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Basic 14 Basic 14 Micro-Nano Tribology Micro Nano Tribology - Ultra low friction of Carbon Nitride (CNx) and and Low adhesion and friction of rubber - Prof N Umehara Prof. N. Umehara Dept. of Mechanical Science and Engineering, N Ui it Nagoya University Basic 14 Micro-Nano Tribology Prof. N. Umehara - Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber - COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

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  • Basic 14Basic 14Micro-Nano TribologyMicro Nano Tribology

    - Ultra low friction of Carbon Nitride (CNx) andand

    Low adhesion and friction of rubber -

    Prof N UmeharaProf. N. UmeharaDept. of Mechanical Science and Engineering,

    N U i itNagoya University

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

  • Outline

    1.Ultra low friction of Carbon Nitride (CNx)・ Mechanism

    ・ Effect of carbon overcoat on frictionEffect of carbon overcoat on friction

    2 Low adhesion and friction of rubber2.Low adhesion and friction of rubber・ High dense plasma irradiation to CllR

    UV i di ti t TPE ith PFPE・ UV ray irradiation to TPE with PFPE

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

  • 1. Ultra low friction of Carbon Nitride(CNx)

    A.Y.Liu, M.L.Cohen, Prediction of new lowcompressibility solids, Science, 245 (1989) 841 842841-842.

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

  • Introduction

    (K.J.Wahl, Naval Research Laboratory)

    0.1nt

    PTFE (=0.04) Lubrication with

    transfer film

    0.01oeffi

    cien

    MoS2DLC

    Lubrication with tribochemical film?Lubrication with

    rictio

    n co

    MoS2(UHV)

    Lubrication with absorbed gas?

    After the annual

    0.001

    Fr H:DLC(N2)a-CNx(N2)

    meetingof STLE, 2001

    Period1980 1990 2000

    MoS2; W.E.Jamison (1986)2; ( )DLC; A.Erdemir (1991), J.Franks, K.Enke and A.Richardt (1990)H:DLC; A.Erdemir (1999), C.Donnet(1998)a CNx; N Umehara K Kato(1998)

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

    a-CNx; N.Umehara, K.Kato(1998)

  • Introduction

    C b it id ( CN ) tiCarbon nitride(a-CNx) coatingHigh hardnessHigh wear resistanceHigh wear resistanceLow friction

    Excellent tribological properties

    Hardness: Ha-CNx/Ha-C=1.31Low friction coefficient(against Al O /TiC slider )Low friction coefficient(against Al2O3/TiC slider )

    B.Wei et al. (1998)

    Durability: Da-CNx/Da-C=3~4 (against Al2O3/TiC pin) E.C.Cutiongco et al. (1996)

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

  • Ion Beam Assisted DepositionSputtering:

    Ar ion beam 1kV 100mAAr ion beam 1kV, 100mA

    Mixing:

    N ion beam 0.5keV,

    30A/cm2

    Coating time:90min

    Thickness of coating:100nm

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

  • TEM photo of CNx by IBAD and Hardness

    ・Hardness 21GPaA h t t・Amorphous structure

    ・N=C bonds38) Micro-wear Mechnaisms of Thin Hard Coatings Sliding against Diamond Tip of AFM,

    ASME, Advances in Information Storage Systems, 9 (1998)289-302.K. Kato, H. Koide, and N. Umehara

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

    , ,

  • Effect of ambient gas on friction coefficient0.5

    Pin: Si3N4 ball (r=4.0mm)

    0.3

    0.4

    effic

    ient

    Disk: CNx (t=100nm)Normal load:100mNFriction cycles:240cycles

    0.36

    0 1

    0.2

    ctio

    n co

    e

    0 05

    0.16

    0

    0.1

    in Air in high vacuum

    in N2 in CO2 in O2

    Fric 0.030.0090.05

    (N Umehara and K Kato 1998)

    vacuum(2x10-4Pa) (7x104 Pa)

    (N. Umehara and K. Kato , 1998)

    Running-in is important for ultra low friction of CNx.g pSomething changed during running-in.

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

  • Raman spectroscopy after running-in

    0.16

    0 10

    0.12

    0.14 in N2

    in vacuumic

    ient

    0.06

    0.08

    0.10tio

    n co

    eff

    0.02

    0.04Fric

    t

    02.0 2.2 2.4 2.6 2.8 3.0

    ID / I

    G

    Large ID/IG provides small friction coefficientIncrease in the number or size of small graphitic domain

    N. Umehara, M. Tatsuno, K. Kato, Proc. Int. Trib. Conf. Nagasaki(2000)1007.

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

  • XPS before and after running-in

    C=N C-NC=N

    N-O N-O

    C-N

    N-O N-O

    (b) wear track after 240 cycles in N2 gas

    (a) a-CNx coating2 g

    After running-in in N2 gasAfter running in in N2 gas, C=N increases larger than C-N.

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

  • Depth profile of N after running-in in various environment

    0 30

    0.35 Beam energy: 5 kV, Beam current: 10 nASputtering energy: 3 kV, Sputtering current: 25 mA

    0.25

    0.30ns

    ityp g gy p g

    nsity CNx

    Si(100)

    d

    Si(100) Si(100)

    0.20

    B in

    ten

    k in

    te as-deposit CNx

    0.10

    0.15

    1s P

    /B

    in N2approximate curve

    Pea

    k

    < 0 01

    0.05

    0.10N in N2

    i A

    in O2N1s

    < 0.01

    ≒ 0 030.00

    0 10 20 30 40 50

    in Ar ≒ 0.03

    0 10 20 30 40 50Sputtering depth d, nm

    T k U h IIP S i A l ti f JSME S t 11 2007Basic 14 Micro-Nano Tribology Prof. N. Umehara

    - Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

    Tokoroyama, Umehara,IIP Session, Annual meeting of JSME,Sept. 11,2007

  • Self surface modification in the running-in process

    In N2 gas

    Low shearing strength layerlayer

    100nm 10~20 nm

    CNxCNx

    Si substrateBasic 14 Micro-Nano Tribology Prof. N. Umehara

    - Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

    Si substrate

  • Outline & Summary1.Ultra low friction of Carbon Nitride (CNx)・Mechanism Self modification in nm thickness・Mechanism Self modification in nm thickness ・Effect of carbon overcoat on friction

    ・Effect of Ultraviolet (UV) ray irradiation on friction

    2. Low adhesion and friction of rubber・High dense plasma irradiation to CIIRHigh dense plasma irradiation to CIIR

    ・UV ray irradiation to TPE with PFPE・UV ray irradiation to TPE with PFPE

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

  • Enhancement of running-in of CNxith thi k b twith nm thickness carbon overcoat

    Carbon layer without Nwithout N

    C N

    CNx on Si(100)

    Si(100)( )

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

  • Effect of 3nm thickness carbon overcoat on friction of CNx

    0.25

    0.30

    020

    CNx (150nm) + C coat ing (0 nm) on Si (100) Sliding speed V: 0 .13m/s, Surface pressure: 33 MP a Si3N4 ball in N2

    Only CNx0.15

    0.20on

    coe

    ffici

    ent μ

    0.00

    0.05

    0.10

    0.15

    0.20

    μ

    C

    CNx

    Only CNx

    0 00

    0.05

    0.10

    Fric

    tio 0 50 100 150 200 250N

    0.30

    0.000 4000 8000 12000 16000 20000

    Number of cycles N, cycles

    0.20

    0.25

    0.30

    ent μ

    0.20

    C

    CNx (150nm) + C coating (3 nm) on Si (100) Sliding speed V:0.13m/s, Surface pressure: 33 MPa Si3N4 ball in N2

    3nm C + CNx

    0.10

    0.15

    rictio

    n co

    effic

    ie

    0 00

    0.05

    0.10

    0.15

    μ

    C

    CNx

    Proc ICMDT

    0.00

    0.05

    0 4000 8000 12000 16000 20000

    F 0.000 50 100 150 200 250

    N

    Proc. ICMDT Sapporo,2007,Tokoroyama, Wang, Umehara Fuwa

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

    0 4000 8000 12000 16000 20000Number of cycles N, cycles

    Umehara, Fuwa

  • Outline & Summary

    1.Ultra low friction of Carbon Nitride (CNx)M h i S lf difi ti i thi k・Mechanism Self modification in nm thickness

    ・Effect of carbon overcoat on frictionnot need running-in

    ・Effect of Ultraviolet (UV) ray irradiation ( ) yon friction

    2. Low adhesion and friction of rubber・High dense plasma irradiation to CIIR・High dense plasma irradiation to CIIR

    UV i di ti t TPE ith PFPE・UV ray irradiation to TPE with PFPE

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

  • The expectation of ultraviolet ray irradiation to CNx

    The light energy UVExpected resultC-N bond: 305 kJ/mol

    h: Planck’s constant, ν: frequency, chhE Energy of photon The light energy

    Wavelength<390 nm

    C

    c: light velocity, λ: wavelength hhE

    Braking ofh: Planck’s constant, ν: frequency,c: light velocity λ: wavelength

    N

    CC

    N NCC C

    CN

    C

    CN

    C

    NC C C

    CC

    N

    CC CC C

    C

    CC

    C

    C C C

    CC

    CCC C

    CEnergy of photon per mol

    ANchE

    C-N bondc: light velocity, λ: wavelength

    NC CC N CC C C

    CC

    CC

    N

    NC CC

    CN

    CC C C

    CC

    CC

    N

    C

    NA: Avogadro’s constant Nitrogen desorption ⇒ Structural change

    We assumed that the variable UV wavelength to obtain superlow friction

    We focused on Nitrogen content in CNx.J. Wei et al. Surf Interface Anal. 28(1999) 208-211

    g pchanged with the Nitrogen content in CNx coating because of its structure.

    Nitrogen content ratio 0 9 12 19% was prepared CN ( content)e.g.

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

    Nitrogen content ratio 0,9,12,19% was prepared CN0.09(x=content)

  • Background –Effect of UV irradiation

    C N bond: 305 kJ/molC – C bond: 348 kJ/mol

    C-N bond: 305 kJ/mol

    365 nm 254 nm312 nm

    329 kJ/mol

    382 kJ/mol

    469 kJ/mol

    C – H bond for CH4 : 416 kJ/mol

    Energy of photonh Pl k’ t t f

    chhE

    gy ph: Planck’s constant, ν: frequency,c: light velocity, λ: wavelength

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

  • Experimental – Ultraviolet ray irradiation to CNx coating

    Table 2 UV irradiation condition

    Did Nitrogen atoms desorb from CNx coating with UV irradiation?Table 1 The energy of each wavelength

    Wavelength , nm Energy, kJ/mol Test pieces Irradiation time

    Table 2 UV irradiation conditionTable 1 The energy of each wavelength

    365 312

    326382

    •CN0 •CN0.09

    •60 min•120 min

    254 4690.09

    •CN0.12•CN0 19

    •180 min•240 min

    u.)

    C KLL

    N KL

    L

    O KL

    L

    0.19

    AES analysis

    lized

    inte

    nsity

    (a.

    C=1

    150 250 350 450 550

    Nor

    mal

    N=x

    N/C ratio: N/C=x/1Basic 14 Micro-Nano Tribology Prof. N. Umehara

    - Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

    150 250 350 450 550Kinetic energy, eV

    /C a o /C /

  • J. M. Ripalda et al. Diam. Relat. Mater. 7(1998) 402-406.XPS analysis resultsCN0.12 N1s peak

    As deposit UV 365 nm 120 min irradiation

    What kind of deformation did it take place?As-deposit UV-365 nm 120 min irradiation

    (a.u

    .)

    N1s

    N-C sp3N-C sp2 N1s

    N-C sp2

    y (a

    .u.)

    Inte

    nsity

    N C spN-N/N-O N-C sp

    3

    N-N/N-OInten

    sity

    I th f it d ti t t l d f ti t k l

    390395400405410Kinetic energy, eV

    390395400405410Kinetic energy, eV

    In the case of no nitrogen desorption, structural deformation took place.

    CN0.09,CN0.19 showed deformation.Triphenilamine

    In the case of UV irradiation to CNx, the bond originated from N-C sp2

    NN The bond shows like graphite was

    assumed to increaseBasic 14 Micro-Nano Tribology Prof. N. Umehara

    - Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

    increased. assumed to increase.

  • Experimental of tribological property under N2UV i di ti diti

    Wavelength Irradiation time

    UV irradiation conditionsUV irradiation ⇒ Friction in N2

    UV In N R t ti•365 nm•312 nm

    •60 min•120 min

    LoadIn N2 Rotation

    312 nm•254 nm

    120 min•180 min•240 min

    CNx•240 min

    Friction test conditionsFriction test conditions

    Load 0.1 NSliding speedRotation speed

    4.19×10-2 m/s200 rpm

    Rotation radiusAmbient

    2.0 mmNitrogen

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

    g

  • 1 0

    Friction test results under N2 environment

    0 60.70.80.91.0

    ffic

    ient

    As-deposit365 nm-60 min365 nm-120 min365 nm-180 minThe running-in period of CN0 12

    Sliding speed V: 4.2×10-2 m/s,

    Load W: 0.1 NCNx coating (0.1 m) on Si(100)

    Si3N4(8 mm) ball

    CN0.12 365 nm-UV irradiation

    0 20.30.40.50.6

    Fric

    tion

    coe 365 nm 180 min

    365 nm-240 minThe running in period of CN0.12

    was decreased by UV irradiation3 4

    In N2

    The variation of

    0.91.0

    As-deposit0.00.10.2

    0 1000 2000 3000 4000 5000N mber of sliding c cles N C cles

    Sliding speed V: 4.2×10-2 m/s,

    Load W: 0 1 N

    with number of cycles

    0 60.70.80.9

    ffic

    ient

    365 nm-60 min365 nm-120 min365 nm 180 min

    Number of sliding cycles N, CyclesLoad W: 0.1 NCNx coating (0.1 m) on Si(100)

    Si3N4(8 mm) ball

    In N2

    As deposit: =0 040

    The average of 5000~10000 cycles

    0.40.50.6

    ctio

    n co

    ef 365 nm-180 min365 nm-240 min

    As-deposit: =0.04060 min: =0.019↓120 min: =0 018↓

    0 10.20.3Fr

    ic 120 min: =0.018↓180 min: =0.022↓240 min: =0 015↓

    0.00.1

    0 5000 10000 15000

    240 min: =0.015↓

    decreased by UV irradiation

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

    Number of sliding cycles N, Cycles irradiation.

  • The effect of UV irradiation on running-in period

    Running-in As-deposit:3100 cycles

  • 3.4 The effect of UV irradiation on minimum mCN0.19

    As-deposit: =0.040 ⇒ 312 nm-120 min: =0.004

    The minimum friction coefficient: min

    0 080.090.10

    cien

    t av

    e

    365 nm312 nm

    Sliding speed V: 4.2×10-2 m/s, Load W: 0.1 N

    CN coating (0 1 m) on Si(100)

    p

    0.050.060.070.08

    ctio

    n co

    effic

    312 nm254 nm

    CN0.19 coating (0.1 m) on Si(100)Si3N4(8 mm) ball

    in N2

    0.020.030.04

    Ave

    rage

    fric

    0.000.01

    0 60 120 180 240UV i di i i T i

    A

    UV irradiation time T, min

    CN0.09 As-deposit: =0.028 ⇒ 254 nm-120 min: =0.002Minimum friction coefficient

    CN0.12 As-deposit: =0.033 ⇒ 365 nm-60 min: =0.008

    The friction coefficient decreased by UV irradiationBasic 14 Micro-Nano Tribology Prof. N. Umehara

    - Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

    The friction coefficient decreased by UV irradiation.

  • Outline & Summary1.Ultra low friction of Carbon Nitride (1.Ultra low friction of Carbon Nitride (CNxCNx))・・MechanismMechanism Self modification in nm thicknessSelf modification in nm thicknessMechanism Mechanism Self modification in nm thickness Self modification in nm thickness ・・Effect of carbon overcoat on frictionEffect of carbon overcoat on friction

    not need runningnot need running--inin・・Effect of Ultraviolet (UV) ray irradiationEffect of Ultraviolet (UV) ray irradiationEffect of Ultraviolet (UV) ray irradiation Effect of Ultraviolet (UV) ray irradiation

    on frictionon friction More rapid runningMore rapid running--in by 1/10 , in by 1/10 , L i i f i ti b 1/10L i i f i ti b 1/10Lower minimum friction by 1/10Lower minimum friction by 1/10

    2. Low adhesion and friction of rubbero ad es o a d ct o o ubbe・・High dense plasma irradiation to CIIRHigh dense plasma irradiation to CIIR

    ・・UV ray irradiation to TPE with UV ray irradiation to TPE with PFPEPFPEBasic 14 Micro-Nano Tribology Prof. N. Umehara

    - Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

    yy

  • Industrial products and issueRubber ProductsWidely used asWidely used as components of various industrial productsas Oil seal, Packing,

    Tire etc. Tire

    p

    Production methods

    Tire

    Production methodsInjection formingPress formingPress forming

    Packing Oil seal

    RubberIssue: Adhesion to mold or conveying equipment Mold

    Rubber

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

    y g q p Mold

  • Why rubber can stick to surface?

    RubberEngineering plastics MetalCells, Soft tissue

    Elastic modulus of various materials

    [Pa] 103 106 109 1012

    Elastic energy Adhesion energy

    RubberThe Contact between Rubber and Steel

    Elastic energy2

    el hEU 2

    ad UAdhesion energy

    h

    Steel Steel

    1el 10U

    Adhesion parameter ~ 10mJ/m2 = 10-2 J/m2 ~ 1 m = 10-6 m

    1

    ad

    el 10U

    1 m = 10 mE ~ 10 MPa = 107 Pah ~ 0.01 m = 10-8m

    Adhesive!

    B N J Persson at el

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

    B.N.J. Persson at el.

  • Another issue for medicine bottle

    Issue:Issue:St dh i f bb fStrong adhesion of rubber for medicine bottle against moldmedicine bottle against mold

    DieSeparated !Separated !CIIR

    DieDue to high adhesion

    Die

    Bottle stick todie pressureMedicine bottle

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

  • Various Various plasma treatmenttreatmentThe generator of ion beam irradiation treatment

    Microwave Quartz

    Electrodes RF

    S f WSubstrate

    Substrate

    Surface Wave

    Gas ring Gas inn ≈1011 1013 cm 3 at a frequency of 2 45

    To pump

    Plasma density : RF plasma < SWP plasmaRF plasma treatment Surface -wave excited plasma treatment

    ne≈1011-1013 cm–3 at a frequency of 2.45 GHzne≈108-1010 cm–3

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

    Plasma density : RF plasma < SWP plasma

  • Adhesion force measurement

    Steppin

    Adhesion force appartusLoad-Displacement curvpp

    g motor

    Linear guide

    Approach

    pe

    Specime oad,

    P

    Retract

    pp

    SUS440CF 19.05mm

    (2)(3)

    n holderDriver

    Adh i f

    Lo

    Displacement, dCIIR sheett: 3mm

    (1)

    (4)

    Adhesion forceUpper side of load cell

    SUS440C

    (4) SeparationCIIR

    (1) Contact (2) Approach (3) Retract

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

    (4) Separation(1) Contact (2) Approach (3) Retract

  • Effect of plasma irradiation on adhesion

    0.16

    Material of sphere: SUS440C

    Ion beam irradiation treatment Plasma treatmentMaterial of sphere: SUS440C

    0.12

    0.14

    N

    Material of sphere: SUS440CDiameter of sphere: φ19.05mm contact time: 90s, Ion gas: ArgonRetracting speed: 0.1mm/minHumidity: 45-50% Temperature: 22-24゜CMaximum load: 1N

    Diameter of sphere: φ19.05mm contact time: 90s, Ion gas: ArgonRetracting speed: 0.1mm/minHumidity: 45-50% Temperature: 22-24゜CMaximum load: 1N

    0.08

    0.10

    orce

    F, N

    Maximum load: 1N Mean value that treated 5 timesMeasured 3 times

    Mean value that treated 5 timesMeasured 3 times

    0.04

    0.06

    ull-o

    ff fo Surface -wave

    excited plasmaRF plasma

    n ≈1011-1013 cm–3ne≈108-1010 cm–3

    0 00

    0.02

    0.04

    Pu

    0.002N0.001N0.001N0.008N

    (92.3%) (99.1%) (99.1%) (98.1%)0.005N

    (95.2%)0.005N ≒ 0N ≒ 0N

    0.015N 0.01N(≒100%)(95.2%)(90.2%)(85.9%)

    ne≈10 -10 cm

    0.00

    Untreated 500V, 50W 30min

    1000V, 100W

    30min

    1000V, 100W

    60min

    2500V, 150W,

    30min32Pa 300W

    12min Untreated 30Pa 200W

    5min

    30Pa 200W

    10min

    30Pa 250W

    5min

    32Pa 300W

    30min

    50Pa 300W

    12min

    Treatment time Ion beam >> surface-wave plasma treatment Surface-wave plasma treatment reduced adhesion almost 0 N between stainless steel ball and CIIR sheet

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

  • Contact microscope device

    Prof. Isami NITTA, Niigata University, Japan

    CIIR

    CIIRCIIR

    CIIR

    The procedure of calculate the real contact areaSchematic diagram of a contact microscope with an elliptically polarized light

    Lights pass through the prismThe procedure of calculate the real contact area

    Prism fixed jig

    The analyzer blocks the light when the asperity exists between prism and CIIR

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

    j gThe asperity appear to be dark dot.

  • Real contact area Real contact area Unreated

    20 ArgonOxygenm

    m2

    10

    15Oxygen

    area

    Ar,

    m

    Temperature : 18-20℃Humidity : 30-40%M i l d 5NArgon-1 min Oxygen-1 min

    5

    10

    cont

    act a Maximum load : 5N

    Argon-5 min Oxygen-5 min 0

    5

    Rea

    l

    Plasma treatment time, min0 5 10 15 20

    Argon-10 min Oxygen-10 min Real contact areas were

    decreased in all conditions !

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

  • Effect of real contact area on adhesion

    0.10 Argon

    0.08NOxygen

    0.06forc

    e, N

    0.04

    hesi

    on f

    0.02Adh

    0 2 4 6 8 10 12 14 160.00

    0 2 4 6 8 10 12 14 16

    Real contact area,mm2

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

  • Surface topography of rubber surfaceSputter coated with platinum for 1mintues

    (a)( )The subsurface on the CIIR looks less granular and generally has a smoother shape(c)Growing rougher as the t ti ti i i

    (a) (b)treating time increasing

    (d)(d)Microwave power pattern has changed - Roughest surface

    ≈ ≈ 25 25 μμmm

    Roughest surface observed

    The cross-section FE-SEM micrographs of oxygen plasma treated to CIIR rubber for (d)(c) Etching effect !Etching effect !

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

    (a) Untreated (b) 200 W, 5 min (c) 200 W, 10 min and, (d) 200 W 20 min

  • Surface roughness of argon plasma treated to CIIR rubber

    Untreated Argon 1 min

    40 μm

    Argon 15 min

    280 μm0 μm 280 μm0 μm

    25

    30

    Rmax RaRz

    25.78

    15

    20

    Rz Rq (RMS)

    8 96

    13.98

    ght, μm

    5

    10

    3.01 4.15

    8.96

    Hei

    g

    0 2 4 6 8 10 12 14 160

    Treatment time min

    3D laser scanning microscope images of CIIR sheets after oxygen plasma treatment

    Treatment time, minSurface profile with argon plasma treatment, as a function of treatment time

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

    g p g yg pwith 200 W at a gas pressure of 30 Pa for treatment times of (a)1, (b)5, (c)10, and (d)15 min.

  • Young’s modulus of CIIR rubberYoung’s modulus of CIIR rubber after argon plasma treated

    300

    A l f 5 ti d250

    aAverage value of 5 times measured Maximum load : 50 μN

    150

    200

    us E

    , MPa

    6 22

    6.335 94

    100

    150

    ng's

    mod

    lu 6.22 5.94

    50You

    n 3.96

    0 5 10 15 200

    Plasm a treatm ent tim e, m in MPa

    1.04

    untreated 1 5 10 15 2038 39.8 151.4 236.4 240.8 225.9

    , MPa

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

  • Explanation by the GW model

    2/1* )/(2.3 aa

    re REAPA

    2

    22

    1

    21

    *

    )1()1(1EEE

    )/( pp RE p : RMS

    pR : asperity of radius = 1μmaP : apparent pressure

    A20 Oxygen

    aA : apparent area

    a, m

    m2

    15

    yg

    ArgonPoisson’s ratio ν

    ntac

    t are

    a

    10

    stainless steel ball : 0.3CIIR rubber : 0.5

    Young’s modulus of

    Rea

    l con

    0

    5g

    stainless steel ball : 210 GpaCIIR rubber : Measured

    )1( NAPAPW aarer

    R

    0 5 10 15 20

    0

    Comparison between GW model & real contact area (Stainless steel ball and CIIR contact)

    2/1* )/(1

    pp RE , μm−1MPa −1

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

    Comparison between GW model & real contact area (Stainless steel ball and CIIR contact)

  • Outline & Summary1.Ultra low friction of Carbon Nitride (1.Ultra low friction of Carbon Nitride (CNxCNx))・・MechanismMechanism Self modification in nm thicknessSelf modification in nm thicknessMechanism Mechanism Self modification in nm thickness Self modification in nm thickness ・・Effect of carbon overcoat on frictionEffect of carbon overcoat on friction

    not need runningnot need running--inin・・Effect of Ultraviolet (UV) ray irradiationEffect of Ultraviolet (UV) ray irradiationEffect of Ultraviolet (UV) ray irradiation Effect of Ultraviolet (UV) ray irradiation

    on frictionon friction More rapid runningMore rapid running--in by 1/10 , in by 1/10 , L i i f i ti b 1/10L i i f i ti b 1/10Lower minimum friction by 1/10Lower minimum friction by 1/10

    2. Low adhesion and friction of rubbero ad es o a d ct o o ubbe・・High dense plasma irradiation to CIIRHigh dense plasma irradiation to CIIR

    b L E & R h S llb L E & R h S ll AA

  • Tendency in Medical syringe products

    Medical syringeMedical syringey gy g

    Glass syringeGlass syringey gy g・Easy to crack・High cost UndesirableHigh cost・inferior to the size accuracy

    Undesirable

    Plastic syringePlastic syringeP d ti

    Plastic syringePlastic syringe・・Productive・・Lubricated with silicone oilsilicone oil

    Replacing glass syringes with plastic ones is desired.

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

  • Issues in advanced plastic syringe

    G k (TPE)

    Plastic syringe Float of silicone oil droplets※In certain medicinesIGasket(TPE) Plunger(PP)

    TPE:Thermoplastic Elastomer

    Risk of the accumulation

    ※In certain medicinesIssue

    in the body

    Silicone oil Barrel(PP)PP:Polypropylene

    Constituent

    yp py

    Adsorption of medicineSilicone oil

    Improper dosage

    Silicone oilIssue

    Improper dosage

    To design the plastic syringe without the silicone oilTo design the plastic syringe without the silicone oilBasic 14 Micro-Nano Tribology Prof. N. Umehara

    - Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

    To design the plastic syringe without the silicone oilTo design the plastic syringe without the silicone oil

  • Photochemically fluorination

    Fused silica glassIn vacuum

    RealReal contact areacontact area

    Surface free energySurface free energy

    UV 172nm (695kj/mol)Fused silica glass

    PFPE(Perfluoropolyether) Association energyAssociation energy

    RealReal contact areacontact area

    TPECC--C 350kj/molC 350kj/molCC--H 410kj/molH 410kj/mol Low frictionLow friction

    UV (172 nm) Fused silica glassUV (172 nm) Fused silica glass

    Bridge formation

    UV 172nm Fused silica glass( )

    Reaction area

    ( )

    Reaction area

    UV 172nmUV 172nm

    CF3*

    CF3*

    CF3*

    F*F*F*

    CF3*

    F* F* F*F*

    *F*CF3

    *F*

    F* F*F*Dissociation of PFPE

    CF3*

    CF3*

    CF3*

    F*F*F*

    CF3*

    F* F* F*F*

    *F*CF3

    *F*

    F* F*F*Dissociation of PFPE

    FF b id f tib id f ti

    C-F

    C-FC-F

    C-F C

    -F

    C-F

    C-H C-F

    TPE

    C-C

    F 3

    C-C

    F 3

    C-C

    F 3

    C-F

    C-C

    F 3

    F*F*

    F F* F*F*

    C-F

    F* rich

    C-F

    C-FC-F

    C-F C

    -F

    C-F

    C-H C-F

    TPE

    C-C

    F 3

    C-C

    F 3

    C-C

    F 3

    C-F

    C-C

    F 3

    F*F*

    F F* F*F*

    C-F

    F* rich Form Form bridge formation bridge formation

    TPE

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

    Increase Increase Young's modulus Young's modulus TPE

  • Effect of Photochemically fluorination on friction

    Friction test in flat specimen W=1 Nイメージを表示できません。メモリ不足のためにイメージを開くことができないか、イメージが破損している可能性があります。コンピュータを再起動して再度ファイルを開いてください。それでも赤い x が表示される場合は、イメージを削除して挿入してください。

    6.0

    Normal load W: 1 N , Sliding speed V: 2 mm/sWavelength of UV: 172 nm

    4 0

    5.0

    ficie

    nt

    in air (30-50 %RH)TPE vs. Non-treated PP

    Wavelength of UV: 172 nmDropped PFPE & Cleaned by HFE

    3.0

    4.0

    n co

    eff

    77%2.0

    Fric

    tion -77%

    0 0

    1.0

    0.00 20 40 60 80 100

    I di ti ti t TPE t iBasic 14 Micro-Nano Tribology Prof. N. Umehara

    - Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

    Irradiation time to TPE t , min

  • Effect of Photochemically fluorination on friction

    Friction test in TPE gasket

    60.0Initial resistance- 40%- 40%

    40 0

    50.0

    ce ,

    N Average dynamic resistanceSize of syringe: 20 ml , Injection liquid: Water

    40%40%

    30.0

    40.0

    ance

    forc

    Dropped PFPE

    Compression velocity: 100 mm/minWavelength of UV: 172 nm

    20.0Res

    ista Cleaned by HFE

    10.0

    0.0Non-treated Silicone oilIrradiated 90 min

    Basic 14 Micro-Nano Tribology Prof. N. Umehara- Ultra low friction of Carbon Nitride (CNx) and Low adhesion and friction of rubber -

    COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

  • 1 Ult l f i ti f C b Nit id (1 Ult l f i ti f C b Nit id (CNCN ))Outline & Summary1.Ultra low friction of Carbon Nitride (1.Ultra low friction of Carbon Nitride (CNxCNx))・・Mechanism Mechanism Self modification in nm thickness Self modification in nm thickness ec a sec a s・・Effect of carbon overcoat on frictionEffect of carbon overcoat on friction

    t d it d i iinot need runningnot need running--inin・・Effect of Ultraviolet (UV) ray irradiation Effect of Ultraviolet (UV) ray irradiation ( ) y( ) y

    on frictionon friction More rapid runningMore rapid running--in by 1/10 , in by 1/10 , Lower minimum friction by 1/10Lower minimum friction by 1/10Lower minimum friction by 1/10Lower minimum friction by 1/10

    2. Low adhesion and friction of rubber・・High dense plasma irradiation to CIIRHigh dense plasma irradiation to CIIR

    by Larger E & Roughness Smallerby Larger E & Roughness Smaller ArAr