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Building-in Reliability into Power Modules Dr. Jacek Rudzki Chemnitzer Seminar 2019

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Page 1: Building-in Reliability into Power Modules · SP3D ® structure double gasket SP3D ® principle from simulation • Shower Power® is a direct cooling technology for lage power modules

Building-in Reliability into Power Modules

Dr. Jacek Rudzki

Chemnitzer Seminar 2019

Page 2: Building-in Reliability into Power Modules · SP3D ® structure double gasket SP3D ® principle from simulation • Shower Power® is a direct cooling technology for lage power modules

2 | DSP Jacek Rudzki

Source: Infineon

Source: Infineon

Power density Junctiontemperature

Reliabilitydemand

present limits

Trends in Power Electronics

Page 3: Building-in Reliability into Power Modules · SP3D ® structure double gasket SP3D ® principle from simulation • Shower Power® is a direct cooling technology for lage power modules

3 | DSP Jacek Rudzki

Automotive applications – life time expectation

14 years life time

3000 max temperature cycling

15.000 starts (w/o start-stop)

200.000 max. excelerations

3.000.000 hard transistor switching

Page 4: Building-in Reliability into Power Modules · SP3D ® structure double gasket SP3D ® principle from simulation • Shower Power® is a direct cooling technology for lage power modules

4 | DSP Jacek Rudzki

Life time expectation for modern applications

Page 5: Building-in Reliability into Power Modules · SP3D ® structure double gasket SP3D ® principle from simulation • Shower Power® is a direct cooling technology for lage power modules

5 | DSP Jacek Rudzki

Two ways to improve the reliability in power module

higher reliability

better cooling

lowering the Tj

better packagingtechnology

Bonding and joining

Page 6: Building-in Reliability into Power Modules · SP3D ® structure double gasket SP3D ® principle from simulation • Shower Power® is a direct cooling technology for lage power modules

6 | DSP Jacek Rudzki

Power Module under Construction

Wire bondinterconnectionframe to substrate

Frame with

terminals

Wire bond interconnectionchip-chip & chip substrate

Die solderingon substrate

Wire bondinterconnectionsubstrate to substrate

Liquid Cooler

ShowerPower®

Substrates DBC

(Al2O3, AlN, Si3N4)

Solder layer,joining of substrate and base plate

Cooler, forced air

Page 7: Building-in Reliability into Power Modules · SP3D ® structure double gasket SP3D ® principle from simulation • Shower Power® is a direct cooling technology for lage power modules

7 | DSP Jacek Rudzki

Shower Power® direct liquid cooling for lowest Rth

coolant inlet

coolant outlet

3-meander ofSP3D® structure

double gasket

SP3D® principlefrom simulation

• Shower Power® is a direct cooling technology for lage power modules• Eliminating the thermal interface material• Offering high performance homogenous cooling at a low pressure drop

Page 8: Building-in Reliability into Power Modules · SP3D ® structure double gasket SP3D ® principle from simulation • Shower Power® is a direct cooling technology for lage power modules

8 | DSP Jacek Rudzki

Power Module under Construction

Wire bondinterconnectionframe to substrate

Frame with

terminals

Wire bond interconnectionchip-chip & chip substrate

Die solderingon substrate

Wire bondinterconnectionsubstrate to substrate

Liquid Cooler

ShowerPower®

Substrates DBC

(Al2O3, AlN, Si3N4)

Solder layer,joining of substrate and base plate

Cooler, forced air

Page 9: Building-in Reliability into Power Modules · SP3D ® structure double gasket SP3D ® principle from simulation • Shower Power® is a direct cooling technology for lage power modules

9 | DSP Jacek Rudzki

First Solution: Sintering Technology

◼ operation temperature at least 200°C

◼ high reliability◼ excellent electrical and thermal

conductivity◼ no liquid phase at joining process◼ high mechanical strength◼ lead-free technology◼ pressure sintering 10 – 30 MPa

TEM picture of sintered layer

Source: Böttge IWM Halle

Source: Ch. Mertens

Page 10: Building-in Reliability into Power Modules · SP3D ® structure double gasket SP3D ® principle from simulation • Shower Power® is a direct cooling technology for lage power modules

10 | DSP Jacek Rudzki

10

Large Area Sintering vs. Large Area Soldering after Temperature Cycling (-40°C – 125°C)

Sintering SAM-analysis

layer Cycles layerthickness passed thickness

50µm 100µm

500 cycles

1500 cycles

2000 cycles

50µm

50µm

100µm

100µm

Soldering

layer Cycles layerthickness passed thickness

Page 11: Building-in Reliability into Power Modules · SP3D ® structure double gasket SP3D ® principle from simulation • Shower Power® is a direct cooling technology for lage power modules

11 | DSP Jacek Rudzki

Power Module under Construction

Wire bondinterconnectionframe to substrate

Frame with

terminals

Wire bond interconnectionchip-chip & chip substrate

Die solderingon substrate

Wire bondinterconnectionsubstrate to substrate

Liquid Cooler

ShowerPower®

Substrates DBC

(Al2O3, AlN, Si3N4)

Solder layer,joining of substrate and base plate

Cooler, forced air

Page 12: Building-in Reliability into Power Modules · SP3D ® structure double gasket SP3D ® principle from simulation • Shower Power® is a direct cooling technology for lage power modules

12 | DSP Jacek Rudzki

Power Cycling Test – Solder and Ag-Sintering

const. power Temp. 20°C/120°C1s on / 5s off

Weibull data calculated from experimental results

50V – MOSFet20mm², 140µm thick

Si-die

Ag sinter

Al-wire

Factor of about 2 better reliability for sintered die

Page 13: Building-in Reliability into Power Modules · SP3D ® structure double gasket SP3D ® principle from simulation • Shower Power® is a direct cooling technology for lage power modules

13 | DSP Jacek Rudzki

Simultaneous thermography of soldered and sintered chips

Solder

Sintering

10,9K

SnAg Sinter.

Silicon 0,048 0,048

Solder

NTV 0,026 0,002

Copper 0,010 0,01

AL2O3 0,165 0,166

Copper 0,007 0,007

Solder

NTV 0,024 0,003

Copper 0,071 0,072

Rth 0,350 0,309

∆Rth 13%current @ 90Atime @ 1s

Lower Tj with Ag-Sintering Layers

Calculated Rth

Page 14: Building-in Reliability into Power Modules · SP3D ® structure double gasket SP3D ® principle from simulation • Shower Power® is a direct cooling technology for lage power modules

14 | DSP Jacek Rudzki

Power Module under Construction

Wire bondinterconnectionframe to substrate

Frame with

terminals

Wire bond interconnectionchip-chip & chip substrate

Die solderingon substrate

Wire bondinterconnectionsubstrate to substrate

Liquid Cooler

ShowerPower®

Substrates DBC

(Al2O3, AlN, Si3N4)

Solder layer,joining of substrate and base plate

Cooler, forced air

Page 15: Building-in Reliability into Power Modules · SP3D ® structure double gasket SP3D ® principle from simulation • Shower Power® is a direct cooling technology for lage power modules

15 | DSP Jacek Rudzki

Combination of Sinter Technology and Cu Wire Bonding Leads to DBB® Technology

relia

bilit

y

technology improvements

Al – wire

soldered die

Al – wire

sintered die

Cu – wire on bond buffer

sintered die

solder degradation and wire lift off

wire lift off

Page 16: Building-in Reliability into Power Modules · SP3D ® structure double gasket SP3D ® principle from simulation • Shower Power® is a direct cooling technology for lage power modules

16 | DSP Jacek Rudzki

Cross Section – Silicon Die with DBB® Technology

Cu - wire

Cu buffer

Si diesinter layer

Cu DCB

Si die

DBB foil

sinter layer

pressure sintering process

Page 17: Building-in Reliability into Power Modules · SP3D ® structure double gasket SP3D ® principle from simulation • Shower Power® is a direct cooling technology for lage power modules

17 | DSP Jacek Rudzki

Test parameter:ΔT = 130KTmin = 20°CP = constton = 1stoff= 10s

Power cycling reliability @ T=130K

Limit for standard technology

Cycles

Page 18: Building-in Reliability into Power Modules · SP3D ® structure double gasket SP3D ® principle from simulation • Shower Power® is a direct cooling technology for lage power modules

18 | DSP Jacek Rudzki

Coffin Manson Diagramm - DBB Results

Outstandig power cycling capabilityFactor of 20 better reliability thanstandard technology

TypeDBB 130

DBB 100

ST 130 ST 100

ton [s] 1 1 1 1

toff [s] 10 10 10 10

Ipulse [A/cm²]

100 100 100 100

Tj,min [°C] 20 20 20 20

Tj,max [°C] 150 120 150 120

DT [K] 130 100 130 100

Tm [°C] 85 70 85 70

DBB® results

Page 19: Building-in Reliability into Power Modules · SP3D ® structure double gasket SP3D ® principle from simulation • Shower Power® is a direct cooling technology for lage power modules

19 | DSP Jacek Rudzki

Conclusions

• Better cooling systems increase the reliability of power modules

• Better bonding and joining technology increase the reliability of power modules

• extended lifetime is achieved by using sintering technique between silicon die and DBC substrate

• heavy copper wires reduces the electrical resistance and improve the life time of power modules

• Combination of sintering technology and Cu wire bonding increases the reliability and leads to better products

Page 20: Building-in Reliability into Power Modules · SP3D ® structure double gasket SP3D ® principle from simulation • Shower Power® is a direct cooling technology for lage power modules

Thank you for your attention