø1.8

2

10

16

A

B

10

22

ø7M5 x 0.8

M8 x 0.75

4

ø14

ø13

ø8.4

ø1.8

2

10

16

AB

2210

M5 x 0.8ø7

M8 x 0.75

ø17

ø16

ø11.4

ø1.8

2

10

16

AB

22

10

4

ø0.9

(6.5

)(8

.5)

ø1.8

(10.

5)

ø2.5

(8.7

)(1

3.9)

(14.

7)

Bushing

Bushing


Width across flat 6


Bushing


Width across flat 6




ZP3-T10B-02ZP3-T13B-02ZP3-T16B-02

Width across flat 7

Width across flat 7



ZP3-T10B-04ZP3-T13B-04ZP3-T16B-04



ZP3-T10B-06ZP3-T13B-06ZP3-T16B-06

Width across flat 7


A

40.548

B

59 66.5

13.616.7

15.616.7

A

40.548

B

59 66.5

13.516.6

15.516.6

A

40.548

B

59 66.5

13.316.4

15.316.4




ModelWeight (g)

Rotating(J)

Non-rotating(K)

ZP3-T10B15-B5ZP3-T10B20-B5




ModelWeight (g)

Rotating(J)

Non-rotating(K)

ZP3-T13B15-B5ZP3-T13B20-B5






ZP3-T10BJB-B5 ZP3-T10BK-B5 ZP3-T13BJB-B5 ZP3-T13BK-B5

Bushing

Bushing


Width across flat 6





ModelWeight (g)

Rotating(J)

Non-rotating(K)

ZP3-T16B15-B5ZP3-T16B20-B5

ZP3-T16BJB-B5 ZP3-T16BK-B5


347

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

01502035040608101316

ø1.5ø2

ø3.5ø4ø6ø8

ø10ø13ø16


ZP3 Y 015 U B3 B3N

Y

Vacuum inlet directionSymbol Direction

LateralB3B5U2U4U6020406

Connection

———

———

—

Vacuum inlet ()

Female thread

Barb fitting

One-touch fitting

Symbol ø4 to ø8

ø1.5to ø3.5

ø10to ø16

M3 x 0.5M5 x 0.8

ø2 tubing ∗1ø4 tubing ∗2ø6 tubing ∗2

ø2ø4ø6

015

——

02

——

035

——

04

—

06

—

08

—

10

—

13

—

16

—



(Symbol)


NSUF

GNGS

Pad material ()

NBRSilicone rubber

Urethane rubberFKM


Symbol Material

B3B5

ø1.5to ø3.5

M3 x 0.5M5 x 0.8

—

ø4to ø16

—


Female thread

Symbol Thread size

ZP3A-Y1-B3

ZP3A-Y2-B5

ZP3A-Y3-B5

Pad diameter: ø1.5 to ø3.5Model Pad unit part no. Adapter part no.

ZP3-Y(015/02/035)U-B3- ZP3-(015/02/035)UNote 1) in the table indicates the pad material.Note 2) in the table indicates the vacuum inlet.Note 3) Fitting is ordered separately.



ZP3-Y(04/06/08)UM-B5-ZP3-Y(04/06/08)B-B5-

ZP3-(04/06/08)UMZP3-(04/06/08)B




ZP3-Y (10/13/16)UM-B5-ZP3-Y (10/13/16)B-B5-

ZP3-(10/13/16)UMZP3-(10/13/16)B



How to Order

Lateral vacuum inlet/With adapter


Specifications

ZP3 Series

348

14

53

2

ø2

5

3 3 3

5

5

5

5

ø1.5

0.3

ø0.8

7M

3 x

0.53

M3 x 0.5

ø5

142

3

7M

3 x

0.53

M3 x 0.5

ø5

ø0.8

ø2.5

ø2

143

2

ø4

ø5

M3

x 0.

53

70.

3

ø0.8

ø3.5

M3 x 0.5

0.3

(12.4)

ø0.

9

(9) (9.9)

ø1.

2

(16.2)


Bar

b f

itti

ng

On

e-to

uch

fit

tin

g

ZP3-Y015U-B3-U2ZP3-Y02U-B3-U2ZP3-Y035U-B3-U2

ZP3-Y015U-B3-U4ZP3-Y02U-B3-U4ZP3-Y035U-B3-U4


Width across flat 5


ZP3-Y015U-B3-02ZP3-Y02U-B3-02ZP3-Y035U-B3-02

ZP3-Y015U-B3-04ZP3-Y02U-B3-04ZP3-Y035U-B3-04

KJH02-M3 [Weight: 1.1 g]∗2 KJH04-M3-X83 [Weight: 1.9 g]∗2


Width across flat 8

∗1 Refer to "ZP3-YU-B3-B3" for dimensions.∗2 When calculating the weight, add the weight of the fitting to "ZP3-YU-B3-B3".

Dimensions/With Adapter: Vacuum Inlet LateralPad diameter ø1.5 to ø3.5

Pad type Flat

ZP3-Y015U-B3-B3[Weight: 1.9 g]



ZP3 SeriesWith Adapter: Vacuum Inlet Lateral

349

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

22

6

0.5

8

8 8

8

6

22

11

M5 x 0.8

ø8

M5 x 0.8

ø8

11

ø6.5

ø4.5

M5

x 0.

8

M5

x 0.

85 5

4 4

0.8

ø4

ø1.8

ø1.2

ø6

ø1.8

8

8

6

22

M5 x 0.8

ø8

11

0.8

ø8.5

ø8

ø1.8

4

M5

x 0.

85

(12.6) (17.8)

(12.5)

ø1.

8

(10.5)

ø0.

9

Dimensions/With Adapter: Vacuum Inlet LateralPad diameter ø4 to ø8

Pad type Flat with groove

ZP3-Y04UM-B5-B5[Weight: 7.0 g]




Bar

b f

itti

ng

On

e-to

uch

fit

tin

g

ZP3-Y04UM-B5-U2ZP3-Y06UM-B5-U2ZP3-Y08UM-B5-U2


Width across flat 7

Width across flat 7


KJH02-M5 [Weight: 1.9 g]∗2 KJH04-M5 [Weight: 2.4 g]∗2

Width across flat 7

Width across flat 8

∗1 Refer to "ZP3-YUM-B5-B5" for dimensions.∗2 When calculating the weight, add the weight of the fitting to "ZP3-YUM-B5-B5".

ZP3-Y04UM-B5-02ZP3-Y06UM-B5-02ZP3-Y08UM-B5-02


ZP3 Series

350

23

7

12

M5 x 0.8

ø1.8

ø11

ø10

1

4

M5

x 0.

8

5ø8

ø1.8

ø13

ø14

7

23

M5 x 0.8

ø8

M5

x 0.

8

5

12

4

1.2

7

23

ø17

ø16

ø1.8

121.

2

4

M5

x 0.

8

5

M5 x 0.8

ø8

(12.6) (17.8) (18.6)

(14.5)(12.5)(10.5)

ø1.

8

ø2.

5

ø0.

9




Square 8


Bar

b f

itti

ng

On

e-to

uch

fit

tin

g



Width across flat 7


Width across flat 7

M-5AU-4-X83 [Weight: 1.6 g]∗2

Width across flat 7





Width across flat 8


Width across flat 7


∗1 Refer to "ZP3-YUM-B5-B5" for dimensions.∗2 When calculating the weight, add the weight of the fitting to "ZP3-YUM-B5-B5".


Square 8Square 8


Pad type Flat with groove


351

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

8

8

8

8

24

82

ø4.5

13

24

28

ø7

13

M5 x 0.8 M5 x 0.8

M5

x 0.

8

M5

x 0.

8

5 5

ø8ø8

4 4

3

2.2

ø4

ø1.8

ø6

ø3.4

ø1.8

8

8

8

24

2

133

ø9

ø8

ø5.2

ø1.8

4

M5

x 0.

8


Bar

b f

itti

ng

On

e-to

uch

fit

tin

g

Width across flat 7

Width across flat 7


5

M5 x 0.8

ø8

(12.6)

(12.5)

ø1.

8

(10.5)

ø0.

9

(17.8)

ZP3-Y04B-B5-U2ZP3-Y06B-B5-U2ZP3-Y08B-B5-U2


ZP3-Y04B-B5-02ZP3-Y06B-B5-02ZP3-Y08B-B5-02


Width across flat 7

Width across flat 8


∗1 Refer to "ZP3-YB-B5-B5" for dimensions.∗2 When calculating the weight, add the weight of the fitting to "ZP3-YB-B5-B5".


Pad type Bellows

ZP3-Y04B-B5-B5[Weight: 7.0 g]



ZP3 Series

352

152

26

210

M5 x 0.8

ø8

(10.5)

ø0.

9

(12.5)

ø1.

8

ø2.

5

(14.5)

(18.6)(17.8)(12.6)

102

5

M5

x 0.

8

ø1.8

ø10

ø6

ø11

26

M5 x 0.8

ø8

152

ø14

ø13

ø8.4

ø1.8

M5

x 0.

8

5

10

26

2

ø17

152

M5

x 0.

8

5

M5 x 0.8

ø8

ø16

ø11.4

ø1.8

4 4 4

Square 8 Square 8 Square 8


Bar

b f

itti

ng

Width across flat 7





Width across flat 7

Width across flat 7

M-5AU-6-X83 [Weight: 1.8 g]∗2




On

e-to

uch

fit

tin

g Width across flat 7

Width across flat 8


KJH02-M5 [Weight: 1.9 g]∗2 KJH04-M5 [Weight: 2.4 g]∗2 KJH06-M5 [Weight: 3.3 g]∗2

∗1 Refer to "ZP3-YB-B5-B5" for dimensions.∗2 When calculating the weight, add the weight of the fitting to "ZP3-YB-B5-B5".

Dimensions/With Adapter: Vacuum Inlet LateralZP3-Y10B-B5-B5

[Weight: 7.9 g]ZP3-Y13B-B5-B5

[Weight: 8.1 g]ZP3-Y16B-B5-B5

[Weight: 8.2 g]



353

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

ZP3 Y 015 U J 3 B3

NSUF

GNGS

Pad material ()

NBRSilicone rubber

Urethane rubberFKM


Symbol Material

N

Y

Vacuum inlet directionSymbol Direction

Lateral

B3B5U2U4U6020406

M3 x 0.5M5 x 0.8

ø2 tubing ∗1ø4 tubing ∗2ø6 tubing ∗2


———

ø4to ø8

ø1.5to ø3.5

———

ø10to ø16

—

Vacuum inlet ()

Female thread

Barb fitting

One-touch fitting

Symbol Connection

01502035040608101316

ø1.5ø2

ø3.5ø4ø6ø8

ø10ø13ø16


JJBK

Buffer specifications ()Rotating

Rotating, With bushingNon-rotating

3 6101520

———

ø1.5 to ø3.5J K J JB K

———

——

———

ø4 to ø16

Stroke ()—Buffer specifications

Stroke015

——

02

——

035

——

04

—

06

—

08

—

10

—

13

—

16

—


(Symbol)




(Symbol)


JKJ

JBK

ø1.5 to ø3.5

ø4 to ø16

M6 x 0.75M8 x 0.75

1.5 to 1.82.0 to 2.5

2.0 to 2.5 M8 x 0.75

0.2

0.2

0.40.5

0.5

3, 6

3, 6, 1015, 20

3, 6, 10, 15, 20


Lateral vacuum inlet/With buffer

Pad diameter: ø1.5 to ø3.5Model Pad unit part no. Buffer assembly part no. Note 3)

ZP3-(015/02/035)UZP3-Y(015/02/035)U(J/K)3-ZP3-Y(015/02/035)U(J/K)6-

ZP3B-Y1(J/K)3-B3ZP3B-Y1(J/K)6-B3



Pad diameter: ø4 to ø8Model Pad unit part no. Buffer assembly part no. Note 3)

ZP3-Y(04/06/08)UM(J/K)3-ZP3-Y(04/06/08)B(J/K)3-ZP3-Y(04/06/08)UM(J/K)6-ZP3-Y(04/06/08)B(J/K)6-ZP3-Y(04/06/08)UM(J/K)10-ZP3-Y(04/06/08)B(J/K)10-ZP3-Y(04/06/08)UM(JB/K)15-ZP3-Y(04/06/08)B(JB/K)15-ZP3-Y(04/06/08)UM(JB/K)20-ZP3-Y(04/06/08)B(JB/K)20-


ZP3B-Y2A(J/K)3-B5

ZP3B-Y2A(J/K)6-B5

ZP3B-Y2A(J/K)10-B5

ZP3B-Y2A(JB/K)15-B5

ZP3B-Y2A(JB/K)20-B5



Pad diameter: ø10 to ø16

ZP3-Y(10/13/16)UM(J/K)3-ZP3-Y(10/13/16)B(J/K)3-ZP3-Y(10/13/16)UM(J/K)6-ZP3-Y(10/13/16)B(J/K)6-ZP3-Y(10/13/16)UM(J/K)10-ZP3-Y(10/13/16)B(J/K)10-ZP3-Y(10/13/16)UM(JB/K)15-ZP3-Y(10/13/16)B(JB/K)15-ZP3-Y(10/13/16)UM(JB/K)20-ZP3-Y(10/13/16)B(JB/K)20-


ZP3B-Y2B(J/K)3-B5

ZP3B-Y2B(J/K)6-B5

ZP3B-Y2B(J/K)10-B5

ZP3B-Y2B(JB/K)15-B5

ZP3B-Y2B(JB/K)20-B5



Model Pad unit part no. Buffer assembly part no. Note 3)

ZP3 Series

Specifications

How to Order

Pad diameterBuffer

specificationsStroke (mm)

Tightening torque (N·m) Mounting

Spring reactive forceAt 0 stroke (N) At full stroke (N)

Replacement Part No.

354

(17.7)(11.4) ø1.

2

(10.5)

ø0.9

(13.9)

ø7

3

13

AD

B

22

M8 x 0.75

M3

x 0.

573

0.3

8

8

8

8

8

8

ø0.8ø1.5ø2

ø7

ø0.8ø2

ø2.5

ø4

ø0.8ø3.5

3

13

BD

A

70.

3

3

M3

x 0.

5M8 x 0.75

22

ø7

3

13

AD

B

22

7M

3 x

0.5M8 x 0.75

3

0.3

ø5

M6 x 0.75

3

ø2ø1.5ø0.8

8

ø5

M6 x 0.75

3

ø2ø2.5

ø0.8

8

ø5

M6 x 0.75

3

ø4ø3.5

ø0.8

8

313

AD

B

M3

x 0.

57

0.3

8

313

AD

B

M3

x 0.

57

0.3

8

3

13A

B

22

D

M3

x 0.

57

0.3

8

22

22

Width across flat 4 Width across flat 6 Width across flat 4 Width across flat 6

Width across flat 8

Width across flat 4

Width across flat 8

Width across flat 6




ZP3-Y015UJ-U2ZP3-Y02UJ-U2ZP3-Y035UJ-U2

ZP3-Y015UJ-U4ZP3-Y02UJ-U4ZP3-Y035UJ-U4

ZP3-Y015UJ-02ZP3-Y02UJ-02ZP3-Y035UJ-02

ZP3-Y015UJ-04ZP3-Y02UJ-04ZP3-Y035UJ-04

ZP3-Y015UJ3-B3ZP3-Y015UJ6-B3

A1720

B3037

D1014

7.78.6


A1720

B3037

D1014

7.78.6

ZP3-Y015UK3-B3ZP3-Y015UK6-B3

A1720

B34 40.5

D11 14.5

11.012.2


A1720

B34 40.5

D11 14.5

11.012.2


A1720

B3037

D1014

7.78.6


A1720

B34 40.5

D11 14.5

11.012.2

Pad diameter ø1.5 to ø3.5 Pad type

3, 6 mmStroke

Flat

Dimensions/With Buffer: Vacuum Inlet LateralZP3-Y015UJ-B3 ZP3-Y015UK-B3

ZP3-Y035UJ-B3 ZP3-Y035UK-B3

ZP3-Y02UJ-B3 ZP3-Y02UK-B3

Dimensions (per stroke)Model Weight (g)














M-3AU-4-X83 [Weight: 0.7 g]∗2 KJH04-M3-X83 [Weight: 1.9 g]∗2

∗1 Refer to "ZP3-YU-B3" for dimensions.∗2 When calculating the weight, add the weight of the fitting to "ZP3-YU -B3".




Lateral ZP3 SeriesWith Buffer: Vacuum Inlet

355

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

ø1.

8ø

0.9

(17.8)

(12.6)(10.5)

(12.5)

M8 x 0.75

4

ø4.5ø4

ø1.8ø1.2

ø7

8

M8 x 0.75

ø6.5

ø1.8ø6

ø7

4

8

M8 x 0.75

ø8ø8.5

ø7

4

ø1.8

8

6

18A

B

22

D

11

0.5

M5

x 0.

8

8

0.8

618

AB

22

D

M5

x 0.

8

11

8

0.8

618

AB

22

D

M5

x 0.

8

11

8

ZP3-Y04UM3-B5ZP3-Y04UM6-B5ZP3-Y04UM10-B5

A

22.525 29

B

404656

D

11 14.520.5

12.814.216.6

12.213.415.4


A

22.525 29

B

404656

D

11 14.520.5

12.814.216.6

12.213.415.4


A

22.525 29

B

404656

D

11 14.520.5

12.814.216.6

12.213.415.4

ZP3-Y04UM-U2ZP3-Y06UM-U2ZP3-Y08UM-U2


ZP3-Y04UM-02ZP3-Y06UM-02ZP3-Y08UM-02



ZP3 SeriesPad diameter ø4 to ø8

ZP3-Y04UMJ-B5 ZP3-Y04UMK-B5 ZP3-Y06UMJ-B5 ZP3-Y06UMK-B5

Pad type

3, 6, 10 mm

Flat with grooveStrokeDimensions/With Buffer: Vacuum Inlet Lateral

ZP3-Y08UMJ-B5 ZP3-Y08UMK-B5




ModelWeight (g)

Rotating(J)

Non-rotating(K)




ModelWeight (g)

Rotating(J)

Non-rotating(K)





ModelWeight (g)

Rotating(J)

Non-rotating(K)





Width across flat 7

Width across flat 7


∗1 Refer to "ZP3-YUM-B5" for dimensions.∗2 When calculating the weight, add the weight of the fitting to "ZP3-YUM-B5".

356

(12.6)

(17.8)(12.5)

(10.5)

ø0.

9ø

1.8

ø7

M8 x 0.75

4

ø4

8

ø1.8ø1.2

ø4.5

ø7

4

ø6ø1.8

8

ø6.5

M8 x 0.75

8

ø7

4

ø8ø8.5

ø1.8

M8 x 0.75

618

AB

22

10

11

0.8

M5

x 0.

8

AB

22

10

M5

x 0.

8

11

0.5

86

18

86

18A

B

22

10

M5

x 0.

8

11

0.8

8





ZP3-Y04UM15-B5ZP3-Y04UM20-B5

A

42.550

B

59 66.5

14.315.1

15.516.6


A

42.550

B

59 66.5

14.315.1

15.516.6


A

42.550

B

59 66.5

14.315.1

15.516.6



Pad diameter ø4 to ø8

ZP3-Y04UMJB-B5 ZP3-Y04UMK-B5



Pad type

15, 20 mmStroke

Flat with groove

Dimensions/With Buffer: Vacuum Inlet Lateral

Width across flat 6


Bushing

Width across flat 6


Bushing


ModelWeight (g)

Rotating(J)

Non-rotating(K)




ModelWeight (g)

Rotating(J)

Non-rotating(K)




ModelWeight (g)

Rotating(J)

Non-rotating(K)



Width across flat 6


Bushing

Width across flat 7

Width across flat 7

Width across flat 8

Width across flat 7



∗1 Refer to "ZP3-YUM-B5" for dimensions.∗2 When calculating the weight, add the weight of the fitting to "ZP3-YUM -B5".

357

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

ø2.

5ø

1.8

(18.6)

(10.5)

ø0.

9

(12.6)

(12.5)

(14.5)

ø7

M8 x 0.75

4

ø11

ø10

ø1.8

ø7

M8 x 0.75

4

ø14

ø13

ø1.8

ø7

M8 x 0.75

4

ø17

ø16

ø1.8

7

19

AB

22

D

12

1M

5 x

0.8

719

AB

22

D

M5

x 0.

8

121.

2

719

AB

22

D

M5

x 0.

8

121.

2

(17.8)


A

23.526 30

B

414757

D

11 14.520.5

13.614.917.3

13.014.216.1







ZP3-Y16UM3-B5ZP3-Y16UM6 -B5ZP3-Y16UM10-B5

A

23.526 30

B

414757

D

11 14.520.5

13.815.117.5

13.214.416.3

ZP3-Y13UM3-B5ZP3-Y13UM6-B5ZP3-Y13UM10 -B5

A

23.526 30

B

414757

D

11 14.520.5

13.715.017.4

13.114.316.2


Pad type

3, 6, 10 mm

Flat with grooveStrokeDimensions/With Buffer: Vacuum Inlet Lateral

ZP3-Y10UMJ-B5 ZP3-Y10UMK-B5 ZP3-Y13UMJ-B5 ZP3-Y13UMK-B5

ZP3-Y16UMJ-B5 ZP3-Y16UMK-B5


Square 8


Square 8


ModelWeight (g)

Rotating(J)

Non-rotating(K)




ModelWeight (g)

Rotating(J)

Non-rotating(K)




ModelWeight (g)

Rotating(J)

Non-rotating(K)




Square 8





Width across flat 7

Width across flat 7

Width across flat 7

Width across flat 7


Width across flat 8

∗1 Refer to "ZP3-YUM-B5" for dimensions.∗2 When calculating the weight, add the weight of the fitting to "ZP3-YUM-B5".

358

(18.6)

ø2.

5ø

1.8

(12.6)(10.5)

ø0.

9

(17.8)(12.5)

(14.5)

ø7

M8 x 0.75

4

ø11

ø10

ø1.8

ø7

M8 x 0.75

4

ø14

ø13

ø1.8

ø7

M8 x 0.75

4

ø17

ø1.8

ø16

7

19

AB

22

10

M5

x 0.

8

12

1

7

19

AB

22

10

M5

x 0.

8

121.

2

7

19

AB

22

10

M5

x 0.

8

121.

2


A

43.551

B

60 67.5

15.015.8

16.217.3


A

43.551

B

60 67.5

15.216.0

16.417.5


A

43.551

B

60 67.5

15.115.9

16.317.4




15, 20 mmStroke

Flat with groove

Dimensions/With Buffer: Vacuum Inlet LateralZP3-Y10UMJB-B5 ZP3-Y10UMK-B5 ZP3-Y13UMJB-B5 ZP3-Y13UMK-B5


Width across flat 6


Bushing

Width across flat 6


Bushing

Square 8

Width across flat 6


Bushing

Square 8

Square 8


ModelWeight (g)

Rotating(J)

Non-rotating(K)




ModelWeight (g)

Rotating(J)

Non-rotating(K)




ModelWeight (g)

Rotating(J)

Non-rotating(K)






Width across flat 7

Width across flat 7

Width across flat 8


Width across flat 7

Width across flat 7

∗1 Refer to "ZP3-YUM-B5" for dimensions.∗2 When calculating the weight, add the weight of the fitting to "ZP3-YUM -B5".







359

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

(12.6)

(17.8)(12.5)

(10.5)

ø0.

9ø

1.8

ø7

4

ø4

ø1.8

8

M8 x 0.75

ø4.5

ø7

4

M8 x 0.75

ø7ø6

ø3.4ø1.8

8

8

ø7

4

ø9ø8

ø5.2ø1.8

M8 x 0.75

820

AB

D 22

M5

x 0.

8

13

2.2

8

820

AB

D 22

M5

x 0.

8

13

3

8

8

820

AB

22D

13

3M

5 x

0.8

ZP3-Y04B3-B5ZP3-Y04B6-B5ZP3-Y04B10-B5

A

24.527 31

B

424858

D

11 14.520.5

12.814.216.6

12.213.415.4


A

24.527 31

B

424858

D

11 14.520.5

12.914.316.7

12.313.515.5


A

24.527 31

B

424858

D

11 14.520.5

12.814.216.6

12.213.415.4

ZP3-Y04B-U2ZP3-Y06B-U2ZP3-Y08B-U2

ZP3-Y04B-02ZP3-Y06B-02ZP3-Y08B-02


ZP3-Y04B-04ZP3-Y06B-04ZP3-Y08B-04

Pad diameter ø4 to ø8 Pad type

3, 6, 10 mm

BellowsStrokeDimensions/With Buffer: Vacuum Inlet Lateral

Width across flat 6


ZP3-Y04BJ-B5 ZP3-Y04BK-B5 ZP3-Y06BJ-B5 ZP3-Y06BK-B5

ZP3-Y08BJ-B5 ZP3-Y08BK-B5


ModelWeight (g)

Rotating(J)

Non-rotating(K)



Width across flat 6



ModelWeight (g)

Rotating(J)

Non-rotating(K)



Width across flat 6



Model

Weight (g)Rotating

(J)Non-rotating

(K)




Width across flat 7


Width across flat 7

Width across flat 7

M-5AU-4-X83 [Weight: 1.6 g]∗2

Width across flat 8


∗1 Refer to "ZP3-YB-B5" for dimensions.∗2 When calculating the weight, add the weight of the fitting to "ZP3-YB-B5".

ZP3 Series

360

(12.6)

(17.8)(12.5)

(10.5)

ø0.

9ø

1.8

ø7

4

ø4ø1.8

8

ø4.5

4

ø7ø6

ø3.4ø1.8

8

ø7

8

ø7

M8 x 0.75

4

ø9ø8

ø5.2ø1.8

820

AB

22

10

M5

x 0.

8

13

2.2

8

2.2

13

M5

x 0

.8

820

AB

22

10

8

3

8

820

AB

22

10

3M

5 x

0.8

13

M8 x 0.75

Width across flat 6


Bushing

M8 x 0.75

Width across flat 6


Bushing

Width across flat 6


Bushing

ZP3-Y04B15-B5ZP3-Y04B20-B5

A

44.552

B

61 68.5

14.315.1

15.516.6

ZP3-Y08B15-B5ZP3-Y08B20-B5

A

44.552

B

61 68.5

14.415.2

15.616.7

ZP3-Y06B15-B5ZP3-Y06B20-B5

A

44.552

B

61 68.5

14.315.1

15.516 .6


ModelWeight (g)

Rotating(J)

Non-rotating(K)


ModelWeight (g)

Rotating(J)

Non-rotating(K)



Width across flat 7




ZP3-Y04B-02ZP3-Y06B-02ZP3-Y08B-02


ZP3-Y04B-04ZP3-Y06B-04ZP3-Y08B-04


15, 20 mm

ZP3-Y04BJB-B5 ZP3-Y04BK-B5 ZP3-Y06BJB-B5 ZP3-Y06BK-B5

ZP3-Y08BJB-B5 ZP3-Y08BK-B5

Stroke

BellowsDimensions/With Buffer: Vacuum Inlet Lateral






ModelWeight (g)

Rotating(J)

Non-rotating(K)




Width across flat 7



361

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

ø2.

5

(14.5) (18.6)

(17.8)

ø1.

8ø

0.9

(12.6)(10.5)

(12.5)

ø7

4

ø11

ø1.8

M8 x 0.75

ø10

ø6

ø7

4

ø14

ø1.8

ø8.4

ø13

ø7

M8 x 0.75

4

ø17

ø16

ø11.4

ø1.8

10

22

AB

22D

M5

x 0.

8

15

2

10

22

AB

22D

15

2M

5 x

0.8

10

22

AB

22D

M5

x 0.

8

152

Square 8

M8 x 0.75

Square 8

Width across flat 7

Width across flat 7

Width across flat 7


Width across flat 8


M-5AU-4-X83 [Weight: 1.6 g]∗2






A


ModelWeight (g)

Rotating(J)

Non-rotating(K)

26.529 33

B

445060

D

13.815.117.5

13.214.216.3


A

26.529 33

B

445060

D

11 14.520.5

14.115.417.8

13.514.516.6


A

26.529 33

B

445060

D

11 14.520.5

14.015.317.7

13.414.416.5


ModelWeight (g)

Rotating(J)

Non-rotating(K)



ZP3-Y10B-02ZP3-Y13B-02ZP3-Y16B-02


ZP3-Y10B-04ZP3-Y13B-04ZP3-Y16B-04


ZP3-Y10B-06ZP3-Y13B-06ZP3-Y16B-06

11 14.520.5


Pad type

3, 6, 10 mm

BellowsStrokeDimensions/With Buffer: Vacuum Inlet Lateral

ZP3-Y10BJ-B5 ZP3-Y10BK-B5 ZP3-Y13BJ-B5 ZP3-Y13BK-B5

ZP3-Y16BJ-B5 ZP3-Y16BK-B5

Width across flat 6


Width across flat 6






Square 8

Width across flat 6



ModelWeight (g)

Rotating(J)

Non-rotating(K)



362

ø2.

5ø

1.8

ø0.

9

(12.6)(10.5)

(12.5) (17.8)

(18.6)(14.5)

M8 x 0.75

4

ø11

ø1.8

ø10ø6

ø7 ø7

M8 x 0.75

4

ø14

ø1.8

ø13ø8.4

ø7

M8 x 0.75

4

ø17ø16

ø11.4ø1.8

1022

AB

22

10

M5

x 0.

8

15

2

1022

AB

22

10

M5

x 0.

8

152

15

1022

AB

22

10

M5

x 0.

8

2Width across flat 6


Bushing

Width across flat 6


Width across flat 7

Width across flat 7

Width across flat 7



Bushing

Width across flat 6


Square 8

Bushing

Square 8Square 8




ZP3-Y10B15-B5ZP3-Y10B20-B5

A

46.554

B

63 70.5

15.216.0

16.417.5

ZP3-Y16B15-B5ZP3-Y16B20-B5

A

46.554

B

63 70.5

15.516.3

16.717.8

ZP3-Y13B15-B5ZP3-Y13B20-B5

A

46.554

B

63 70.5

15.416.2

16.617.7


Model


Model


Model


Weight (g)Rotating

(J)Non-rotating

(K)

Weight (g)Rotating

(J)Non-rotating

(K)

Weight (g)Rotating

(J)Non-rotating

(K)




Barb fitting One-touch fitting


ZP3-Y10B-02ZP3-Y13B-02ZP3-Y16B-02


ZP3-Y10B-04ZP3-Y13B-04ZP3-Y16B-04


ZP3-Y10B-06ZP3-Y13B-06ZP3-Y16B-06


15, 20 mmStroke

BellowsDimensions/With Buffer: Vacuum Inlet Lateral









363

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

w

e

i

y

t

u

r

e

w

q

i

y

t

u

r

o

e

w

q

i

y

t

u

r

e

w

q

i

y

t

u

r

e

w

q

q

w

q

w

q

t

w

q

tr

Pad with buffer

Pad

AdapterGasket

Nut

Fitting

M6 x 0.75M8 x 0.75M12 x 1

M10 x 1

1

23

4

5

1

23456789

No. DescriptionDescription Note

NBR/Silicone rubberUrethane rubber/FKM

Conductive NBR/Conductive silicone rubberBrass(Electroless nickel plated)

Stainless steel 304/NBR

Structural steel(Trivalent chromated)

Brass(Nickel plated)—

No. NoteMaterial (Surface treatment)

Pad

AdapterPiston rodReturn springBuffer bodyBuffer adapterNutFittingBushing

NBR/Silicone rubberUrethane rubber/FKM

Conductive NBR/Conductive silicone rubber

Brass(Electroless nickel plated)Stainless steelStainless steel

Brass(Electroless nickel plated)Brass(Electroless nickel plated)

Structural steel(Trivalent chromated)——

Component Parts

Component Parts

Description

Pad with adapter

ZP3 Series

ConstructionComponent Parts List

Material (Surface treatment)

364

P.370ZP3-015UZP3-02UZP3-035U

ZP3A-T1-A3

P.370ZP3-015UZP3-02UZP3-035U

ZP3A-T1-B3

P.370ZP3-015UZP3-02UZP3-035U

ZP3A-T1-A6-B3

P.370

ZP3-04UMZP3-06UMZP3-08UMZP3-04BZP3-06BZP3-08B

ZP3A-T2-A5

P.370


ZP3A-T2-B5

P.370


ZP3A-T2-A10-B5

P.370


ZP3A-T2-A10-04

P.370


ZP3A-T3-A5

P.371


ZP3A-T3-B5

P.371


ZP3A-T3-A12-B5

P.371


ZP3A-T3-A12-04

P.371


ZP3A-T3-A12-06

P.371ZP3-015UZP3-02UZP3-035U

ZP3A-Y1-B3

P.371


ZP3A-Y2-B5

P.371


ZP3A-Y3-B5

ZP3 Series

Adapter Applicable Pad List

Page

ZP3 Series Mounting Adapter Part No.Applicable pad part no.

ZP3 SeriesAdapter part no. Adapter part no.

Applicable pad part no.

ZP3 SeriesPage

365

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

P.372ZP3-015UZP3-02UZP3-035U

ZP3B-T1J3-B3

P.372ZP3-015UZP3-02UZP3-035U

ZP3B-T1J6-B3

P.372ZP3-015UZP3-02UZP3-035U

ZP3B-T1K3-B3

P.372ZP3-015UZP3-02UZP3-035U

ZP3B-T1K6-B3

P.372


ZP3B-T2AJ3-B5

P.372


ZP3B-T2AJ6-B5

P.372


ZP3B-T2AJ10-B5

P.372


ZP3B-T2AK3-B5

P.372


ZP3B-T2AK6-B5

P.372


ZP3B-T2AK10-B5

P.372


ZP3B-T2AJB15-B5

P.372


ZP3B-T2AJB20-B5

P.372


ZP3B-T2AK15-B5

P.372


ZP3B-T2AK20-B5

Buffer Assembly Part No.

PageBuffer assembly part no.Applicable pad part no.

ZP3 SeriesBuffer assembly part no.


ZP3 SeriesPage

ZP3 Series

Buffer Applicable Pad List

366

P.373


ZP3B-T2BJ3-B5

P.373


ZP3B-T2BJ6-B5

P.373


ZP3B-T2BJ10-B5

P.373


ZP3B-T2BK3-B5

P.373


ZP3B-T2BK6-B5

P.373


ZP3B-T2BK10-B5

P.373


ZP3B-T2BJB15-B5

P.373


ZP3B-T2BJB20-B5

P.373


ZP3B-T2BK15-B5

P.373


ZP3B-T2BK20-B5

P.374ZP3-015UZP3-02UZP3-035U

ZP3B-Y1J3-B3

P.374ZP3-015UZP3-02UZP3-035U

ZP3B-Y1J6-B3

P.374ZP3-015UZP3-02UZP3-035U

ZP3B-Y1K3-B3

P.374ZP3-015UZP3-02UZP3-035U

ZP3B-Y1K6-B3

Buffer assembly part no.Applicable pad part no.

ZP3 SeriesPage PageBuffer assembly part no.


ZP3 Series


Buffer Applicable Pad List ZP3 Series

367

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

P.374


ZP3B-Y2AJ3-B5

P.374


ZP3B-Y2AJ6-B5

P.374


ZP3B-Y2AJ10-B5

P.374


ZP3B-Y2AK3-B5

P.374


ZP3B-Y2AK6-B5

P.374


ZP3B-Y2AK10-B5

P.374


ZP3B-Y2AJB15-B5

P.374


ZP3B-Y2AJB20-B5

P.374


ZP3B-Y2AK15-B5

P.374


ZP3B-Y2AK20-B5

PageBuffer assembly part no.Applicable pad part no.

ZP3 SeriesBuffer assembly part no.


ZP3 SeriesPage


ZP3 Series

368


P.375


ZP3B-Y2BJ3-B5

P.375


ZP3B-Y2BJ6-B5

P.375


ZP3B-Y2BJ10-B5

P.375


ZP3B-Y2BK3-B5

P.375


ZP3B-Y2BK6-B5

P.375


ZP3B-Y2BK10-B5

P.375


ZP3B-Y2BJB15-B5

P.375


ZP3B-Y2BJB20-B5

P.375


ZP3B-Y2BK15-B5

P.375


ZP3B-Y2BK20-B5


ZP3 SeriesPage Page

Buffer Applicable Pad List ZP3 Series


ZP3 Series

369

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

1.8

M3 x 0.5

ø2ø1.5ø0.8

2.5

2.55

0.4

1.5

M6 x 0.75M3 x 0.5

3.5

10

12

0.4

1.5

ø2

ø1.5ø0.8

3.5

M3 x 0.5

5.5

0.4

1.5 ø0.8

ø1.5ø2

M5 x 0.8

ø5

ø3

ø1.8

1.4

3.5

5.5 3

2.5

5

M5 x 0.8

ø8

M10 x 1

ø5

ø3

ø1.8

1.4

3.5

14

5

M5 x 0.8

7.5

3.5

1.4

ø5

ø3

ø1.8

M5 x 0.8

ø6

ø4ø1.8

32.

55.5

43

32

12

2

2

2

ø6

173.

5

1.4

12

33

2

M10 x 1

ø8

ø1.8

ø3

ø5

ZP3-015UZP3-02UZP3-035U

ZP3A-T1-A3 [Weight: 0.5 g]

ZP3-015UZP3-02UZP3-035U

ZP3A-T1-A6-B3 [Weight: 2.7 g]Adapter part no.

ZP3-015UZP3-02UZP3-035U

ZP3A-T1-B3 [Weight: 0.8 g]


ZP3A-T2-A5 [Weight: 1.4 g]Adapter part no.


ZP3A-T2-A10-B5 [Weight: 10.7 g]


ZP3A-T2-A10-04 [Weight: 9.9 g]Adapter part no.




ZP3A-T3-A5 [Weight: 2.4 g]Adapter part no.

ZP3 Series

Mounting Adapter Part No.Vacuum Inlet Direction Vertical

Adapter part no. Adapter part no.


Width across flat 5

Width across flat 5

Width across flat 8

Width across flat 5

Width across flat 7

Width across flat 7

Width across flat 7



Width across flat 7


Gasket









Gasket

Gasket

Applicable tubing: ø4

370

7.5

4

1.8

ø6

ø4

ø1.8

5

M5 x 0.8

ø6

ø4

ø1.8

M12 x 1

426

.2 185

22

1.8

5

M5 x 0.8M12 x 1

ø6

ø4ø1.8

1.8

423

185

22

51.

84

26 18

22

M12 x 1

ø1.8ø4ø6

ø5M3 x 0.5

2

11

0.4

1.5

ø2

ø0.8

ø1.5

4

M3

x 0.

5

3

3

ø8

M5 x 0.8

2

163.

5

1.4

ø5

ø3

ø1.8

5

4

M5

x 0.

8

5

ø8

M5 x 0.8

164

1.8

ø6

ø4

ø1.8

5

4

M5

x 0.

8

5

8

8

8

8

5

5




flat 14










ZP3A-T3-A12-04 [Weight: 19.6 g]


ZP3A-T3-A12-06 [Weight: 17.5 g]

ZP3-015UZP3-02UZP3-035U

ZP3A-Y1-B3 [Weight: 1.8 g]






ZP3A-T3-A12-B5 [Weight: 18.2 g]

Mounting Adapter Part No. ZP3 Series

Vacuum Inlet Direction

Vacuum Inlet Direction


Adapter part no.

Adapter part no. Adapter part no.Adapter part no.

Adapter part no.



Applicable pad part no.Applicable pad part no.



Lateral

Vertical

371

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

22

ø1.5

ø5M3 x 0.5

22D

B

A

0.4

1.5

ø2

ø1.5

ø0.8

M6 x 0.75

ø7

M5 x 0.8

4

B

DA

1.4

3.5

M8 x 0.75

22

ø7M5 x 0.8

4

M8 x 0.75

ø5

ø1.8

ø3

A

B3.

5

10

ø5

ø3

ø1.8

1.4

ø7

M3 x 0.5

3

22D

A

B1.

5 ø0.8

ø2

M8 x 0.75


Width across flat 8


Width across flat 6


Width across flat 7


Width across flat 6

Bushing

Bushing


Width across flat 7

ZP3 Series


Dimensions (per stroke)Model

47

A2128

B1014

DZP3B-T1J3-B3ZP3B-T1J6-B3

ZP3B-T1J-B3 ZP3B-T1K-B3

ZP3B-T2AJ3-B5ZP3B-T2AJ6-B5ZP3B-T2AJ10-B5ZP3B-T2AK3-B5ZP3B-T2AK6-B5ZP3B-T2AK10-B5

7.1 8.310.2 7.0 8.310.2

Buffer assembly part no. Weight(g)

ZP3B-T1J3-B3ZP3B-T1J6-B3ZP3B-T1K3-B3ZP3B-T1K6-B3

3.54.36.78.1


ZP3B-T2AJB15-B5ZP3B-T2AJB20-B5ZP3B-T2AK15-B5ZP3B-T2AK20-B5

10.010.612.013.1


ZP3-015UZP3-02UZP3-035U






5 812

A 24.531 41

B11 14.520.5

DZP3B-T2A3-B5ZP3B-T2A6-B5ZP3B-T2A10-B5


58

A23.530

B11 14.5

DZP3B-T1K3-B3ZP3B-T1K6-B3


30.538

A49 56.5

BZP3B-T2A15-B5ZP3B-T2A20-B5


ZP3B-T2AJB-B5 ZP3B-T2AK-B5

ZP3B-T2AJ-B5 ZP3B-T2AK-B5

VerticalVacuum Inlet Direction

Note) The symbol "" indicates buffer type "J" or "K".

Note) The symbol "" indicates buffer type "JB" or "K".

372

22

ø7M5 x 0.8

4

B

DA

4

1.8

ø6

ø4

ø1.8

M8 x 0.75

22

M5 x 0.8ø7

M8 x 0.75

ø6

ø4

ø1.8

1.8

4

A

B

10

4

Width across flat 6





Bushing

Bushing

ZP3B-T2BJB15-B5ZP3B-T2BJB20-B5ZP3B-T2BK15-B5ZP3B-T2BK20-B5

12.515.614.5 15.6

ZP3B-T2BJ3-B5ZP3B-T2BJ6-B5ZP3B-T2BJ10-B5ZP3B-T2BK3-B5ZP3B-T2BK6-B5ZP3B-T2BK10-B5

7.8 8.910.9 7.7 8.910.9


ZP3B-T2BJ-B5 ZP3B-T2BK-B5

ZP3B-T2BK-B5ZP3B-T2BJB-B5Buffer assembly part no. Weight(g)





30.538

A49 56.5

BZP3B-T2B15-B5ZP3B-T2B20-B5


5 812

A24.531 41

B11 14.520.5

DZP3B-T2B3-B5ZP3B-T2B6-B5ZP3B-T2B10-B5


∗ Refer to the 322 for nut tightening torque.

VerticalVacuum Inlet Direction



Buffer Assembly Part No. ZP3 Series

373

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

22

1.5

M8 x 0.75

ø5

M6 x 0.75B

A

100.

4

1.5

22D

M3

x 0.

5

43

ø2

8

8

ø1.5

ø0.8

ø7

M8 x 0.75

M5 x

0.8

54

1.4

12A

BD

8

8

ø5ø3

ø1.8

3.5

8

8

ø7

1.4

3.5

12

AB

10

22

M5

x 0.

8

54

ø5

ø3ø1.8

M8 x 0.75

ø7

22D

A

B

ø0.8

ø2ø1.5

3

M3

x 0.

5


Width across flat 6

Width across flat 6




Width across flat 8

Bushing

36.544

A53 60.5

BZP3B-Y2A15-B5ZP3B-Y2A20-B5


ZP3B-Y1J3-B3ZP3B-Y1J6-B3ZP3B-Y1K3-B3ZP3B-Y1K6-B3

7.6 8.510.912.1

ZP3B-Y2AJ3-B5ZP3B-Y2AJ6-B5ZP3B-Y2AJ10-B5ZP3B-Y2AK3-B5ZP3B-Y2AK6-B5ZP3B-Y2AK10-B5

12.513.916.311.913.115.1

ZP3B-Y2AJB15-B5ZP3B-Y2AJB20-B5ZP3B-Y2AK15-B5ZP3B-Y2AK20-B5

14.014.815.216.3

ZP3-015UZP3-02UZP3-035U

ZP3B-Y1J-B3 ZP3B-Y1K-B3

ZP3B-Y2AK-B5

ZP3B-Y2AK-B5ZP3B-Y2AJB-B5

ZP3B-Y2AJ-B5

1417

A2734

B1014

DZP3B-Y1J3-B3ZP3B-Y1J6-B3







1417

A31 37.5

B11 14.5

DZP3B-Y1K3-B3ZP3B-Y1K6-B3


16.519 23

A344050

B11 14.520.5

DZP3B-Y2A3-B5ZP3B-Y2A6-B5ZP3B-Y2A10-B5





LateralVacuum Inlet Direction



ZP3 Series

374

4

1.8

M5

x 0.

8

ø7

22

12

DA

B

8

8

ø1.8

ø6ø4

4

5

M8 x 0.75

8

8

ø7

B10

A

12

4

1.8

22

M8 x 0.75

4

M5

x 0

.8

5

ø1.8ø4

ø6

Width across flat 6

Width acrossflat 10

Width across flat 6


Bushing




Applicable pad part no.ZP3B-Y2BJB-B5 ZP3B-Y2BK-B5

ZP3B-Y2BK-B5ZP3B-Y2BJ3-B5ZP3B-Y2BJ6-B5ZP3B-Y2BJ10-B5ZP3B-Y2BK3-B5ZP3B-Y2BK6-B5ZP3B-Y2BK10-B5

13.014.316.712.413.615.5

ZP3B-Y2BJB15-B5ZP3B-Y2BJB20-B5ZP3B-Y2BK15-B5ZP3B-Y2BK20-B5

14.415.215.616.7

∗ Refer to the 322 for nut tightening torque.



ZP3B-Y2BJ-B5

36.5 44

A53 60.5

BZP3B-Y2B15-B5ZP3B-Y2B20-B5


16.519 23

A344050

B11 14.520.5

ZP3B-Y2B3-B5ZP3B-Y2B6-B5ZP3B-Y2B10-B5

Dimensions (per stroke)Model D



Vacuum Inlet Direction Lateral

Buffer Assembly Part No. ZP3 Series

375

ZP3

ZP3E

ZP2

ZPZPTZPR

ZP2V

XT661

ZP3

baoanjsc · variations space-saving rohs 12 mm 19.5 mm 3 mm 8.5 mm zp3 zp3 ø2 ø4 ø1.5 ø2 ø3.5...

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