c. glenn shirley and jack t. mccullenweb.cecs.pdx.edu/~cgshirl/glenns publications/32 1996...c....
TRANSCRIPT
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Component Reliability, ECTC, May 1996 1
COMPONENT RELIABILITY
C. Glenn Shirley and Jack T. McCullenIntel Corporation
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Component Reliability, ECTC, May 1996 2
Component ReliabilityTable of Contents
• Technology Trends• Failure Mechanisms and Acceleration Models
Temperature and biasMoistureThermomechanical
• Quality and Reliability AnalysisQuality analysis of wire bond placement.Reliability analysis of capacitor failure in T/C.
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Component Reliability, ECTC, May 1996 3
Technology Trendsand the reliability issues they drive...
• Focus mainly on package-related issues.Most new mechanisms are package-related.
• Market Segment Model• Package Attributes
TodayWhere we are going
• TrendsPackage OutlineLeadframe TrendsInterconnection TrendsPassivation TrendsOEM Trends
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Component Reliability, ECTC, May 1996 4
Process, Package Technology, and Product Evolve in Parallel
Process
1.5 micron
1.0 micron
0.8 micron
0.6 micron
0.4 micron
DIP, PLCC
PQFPMMPQFP HDPQFP, TAB, C4Plastic Package
386 486 Pentium© CPU "P6" ©Introduced Product
Follow-on and Plastic X X X X
BGA, PPGA
'85 '86 '87 '88 '89 '90 '91 '92 '93 '94 '95 '96
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Component Reliability, ECTC, May 1996 5
Technology TrendsPackage/Interconnect
OUTERCONNECTION
INNER CONNECTION
BGABall Grid Array SUB
CHIP CHIP CHIP
PGAPin Grid Array
TCPTape Carrier PKG
Wire Bond TAB FLIP CHIP
Board-CONNECTOR Board(MCM)
Gull WingQFP
Board Board
SUB
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Component Reliability, ECTC, May 1996 6
Power Quad Package
Tape/AdhesiveDielectric
Copper Heat SlugSingle LayerLead Frame
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Component Reliability, ECTC, May 1996 7
Ball Grid Array (BGA)Die Up Option
Solder Balls
Expoxy Based Molding Compound Ag - Epoxy Adhesive
Die Down Option
Epoxy Based Molding Compound Solder Balls1.27mm Grid Array
BT Resin Multilayer PCB
Metal Heat Sink PlateAg - Epoxy Adhesive
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Component Reliability, ECTC, May 1996 8
Plastic Pin Grid Array (PPGA)
CPGA: Tungsten metallization, higher R (5.6 μohms) higher dielectric constant (εr ~9-11)
PPGA: Copper metallization, lower R (1.7 μohms) lower dielectric constant (εr ~4.5-5)
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Component Reliability, ECTC, May 1996 9
Market Segment ModelMarket Segments Attributes/determinants
(by industry market segments) (key market requirements)Notebooks
laptops/palmtops
Low-End Desktops
High-End Desktops
Servers
End-User Upgrades
form-factor, costs, low-power, ....
costs, performance, .....
price/performance, power,......
performance, price, power
socketability, electrical & architectural compatibility, power
COT/QFPArray
PGA/E-QFP
PGA/LGA
Options
Technology Trends
QFPE-QFP
PGA/Array/Few-ChipModules
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Component Reliability, ECTC, May 1996 10
Technology Trends
• High-performance VLSI is moving into
everyday products.
• Economics continue to push VLSI into
plastic packages.
• Most package reliability issues are largely
plastic reliability issues.
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Component Reliability, ECTC, May 1996 11
Package Attributes...Where we are today
Technology Trends
Max No. Lead No. Pkg. Bodyof leads pitch (mm) planes Thickness (mm) Size (mm)
DIP 48 100 mils 1 4.7 14 x 61PLCC 84 50 mils 1 4.3 29PQFP 196 0.65 1 3.5 34PQFP/DPH 196 0.65 2 3.5 34PQFP/MM 196 0.65 3 3.5 34TSOP 56 0.5 1 1.1 14 x 18TQFP 208 0.5 1 1.5 34BGA 400 0.05 1 2.3 35HDPQFP 400 0.4 2 2.0 40TCP 600 0.2 1 0.5 20
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Component Reliability, ECTC, May 1996 12
# pads increases rapidly due tohigher clock rate = more power/gnd, bus width, functions
Pad DensityTechnology Trends
0
100
200
300
400
500
600
700
800
900
Product Complexity / Time
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Component Reliability, ECTC, May 1996 13
Power DissipationTechnology Trends
10
5
0
Power Dissipation
CPGA
TCP/QFP/PQFP
15
Multi Layer Metal (MM)
PRODUCT COMPLEXITY
PlasticHeat-Slug Pkgs
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Component Reliability, ECTC, May 1996 14
As the number of leads increase, lead-pitch must be scaled to keep the body size from growing too large = physical and electrical problems
# of Leads
Lead DensityTechnology Trends
Practical PackageBody Sizes
0.65mm
COT/Tape Pack
0.5mm
0.4mm
0.3mm
0.2mmCOT
0.1mm
Fine-PitchPackage Body
Size (mm)
0
10
20
30
40
50
60
70
80
200L 300L 400L 500L 600L 700L
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Component Reliability, ECTC, May 1996 15
Wirebond Running Out Of Gas?Wirebond is still the lowest cost, most flexible, and matured technology
compacted dice require tighter bond-pitch, larger # of pads push wirebond into a limiting regime.....practical limit believed to be around 60 μm for aluminum (ceramics) and 75 μm for gold (plastics)
VLSIVLSI VLSI
Standard Product Compaction
Bond-Pitch Decreases
Wirelength Increases
Technology Trends
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Component Reliability, ECTC, May 1996 16
Technology Trends
# Pads/# Pins
Pad Pitch (μm)
TAB
Array/C4
Wirebond
EvolutionaryVector
50 100 150
(Aluminium)
(Gold)
Compaction
Performance, I/O
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Component Reliability, ECTC, May 1996 17
Technology Trends
Package Outline Trends
• Larger die sizes (approx. 500 mils and up; mechanical issues)
• Higher lead count (> 300; reliability statistics)
• Finer pitch leads (Pin-pin shorts/leakage)• Thinner, wider packages (Mechanical
issues)
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Component Reliability, ECTC, May 1996 18
Technology TrendsLead Frame Trends
• Finer Pitch - (0.3mm)
• Copper lead frames for improved thermal performance (Si/Cu TCE mismatch).
• Multiple planes of metal separated by insulating tape for thermal & electrical performance (Tape/Cu chemical reactions in moisture and bias)
• Copper slugs attached to or used for die attach plane
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Component Reliability, ECTC, May 1996 19
Technology Trends
Interconnection Technology Trends• Increasing lead count is demanding finer pitch
bond pads.
• Plastic: gold wire bonding pitch > 70 μm.
• Plastic: TAB bond pitch > 70 μm.
(Bump-passivation overlap = new failure mode)
• Ceramic: Al, 95 μm pitch, then 85 μm pitch,
then C4, 75 μm pitch.
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Component Reliability, ECTC, May 1996 20
Technology TrendsPassivation Trends
• Approach 1. Nitride/polyimide.Nitride is a moisture barrier. Process window:0.5 μ < thickness < metal space.Polyimide (4 μ thick) is mechanical protection.
• Approach 2. Reflowable glass/nitride.Planarize metal topography before nitride deposition.Nitride thickness is not limited by top metal spacing.For single mask, exposed glass films at pad openings admit moisture for wire bond, but not TAB.
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Component Reliability, ECTC, May 1996 21
Technology TrendsPassivation Approaches
PECVD Oxynitride/Nitride Metal Bond Pad
Other films
Silicon
Polyimide
PECVD Oxynitride/Nitride Metal Bond Pad
Exposed Reflow Glass
Reflow Glass
Other films
(moisture penetration path)
Silicon
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Component Reliability, ECTC, May 1996 22
OEM Trends• Ceramic will still be used for high power - socketed
• Surface mount is the main-line board mount process.
• Severe thermal shocks to 219 C (solder reflow temperature) occur during board mount.
• For plastic, the big issue is “popcorn” fracture and other damage due to absorbed moisture.
• Re-bake is limited by solder wettability degradation.
• OEMs dislike the complex bagging, shipping, and shelf-life guidelines required to keep parts dry.
Technology Trends
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Component Reliability, ECTC, May 1996 23
Effect on Reliability• Lead Pitch Decrease
Contaminant Driven Interlead Growth
Bond Integrity (decreased wire size/increased span)
• Larger, More Complex Die / Thinner Packages
Thermal Mismatch Issues due to Increased Interfaces
Thermomechanical Stress
Moisture Induced Mounting Stresses (Mass Reflow)
Technology Trends
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Component Reliability, ECTC, May 1996 24
Mechanisms and ModelsOverview
• Classes of mechanisms...Defect vs intrinsic
Die-level field reliability is dominated by defect mechanismsPackage-level reliability is dominated by intrinsic mechanisms.
Accelerating Stresses...ThermalMoistureThermomechanical
• Our objectives...Describe the mechanism - examplesGive an acceleration model which can be used in field reliability calculations.
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Component Reliability, ECTC, May 1996 25
Mechanisms and ModelsOverview
• Thermal
Die-level mechanisms
Au/Al Intermetallics and Au ball bonds.
Lead Finish
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Component Reliability, ECTC, May 1996 26
Mechanisms and ModelsOverview
• Moisture
External Corrosion
Moisture Transport in Molding Compounds
Internal: Package Failure
Internal: Die Failure
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Component Reliability, ECTC, May 1996 27
Mechanisms and ModelsOverview
• Thermomechanical
Temperature Cycling
Moisture Transport
“Popcorn” Mechanism in Plastic Surface Mount
Bond & Wire Damage
Passivation and other Thin Film Damage
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Component Reliability, ECTC, May 1996 28
Thermal Mechanisms
• Die-level mechanismsElectromigrationHot-electronOxide defects.
• Gold aluminum intermetallic “Purple Plague”Effect of BromineKelvin Resistance Measurements
• Lead finishCopper tin intermetallicSolder plate vs solder coat
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Component Reliability, ECTC, May 1996 29
Die-Level Mechanisms• Mechanisms include electromigration, oxide
degradation, hot-electron effects.• Die-level mechanisms are accelerated by
the die temperature and supply voltage.• Most die-related field reliability issues are
defect-related.• A useful “universal” acceleration model for
defect-related die-level mechanisms is
Q and C are mechanism-specific.
AFQk T T
C V V= −⎡
⎣⎢⎤
⎦⎥+ −
⎧⎨⎩
⎫⎬⎭
exp ( )1 1
1 22 1
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Component Reliability, ECTC, May 1996 30
Gold-Aluminum Bond Failure
• Gold and Aluminum interdiffuse.Intermetallic phases such as AuAl2 (“Purple Plague”) form.Imbalance in atomic flux causes Kirkendall Voiding
• Kirkendall voids lead toBond weakening - detected by wire pull test.Resistance changes in bond - detected by Kelvin measurement of bond resistance.
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Component Reliability, ECTC, May 1996 31
Gold-Aluminum Intermetallic
Cross-section of gold ball bond on aluminum pad after 200 hours at 160C
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Component Reliability, ECTC, May 1996 32
Gold-Aluminum Intermetallic
Cross-section of gold ball bond on aluminum pad after 80 hours at 156C/85%RH
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Component Reliability, ECTC, May 1996 33
Gold-Aluminum Bond Failure
380 340 300 260 220 200 180 1600.1
1
10
100
1E3
1E4
Temperature (deg C, Arrhenius Scale)
Hours
Arrhenius plot of time to 10% of wire pull failure.Activation energy = 1.17 eV.
Source: S. Ahmad, Intel
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Component Reliability, ECTC, May 1996 34
0
0.2
0.4
0.6
0.8
1.0
1.2
1.4
20 40 60 80 100 120 140
2.7 1.450.8
0.5
Bake Time, hours
Log{ Resistance Change (milliohms)}
Weight % Bromine
Gold-Aluminum Bond Failure•Kelvin resistance measurements.
•Resistance increase of Au bonds to Al pads vs bake time.
•Bake at 200 C.
•Various levels of Br flame-retardent in molding compound.
•Br catalyzes Au-Al intermetallic growth.
Source: S. Ahmad, et al. “Effect of Bromine in Molding Compounds on Gold-Aluminum Bonds,” IEEE CHMT-9 p379 (1986)
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Component Reliability, ECTC, May 1996 35
Thermal Degradation of Lead Finish
Solder Solder
Cu6Sn5 intermetallic
CopperCopper
Lead
Post-plating solder plate Post burn-in solder plate showing copper-tin intermetallic
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Component Reliability, ECTC, May 1996 36
Thermal Degradation of Lead Finish
X-section of solder-plated lead X-section of solder-coated lead
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Component Reliability, ECTC, May 1996 37
Thermal Degradation of Lead Finish
• Only an issue for copper leadframes (not Alloy 42).
• Cu3Sn or Cu6Sn5 intermetallics grow at the interface between solder or tin plating.
• Activation energy for intermetallic phase growth is0.74 eV
• If intermetallic phase grows to surface of solder or tin plate, solder wetting will not occur.
• Main effect is to limit the number of dry-out bakes of surface mount plastic components.
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Component Reliability, ECTC, May 1996 38
Moisture-Related Mechanisms
• External Package Corrosion
• Internal Package MechanismsInterplanar LeakageAl Pad Corrosion
• Internal Die-Related MechanismsThin-Film DelaminationCircuit Failure due to Passivation Defects
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Component Reliability, ECTC, May 1996 39
External Package CorrosionTwo Types:
• Galvanic effects due to mismatch between package pin and socket.
Use Au-plated socket contacts with Au-plated pins.Use Sn-finished socket contacts with tin or solder-plated pins.
• Galvanic effects independent of socket due to pinholes in Au finish.
Pinhole in Au exposing ferrous base metal, or Ag/Cu brazing material causes strong galvanic cell on exposure to moisture.Prevented by passive Ni barrier under Au.
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Component Reliability, ECTC, May 1996 40
External Package Corrosion
• Sn, solder, and especially Ag can migrate under influence of humidity and electric fields.
• Ni barrier over Ag/Cu brazing material prevents this in laminated ceramic packages.
• Sn migration is also a possibility in saturated steam stress.
• These external moisture-related effects are infrequently observed in the field.
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Component Reliability, ECTC, May 1996 41
Internal Moisture Mechanisms
• Package-RelatedMM tape leakageLead stabilizing tape leakage.
• Die-RelatedAl pad corrosionMoisture-related Au/Al bond degradation.Logic failure due to passivation damage.
• Acceleration models for internal mechanisms.
Steady-state power dissipationMoisture transport in molding compound.Acceleration under quasi-periodic stress.
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Component Reliability, ECTC, May 1996 42
MM Tape Leakage
Leadframe
Power Plane Ground Plane
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Component Reliability, ECTC, May 1996 43
MM Tape Leakage
0 10 20 30 4050
200
400
600
800
1000MM Leakage vs 156/85 Biased HAST Time
Biased HAST Stress Time (HR)
LeakagemA
1 2 3 4 5 6 7 80
0.05
0.1
0.15
1/MTTF
Bias (Volts)
156/85 HAST of MM Tape Candidates
(hrs)
"A"
"B"
Acceleration factor is proportional to bias.Tape m Q eV“A” >12 0.74“B” 5 0.77Source: C. Hong, Intel, 1991
Experimental Tape Data:
AFV H Q kTm
=
× × −Constant exp( / )
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Component Reliability, ECTC, May 1996 44
Lead-Stabilizing Tape Leakage• A vendor process excursion.• Leakage observed after 336 hours of steam.• Re-activated by 48 hours at 70C/100% RH• No leakage seen between leads not crossed by tape• Rapid decay for leads crossing end of tape
Tape dries from exterior inwards
Die Lead Stabilizing TapeTape provides mechanical
stability to long leads during wirebond.
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Component Reliability, ECTC, May 1996 45
Lead-Stabilizing Tape Leakage
10 100 1000Recovery Time (Minutes)
1E-5
1E-6
1E-7
1E-8
1E-9
1E-10
1E-12
1E-13
LeakageCurrent (A) Pin 3 -4
Pin 2-3
Pins Crossed by Tape
Pins NOT crossed by tape
Source: S. Maston, Intel
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Component Reliability, ECTC, May 1996 46
TAB Interlead Leakage/Shorts• Requires bias• Accelerated by temperature & humidity• Seen as early as 20 hrs 156/85 HAST• Highly dependent on materials & process
Internal Moisture Mechanism
-
+
-
Copper dendrites after 40 hours of biased 156/85 HAST
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Component Reliability, ECTC, May 1996 47
Aluminum Bond Pad Corrosion
Moisture Moisture
Fe++
Ni++Lead CorrosionMicrogap
Cl-
Shortest path has highestfailure rate.
Source m Q (eV)Peck (a) 2.66 0.79Hallberg&Peck (b) 3.0 0.9
(a) IRPS, 1986; (b) IRPS, 1991.
Source: P.R. Engel, T. Corbett, and W. Baerg, “A New Failure Mechanism of Bond Pad Corrosion in Plastic-Encapsulated IC’s Under Temperature, Humidity and Bias Stress” Proc. 33rd Electronic Components Conference, 1983.
AFV H Q kTm
=
× × −Constant exp( / )
1
Pins
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Component Reliability, ECTC, May 1996 48
Moisture-Related Gold Bond Degradation
0 2 4 6 8 10 12 14 16 18 200.010.1
1
10
305070
90
99
99.999.99
HASTOFF-CENTER
HASTCENTERED
BAKECENTERED
BAKEOFF-CENTER
%
Pull Force (gm)
Effect of 80 hours of 156/85 HAST vs 156/0 Bakeand Centered vs Off-Centered Bonds on Wire Pull Test Data
Source: G. Shirley and M. Shell-DeGuzman, IRPS, 1993
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Component Reliability, ECTC, May 1996 49
Moisture-Related Gold Bond Degradation
0 2 4 6 8 10 12 14 16 18 200.010.1
1
10
305070
90
99
99.999.99
POLYIMIDEOFF-CENTER
POLYIMIDECENTERED
NO-POLYIMIDE CENTERED: SQUARE OFF-CENTER: TRIANGLE
%
Pull Force (gm)
Wire Pull Strength of Polyimide vs No Polyimide and Centered vs Off-Centered Bonds after 40 hours of 156/85 HAST
Source: G. Shirley and M. Shell-DeGuzman, IRPS, 1993
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Component Reliability, ECTC, May 1996 50
Moisture-Related Gold Bond Degradation
20 40 100 200 400 1E3 2E320
40
80
100
Hours
121/100135/85
17hr 156/85 + x 156/65156/85
F50(gm)
Source: G. Shirley and M. Shell-DeGuzman, IRPS, 1993
bam Q
=
= ×= =
112 7113 100 98 115
010
... ; .
gm (gm- hrs)
eV
-1
Fat b
a a h Q kT
F F Z
m
P P
50 2 2
0
50
11
017
=+
= × × −
= × − ×
=
( ) /
exp( /
exp( )
.
σ
σ
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Component Reliability, ECTC, May 1996 51
10μ
Logic Failure Due to Passivation Damage
Site of failing bit. SRAM after HAST stress. After polyimide removal and light buffered oxide etch.
Courtesy M. Shew, Intel
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Component Reliability, ECTC, May 1996 52
Etch-decorated cross-section of passivation. Note growth seams.
2 μ
Logic Failure Due to Passivation Damage
2 μ
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Component Reliability, ECTC, May 1996 53
Logic Failure Due to Passivation Damage
Vthreshold
Row
Column
Vthreshold
ColumnRow
Source: C. Hong, Intel
SRAM VOLTAGE THRESHOLD MAP FOR CELL PULLUP TRANSISTOR(Baseline threshold is 0.89 V. Passivation is 0.6 μ nitride, no polyimide.)
After 120 h 156/85. 4 failed bits with Vt > 2.5 V
2 bits recover after further 2 hr bake at 150 C
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Component Reliability, ECTC, May 1996 54
Logic Failure Due to Passivation Damage
30 100 1E3 1E40.5
1
10
30
50
70
90
%
Hours
85/85, standby140/85, standby140/85, no bias156/85, standby156/85, active
156/85, no biasModel: 85/85 standbyModel: 140/85 standbyModel: 140/85 no biasModel: 156/85 standbyModel: 156/85 activeModel: 156/85 no bias
Source: G. Shirley and C. Hong, Intel
AF a bV H Q kT
a b m Q
m= × + × × −
= = = =
Constant
eV
( ) exp( / )
. . . .0 24 014 4 64 0 79
SRAM HAST and 85/85 Bit Failures (No Polyimide)
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Component Reliability, ECTC, May 1996 55
Logic Failure Due to Passivation Damage99.9
99
90
50
10
0.1
% Fail
1
40 100 400 1K 2K 4K 10KTime in HAST
140/85130/85121/100120/8585/85
10
• Bit Failures in 256K EPROMsafter Temperature-Humidity(no Bias) Stress at VariousConditions.
• Bimodal distribution due topassivation damage on earlyfailures.
• 85/85 Data shows broaderdistribution due tocontamination.
Source: Danielson, et al. IRPS, 1989
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Component Reliability, ECTC, May 1996 56
Logic Failure Due to Passivation Damage• Principles of passivation design: Hermeticity and
Mechanical Protection
• PECVD Silicon Nitride is effectively impermeable except for defects.
• Scratches or growth defects allow moisture to penetrate.
• Moisture reaching circuit causes logic failure
• Corrosion rarely seen - today, defect effects dominate
• Strong bias effects are typical for logic circuits
• EPROMs have "built-in" bias
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Component Reliability, ECTC, May 1996 57
THB Models from Steady-State Experiments
• Fundamental environmental parameters are T, H and V, at the site (at the die, “j”) of the failure mechanism. So
• A convenient special case of this formula is “Peck’s Model”:
• Find a, b, m, Q from experiments with steady-state stress and negligible power dissipation.
AF f T H Vj j= ( , , )
AF a b V H Q kTjm
j= + × × × −( ) exp( / )
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Component Reliability, ECTC, May 1996 58
Moisture Transport in Plastic
• Vapor Pressure and Calculation of Relative Humidity
• Diffusion and Absorption of Moisture in Molding Compound
• Needed for calculation of accelerations in non-steady-state moisture stress.
• Needed for calculation of “popcorn” internal package pressure.
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Component Reliability, ECTC, May 1996 59
Vapor Pressure and Relative Humidity
or
What is Psat?
Where
λ = 2262.6 joule/gm (latent heat of vaporization)
M = 18.015 gm/mole, R = 8.32 joules/(mole K), k = 8.617x10-5 eV/K
HT
T=
Actual water vapor pressure at temperature Saturated water vapor pressure at temperature
P H P TH O sat2= × ( )
P T PM
RTP
QkT
Qk M
RP
Psat eV( ) exp exp .= −⎛⎝⎜
⎞⎠⎟ = −
⎛⎝⎜
⎞⎠⎟ = =0 0 0 42
λ λ
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Component Reliability, ECTC, May 1996 60
Vapor Pressure and Relative Humidity
200 160 120 100 80 60 40 20 0.01
.02
.04
.1
.2
.4
1
2
4
10
Temperature in deg C (Arrhenius Scale)
Pressure
Water Vapor
Liquid Water
Coexistence of liquid and vaporQ = 0.42 eV
(Atm)
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Component Reliability, ECTC, May 1996 61
Vapor Pressure and Relative Humidity
An accurate formula for Psat (in Pascals) is
which is accurate to better than 0.15% in the range 5 C< T < 240 C.
P T a x xT
a aa a
sat nn
n( ) exp ,
(. .. .
= × ×⎛⎝⎜
⎞⎠⎟ =
+ °
= = − ×
= − × = ×
=∑1000
1273
16 033225 35151386 102 9085058 10 50972361 10
0
3
0 13
25
36
C)
, ,,
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Component Reliability, ECTC, May 1996 62
Vapor Pressure and Relative Humidity• Example: Relative humidity at “hot” die in steady
state.Partial pressure of water vapor is the same everywhere:
So RH at die is given by:
Where the ratio, h is defined as:
and can be plotted...
P PH O H O2 2die ambient( ) ( )=
H P T T H P T( ) ( ) ( ) ( )die ambientsat ambient ja sat ambient× + = ×Δ
H h H( ) )die (ambient= ×
hP T
P T T=
+sat ambient
sat ambient ja
( )( )Δ
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Component Reliability, ECTC, May 1996 63
Vapor Pressure and Relative Humidity
0 20 40 60 80 100 120 140 160 180 2000.00
0.20
0.40
0.60
0.80
1.00 02
4
6
8
1015
20
3040
R
T(ambient)
Curves labelled with Tja
0.784
Example: At 20/85 and Tja = 4 C, the die is at 24/(0.784x85) = 24/67.
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Component Reliability, ECTC, May 1996 64
Effect of Steady-State Power Dissipation• Superimpose log(H) vs 1/T contour plots
ofPeck model for THB acceleration factor.Partial pressure of water vapor, Psat.
• Contours are straight lines:Peck model: Iso-acceleration contours with slopeproportional to Q/m.Psat: Isobars with slope proportional to Qp
= 0.42 eV.Reference: C. G. Shirley, “THB Reliability Models and Life Prediction for Intermittently-Powered Non-Hermetic Components”, IRPS 1994
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Component Reliability, ECTC, May 1996 65
Effect of Steady-State Power DissipationIso-acceleration contours for example mechanism
(m = 4.6, Q = 0.8 eV) superimposed on water vapor pressure isobars.
Increasing steady-statedissipation (X to Y).Follows isobar.
Typical Climate
Relative slopeQ/m < 0.42 eV: DecelerationQ/m > 0.42 eV: Acceleration.
180 140 100 80 60 40 20 030
40
100
1 0.01
10
100
1K100K
0.01atm0.1 atm1 atm5 atm 4 23
X
Y
RH (%)at Die
Hj
Tj at Die (deg C)
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Component Reliability, ECTC, May 1996 66
Moisture Absorption/Diffusion inMolding Compound
A
L
Zero flux or "die" surface
ACTUAL
MODEL
2L
Surface exposed to ambient.
Surface exposed to ambient.
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Component Reliability, ECTC, May 1996 67
Moisture Absorption/Diffusion inMolding Compound
Diffusion Coefficient:
Henry’s Law:
Saturation Coefficient:
Source: Kitano, et al IRPS 1988
D DQkT
D Qdd= −
⎛⎝⎜
⎞⎠⎟ = × =−
0 054 7 10 050exp . / sec . m eV2
M PS HP Ssat sat= =
S SQkT
S Qss=
⎛⎝⎜
⎞⎠⎟ = × =0 0
42 76 10 0 40exp . . mole / m Pa eV3
M HP SQ Q
kTQ Qsat
s ps p=
−⎡
⎣⎢
⎤
⎦⎥ − = −0 0 0 02exp
( ). eV
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Component Reliability, ECTC, May 1996 68
Moisture Absorption/Diffusion inMolding Compound
0.00 0.20 0.40 0.60 0.80 1.000.00
0.20
0.40
0.60
0.80
1.00
Fourier Number = Dt/L^2
Concentration at Die Surface (C)
Total Weight Gain (M)(C-Cinit)/(Ceq-Cinit)
(M-Minit)/(Meq-Minit)
or
0.8481
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Component Reliability, ECTC, May 1996 69
Step-Function Stress
T (deg C)
Package MoistureTime Constant
t
LD
QkT
d
mc
( )
. exp
sat =
⎛
⎝⎜
⎞
⎠⎟0 8481
2
0
Typical Moisture Time Constants (Hours)
220 180 140 100 60 40 20 1
2
4
10
20
100
200
400
1K
TSOP (12 mils)
PQFP (37 mils)
DIP, PLCC (50 mils)
Normal Operating Range
TSOP
L
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Component Reliability, ECTC, May 1996 70
0
500 20 40 60
380 460
540 0
500 20 40 60
280 360
440 520
T(ambient) = 100 CH(ambient) = 85%t(sat) = 28 hours
T(ambient) = 60 CH(ambient) = 85%t(sat) = 153 hours
Cj
Moles/m3 Moles/m3
Hours Hours
mils mils
Cyclical StressOne-Dimensional Diffusion Equation Solutions
8 hours on, 16 hours off cycling for PDIP
Moisture concentration at the die is constant if Period << t(sat)
Tja = 20C
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Component Reliability, ECTC, May 1996 71
Cyclical Stress“Fourier-Durations”A B A B
tA tB tA tB
TA,mc
TB,mc
τ τAA mc A
BB mc BD T t
LD T t
L=
×=
×( ) ( ), ,2 2
MoldingCpd.Temp.
Package MoistureConc.
Moisture ConcentrationNext to Die Cj
Moisture Concentration atPackage Surface CA,c and CB,c
Conc. at die is Fourier-duration-weighted sum of
surface concs.:
CC C
jA A c B B c
A B=
++
τ ττ τ
, ,
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Component Reliability, ECTC, May 1996 72
Quasi-Periodic Stress• Result also applies to quasi-periodic stress, and
and arbitrary geometry:
• So calculate the relative humidity at the die in each part of the cycle and thence find the average acceleration factor...
Moisture Saturation Time Constant
Package SurfaceMoisture Conc., Cc
Package MoistureConc. at Die, Cj
Temperature ofMolding Compound
Tmc
“A”
“B”
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Component Reliability, ECTC, May 1996 73
Time-On Factors
r = proportion of time in A-cycle. TA,a HA,a TB,a HA,a are ambient conditions.
AF TOF AF TOF AFA B( ( ) ( )Average) Steady - State A Steady - State B= × + ×
TOF rr WXY r
r W r
mA = ×
+ −+ −
⎧⎨⎩
⎫⎬⎭
( )( )
11
TOF r W X Y r rW r r
mB = − ×
+ −+ −
⎧⎨⎩
⎫⎬⎭
− − −
−( ) ( )( )
1 11
1 1 1
1
WD TD T
XS TS T
YH P TH P T
B mc
A mc
B mc
A mc
B a sat B a
A a sat A a= = =
( )( )
( )( )
( )( )
,
,
,
,
, ,
, ,
There is no dependence on package geometry or cycling frequency.Except the condition that t(sat) >> Cycle Period
AmbientCycling Factor
Molding CompoundTemperature Cycling Factor
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Component Reliability, ECTC, May 1996 74
ExampleA-cycle: Bias off, no acceleration.
B-cycle: Bias on, various power dissipations.Model: a = 0, Q = 0.79 eV, m = 4.64, Qs = 0.4 eV, Qd = 0.5 eV
“On some of the time” can be much more accelerated than “On all of the time.”Correction to “steady-state” increases with decreasing temperature.
Tja = 20 CTja = 20 CTambient = 60 C Tambient = 25 C
r rFraction of time on.
Time-On Factor
0.0 0.2 0.4 0.6 0.8 1.0 0246810 12 14
0.0 0.2 0.4 0.6 0.8 1.0 0246810 12 14
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Component Reliability, ECTC, May 1996 75
Internal Moisture Models: Conclusions• log(H) vs 1/T plot shows how steady-state power
dissipation affects THB acceleration. Q/m </> 0.42 eV for de/ac-celeration with increasing Tj.
• For quasi-periodic “use”, steady-state acceleration is modified by a “time-on-factor” (TOF).
• TOF corrections for power cycled quasi-periodic “use” conditions, can be much larger than predicted by “proportional time-on”.
• Many applications involve “rapid” power and ambient cycling of non-hermetic encapsulated components. TOF corrections must be used for accurate life prediction calculations.
• Good News! There’s a simple formula for TOF valid for nearly all “use” conditions, and package geometries.
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Component Reliability, ECTC, May 1996 76
Thermomechanical Mechanisms
• Die cracking in ceramic packages• Cracking in plastic packages
Temperature CycleMoisture Transport“Popcorn effect” in plastic Surface Mount Devices
• Bond damage (wire and TAB)• Thin Film Cracking (TFC) in plastic• Thin Film Delamination (TFD) in plastic
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Component Reliability, ECTC, May 1996 77
Material Properties Influencing Temperature Cycling-Induced Failure
Mechanisms
Material Thermal Coeffic’tof Expansion
(ppm/°C)
Young'sModulus(GPa)
ThermalConductivity
(W/m °C)
CopperAlloy 42SiliconMolding Compound
Alumina
1753
21
6.5
11914513118
25
151570.6
25
398
PC Board 15-17 11 25
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Component Reliability, ECTC, May 1996 78
Die Cracking in Ceramic Package
Die crack initiated at edge void after temperature cycle
Die crack in ceramic photo here
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Component Reliability, ECTC, May 1996 79
Die Cracking in Ceramic Package
Edge Void Center Void
40
20
0
-20
-40
-60
0 20 40 60Distance from die edge (mils)
TENSILE
COMPRESSIVE
Edge VoidCenter Void
Longitudinal Stress 0.5 mils inside SiliconSx
Au-Si Eutectic
Alumina
SiTensile stress in silicon as a function of distance from die edge and center voids. (PSI per deg C, Sx).
Source: S. S. Chiang and R. A. Shukla, “Failure Mechanism of Die Cracking Due to Imperfect Die Attachment,” Electronic Components Conference, 1984.
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Component Reliability, ECTC, May 1996 80
Die Cracking in Ceramic Package
• Root cause of die cracking is EDGE void• FEA predicts large tensile stress near edge void• Voids result when die backside fails to wet• Flash Time well correlated to backside wetting• Factors affecting wettability
Oxygen concentration in Cr layerRoughness of back side of dieDegree of backside oxidationAssembly process
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Component Reliability, ECTC, May 1996 81
Die Cracking in Plastic Package
Backside damage induced die crack
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Component Reliability, ECTC, May 1996 82
Die Cracking in Plastic Package(Temperature Cycle)
• Stresses of a thermo-elastic nature are inevitable.• Result of thermal mismatch.• Stresses controlled by:
Material selection.Die attach adhesive thickness (BLT).Voids in die attach.Thickness of mold compound above and below and below die surface.
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Component Reliability, ECTC, May 1996 83
Die Cracking in Plastic Package(Temperature Cycle)
• Silicon damage increases local stress concentration
Wafer grindWafer sawEjector pin damage
• Not an issue with current materials.
• Seen after temperature cycle/shock.
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Component Reliability, ECTC, May 1996 84
Cracking in Plastic Packages Due to Temperature Cycle
ShearStress
NormalStress
Crack
Die EdgeWith crack
Without crack
With crack
Without crack
Void & cracksBond and TFC damage
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Component Reliability, ECTC, May 1996 85
Cracking in Plastic Package
Package crack starts at die edge
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Component Reliability, ECTC, May 1996 86
Delamination and Cracking Around Leadframe
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Component Reliability, ECTC, May 1996 87
Cracking in Plastic Packages(Temperature Cycle)
• Generic issue for epoxy/novolac and other thermosetsNot a large issue in through-hole mountingStress concentrations important
VoidsLocal stress multiple of nominal stressMultiplier depends on radius of curvatureTimoshenko shows 3X for circular hole in tension
Burrs• Surface Mount process aggravates cracking
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Component Reliability, ECTC, May 1996 88
Cracking in Plastic Packages• Temperature cycling or “Popcorn” effect causes cracks
and delaminations to propagate.• After cracking:
Cracks and delaminations redistribute stresses in package.
Shear stresses increase - especially at die corners.
Normal stresses become locally tensile at die corners.
Bond and wire damage occurs because of increased shear and tensile normal stresses.
Understanding molding compound crack propagation/delamination is key to understanding T/C and popcorn acceleration models.
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Component Reliability, ECTC, May 1996 89
Acceleration of Temperature-Cycle Induced Package Cracking
• Obeys Coffin-Manson formula with ΔT = maximum difference from neutral stress temperature.
• For T/C, the low temperature has the main effect.
m: Depends on fracture properties of material/interface.
AF TT
m
T T T
T T use T
T
accelerated
use
accelerated min neutral
use min neutral
neutral
=⎛⎝⎜
⎞⎠⎟
= −
= −
= ≈ °
ΔΔ
Δ
Δ
( )
( )
accelerated
Zero stress temperature ( 170 C)
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Component Reliability, ECTC, May 1996 90
Acceleration of Temperature-Cycle Induced Package Cracking
• Crack propagation properties depend on formulation -“low stress” molding compounds.
Encapsulant B
Encapsulant A
-55 C to 150 C
50%
100%
Cum Fail
Cycles200 400 600 800
Source: A. Nishimura, et. al. “Life Estimation for IC Packages Under Temperature Cycling Based on Fracture Mechanics,” IEEE Trans. CHMT, Vol. 10, p637 (1987).
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Component Reliability, ECTC, May 1996 91
Acceleration of Temperature-Cycle Induced Package Cracking
T/C of 600 mil Alloy 42 DIPsEncapsulant B
-55 C to 110 C
-15 C to 150 C50%
100%
50 100 150Cycles
CumFail
50 100 150Cycles
50%
100%
CumFail
Encapsulant B
-55C to 110C
-55C to 50C
-55C to 150C
Effect of Minimum Temperature(Constant Temperature Amplitude)
Effect of Temperature Amplitude(Constant Minimum Temperature)
Source: A. Nishimura, et. al. “Life Estimation for IC Packages Under Temperature Cycling Based on Fracture Mechanics,” IEEE Trans. CHMT, Vol. 10, p637 (1987).
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Component Reliability, ECTC, May 1996 92
Acceleration of Temperature-Cycle Induced Package Cracking
Tensile Test of Notched Samples
• Measure crack growth rate for sinusoidal load:
• Plot crack growth rate da/dN versus ΔK on log-log plot to determine Coffin-Manson exponent, m:
Notch
CrackLoadLoad a
m ≈ 20
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Component Reliability, ECTC, May 1996 93
Acceleration of Temperature-Cycle Induced Package Cracking
0.5 1 2 3Stress Intensity Factor Amplitude
da/dNCrack Growth Rate
mm/cycle
1E-1
1E-2
1E-3
1E-4
1E-5
1E-6
Encapsulant A
150C
25C
-55C
Slope of lines on log-log plot
ΔK MPa m( )
Source: A. Nishimura, et. al. “Life Estimation for IC Packages Under Temperature Cycling Based on Fracture Mechanics,” IEEE Trans. CHMT, Vol. 10, p637 (1987).
m ≈ 20
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Component Reliability, ECTC, May 1996 94
Acceleration of Temperature-Cycle Induced Package Cracking
• The rate of crack propagation is given by
• In plastic packages under temperature cycling, the stress concentration factor is given by
• Where α is the thermal coefficient of expansion of the material in question.
dadN
K m= × Constant ( )Δ
ΔK T T= × − × − Constant molding compound silicon min neutral( ) ( )α α
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Component Reliability, ECTC, May 1996 95
Cracking of Plastic Surface-Mount Devices (SMDs) - “Popcorn Effect”
Moisture Absorbtion
Moisture Vaporization
a t
Delamination VoidPressure in Void = P
Plastic Stress Fracture
Collapsed Voids
Bond Damage
During Storage
During Solder
Pressure Dome
Package Crack
Plastic package cracking due to “popcorn” effect during solder reflow
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Component Reliability, ECTC, May 1996 96
Cracking of Plastic Surface-Mount Devices - “Popcorn Effect”
Plastic package cracking due to “popcorn” effect during solder reflow
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Component Reliability, ECTC, May 1996 97
Cracking in Plastic Surface-Mount Packages - “Popcorn Effect”
A7 A9
A8
Pulse-echo acoustic image throughback of 68PLCC that developed
popcorn cracks during solder reflow
Acoustic B-scan
SEM of cross section
B-Scanline
Source: T.M.Moore, R.G. McKenna and S.J. Kelsall,in “Characterization of Integrated Circuit Packaging Materials”, Butterwoth-Heinemann, 79-96, 1993.
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Component Reliability, ECTC, May 1996 98
Cracking in Plastic Surface-Mount Devices
Acoustic time-of-flightimage indicatingpackage crack
Real-time x-ray image showingdeformation in wires where
they intersect the crack
Source: T.M.Moore, R.G. McKenna and S.J. Kelsall,in “Characterization of Integrated Circuit Packaging Materials”, Butterwoth-Heinemann, 79-96, 1993.
132 lead PQFP which was damagedduring solder reflow.
Pulse-echo acousticimage through top
(delamination in black)
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Component Reliability, ECTC, May 1996 99
Cracking/Delamination of Plastic SMDs - “Popcorn Effect”
• Factors influencing cracking & delamination:
Peak temperature reached during solderingMoisture content (percent weight) of molding compoundDimensions of die paddleThickness of molding compound under paddleAdhesion of molding compound to die and/or lead frameMold compound formulation
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Component Reliability, ECTC, May 1996 100
• A crack propagates to the surface when maximum bending stress σmax exceeds a fracture stress characteristic of the molding compound
• σcrit depends on molding cpd. formulation, and on temperature (see next slide).
• Maximum bending stress occurs at center of long edge of die and is given by: Source: I. Fukuzawa, et. al.
“Moisture Resistance Degradation of Plastic LSIs by Reflow Solder Process,” IRPS, 1988
Cracking/Delamination of Plastic SMDs - “Popcorn Effect”
σ σmax ( )> crit reflowT
σ max = × × ⎛⎝⎜
⎞⎠⎟
×62
K at
P
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Component Reliability, ECTC, May 1996 101
Source: Kitano, et al. IRPS, 1988
σcrit is proportional to molding compound strength
Cracking/Delamination of Plastic SMDs - “Popcorn Effect”
50 100 150 200 2500
20
40
60
80
100
Temperature (deg C)
Molding CompoundStrength (MPa)
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Component Reliability, ECTC, May 1996 102
• K is a geometrical factor (K = 0.05 for square pad).
• P is the internal pressure. Depends on
Moisture content of molding compound (depends in turn on RH and temp. of previous soak ambient).
Peak temperature during reflow.
Cracking/Delamination of Plastic SMDs - “Popcorn Effect”
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Component Reliability, ECTC, May 1996 103
Calculation of Internal “Popcorn” Pressure
μρ
ρμ
μ
( , )( )
( ) ( )( ) ( )
( )( , )( )
x tt
P t R T tH P T S T
t x
P tt
S T
sat
≡≡
= × × == × × ≡
> =
=
Concentration Profile in Molding Cpd. Moisture Concentration in Cavity
Cavity Pressure Initial Moisture Conc. In Mold. Cpd.
For the boundary condition at is:
cav
0
cav
1
0 0 0
1
0 00
Cavity Molding Compound AmbientImpermeable
Surface
BeforeShock (T0)
AfterShock (T1)Time = t
x = -l x = w
μ ( , )x t
ρ ( )t
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Component Reliability, ECTC, May 1996 104
Ref. H. S. Carslaw and J.C. Jaeger, “Conduction of Heat in Solids,”Oxford 2nd ed. (1986) pp128-129.
μ εμ
γ γ εγ γ
γ γ γ εγ γ
( , ) exp( )sin[ ( )]( )sin
( )exp( )sin[ ( )]( )
f T ST S
c fc c
SS
c fc c
n n
n nn
n n n
n nn
0
1 1
0 0
2
2 21
1
0
2 2 2
2 21
1 1 2 1
1 1 2 1
= + −⎡
⎣⎢
⎤
⎦⎥ ×
× × − −+ +
+ −⎡
⎣⎢
⎤
⎦⎥ × −
× + − −+ +
⎧⎨⎩
⎫⎬⎭
=
∞
=
∞
∑
∑
wx
wtDf
c
SRTc
n
≡≡
=
=
ε
γγγ
Number);(Fourier and
tan of roots are and
where
21
11
l
Calculation of Internal “Popcorn” Pressure
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Component Reliability, ECTC, May 1996 105
Mole/m^350 150 250 350
Water Concentration ProfileCavity = 0.05 mm, Precond = 25/85, Tsolder = 215 C
1
0.1
10
100
1000
Time(sec)
0 (Mold cpd/cavity interface)-0.05 0.15 0.35 0.55 (mm)
Cavity Water VaporConcentration
Package Thickness = 0.60 mm
Calculation of Internal “Popcorn” Pressure
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Component Reliability, ECTC, May 1996 106
Example:• Unit preconditioned in 85/85 for a long time, then
subjected to 215 C solder shock.• Saturation coefficient has activation energy of 0.4
eV. (eg. Kitano et. al.)• Steam table pressure at 85 C is 0.57 atm.
P H P T S TS Tw tcav or satl→ →∞ →⎯ →⎯⎯⎯⎯⎯⎯ × ×0 0 0 0
0
1; ( ) ( ) ( )
( )
Pcav -5
eV8.62 10 eV/ K
Atmospheres
= × ×× ° +
−+
⎛⎝⎜
⎞⎠⎟
⎧⎨⎩
⎫⎬⎭
=
085 0570 40 1
273 851
273 215153
. . exp.
.
Calculation of Internal “Popcorn” Pressure
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Component Reliability, ECTC, May 1996 107
0 10 20 30 40 50 60 70 800
100
200
300
400
Plastic Thickness, t (mils)
Pad Size, a(mils)
a/t = 4.5
Package Cracking
No Package Cracking
Cracking sensitivity of PLCC packages after saturation in 85/85followed by vapor-phase reflow soldering at 215 oC
Cracking/Delamination of Plastic SMDs - “Popcorn Effect”
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Component Reliability, ECTC, May 1996 108
Die surface delamination in plastic package after moisture saturation followed by vapor-phase reflow soldering at 215 oC
Cracking/Delamination of Plastic SMDs - “Popcorn Effect”
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Component Reliability, ECTC, May 1996 109
Die paddle delamination, showing broken bond, in plastic package after moisture saturation followed by vapor-phase reflow soldering at 215 oC
Cracking/Delamination of Plastic SMDs - “Popcorn Effect”
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Component Reliability, ECTC, May 1996 110
• For pre-soak at 85/85, 215 C peak temperature, and specific molding compound, a/t = 4.5 for crack propagating to surface.
• σcrit for other damage (wires, bonds) will be less than for cracks propagating all the way to the surface of the package.
But the same model can be used.
Cracking/Delamination of Plastic SMDs - “Popcorn Effect”
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Component Reliability, ECTC, May 1996 111
• Dimensional ratios are importantFukuzawa's paper (IRPS 1985)Jeopardy if (flagsize/epoxy thickness)>5, for 168 hour 85/85 presoak and 215C solder shock.Pad depression and/or heat spreader exacerbate jeopardyBoth decrease epoxy thickness from flag to exterior
• Recent data indicate thin package with larger paddle is less sensitive (Van Doorselaer, IRPS 1993)
Cracking/Delamination of Plastic SMDs - “Popcorn Effect”
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Component Reliability, ECTC, May 1996 112
• Ways to reduce/eliminate delamination:Through holes Blind holes with intersecting patterns/depth profilesPolyimide wafer coat promotes adhesionLeadframe plating (Ni or ??) promotes adhesionChemical improvement of surface adhesion?
Cracking/Delamination of Plastic SMDs - “Popcorn Effect”
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Component Reliability, ECTC, May 1996 113
Other Thermomechanically-Induced Mechanisms
• We have seen that package cracks and delaminations are induced by
Temperature CyclingPopcorn Mechanism
• Package components “get in the way” ofpackage cracks, causing:
Wire DamageBond FailureThin-Film Cracking
• Let’s look at the previous package cross-sections on a scale of 10s of microns...
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Component Reliability, ECTC, May 1996 114
Effect of Package Cracking and Delamination on Wires, Bonds, and
Passivation Films
Au
Substrate DamageSilicon
Shear
Normal (tensile)
Crack
Wire Shear
Thin-Film Cracking
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Component Reliability, ECTC, May 1996 115
Bond Damage: Wires andBall Bonds
• Cracks can intersect wires,TAB leads.• Bonds can be sheared at the bond/pad
interface• Shear and tensile normal stress can break
wires at their necks.• Substrate cracks induced during bonding can
propagate and cause “cratering” or “chip-out”.
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Component Reliability, ECTC, May 1996 116
Wires sheared by wire crack
Bond Damage: Wire Shear
(Open)
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Component Reliability, ECTC, May 1996 117
Ball bonds in plastic package after temperature cycle
Bond Damage
Sheared Bond Unfailed Bond
Die Corner20 μ
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Component Reliability, ECTC, May 1996 118
Necking Damage
Bond Damage
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Component Reliability, ECTC, May 1996 119
Necking fracture
Bond Damage
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Component Reliability, ECTC, May 1996 120
Delamination induced down bond fail after temperature cycle
Bond Damage
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Component Reliability, ECTC, May 1996 121
Cratering damage on bond pads
Bond Damage
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Component Reliability, ECTC, May 1996 122
Bond shear at die corners after temperature cycle
Bond Damage
Die
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Component Reliability, ECTC, May 1996 123
Bond Damage and Delamination
A7 A9
A8
Pulse-echo acoustic image of mold compound/ die interface in four devices. Delamination is shown in black. White boxes added to show locations of low bond wire pull strength results.
44 PLCC devices that failed after solderreflow and 1000 cycles (-40 to 125C)
Intermetallic fracture at bond due toshear displacement.
Source: T.M.Moore, R.G. McKennaand S.J. Kelsall, IRPS 1991, 160-166.
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Component Reliability, ECTC, May 1996 124
Cu Lead
Silicon
Substrate Crack
Ti barrier Au bump
Al pad
Au bump
Etch
Barrier crack and Au/Al intermetallic
Crater
Cu Lead
TAB cratering and diffusion barrier damage revealed by wet etch.
Bond Damage (TAB)
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Component Reliability, ECTC, May 1996 125
TAB bonds Au/Al intermetallic formed at cracks in Ti barrier
Bond Damage (TAB)
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Component Reliability, ECTC, May 1996 126
Crater under TAB bonds
Bond Damage (TAB)
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Component Reliability, ECTC, May 1996 127
Factors Affecting Bond Cratering
• Package mechanicsAmplitude/cycles of T/C
“Popcorn” severity
Reflow temperature
Moisture content of plastic
Package geometry
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Component Reliability, ECTC, May 1996 128
• Pad metallization
Cratering not seen in pure Al.
During bonding Si precipitates in Al-1% Si create nucleation sites for substrate cracks.
Ti barrier under Al-1%Si is a fix since it prevents precipitation of Si nodules at metal/dielectric interface.
Factors Affecting Bond Cratering
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Component Reliability, ECTC, May 1996 129
• Substrate dielectric filmsCratering more prevalent with softer filmsRank order for incidence of cratering:
PSG - 11% PPSG - 7% PPSG 0% PField OxideNitride
Less Cratering
Factors Affecting Bond Cratering
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Component Reliability, ECTC, May 1996 130
• Bond Cratering is insidious because it is not usually detectable by electrical measurements.
• Wire pull or bond shear measurements are necessary to detect zero-strength bonds.
• Even zero-strength bonds have resistances of 10s of ohms (vs 1 or 2 ohms for good bonds).
• A ZERO-STRENGTH BOND IS A FAILED BOND -even if the device is electrically good.
• Why? Because devices with zero strength bonds may fail intermittently.
Factors Affecting Bond Cratering
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Component Reliability, ECTC, May 1996 131
• Trace-Via Cracking Opens resulting from trace to via interface cracking on PPGA packages with multi-level organic substrateSeen after Temperature cycle
• Chip Cap Solder AttachCracking in solder joint after temperature cycleReduced capacitance resulting from cracking in the solder joint
Thermomechanical Mechanisms in Organic Packages
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Component Reliability, ECTC, May 1996 132
T V C r a c k
M e t a l T r a c e
P l a t e dP i nB a r r e l
Pin
Trace-Via Cracks after 1000 TC “B”
Thermomechanical Mechanisms in Organic Packages
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Component Reliability, ECTC, May 1996 133
Chip capacitor solder joint cracking after temperature cycle
Thermomechanical Mechanisms in Organic Packages
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Component Reliability, ECTC, May 1996 134
Trace-Via Cracks• Cu interface joining substrate traces and pin
vias fail.Total trace thickness not sufficient. Thickness increased to 30 μ.
Chip Cap Attach• Capacitor fails at solder attachment
Causes traced to low solder fillet height.Solder volume increase to insure 50% solder fillet height.
Thermomechanical Mechanisms in Organic Packages
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Component Reliability, ECTC, May 1996 135
Thin-Film Cracking (TFC) in Plastic Packages
Au
Substrate DamageSilicon
Shear
Normal (tensile)
Crack
Wire Shear
Thin-Film Cracking
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Component Reliability, ECTC, May 1996 136
Die Surface
Replica in Plastic
Plastic conforms to die surface.
Thin-Film Cracking (TFC) in Plastic Packages
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Component Reliability, ECTC, May 1996 137
A B
Cracks
Die Corner
Channel
Aluminum
Polysilicon
SiO2PSG
PassivationCrack Crack BA
Shear stress applied to passivation
Aluminum
Polysilicon
Die center
Thin-Film Cracking (TFC) in Plastic Packages
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Component Reliability, ECTC, May 1996 138
Thin film cracking after temperature cycle
Thin-Film Cracking (TFC) in Plastic Packages
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Component Reliability, ECTC, May 1996 139
1 micron
Passivation delamination crack propagates into substrate...Source: K. Hayes, Intel
Thin-Film Cracking (TFC) in Plastic Packages
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Component Reliability, ECTC, May 1996 140
• Factors Affecting TFC
T/C Amplitude and number of cycles.
Die Size
Metal Buss Width in Die Corners
Passivation Thickness
Compliant overcoat - eg. polyimide
Thin-Film Cracking (TFC) in Plastic Packages
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Component Reliability, ECTC, May 1996 141
Source: C. F. Dunn and J. W. McPherson, “Temperature-Cycling Acceleration Factors for Aluminum Metallization Failure in VLSI Applications,” IRPS, 1990.
Main effect on acceleration is Tmin
95
80
60
40
20
105
21
Cum %Fail
10 100 1000Cycles
-65 C to 150C
-40 C to 85 C
0 C to 125 C125 C Amplitude
Same amplitude
Best Fit: Tneutral = 170 C,m = 11
Factors Affecting TFC:T/C Amplitude and Number of Cycles
Thin-Film Cracking (TFC) in Plastic Packages
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Component Reliability, ECTC, May 1996 142
No Contacts
17 μ contacts
3 μ contacts
21 μ 7 μ 105 μ
Buss Widths
Source: Shirley & Blish, “Thin Film Cracking and Wire Ball Shear...,” IRPS 1987.
Thin-Film Cracking (TFC) in Plastic Packages
Factors Affecting TFC: Buss Width Effect
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Component Reliability, ECTC, May 1996 143
70
50
30
10521
.1
% Fail
10 100 1000Cycles
105 micron bus, no slots or contacts
Busses with slots and/or contacts
Narrow buss, or contacts, stabilizes buss, reduces incidence of TFC.Leads to buss width design rules, and buss slotting in die corners.
Thin-Film Cracking (TFC) in Plastic Packages
Factors Affecting TFC: Buss Width Effect
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Component Reliability, ECTC, May 1996 144
100
80
60
40
20
00.5 0.6 0.7 0.8 1.00.9 1.1Total Passivation Thickness in microns
%Failing
• Fraction of PDIP-packaged SRAM failing.
• Post 1K cycle of T/C C.
• No Polyimide die coat.
• Thicker passivation is more robust.
Source: A. Cassens, Intel
Thin-Film Cracking (TFC) in Plastic Packages
Factors Affecting TFC: Passivation Thickness
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Component Reliability, ECTC, May 1996 145
• SRAM in PDIP• Temperature Cycle Condition C• Polyimide Overcoat
Case 200 cycles 500 cycles 1000 cycles
No Polyimide 0/450 13/450 101/437
Polyimide 0/450 0/450 0/450
Source: A. Cassens, Intel
Thin-Film Cracking (TFC) in Plastic Packages
Factors Affecting TFC: Compliant Overcoat
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Component Reliability, ECTC, May 1996 146
Theory of Thin Film Cracking• Shear stress applied to die surface is maximum at die
corners, and is determined by package mechanics. It is given by σ(passivation surf.).
• Okikawa et. al determined buss width effect, Edwards et al. extended to include passivation thickness effect:
TFC occurs when and where
K = dimensionless constantE = Young’s modulus of passivationt = Passivation thicknessL = Buss width
Sources:Okikawa, et al. ISTFA, Oct. 1983,Edwards, et al. IEEE-CHMT-12, p 618, 1987
Thin-Film Cracking (TFC) in Plastic Packages
σ ( )Passivation Surface > × × ⎛⎝⎜
⎞⎠⎟
K E tL
2
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Component Reliability, ECTC, May 1996 147
• Occurs in Steam (121/100), (not HAST).
• Plastic at die corners applies shear stress
• Films tend to "peel up" at corners.
• Moisture attack at exposed film edges."Peel-up" tendency opens crack.
• Crack propagates into die, disrupting circuit
• Fixes: Edge ring design, film composition
Thin-Film Delamination (TFD) in Plastic Packages
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Component Reliability, ECTC, May 1996 148
10 μ
Delamination at die edge after 168 hours of steam.
Thin-Film Delamination (TFD) in Plastic Packages
Source: C. HongIntel
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Component Reliability, ECTC, May 1996 149
Delamination at die edge after 168 hours of steam.
Thin-Film Delamination (TFD) in Plastic Packages
Source: C. HongIntel
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Component Reliability, ECTC, May 1996 150
Quality and Reliability Analysis
• Quality Modeling.Wirebond placement example.Data acquisition.Monte Carlo simulation.
• Reliability ModelingDefect models scale with extensive attributes (area, etc.)Intrinsic (wearout) models depend on material properties.Extracting models from failure data.AccelerationSeries vs parallel (redundant) models.
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Component Reliability, ECTC, May 1996 151
Yield/Reliability Simulation for Wire Bonding
• Measure physical process capability.Make measurements of bond location and ball size.Use a sample of about 200.Determine distribution of bond center (x,y), and ball diameter, r.
Shape (normal, etc.), Mean, Variance.Determine whether x, y, r are correlated.
• Decide on yield and reliability specification limits.• Calculate yield and latent reliability DPM.
Assume that process is in statistical control.Analytical calculation - difficult, not general.Simulate the process using fitted distribution parameters.
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Component Reliability, ECTC, May 1996 152
Yield/Reliability Simulation for Wire Bonding
Ball can overlap adjacent metal (reliability jeopardy).
xy
r
Bond pad opening.
Ball bond.
Ball can overlap adjacent pad opening - dead short (yield issue)
165 μ
125 μ
155 μ
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Component Reliability, ECTC, May 1996 153
Yield/Reliability Simulation for Wire Bonding
-15 -10 -5 0 5 10 15 0.01
0.1
1
10 20 30 40 50 60 70 80 90
99
99.9
99.99
X: Mean = -0.89, SD = 4.34
Y: Mean = -2.17, SD = 6.75
Cum %
Distance from Center of Pad (microns)
40 42 44 46 48 50 52 54 56 58 60 0.01
0.1
1
10 20 30 40 50 60 70 80 90
99
99.9
99.99
Ideal Process: Mean = 49.32, SD = 2.25
Actual: Mean = 49.73, SD = 3.17
Cum %
Ball Radius (microns)
-20 -15 -10 -5 0 5 10 15 20 -20
-15
-10
-5
0
5
10
15
20
X-Position (microns)
Y-Position (microns)
(x,y) Distributionsr Distribution
• x, y, and r distributions are normal and uncorrelated.
• The parameters of the process in “statistical control” are
x Mean x SD y Mean y SD r Mean r SD0 4.34 0 6.75 49.3 2.25
Outliers
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Component Reliability, ECTC, May 1996 154
Yield/Reliability Simulation for Wire Bonding
r
x
y
d
d
d/2
• Individual bonds are points clustering around the target.
• Bonds inside pyramid pass the criterion.
• Bonds outside the pyramid fail the criterion.
• Integrate an elipsoidal probability function centered on the target over the volume intersected by the pyramid to get DPM. Difficult to do in general. OR..
• Use random number generator to simulate millions of bonds using distribution parameters determined from 200-unit experiment. This is easy!
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Component Reliability, ECTC, May 1996 155
Yield/Reliability Simulation for Wire Bonding
Total Pad Overlap DeadBonds Opening Metal Short
-----------------------------------------------Criterion 0 125 155 165Counts 1000000 70232 68 3
X-Mean X SD Y-Mean Y-SD Dia.-Mean Dia-SD----------------------------------------------
0 4.34 0 6.75 98.64 4.5
procedure(n);/* BONDSIM - n is the number of iterations */
{bnd_tbl = "@bndplace1@bond_param";bnd_results = "@bndplace1@bond_results";xmean = bnd_tbl [1, 1];xsd = bnd_tbl [1, 2];ymean = bnd_tbl [1, 3];ysd = bnd_tbl [1, 4];dmean = bnd_tbl [1, 5];dsd = bnd_tbl [1, 6];do m = 1 to n;
{xcen = xmean + normdev() * xsd;ycen = ymean + normdev() * ysd;rad = 0.5 * (dmean + normdev() * dsd);ball_right = xcen + rad;ball_left = xcen - rad;ball_top = ycen + rad;ball_bott = ycen - rad;do p = 1 to lastcol(bnd_results );
{lright = ball_right > 0.5 * bnd_results [1, p];lleft = ball_left < - 0.5 * bnd_results [1, p];ltop = ball_top > 0.5 * bnd_results [1, p];lbott = ball_bott < - 0.5 * bnd_results [1, p];lfail = lright OR lleft OR ltop OR lbott;if lfail then
bnd_results [2, p] = bnd_results [2, p] + 1;}
}}
Number of Bonds to Simulate
Distribution Parameters
“Numerical Recipes” by W. H. Press, B. P. Flannery, S. A. Teukolsky, W. T. Vetterling, Cambridge UP (1986), p203.
Simulate Normal Deviate (mean = 0, SD = 1).
Results
“Reliability”“Yield”
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Component Reliability, ECTC, May 1996 156
Reliability Statistics
• Several mathematical functions are used to describe the evolution of a population.
• Cumulative distribution function F(t):
Probability that a unit from original population fails by time t
• Survival function S(t) = 1 - F(t):
Probability that a unit from original population survives to time t.
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Component Reliability, ECTC, May 1996 157
Reliability Statistics
0.1 0.2 0.4 1 2 4 10 200.00
0.10
0.20
0.30
0.40
0.50
0.60
0.70
0.80
0.901.00
F(t)S(t)
t/t50
ProbabilitySigma = 1Lognormal Distribution
Cumulative Distribution Function and Survival Function
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Component Reliability, ECTC, May 1996 158
Defect Mechanismsvs Intrinsic Mechanisms
Defect Mechanisms• Affects Infant Mortality• Decreasing Failure Rate• Scales with Area, etc.
Intrinsic (Wearout) Mechanisms• Affects Long-Term Reliability• Increasing Failure Rate• Fails “all at once” - small sigma in log time.
FailureRate
Time
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Component Reliability, ECTC, May 1996 159
Scaling of Defect-Related Mechanisms• Defect counts per device scales with extensive
properties of the product.Die Area, Lead count, Perimeter of dielectric edge in package, etc.Areal defect density, Defects per lead, Defects per length of perimeter in package, etc.
Leadframe
Power Plane Ground Plane
Lead count(Defects per lead)
Insulator edge(Defects per cm)
Die Area(Defects per unit area)
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Component Reliability, ECTC, May 1996 160
Reliability Statistics• Multiple failure mechanisms (series)
If the earliest occurrence of a mechanism is fatal, then the device is logically a chain:
DefectMechanism
1
DefectMechanism
2
DefectMechanism
3
IntrinsicMechanism
1
IntrinsicMechanism
2
IntrinsicMechanism
3
Etc.
S S STotal Mechanism 1 Mechanism 2= × ×....
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Component Reliability, ECTC, May 1996 161
Reliability Statistics• Multiple failure mechanisms (parallel)
If failure only occurs when all elements fail the device has redundant elements
Mech 1
Mech 2
Mech 3
Mech 4
...
F F FTotal Mechanism 1 Mechanism 2= × ×....
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Component Reliability, ECTC, May 1996 162
Determination of Weibull Distribution• Order failures in order of time to fail, rank = i.• Calculate cumulative proportion failing (N = total
sample)
• Calculate Weibit Wi for each Fi
• Calculate yi = ln(ti) (Natural logarithm!)• Plot yi vs Wi• Fit line and find intercept and slope
F i N
F i Ni
i
=
= − +
/
( . ) / ( . )
(simplest)
(desirable)0 3 0 4
W Fi i= − −ln( ln(1 )) α is often very large, so quote ln(α) for
convenience.
ln( ) ln( )t Wi i= + ×αβ1
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Component Reliability, ECTC, May 1996 163
PPGA Example• PPGA packages with 8 chip capacitors per DUT
were subjected to temp cycle B and temperature cycle C.
• The package fails when at least one capacitor fails.
100 200 400 1E3 2E3 1000 DPM
1
10
20 30
50 70
90 TCC TCB LogAlpha= 7.28 Beta= 2.61LogAlpha= 8.09 Beta= 2.59
Weibull with two-sided 90.0% confidence limits
CAPS 24-JUL-95 18:55 Page 1
F t c
F t c
F t c
( ) exp
( ) expexp( . )
( ) expexp( . )
.
.
= − −⎛⎝⎜
⎞⎠⎟
⎡
⎣⎢⎢
⎤
⎦⎥⎥
= − −⎛⎝⎜
⎞⎠⎟
⎡
⎣⎢⎢
⎤
⎦⎥⎥
= − −⎛⎝⎜
⎞⎠⎟
⎡
⎣⎢⎢
⎤
⎦⎥⎥
1
17 28
18 09
2 61
2 59
α
β
(T / C C)
(T / C B)Cycles, c
Cum % Fail
Note: β = 2.6 >> 1, so this is a WEAROUT mechanism.
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Component Reliability, ECTC, May 1996 164
PPGA Example, Cont’d• What is the acceleration between T/C B and T/C C?
F t c
F t c
( ) expexp( . )
( ) expexp( . )
.
.
= − −⎛⎝⎜
⎞⎠⎟
⎡
⎣⎢⎢
⎤
⎦⎥⎥
= − −⎛⎝⎜
⎞⎠⎟
⎡
⎣⎢⎢
⎤
⎦⎥⎥
17 28
18 09
2 61
2 59
(T / C C)
(T / C B)
Acceleration undefined unlessshape parameters are the same.They are the same in this case.
Acceleration = = − = =exp( . )exp( . )
exp( . . ) exp(. ) .8 097 28
8 09 7 28 81 2 25
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Component Reliability, ECTC, May 1996 165
PPGA Example, Cont’d• The PPGA package failed when one or more of the
8 capacitors failed.
• What is the survival function of a single capacitor in T/C C?
S t S t c
c c
Capacitor PPGA( ) [ ( )] expexp( . )
expexp ln
..
expexp( . )
.
.
.
= = −⎛⎝⎜
⎞⎠⎟
⎡
⎣⎢⎢
⎤
⎦⎥⎥
= −+⎛
⎝⎜⎞⎠⎟
⎛
⎝
⎜⎜⎜⎜
⎞
⎠
⎟⎟⎟⎟
= −⎛⎝⎜
⎞⎠⎟
18
2 6118
2 61
2 61
7 28
82 61
7 28 8 08
Stays Weibull!
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Component Reliability, ECTC, May 1996 166
100 200 400 1E3 2E3 1000 DPM
1
10
30
50 70
90
TCC PPGA, Series Cap.Single Cap.Redundant Caps.
Weibull with two-sided 90.0% confidence limitsCycles
Cum %Failing
PPGA Example, Cont’d• If this capacitor is used in a device with 8 caps that
only fails if all caps fail, what is S(t)?
S t S tDevice Capacitor( ) [ ( )]= − −1 1 8
Cap
Cap
Cap
Cap
Cap
Cap
Cap
Cap
8 in parallel*(redundant)
8 in series*
SingleCapacitor
* reliability, not electrical, sense!
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Component Reliability, ECTC, May 1996 167
Summary• Quality
Models of manufacturing quality can be established with a small number of measurements.Once the distribution of the key parameter is established simulation can be used to estimate the defectivity associated with various design rule choices.
Note: A large number of pass/fail measurements on many test structures numbers of structures can be avoided.
• ReliabilityAnalysis of typical wearout data was shown.