ca0312a test measurement web
TRANSCRIPT
A e r o t e c h W o r l d w i d eUnited States • Germany • United Kingdom • Japan • China • Taiwan • France
Semiconductor Inspectionand Metrology
Cleanroom and High VacuumSystems
IntegratedAutomationand DataAcquisition
Sensor Testing
SurfaceProfiling
www.aerotech.comDedicated to the Science of Motion
Motion and Automationfor Test, Measurementand Inspection
Capabilities in Test, Measurementand InspectionSince 1970, Aerotech has been dedicated to developing solutions for the test, measurement and inspectionindustry. Our expertise includes systems for shop floor, R&D, vacuum and cleanroom environments. Our ability toprovide custom-engineered products and systems to end users, integrators and high-volume OEMs is unmatched,and our products deliver quality, performance, flexibility and the highest return on investment.
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5• Single- and multi-axis rate tables
• Motion simulator software
• Advanced control techniques
• Excellent rate and in-position stability
Sensor Testing
• Compact surfacemeasurementplatform (SMP)
• Linear amplifiers
• Integrated systemsupport
• Measure wafers,optics and cylindricalshapes
• X-ray inspection
• Ultrasonic testing
• Large selection ofcomponents
• Linear amplifiers
• Linear and rotarymotors
Nondestructive Test 19
Surface Profiling 15
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23• Ellipsometry, scanning white light
interferometry, stylus measurements
• High performance linear motor stages
• Low profile direct-drive vertical and rotary stages
• Vacuum chuck options withintegrated leveling mechanisms
• Linear and PWM digital controllers
Semiconductor Inspection and Metrology
41• Stand-alone and
PC-based controllers
• PLC and motionintegration withMotionPAC
• Operator interface
• Data acquisition –Sensor Fusion
• Advanced tuning andcontrols features
Integrated Automation and Data Acquisition
• Satellite inertialnavigation system testing
• Scanning electronmicroscopy
• Optics polishing
• Vacuum option for 10-3 to 10-8
• Experience with vacuumapplications
35Cleanroom and High Vacuum Systems
4 www.aerotech.com
ContentsWORLD HEADQUARTERSAerotech, Inc.101 Zeta DrivePittsburgh, PA 15238Ph: 412-963-7470Fax: 412-963-7459Email: [email protected]
Aerotech United KingdomJupiter House, Calleva ParkAldermaston, Berkshire RG7 8NN, United KingdomPh: +44-118-9409400Fax: +44-118-9409401Email: [email protected]
Aerotech GermanySüdwestpark 9090449 Nürnberg, GermanyPh: +49-911-9679370Fax: +49-911-96793720Email: [email protected]
Aerotech Japan17-25 1-chomeKitahoncho Funabashi-shiChiba-ken, 273-0864, JapanPh: +81-47-489-1741Email: [email protected]
Aerotech ChinaUnit 3328, 33/F,China Merchants Tower,168 - 200 Connaught Road Central,Hong KongPh: +852-3793-3488Email: [email protected]
Aerotech Taiwan1F No. 42 Lane 128Jing Ye 1st RoadZhongshan District, Taipei City,Taiwan R.O.C. (104) Ph: +886-2-8502-6651Email: [email protected]
Aerotech FranceBP 7004345702 Villemandeur CedexFrancePh: +33-238970830Email: [email protected]
Capabilities in Test, Measurement and Inspection............................................................2
Sensor TestingInertial Sensor Testing and Calibration ............................................................................6Motion Simulators............................................................................................................8General Sensor Testing ....................................................................................................12
Surface ProfilingSurface Measurement Motion Platform (SMP).................................................................16Traditional Profiling and Measurement Solutions .............................................................18
Nondestructive TestX-Ray Inspection ..............................................................................................................20Ultrasonic Testing.............................................................................................................22
Semiconductor Inspection and MetrologyThin Film Measurement ....................................................................................................24Wafer Inspection..............................................................................................................26Atomic Force Microscopes...............................................................................................28Defect Detection/Particle Scanning .................................................................................30Electrical and Magnetic Characterization........................................................................32Reticle Inspection .............................................................................................................33SEM, TEM, FIB .................................................................................................................34
Cleanroom SystemsCleanroom Capabilities ...................................................................................................36
High-Vacuum SystemsVacuum Applications .......................................................................................................38Rotary Test Platform.........................................................................................................40
Integrated Automation and Data AcquisitionAerotech Integrated Automation Solutions ......................................................................42Standard Controls............................................................................................................44Advanced Controls ..........................................................................................................45Data Acquisition Solutions – Sensor Fusion .....................................................................46MotionPAC ......................................................................................................................48A Wide Variety of Amplifier Options...............................................................................50
Rotary and Linear MotionRotary Motion Solutions ..................................................................................................52Linear Motion Solutions ...................................................................................................56Planar Air-Bearing Stages................................................................................................58Nanopositioners ..............................................................................................................60Components to Integrated Solutions ................................................................................64
Bringing Value and Convenience to our Customers ...........65
Engineered Systems...........................................................................66
Capabilities in Other Markets.......................................................68
Worldwide Training and Support................................................70
Awards and Recognition .................................................................71
Copyright © 2012, Aerotech, Inc. Information inthis brochure is subject to change without notice.
SensorTesting
Inertial Sensor Testing and CalibrationRegardless of the size, composition, degrees of freedom or quantity of sensors, Aerotech has a solution for thetesting and calibration of today's inertial sensors. Our solutions are designed to induce sinusoidal excitations,accelerations and positions for the testing and calibration of accelerometers, gyroscopes, inertial navigationsystems, fiber optic gyros, inertial measurement units and stabilized systems. When coupled with our state ofthe art controllers containing Harmonic Cancellation, Motion Simulator Software, Motion Designer Software,Command Shaping and various other advanced control techniques, precise and highly-repeatable testing andcalibration are assured.
Applications• Accelerometers
• Gyroscopes
• MEMS calibration
• Inertial measurement units
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Features and Benefits• High accuracy, direct-drive
motion simulators
• No cogging
• High torque
• Mechanical or air bearings
• Real-time data collection
• Position, rate and oscillationmodes
• User-profile importing
• Easy-to-use programming tools
• Slip-rings or twist cables feedUUT signals/power
• Solutions range fromeconomical single-axis systemsto high-performance three-axissystems
ChallengeMany times a sinusoidal excitation is needed in thetesting or calibration procedure of an inertia device.The very nature of this test introduces errors in themotion at the excitation frequency and other higherorder harmonics. Left uncorrected, these errors canskew test results, lead to poor calibration or triggerunnecessary failures in quality assurance.
SolutionUsing Harmonic Cancellation, which is part of ourDynamic Controls Toolbox, you can easily cancel outany disturbances caused by the excitation frequency oran imbalanced load. This feature adapts to magnitudeand frequency of error source. An easy-to-use setupwizard is provided through the Digital Scope and theMotion Simulator. Aerotech understands thatdisturbances are unacceptable and has developedHarmonic Cancellation for all of our controller lines toeliminate these errors, resulting in the most accuratetesting and calibration results available.
Position error withoutharmonic cancellation
Position error withharmonic cancellation
Advanced Control: Harmonic Cancellation
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Precision Direct-DriveRotary Position andRate Tables• High capacity angular contact
bearings or air bearings
• Highly accurate closed-loopcontrol
• Brushless, slotless motor forsmooth motion with no cogging
• Large selection of integrated,low-noise slip rings for customersignals and power
• Multiple motor types for highspeed or high-torqueconfigurations
• Excellent error motionperformance
• Dual liquid or gas ports
• Low maintenance design
• Position resolution to0.000006° (0.1 μrad)(0.02 arc sec)
ARMS-260
ARMS-200
ARMS-150
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Motion Simulators – GUIKey Features:
• Operate 1,2,3 axis motion simulators
• User-friendly graphical user interface
• Graphical motion profile PVAT (Position, Velocity,Acceleration, Time) importing
• Position Synchronized Output for real-time eventtriggering
• Trajectory tracking from Ethernet, analog orprogram inputs
• Frequency response mode allows input sinesweep and UUT performance tests on customerdevice
• Iterative Learning minimizes position error
• GUI remote client-server mode allows parallelprocessing capabilities and control via Ethernetnetwork
• Harmonic Cancellation optimizes motion positionerrors generated by sinusoidal motion
Motion Designer
Frequency Response
Data Analysis
Main Screen
Program
Track screen allows external signal selection for tracking
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Motion Simulators – Single Axis
PC and Npaq or HLe rack-mountcontrol operation via AerotechMotion Simulation package
TiltMotion
UUT power and signalsroute through slip rings
Area for mountingmultiple UUTs (UnitUnder Test) on ourlarge tabletops forsimultaneous testing
High SpeedRotation orOscillation
ARMS-260
• 500 lb (227 kg) payload capacity
• Unloaded acceleration >20,000°/s2
• Minimum rate 0.001°/s
Single-Axis ARMS SeriesRate Tables
• Single-axis configurations include optional free standing, high stiffness post withleveling feet
• Reconfigurable for continuous or limitedtravel
• Custom slip-ring options available
• Vertical or horizontal orientation options
• Different tabletop size options
High AccuracySingle-Axis Rate Tablewith Tilt Table
• Allows rate table performance atmultiple inclination angles
• Mounted to a gear-drive rotarytable for tilt motion
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Motion Simulators – Two AxisTwo-axis motion simulators are usefulfor simultaneous axis testing of position,rate and acceleration sensors.
Two-Axis Rate Tablewith IntegratedElectronics
• Continuous rotation of both axes
• Smooth motion from non-coggingbrushless, slotless motors
• Power and signalslip rings
• Two rotating gas/liquidports
• Machine baseincludes motioncontroller, lineardigital amps and ESTOP safety controls
Accuracy plotshowing better than±1 arc-sec accuracy(±4.85 μrad)
Continuous Yaw
ContinuousRoll
ESTOPremote forflexible safetylocations
Linear amplifiers andESTOP control integratedinto rack-mount shelf tominimize floor spacerequirement
Remote or integratedPC options
Gyro and inertialdevice testing
Motion Simulators – Three AxisThree-axis motion simulators provideroll, pitch and yaw simultaneousmotion for real-world angular velocity profiles.
• Smaller than traditional three-axissimulators to accommodate today’sminiature MEMS gyros in a muchsmaller footprint
• Modular design based on theARMS rate tables
• Continuous or limited travel options
• Pedestal options
• Single-axis rate tablesintegrated with a heatchamber
• Vertical and horizontalmount available
• Low cycle times fortemperature tests
Each motionsimulator is testedfor accuracy andtilt errors. Typical tilterror is below10 μrad. Typicalaccuracy is ±5-10 μrad.
Continuous Roll,Pitch and Yaw
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General Sensor TestingSensors of all shapes and sizes can be found in virtually every product that is manufactured. Sensors allow theproducts we use to work smarter and safer. The testing of these devices is critical to ensure safe and accurateoperation. Regardless of the sensor type, Aerotech has a solution to meet your testing needs.
Applications• Position sensors
• Infrared detectors
• Automotive sensors
• Pressure sensors
Features and Benefits• Superior velocity stability
• Low settling time
• High throughput
• High accuracy
• Component level to turnkeysystem capabilities
• Numerous stage offerings
• Customizable user interface
• Integrated DevelopmentEnvironment (IDE)
• Advanced controls techniques
Products• APR
• ADRT/ADRS
• PRO series (ball screw andlinear motor)
• AGC
• ACS
• AGS1500
• Custom solutionsAPR
A3200 and Ensemble multi-axismotion controllers
ADRS
PRO165LM
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Variety of Linear Motion Stages for Every Application
ACT115: Low cost, low-lead-time actuators
PRO165LM-XY:Standard XY, XYZ, XYθcombinationsANT130-L:
High resolutionlinear motor stage
MPS75SL:Miniaturegear-drivenlinear stage
EnsembleSeries
SoloistSeries
Broad Selection of Integrated Controllers
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ChallengeToday's sensors can come in manydifferent shapes and sizes with even morevariations in functionality. Developing andmanufacturing devices is your area ofexpertise, and testing and inspectingthose devices is very important. Aerotechunderstands that many times these highlyspecific devices require customizedtesting and calibration solutions.
SolutionOur highly skilled Mechanical, Electricaland System engineers will work with youto design a custom solution to meet yourspecific testing needs. We are capable ofproviding customization on all levels.From special motors to custom stages tocomplete machines with enclosures, safetyand consoles, Aerotech is your one stopshop for all of your custom automationneeds.
AGC Goniometers• Goniometers for unique testing
environments
• Linear amplifiers for delicatetesting environments
• Integrated solutions tominimize startup time
General Sensor Testing
Ndrive Linear Amplifiers(ML, CL, HLe)
SurfaceProfiling
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Surface Measurement Motion Platform (SMP)Aerotech's Surface Measurement Motion Platform (SMP)is a unique solution for surface profiling needs. The SMP isparticularly effective when measuring or testing rotationsymmetric objects but smaller non-rotation symmetricobjects can also be measured. With the small mechanicalfootprint, integrated controls and flexible sensor options,the SMP can be easily added to any laboratory, testingfacility or manufacturing floor. With the R and Theta axesavailable as air bearings or mechanical bearings there isa solution for every budget.
Features and Benefits• Ideal for rotationally symmetric objects
• Includes up to four axes of motion ina compact package
- Available as a mechanical bearing or air bearing solution
• Flexibility to measure top and sidesurfaces as well as flat or sphericalparts
• Mechanical design allows for varioussensor options
- White Light Interferometer- Multi-Wavelength Interferometer- Vision System- Touch Probes
• Compact design is 60% smaller thantraditional Cartesian systems
• High-speed design is 40% faster thantraditional Cartesian systems
• Superior position repeatability in the nm range
• Linear amplifier technology
• Versatile software architecture allowsfor easy integration
• Advanced control techniques toeliminate environmental disturbances
• Available operator interface allowsfor a shorter time to market
Z
TT
C
RR
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ChallengeThe mechanics and controls are only part of acomplete profiling or inspection machine. Sensorintegration, process development and dataacquisition are many times a much larger part of theoverall machine. Many times, coordinating themechanical system position with the sensor valuescan be difficult and time consuming. Incorporatingthe results into a polished user interface is alsonecessary in order to bring the final product tomarket.
Increase rate stability and decrease settle times in the presence ofvibration with Aerotech’s Enhanced Throughput Module (ETM)
SolutionAerotech offers a suite of powerful software toolsthat allow for fast development of a custominterface.
• C#
• VB.NET®
• Managed C++
• LabVIEW®
(VIs provided)
• C Library
• EPICS
• IEC61131-3
Time
Posi
tion
Motion Designer – Graphical trajectory generation and data analysis
Use the Aerotech Operator Interface (OI) for fast deploymentLabVIEW™ VIs for building a custom interface
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Traditional Profiling andMeasurement SolutionsSurface profiling applications challenge current motioncontrol technology on a number of fronts. Extremely highprobe sensitivity is required for state-of-the-art systems,mandating the smallest possible parasitic motion (such asflatness), while high-speed data collection must not behampered by the automation controller. Aerotech'sintegrated scanning platforms offer key features toincrease both throughput and performance.
Products• AGS10000 and AGS15000 linear motor gantries
• ANT130-XY multi-axis nanopositioner
•ANT130-L-Z vertical nanopositioner
• Components for custom solutions
Features and Benefits• In-position stability
• High accuracy
• Low total cost of ownership
• Component-to-turnkey system capabilities
• Solutions for all levels of accuracy
- Ball-screw stages- Linear motor stages- Air-bearing stages
AGS15000 seriesCartesian gantry
ANT130-XY and ANT130-Lmounted to a granitebase/bridge assembly
NondestructiveTest
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X-Ray InspectionAerotech understands the challenges behind today’s X-ray technology and has the components and stages tosupport all areas of X-ray inspection. As the tolerances for inspection get better and better, then so must theprecision of the axes involved in the test procedure. This is why it is important to choose your products from avendor that can supply not only what you need today, but also what you will need in the future.
Features and Benefits• Accurate low-speed operation
• High velocity stability
• Controls solutions for all axes
• Large selection of components
Products• PRO115 and PRO165 ball-screw stages
• AGR gear-drive rotary stage
• ADRS mechanical bearing, direct-driverotary stage
• ABRS and ABRT air-bearing,direct-drive rotary stages
• Custom solutions
AGR-50 gear-driverotary stage
ABRS-200MPair-bearing,direct-driverotary stage
PRO165 ball-screwlinear stage
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SolutionAt Aerotech we have a wide range of stages andcomponents to meet all of the needs of X-rayinspection machines. At the component level we haveour linear motors, rotary motors and control solutions.Our PRO Series ball-screw stages and AGR Seriesgear-driven rotaries are the perfect choices for thosenon-testing axes. For test axes we have a largeselection of direct drive and air-bearing options tomeet any requirement.
ABL1500Z withABRT rotary stage
ABRT seriesair-bearing,direct-driverotary stages
Linear amplifier solutions for noiseimmunity and smooth velocity control
ChallengeX-ray inspection machines require different axesof varying degrees of precision. Many times theaxes not used during testing only require ballscrew or gear-driven technology, while the testaxes can require direct-drive motion or even air-bearing-level precision.
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Ultrasonic TestingWhether you are in search of a complete ultrasonic testing machine or just the components to build your ownsystem, Aerotech has a solution. Our large selection of ball-screw stages, gear-driven rotaries and linear motoractuators are complemented nicely by our extensive controls in order to provide you with the best solution, allfrom a single vendor.
Products• PRO115 ball-screw linear stage
• ACT linear actuator
• Linear amplifiers
• Rack-mounted amplifiers
• Linear motors
• Rotary motors
• Full inspection machines
Custom XYZgantry system builtfrom PRO serieslinear stages
Features and Benefits• Cost effective
• No radiated electrical noise
• Flexible solutions
• Components to complete systems
Complete line of linearamplifiers and motors
SemiconductorInspection andMetrology
Applications• Ellipsometry
• Reflectometry
• Scanning White Light Interferometry (SWLI)
• Stylus measurements
Features and Benefits• Highly accurate closed-loop control
• Digital output encoder options
• Brushless, slotless motor for smooth motion withno cogging
• Low profile Z and theta stage options
• Rotary stage options with integral rotary union forvacuum chuck operation
• Vacuum chuck options with integral levelingmechanism
Thin Film MeasurementAerotech has a multitude of linear, rotary and Z stage options fortwo-, three- and four-axis thin film thickness and profile measurementtools. Each system has been designed to optimize throughput whileminimizing thickness/profile direction geometric errors. Allmechanics are designed to be fully cleanroom compatible byutilizing strict manufacturing methods, careful material selection andthoughtful cable management designs. Aerotech's Ensemblecontroller, utilizing the ultra-compact Ensemble MP drive, provides ahigh-performance motion platform that requires minimal space.
Products• Ensemble MP PWM controller/drive
• High performance linear motor stages(ALS20000, PRO225LM)
• Low profile direct-drive Z and rotary stages(WaferMax Z, WaferMax T, ADRS)
350 mm travelALS20000 XY stage withWaferMax theta stage
300 mm waferchuck withintegral 3-pointleveling mount
Ensemble MP PWM drives
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ChallengeFab floor-space is at a premium,which forces tool manufacturers toprovide the smallest machinefootprint possible. In addition, avariety of machine safety standardsmust be satisfied. Compact driveelectronics that can run on non-lethalvoltages (48 VDC and below) andcan be mounted just about anywherein the tool are highly valuable whenattempting to pass regulatorystandards like Semi S2.
SolutionAerotech’s MP and ML drive optionsare compact, DC input compatibledrives that provide nearly all of thecontrol functionality of other drivesbut take up less than one-fourth thevolume. Their compact size allowsthem to be mounted just aboutanywhere and they are compatiblewith readily available 24 and48 VDC supplies.
Ensemble ML 10-40-IO MXH (linear) andEnsemble MP 10-IO-MXU (PWM) drives
41.1 mm10
7 mm
141.
2 m
m
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Wafer InspectionAn integral element of every wafer fabrication facility is its optical(lightfield and darkfield) inspection systems. These surfacecharacterization tools detect a wide variety of defects including voids,pits and scratches in the wafer surface. Smooth, high-speed rasterscanning is required to meet the needs of today’s fabrication facility.Aerotech’s ABL9000 has long been the standard for this type ofinspection by providing superior dynamic performance characteristics.
ABL9000 motion platform with granite bridge/Z axis,optimized isolation system and machine base
Features and Benefits• Aerotech direct-drive linear motors allow for high-
speed scanning and fast turnaround, thusmaximizing inspection tool throughput
• Aerotech offers a wide variety of axes that can bemounted on an XY stage, including theta axes forpattern alignment and Z axes for focus adjustment
• Open-frame stage for microscope applications
• Aerotech-supplied machine base and isolationsystem minimize integration time
• Aerotech’s experienced engineeringgroup can assist in developing acustom system to meet your specificneeds
Aerotech offers awide variety oflinear and rotarystage combinationsto fit nearly anyinspection/defectdetectionapplication.
ABL1500WB/ABL1500 XY withpneumatically counter-balancedABL1500Z
ABL1500WB/ABL1500 XYwith WaferMax Zθ
Products• High dynamic stages (PlanarHD, ABL9000,
ABL1500, ALS3600)
• Direct-drive rotary and Z-axis stages
(WaferMax Z and T)
• High performance A3200 control platform
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The Slice (raster scanning) command blends a scanning andstepping move together to form a single contoured move forhigher throughput
Aerotech has multiple open frame stageconfigurations including air and mechanicalbearing systems ideally suited to opticalwafer inspection applications.
Automation 3200 (A3200)multi-axis machine controller
High throughput customALS3600 open frame stage
ChallengeThe key to optical wafermeasurement systems is their abilityto accurately identify and measuredefects while running at productionline rates. This requires exceptionallystiff mechanical structures, motionprofile generation and responsiveisolation systems. The system’s abilityto settle to a target scan velocity iskey to meeting wafer per hour (wph)throughput requirements.
SolutionBoth Aerotech’s air and mechanicalbearing stages are developed to bethe highest stiffness structurespossible. This design philosophyforces throughput reducing naturalfrequencies as high as possible. Inaddition, Aerotech has developedmove profile optimization routinesthat allow for faster settling afteracceleration. The Slice commandsmooths the stage turnaround duringraster scanning, and Directional GainScheduling reduces settling time byautomatically adjusting gains basedon error motions.
Dynamic Position Error, Circle XY - Gain Scheduled Kpos
Time (seconds)
Pos
Erro
r x
(μm
)Po
s Er
ror
y (μ
m)
Vect
or P
os E
rror
(μm
)
Time (seconds)
Time (seconds)
Normal
Gain Scheduled Kpos
Normal
Gain Scheduled Kpos
Normal
Gain Scheduled Kpos
This system featuresair-bearing stagesand two-axis laserinterferometerfeedback to providesub-nanometerresolution.
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Atomic ForceMicroscopesMany inspection applications require tight positional stability, but feware as stringent as that for Atomic Force Microscopes (AFMs).Aerotech has multiple motion platform solutions that directly addressthe needs of Atomic Force Microscopy by providing nanometer stepsizes to single-digit nanometer positional stability. The recommendedplatforms are all direct-drive, direct-feedback devices that undergoextensive testing to ensure top-notch accuracy and stabilityperformance.
Features and Benefits• A3200 motion controller with rack mount or
discrete linear amplifiers
• High performance integrated XY linear motorstages – air bearing and mechanical bearing
• Ultra-stable motion platform provides very tightin-position stability and minimal drift
Products• Ultra-stable multi-axis motion platforms
(ABL9000, ANT95-XY, ANT130-XY)
• Low noise, high resolution control electronics(Ndrive HLe, Npaq/DL4010, Ndrive ML)
• Alternative construction materials to minimizethermal issues
300 mm wafer class ABL9000planar air-bearing
SolutionAerotech's ABL9000 can be "locked" in both Xand Y to dramatically increase positionalstability over time. Specially designed methodsare used to control the locking procedure whilemaintaining positional information. This ensuresthat the user always knows where the sample ispositioned regardless of the locking condition.
Special calibration methods can be used toincrease both the unlocked and lockedaccuracy at the workplane of an XY stagesystem. These methods are designed to not onlyreduce the positional errors but also X and Ydirection errors caused by rotations in theta X,theta Y and theta Z directions.
ChallengeAFMs produce exceptionally high-resolutionimages of very complex geometric features.The challenge is finding a motion platform thatprovides very accurate positioning as well asno motion when settling in position. Positionalinstability is a parasitic motion that AFMscannot tolerate.
Invar ALS130-XY withpneumaticallycounterbalanced Z axis isspecifically designed todramatically increasethermal stability.
ANT180-XYstage system
ANT130-XY ANT95-XY-ULTRADiscrete or rack-mountlinear amplifier options
0 5 10 15 20 25 301
0
1
2
3
4
5
6
7
8
9
10
11
Time (s)
Po
siti
on
(n
m)
1 nm Best-in-Class Resolution
1 nm step plot for ANT95-XY-ULTRA
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Defect Detection/Particle ScanningAerotech's ultra-smooth linear air-bearing motion systems andhigh performance rotary stages are an excellent choice formacro-defect, particle contamination and general defectmeasurements. High speed linear and matched rotary stagescoupled with a state-of-the-art motion controller provide accurate,high-throughput measurements. Whether it is simple "spokes-of-the-wheel" motions or tightly controlled helical inspection profiles,Aerotech has the optimum stage combination.
Products• A3200 motion controller with rack-
mount or discrete linear amplifiers
• Harmonic Cancellation advancedcontrols minimize parasitic couplingbetween rotary and linear axes
• High performance air-bearing, linearmotor stages (ABL1500/ABL2000)
• Direct-drive high-speed spindle ortraditional rotary stages(ABS2000/ASR2000/ABRS/ADRS)
Custom ABL2000 linear air-bearingwith custom low-profile rotary stage
Depending on axis orientation and packagingrequirements, Aerotech can design a custom,high-performance R-theta solution to suit.
ASR2000 seriesmechanical-bearingspindle
Aerotech has both mechanical andair-bearing spindle options forrotational speeds up to 6000 rpm.
ABS2000 seriesair-bearing spindle
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ChallengeWhen incorporating high-speed rotaryaxes into a multi-axis motion platform,chuck balancing becomes an importantconcern. Proper balancing of thepayload increases accuracy by reducingmachine vibration and increasesthroughput by allowing for higherspindle speeds.
Features and Benefits• Aerotech advanced controls –
Harmonic Cancellation
• Reduce position error onperiodic trajectories
• Reject periodic disturbances
• Adapts to magnitude andfrequency of error source
• Built-in setup wizards
SolutionFor applications utilizing a high-speedspindle, Aerotech can perform chuckcentering/balancing to reduceintegration time. In addition, Aerotech'sadvanced control suite incorporates"Harmonic Cancellation," a controlmethod specifically designed todramatically reduce cross-talk betweenrotary axes with residual imbalance andlinear axes.
High-power linearamplifier control system
Position error withoutHarmonic Cancellation
Position error withHarmonic Cancellation
Advanced Control: Harmonic Cancellation
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Products• Epaq rack mount or Ensemble CP/MP
discrete drives
• PRO series, AGS1000, side-drive XY
• AVS/AVSI series, ATS100 for focusing
• AGR series
Electrical and MagneticCharacterizationFrom traditional four-axis stage stacks to small footprintgantry systems, Aerotech has a multitude of options forelectrical and magnetic measurements. For magneticmeasurements, Aerotech can also supply customstructures that increase the distance between magneticmaterials and the work area or can provide speciallydesigned shielding solutions.
Features and Benefits• Traditional XY or gantry configurations
• Rotary encoder, linear encoder or “dual-loop”feedback
• High accuracy and tight in-position stability
• Custom designs available
AGS1000 Cartesian gantry
Custom XY crossed-roller stage
Ensemble multi-axisstand-alone controller
Reticle InspectionReticle inspection requires a unique combination ofmechanics that provides both ultra-high accuracy and alarge clear aperture. The combination of high stiffness airbearings and dual linear-motor-driven axes provides anXY open-frame stage with exceptional performancecharacteristics. The ABL3600 represents a major upgradein performance over traditional mechanical-bearing open-frame stages.
Features and Benefits• Large clear aperture provides
complete access for inspection andillumination
• Dual linear-motor-driven X and Y axesprovide excellent yaw performance(0.5 arc sec)
• All air bearings are fully preloaded toprovide exceptional system stiffness
• Brushless, slotless motor for smoothmotion with no cogging
• Linear encoder or laser interferometerfeedback provides highly accuratepositioning
Products• ABL3600
• ALS3600
• Custom tip-tilt
• A3200 controller
• Npaq drive chassis
Automation 3200 (A3200)multi-axis machine controller
ABL3600 open-frame air-bearingwith 250 mm XY travel
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SolutionAerotech has a long history of supplying vacuumcompatible motion systems for a variety ofapplications including semiconductor inspection,satellite testing and ion beam profiling. Ourapplication, engineering and production staff arehighly skilled and experienced with custom vacuumsystem solutions designed to meet specific testingneeds of vacuum inspection systems.
SEM, TEM, FIBElectron/ion microscopy including transmission electron,scanning electron and focused ion beam microscopesprovide exceptionally high resolution images with largedepths of field and have many other advantages overtraditional microscopy. Strikingly clear images areobtained from samples ranging from biological samplesto semiconductor wafers. Regardless of the componentunder test, Aerotech has a variety of high vacuum, lowmagnetic field electromechanical solutions.
ApplicationsToday's electron- and ion-beam microscopes requirevery high throughput motion systems that utilize highvacuum compatible materials and incorporate carefulmagnetic field management. All of these featuresensure fast, accurate measurements with littlecontamination.
• BGA components
• Biological samples
• Materials qualification
• Semiconductor wafers
Features and Benefits• Custom solutions
• High throughput
• Low settling time
• High accuracy
• Component turnkey system capabilities
• Integrated Development Environment
• Advanced control techniques
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XY vacuum stage withspecial shielded magnets
CleanroomSystems
Cleanroom CapabilitiesAerotech manufactures the widest variety of cleanroom compatible motion solutions for high performanceapplications such as wafer inspection and metrology.
Aerotech Cleanroom-ReadyMotion Systems Feature:• Low particulate generating cable management
systems
• Cleanroom compatible, hydrocarbon-freelubricants
• Special material surface treatments
• Manufacturing processes that are specificallydesigned to maximize system-level cleanliness
• Cleanroom packaging
Cleanroom Facility• ISO Class 6
• Cell specific ISO class 5 areas
• Temperature control to ±0.1 degree C
• Dedicated product transfer and largemain product assembly areas
• Actively-isolated granite surface platesfor testing purposes
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ALS20000XY linear motor stage
ABL9000 planar air-bearing withcustom isolation system
High-throughputopen-frame system
High-VacuumSystems
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Vacuum ApplicationsAerotech’s vast application experience, unmatched product scope, and extensive engineering capabilitiesmake us the partner of choice for vacuum compatible motion systems. Since our inception, Aerotech hasdesigned and manufactured the highest-performance motion control and positioning systems available, and ourvacuum-compatible platforms are no exception. Aerotech’s precision motion control products provide thecritical performance for today’s demanding vacuum applications in markets such as semiconductormanufacturing and inspection, optics fabrication and military/aerospace. Always guiding our vacuum systemdevelopment effort is Aerotech’s motto: “Dedicated to the Science of Motion.”
Aerotech Has SpecificExperience with Vacuum-Compatible Motion Platforms• Material selection
• Surface preparation
• Hardware venting and elimination oftrapped volumes
• Lubricant selection
• Thermal management
• Magnetic field control
• Cleaning
• Bake-out
• Handling and packaging
Vacuum Options Available from Aerotech
• Low vacuum option (10-3 torr)
• Standard vacuum option(10-6 torr)
• High vacuum option (10-8 torr)
Aerotech’s Vacuum ExperienceIncludes a Wide Variety ofApplications• Satellite component testing
• Scanning electron microscopy (SEM)
• E-beam inspection
• EUV lithography
• Ion-beam profiling
• Ion implantation
• Deposition
• Optics polishing
XY vacuum system prepared for 10-8 torr operation
A wide variety of standard Aerotech motion products are available in vacuum-prepared versions. In addition tostandard platforms, Aerotech routinely manufactures custom systems designed to meet application-specificneeds. All of Aerotech’s vacuum compatible motion platforms minimize pump down time, chambercontamination and thermal issues. In addition, these systems can incorporate key application considerationslike reduction of magnetic fields.
Shielded linear servomotorAerotech cleanroom
Actual magnetic field measurementover a 300 mm diameter target zone
Actual RGA plot from an XY system
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Multiple configurations available
40 www.aerotech.com
The AerotechRotary Calibrator(ARC) sets a newindustry standardof performancefor angle androtary tablecalibrations. Atthe heart of theCalibrator is alarge rotary air-bearing axis withnanometer-levelerror motionperformance.This high-accuracyair-bearingmaster axis isconstructed of
steel to closely match the CTE of the surrounding granitestructure. The air-bearing acts as the master angle generatorto generate angles as small as 0.015 arc-seconds to over360° (continuous rotation).
The Calibrator isequipped with ahigh-resolution, high-accuracy electronicautocollimator formeasurementfeedback on opticalsurfaces. The entireinstrument is built ona precision granite machine structure that is isolated fromthe machine base and floor through passive air isolation. Acustom enclosure isolates the system from air turbulence,high-frequency thermal fluctuations and ambient light.System electronics are housed in a separate enclosure fromthe instrument to isolate any electrical noise and heat fromthe instrument. Custom calibration software provides theoperator with easy control of the angular step, testprocedure (such as circle closure) and plot/reportgeneration.
Rotary Test Platform
1. Angular measurement uncertainty analysis performed according to ANSI/NCSLZ540-2-1997: Guide to the Expression of Uncertainty in Measurement whilecalibration of a rotary table over 360º with 10º steps using a modified circle closuretechnique. The temperature of the lab was controlled to 20ºC +/- 0.25ºC.
Specifications• Master-axis accuracy:
<0.15 arc-seconds (<727 nano-radians)
• Minimum incremental step (min. angle):0.015 arc-seconds (73 nano-radians)
• Electronic system resolution:0.0069 arc-seconds (34 nano-radians)
• Angular measurement uncertainty: <0.2 arc-seconds expanded uncertainty, k=2(<970 nano-radians, k=2)1.
• Customized software for automated testexecution and report generation
• Built-in control and plot utilities
PPosition (Degrees)0 50 100 150 200 250 300 350
0.2
0.15
0.1
0.05
0
-0.05
-0.1
-0.15
-0.2
Data Taken 5-May-2010
Data Taken 11-May-2010Data Taken 6-May-2010
Pos
ition
Err
or (A
rc S
econ
ds)
Aerotech Rotary Calibrator (ARC) master axiserror – calibrated repeatability over multipledays.
IntegratedAutomationand DataAcquisition
42 www.aerotech.com
• High performance
• Easy to use
• Flexible
• Scalable
• Networked
• Lowest cost of ownership
• Advanced control technology
Linear and RotaryServomotors
Automation 3200 Ensemble
Network andFieldbus Connectivity• Ethernet/IP™
• Modbus®/TCP
• DeviceNET
• Ethernet TCP/IP
• USB
• RS-232
• GPIB
• PC-based
• 1 to 32 axes of coordinated motion
• Up to 32 tasks
• RS-274 (G-code)
• Advanced features for demandingapplications
• PWM or linear drives (up to 150 amp)
• Scanner control for marking
• Tightly integrated laser functionality
• Retrofit package for old controls
• Integrated PLC – MotionPAC
• Stand-alone
• 1 to 10 axis controller
• Up to 4 tasks
• Versatile, cost-effective,coordinated motion
Aerotech Integrated Automation Solutions
Configure Your AutomationSolution with Aerotech
• Common Software Platform: Tools, Powerful Programming Environment, Calculators, Diagnostics
Programming Interface Autotune Loop Transmission
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Soloist
Accessories• Linear amps
• ESTOP
• Rack-mount configuration
• Rack-mount PCs
Data Acquisition
• PWM or linear drives (10-150 amp peak)
• Drives brushless, linear, rotary,DC brush or stepper motors
• Desktop, rack mount or panel mount
• Stand-alone
• Network up to 1,024 single axes
• Up to 4 tasks
• Elegant, economical, versatilecontroller
• PWM or linear drives(10-150 amp peak)
• Drives brushless, linear,rotary, DC brush orstepper motors
•Use the libraries and SDK to develop your own applications with .NET, C#, VB.NET, C, or LabVIEW®
MotionPACParameter Editor Digital Scope
Sensor Fusion
44 www.aerotech.com
Standard Controls
Slice Move
Aerotech controllers offer the broadest array of programming interfaces and core motion capabilities of anyautomation system available today for both OEMs and end-users alike.
Increase scanning throughput by blendingstep and scan into a contoured move
Axis Calibration
Compensate for repeatable mechanicalerrors in a positioning system
Gantry Mode
Complex gantry control is reduced to a fewsimple commands to handle dual motorand/or dual feedback configurations
Parts Rotation
Use when a two-dimensional part must berepeated in different orientations withouttranslating the part program many times over
3D Error Correction
Measure XYZ errors and the controller cancorrect the commanded position to accuratelymove to all locations in the 3D space
Dual-Loop Control
Dual-loop control is used to eliminate theeffects of backlash and other sources of error
Laser Interferometer
Systems requiring ultra-high resolution andfeedback stability use interferometerfeedback
Velocity Blending
The velocity changes to the next velocitycommand, acceleration limited, withoutstopping
Orthogonality Correction
Improve X-Y planar accuracy by simplyentering the known orthogonality error andthe controller will compensate
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Advanced Controls
Directional Gain Scheduling
Decrease settle-time and increase in-positionstability
Friction Compensation
Reduce settle time and reduce error atdirection reversals
Position SynchronizedOutput (PSO)
Trigger external events precisely at desiredposition while in motion
Motion Designer
Graphical trajectory generation and dataanalysis
Command Shaping
Reduce vibration at the work point
Loop Transmission
Tuning and diagnostic utility that greatlyenhances system performance
Harmonic Cancellation
Reduce position error on periodictrajectories and reject periodic disturbances
Iterative Learning Control
Reduce following error on repeated movesequences that can be learned andoptimized
Enhanced ThroughputModule (ETM)
Increase rate stability and decrease settletimes in the presence of vibration
46 www.aerotech.com
Data Acquisition Solutions – Sensor FusionThe Sensor Fusion desktop, rack mount or panel mount system allows you to record sensor I/O preciselyaligned with encoder positions, and to retrieve the results through one easy to use software interface. TheSensor Fusion, when used with PSO and the Digital Scope, is Aerotech's answer for all of your data acquisitionneeds. The Sensor Fusion can have up to four of the following card options:
With a variety of analog, digital, encoder and PSO cards available, the Sensor Fusion allows you to recordsensor data and position data in ways that have never been possible. Its modular design allows for additionalcards such as vision and serial data acquisition. With desktop, rack mount and panel mount options available,there is a Sensor Fusion for every application. As an integrated member of the A3200 motion controller family,the Sensor Fusion allows you to collect position data as well as sensor data in concert with one another.
• Analog Input
• Analog Output
• Digital Input
• Digital Output
• Encoder Input and PSO Output
Features and Benefits• Data acquisition precisely
integrated with motion control
• Sensor I/O easily aligned withencoder position
• Data recording and playback
• Combine sensor inputs in real time
• 5 MHz collection rates
• One easy-to-use software interface
• No additional software required
• Desktop, rack mount and panel-mount options
Sensor Fusion
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SF-DO-01SF-DO-02• 32 digital outputs
• 5 MHz playback
• 32 mA at 5 V
• High power option:325 mA at 5-24 V
Digital Input Digital Output
Encoder Inputand PSO Output
Digital Input:SF-DI-01• 32 digital inputs
• 5 MHz collection rate
• 5 V or 24 V
• Active high or active low
SF-ENC-01• 4 encoder inputs
(TTL)
• 1 PSO outputs
• 1.0 MHz collection
Analog OutputAnalog Input
SF-AI-01SF-AI-02• 16 analog inputs
• Up to 400 kHz collection
• 18-bit resolution
• Selectable input range
SF-AO-01SF-AO-02• 8 or 16 outputs
• 500 kHz playback
• 16-bit resolution
• 5 V, 10 V or externalreference voltage
SF-AO-03SF-AO-04• 4 or 8 outputs
• 750 kHz playback
• 20-bit resolution
• 5 V, 10 V or externalreference voltage
48 www.aerotech.com
MotionPAC – PLC Integrated With Motion• 30% to 50% reduction in development time
• High-performance motion fully integratedwith standard PLC environment
• Easy-to-use diagnostics and tools
• Standards & flexibility: IEC 61131-3, .NET,PLCopen, PC-based
• Integrated with the A3200 motion controller
Program in IEC6 1131-3: LD, FBD, ST
Define hardwareOnline mode displaysall Tag values
Axis manager Standard LDCreate libraries
Combine LD and FDon same program
Completely integratedmotion blocks
Tag database
LD, FBD or STprograms
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Integrated Automation: MotionPAC
MotionPAC• IEC 61131-3• PLCopen• Aerotech motion blocks• Axis manager• Extensive development & debug environment• Simulate program
Motion Composer• Axis manager• Low-level motion diagnostics• Motion programming• Advanced control algorithms
Scope• Signal capture & analysis• Autotuning• Loop transmission• Encoder tuning• Advanced controls
HMI• Program selection and run• Jog panel• Machine control• Customizable buttons• Axis manager
I/O & Data Acquisition• High-speed data acquisition synchronized
with motion & PLC• High-speed registration• Position Synchronized Output• Machine interlocks• Fieldbus I/O
Central Machine TagDatabase• Tags available in all applications by name• Define both local or global machine Tags• Define Tags in I/O definition, ST, LD, FBD or
motion program
50 www.aerotech.com
A Wide Variety of Amplifier Options
MP
1 1 1 11 6 6
10 A
10-80 VDC(Output)
1-AI6-DI/4-DO
1-AI/1-AO
8-DI/8-DO
1-AI/1-AO
All units capable of sinusoidal commutation, dual-loop control and drive brushless, brush or stepper motor
16-DI/16-DO
1-AI/1-AO
16-DI/16-DO
1-AI/1-AO
16-DI/16-DO
4-AI/4-AO
16-DI/16-DO
4-AI/4-AO
6-DI/4-DO
1-AI/1-AO
6-DI/4-DO
1-AI/1-AO
6-DI/4-DO
1-AI/1-AO
10-320 VDC 10-320 VDC ±40-80 VDC±40 VDC
10 A
N/A
Npaq®: 10-30 A
Npaq®: 10-320 VDC
MultipleConfigurations
Available
MultipleConfigurations
Available
1-AI per axis
8-DI/8-DO per Axis
1-AI/1-AO per Axis
Epaq: 24-90 VDC
Epaq: 10 A10-30 A 10-150 A 10-20 A
PWMPWM PWM LinearLinearNpaq®: Both
PWM and Linear Available
Epaq: BothPWM and
Linear Available
A3200Drives
EnsembleControls
SoloistControls
Output Type
Axes
Peak CurrentOutput
DC BusVoltage
StandardI/O
Optional I/O
IncrementalEncoder
AbsoluteEncoder
Resolver/InductosynCapacitive
ProbesLaser
Interferometer
CP HPe HLe MLCL Integrated Drive Racks
Npaq® or Npaq® MRdrive chassis
Epaq or Epaq MR drive chassis and motion controller
1
16-DI/16-DO
1-AI/1-AO
6-DI/4-DO
1-AI/1-AO
±40 VDC
10 A
Linear
RotaryandLinearMotion
52 www.aerotech.com
Rotary Motion Solutions
• 100 mm, 150 mm, 200 mm, 250mm and 325 mm apertures
• Axial load capacity to 595 kg
• Excellent accuracy andrepeatability
• Cog-free motor provides smoothmotion
• No gear backlash
ALAR• No accuracy change over time
from gear wear
• 45-300 rpm continuous rotationspeed
• Vac 10-6 torr compatible versions
• High resolution gives excellentstepping and in-position stability
The ALAR-LP series is designed to be mountedwith the vertical axis coincident with gravity.The LP is lower profile than the SP forapplications that have less space available.
In-position stability of ±0.05 μrad High resolution gives small step capability
The ALAR-SP series is designed to bemounted in any configuration – vertical orhorizontal.
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Ultra-Precise, LowProfile, Direct-DriveRotary Air-Bearings• Excellent radial, axial and tilt
error motions
• Direct coupled, high-accuracyrotary encoder
• Low profile, planar design
• Axial load capacity to 97 kg
• Magnetic preload
Ultra-Precise, High Accuracy,Direct-Drive RotaryAir-Bearings• High torque output, direct-drive
slotless, brushless servomotor
• Zero-cogging motor foroutstanding velocity stability
• Excellent radial, axial and tilterror motions
• Direct coupled, high-accuracyrotary encoder
• Large-diameter clear aperture
• No mechanical contact
• Fully constrained air-bearingcan be run upside down or onits side
• Axial load capacity to 69 kg
ABRS Series
ABRT Series
54 www.aerotech.com
APR Series
High Accuracy Rotary Stage
• Accuracies up to 1.1 arc second
• Axial load capacity up to 450 kg
• Incremental or absolute encoders
• Large bearings provide high payload andmoment load capacity
• 375-800 rpm continuous rotation speed
• Seven models are available, each with either50, 75 or 100 mm clear aperture
Low Profile, Direct-Drive Rotary Stages• High torque output, direct-drive
brushless servomotor
• Cog free, slotless motor designfor superior velocity stability
• Direct coupled, high-accuracyrotary encoder
• Ultra-low-profile minimizesworking height
ADRS Series
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Large Aperture, Gear-Drive Rotary Stage
AGR Series
• Enhanced speed and load capacity
• Large aperture addresses a wide range ofapplications
• Useful for heavy and unbalanced loads
• Non-back-driving gear
• Vacuum rated options to 10-6 torr
ADRT Series
High Torque Output,Direct-Drive RotaryStages• Cog-free brushless servomotor
design for outstanding velocitystability
• Large-diameter clear aperture
• High load capacity and highspeed
• 5-60 arc second accuracy
56 www.aerotech.com
ALS Series• Direct-drive linear motor stages
• Hard cover and side-seal design for years ofmaintenance-free operation
• High accuracy linear encoder option forapplications that require excellent velocityregulation
• Multiple frame sizes and travel lengths providesystem configuration flexibility
• Integrated cable management for XY, XYZconfigurations and customer interfaces
AGS Series• Optimized design for precise contouring
• Velocity to 3 m/s and acceleration to 5 g
• High power brushless linear servomotors forsmooth motion
• Travels up to 1.5 m x 1.5 m
• Customizable Z and theta axes for flexibleconfigurations
• Noncontact linear encoders
• Configurable cable management system allowsfor integration of fiber lasers, cameras, air lines,etc. for multiple applications
ABL Series• Exceptional geometric air-bearing performance
• Travel to 1.2 meter
• Linear encoder or laser interferometer feedback
• Submicron accuracy
• Integrated XY and XYZ systems
• Non-cogging direct-drive motors
ALS5000WB
AGS15000
ABL1500
ABL8000
Linear Motion Solutions
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PRO Series• Precision ground ball-screw drive
• Rugged construction
• Long-life linear motion bearing
• Side-seal design with hard coverprotects from debris better thantop-seal design
• Low cost, high performance
• 50 to 1500 mm travel
ATS Series• Precision ground ball-screw drive
• Rugged construction
• High accuracy, noncontact linear encoder
• Long-life linear motion guide bearing system
• Travels from 25 mm to 1000 mm
• Heavy load options available
• 10-6 torr vacuum compatible
• Hard-coated tabletop and cover
• Low-bearing errors for excellent geometricperformance
MPS Series• 50 and 75 mm widths
• Travel to 100 mm
• Precision ground ball-screw or lead-screw drive
• DC servo or stepper motor
• Crossed-roller bearings
• Compact multi-axis configurations
PRO LM Series• Direct-drive linear motor for
ultra-precise motion
• Long-life linear motion guidebearing system
• Travels from 100 mm to 1500 mm
• Low-cost, high-performance stage
MPS50SL/MPS75SL XY
PRO165
PRO165LM
ATS5000WB
58 www.aerotech.com
Planar Air-bearing StagesABL9000• Full preload on all axes
• Dual linear-motor-driven Y axis
• Travel to 1.2 m x 1.2 m
• Linear encoder or laserinterferometer feedback
PlanarHD
• Maximize throughput with 2 m/s scanvelocity and 5 g acceleration
• Faster turnaround and minimizedsettling times
• Active yaw control
• Linear encoder or laser interferometerfeedback
• Travel to 1.2 m x 1.2 m
Dynamic straightness, center 270 mmof travel at 500.0 mm/s max velocity
ABL9000
PlanarHD
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AHL9000• Air-bearing scan axis; mechanical-bearing step axis
• Dual linear-motor-driven step axis
• Travel to 1.2 m x 1.2 m
• Linear encoder or laser interferometer feedback
ABG10000• Air bearings for ultra-smooth motion
• All axes are fully preloaded
• Dual linear-motor-driven lower axis
• Travel to 1 m x 1 m
• Options include: Z axis,vibration isolation,machine base and controlenclosure
AHL9000
ABG10000
60 www.aerotech.com
NanopositionersANT95-L Single-Axis Linear Stage• Noncontact, non-cogging, frictionless
direct-drive – zero backlash orhysteresis
• High resolution (1 nm), repeatability(75 nm) and accuracy (250 nm)
• In-position stability of <1 nm
• Anti-creep crossed-roller bearings
• High dynamic performance
• Available in X, XY, XYZ and manyother combinations
ANT95-XY Dual-Axis Linear Stage• Integrated low profile XY linear motor stage
• Noncontact, non-cogging, frictionless direct-drive – zero backlash or hysteresis
• High resolution (1 nm), repeatability (75 nm) and accuracy (250 nm) per axis
• In-position stability of <1 nm
• Anti-creep crossed-roller bearings
• High dynamic performance
-25-12.5
012.5
25
-25-12.5
012.5
25-3-2-10123
Position (mm)
Position (mm)
Acc
ura
cy E
rro
r (μ
m)
ANT95-50-L-PLUS 1 nm step plot
The ANT95-L series offers 25, 50, 75 and 100 mm travels
ANT95-50-XY-ULTRA 2D system accuracy
The ANT95-XYseries offers 25 x 25 mm or50 x 50 mm travel
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ANT130-L Single-AxisLinear Stage• Noncontact, non-cogging, frictionless direct-
drive – zero backlash or hysteresis
• High resolution (1 nm), repeatability (75 nm) and accuracy (250 nm)
• In-position stability of <1 nm
• Anti-creep crossed-roller bearings
• High dynamic performance
• Large selection – 4 different travel options
ANT130-XY Dual-Axis Linear Stage• Integrated low profile XY linear motor stage
• Noncontact, non-cogging, frictionless direct-drive –zero backlash or hysteresis
• High resolution (1 nm), repeatability (75 nm) andaccuracy (250 nm)
• In-position stability of <1 nm
• Anti-creep crossed-roller bearings
• High dynamic performance
AWARDS
-80-40
040
80
-80-40
040
80-3-2-10123
Position (mm)
Position (mm)
Acc
ura
cy E
rro
r (µ
m)
The ANT130-L series offers 35, 60, 110 or 160 mm travel
ANT130-060-L-PLUS 1 nm step plot
The ANT130-XY series offers 60 x 60,110 x 110 or 160 x 160 mm travel
ANT130-160-XY-ULTRA 2D system accuracy
62 www.aerotech.com
0 5 10 15 20 250.05
0
0.05
0.1
0.15
0.19
0.24
0.29
0.34
0.39
0.44
0.48
0.53
Po
siti
on
(μra
d)
Time (sec)0 5 10 15 20 25
0.01
0
0.01
0.02
0.03
0.04
0.05
0.06
0.07
0.08
0.09
0.1
0.11
Po
siti
on
(ar
c-se
c)
ANT95-R and ANT130-RRotary Stages• High resolution (0.01 arc sec)
• High performance in large travels
• Outstanding error motionspecifications
• 0.005 arc-sec in-position stability
• 3 arc-sec accuracy
• 1.5 arc-sec bi-directionalrepeatability
• Multi-axis configurations
ANT-20G Goniometers• Noncontact, non-cogging, frictionless
direct-drive for zero backlash or hysteresis
• High speed (150°/s)
• High resolution (0.05 arc second)
• Excellent in-position stability
• Large angular range; 20° of travel
• Orthogonal mounting of two cradlesprovides rotation about the same point
• No maintenance
• Compact design
ANT95-R 0.01 arc-sec step plot
ANT-20G-90 0.05 arc-sec step plot
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0 5 10 15 20 25 302
0
2
4
6
8
10
12
14
16
18
20
22
Time (s)
Po
siti
on
(n
m)
ANT95-L-Z andANT130-L-Z• Nanometer performance in a large
travel format
• High resolution (2 nm), repeatability (75 nm), and accuracy (300 nm)
• In-position stability of <2 nm
• Anti-creep crossed-roller bearings
• High dynamic performance
ANT95-50-L-Z-PLUS 2 nm step plot
0 5 10 15 20 25 302
0
2
4
6
8
10
12
14
16
18
20
22
Time (s)
Po
siti
on
(n
m)
ANT130-5-V 2 nm step plot
ANT95-3-V andANT130-5-V• Nanometer performance with either
3 or 5 mm travel
• In-position stability of <1 nm
• 200 nm accuracy
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ChallengeThere can be drastic differences in requirementsfrom one measurement system to the nextdepending on its intended use. As an integrator orOEM, this can be frustrating as it requires constantevaluation of new motion equipment to satisfy everchanging requirements. This can lead to inconsistentsolutions and support challenges.
SolutionAerotech offers solutions for all levels ofperformance and component needs. At the verysimplest level we have controls and motors thatusers can buy to incorporate into their own designs.If more complete components are desired we offera large selection of rotary and linear stagesutilizing ball screw, gear drive, linear motor,mechanical bearing and air-bearing technology. Ifa complete system is needed Aerotech can providea machine base, isolation systems, integratedcontrols, safety and enclosures. We can provide asolution that requires nothing more than adding asensor and implementing the process.
BMS60brushless slotlessrotary motor
Custom Z-axisassembly
BLM serieslinear motor
A3200 softwaremachine controller
Npaq rack mountservo amplifier
Components to Integrated Solutions...
www.aerotech.com
Bringing Value and Convenienceto Our Customers
Vertical IntegrationOur expertise in motors, amps,controls and stages enables us toprovide a complete optimizedsolution.
InterconnectabilityAerotech systems are designedto work together. This allows youto spend time and resources onyour process, not on systemintegration.
System CheckoutPrior to shipment, all systems arefully assembled and checked out.All system parameters are factory-set based on your specifications.
DocumentationAll systems are fully documented.System interconnect-drawings,specification sheets and stagecertification plots are includedwith every system.
Aerotech offers its customers a number of importantadvantages as a single-source provider:
R&DOur engineering teams arededicated to product developmentand continuous improvement.
Technology LeaderAerotech engineers arecontinuously updating existingproducts and introducing newproducts. We are truly “Dedicatedto the Science of Motion.”
QualityAerotech is an ISO 9001 certifiedsupplier with a rigorous qualityprogram.
Worldwide PresenceAerotech is committed to supportingcustomers worldwide. We operatefull sales and service facilities in theUnited Kingdom, Germany, Japan,Taiwan and China. We also maintaina growing number of direct fieldsales and application engineeringoffices throughput North America,and work with representatives acrossthe globe.
Support & ServiceBecause all system elements aredesigned and manufactured byAerotech, we provide the highestlevel of technical knowledgeavailable. Unlike companies thatonly manufacture part of thesystem, Aerotech manufacturesall of the system components,minimizing service time.
Single-Source SolutionAerotech designs andmanufactures precision stages,motors, drives and controllersgiving you all of the componentsneeded for a complete system.
Application ExperienceSince 1970, Aerotech hascompleted thousands of motioncontrol projects, spanning anextensive range of applications.
Corporate Headquarters • Pittsburgh, PA • USA
AerotechUnited Kingdom
AerotechGermany
AerotechJapan
Aerotech China
AerotechTaiwan 65
66 www.aerotech.com
Engineered SystemsAerotech engineers and manufactures specialty high-performance subsystems. Our highly-trained staff ofexperienced software and hardware engineers enables our customers to get to production readiness faster.Aerotech provides real-time collaborative support — either at your facility, at our facility or on the web.
Ion Beam Profiling in Vacuum Liquid-Cooled, Vacuum-Prepped System
Precision Optical Production Two-Side Optical Inspection
Rapid Prototyping Advanced Pick-Place-Inspect Station
Optical Inspection
High-Volume Production Inspection Station
4-Axis Coordinate Measuring Machine
Experimental Lithography Printhead Inspection Station High-Accuracy Laser Machining
Drum Writing High-Speed Optical Indexer
Direct-Write Lithography Magnetic Characterization
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Discrete Part Manufacturing Memory RepairComponent Inspection PCB Inspection
Lithography Thin-Film Measurement
Drum Writing
Large-Substrate Inspection High-Throughput Wafer Inspection
Rotary Test StandSolar Module Inspection Pick and Place
Vacuum Inspection System Microscopy
Vacuum ProcessingFPD Processing
Photovoltaic, Fuel Cell and Alternative Energy
Extensive application experience and a broad array of motionproducts make Aerotech the perfect partner for your photovoltaic(solar cell), fuel cell and other alternative energy manufacturingand testing platforms. Our worldwide operation has engineeredand manufactured a multitude of motion platforms for thesemarkets and we continue to provide innovative solutions.
Control Systems
Aerotech motion controllers, motors and drives are utilized in our ownpositioning systems and by end users and OEMs worldwide. From ourAutomation 3200 software-based motion controller that can control upto 32 axes, to the Soloist single-axis servo controller, to the Ensemblemulti-axis stand-alone motion controller, we provide a variety of optionsto suit your application.
General Automation
Since 1970 Aerotech has been a manufacturer of top-quality automationproducts. The breadth of the our product line, including automatednanopositioners, planar air-bearing systems, high-speed gantries, linear androtary and lift stages, brushless linear and rotary servomotors and drives,single- and multi-axis motion controllers, goniometers and gimbals/opticalmounts makes Aerotech unique among motion control manufacturers.Aerotech is Dedicated to the Science of Motion.
Laser Processing
Aerotech has extensive experience in providing motion componentsand subsystems for laser processes such as cutting, welding, marking,etching and micromachining. These processes are the key toadvancing technology in markets such as photovoltaicmanufacturing, aerospace and medical device manufacturing.
Capabilities in Other Markets
www.aerotech.com68
Defense and Aerospace
Aerotech has manufactured hundreds of high-accuracy systems includingmany for high vacuum (10-6 torr) and cleanroom environments. Ourequipment is used for testing electro-optic systems, high-performance laserprocessing, materials testing and manufacturing, target tracking, satellitesensor calibration and verification, inertial guidance testing, scanning,optical pointing, repeatability and life-cycle testing for quality control.Custom systems are available with minimal development time.
Medical Device Manufacturing and Life Sciences
Aerotech manufactures high-performance motion systems andcomponents for medical and life sciences applications includingstent cutting, medical laser welding systems for cardiac pacemakersand catheters, IOL and contact lens manufacturing, DNAsequencing, blood sequencing, haptic mills and drills, x-raymachines, magnetic resonance scanners and CAT scanners. Wecan customize a medical laser welding system for any need.
Government and Educational Research and Development
The breadth of Aerotech’s product line offers solutions for the wide-rangingrequirements of academic and government R&D. Our nanopositionersprovide the accuracy required not only for photonics experiments, but alsofor micro- and nano-machining workstations. Aerotech’s multi-axis rotarypositioners and gimbals offer the high precision needed for defense, satelliteand space science research. Unique applications call for unique solutions,and Aerotech can provide custom-engineered systems to meet your needs.
Electronics Manufacturing and AssemblySpeed, accuracy and reliability are the key requirements for pick-and-placemachines, stencil cutting machines, printed circuit board assembly and otherelectronic manufacturing and assembly equipment. Since 1970 Aerotech hasexceeded the most stringent criteria used to judge electronic manufacturing andassembly equipment, and we continue to raise the standard with our advancedmotion technologies by addressing industry-specific challenges in pick-and-placemachines, stencil cutting machines and printed circuit board assembly systems.
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Aerotech offers comprehensive worldwide training andcustomer service either at customer facilities or at one of ourAerotech training centers.
Our Training Program Features:
• Standard and customized courses
• Hands-on training with Aerotech positioning systems
• Interactive training with experienced instructors
• Comfortable, spacious facilities
Installation and Start up (Commissioning)
Startup and commissioning services minimize startup times,reduce cost and accelerate time-to-production. By combiningour product knowledge with your process and applicationexpertise, new systems and applications can be completedfaster at a reduced overall cost.
Engineering Support
Aerotech provides complete engineering support for ourproducts, including on-site support and maintenance, andremote support via phone, fax, website and/or WebEx®
software. As a manufacturer staffed by engineers, weunderstand the unacceptability of downtime.
Training
Comprehensive training classes are designed to help ourcustomers realize the full potential of our products. Bydemonstrating all of a product’s features and how to usethem, customers have been able to reduce startup time andquickly optimize their applications. Our classes have beendeveloped, and continually upgraded, using feedback fromour customers.
Since 1970, Aerotech has designed motion control andpositioning systems and components with an unsurpassedtrack record of reliability. When you make the choice topurchase from Aerotech, we urge you to learn how to get themost from your new products. We provides both on-site (yourfacility) and/or in-house (our facility) training for ourcustomers’ convenience.
Aerotech Ltd (United Kingdom)
Aerotech GmbH (Germany)
Aerotech KK (Japan)
Aerotech Inc (U.S.A.)
Worldwide Training and Support
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Semiconductor International 2007 Editors’Choice Best Product –
WaferMax T™
Semiconductor International 2008
Editors’ Choice Best Product –
Ensemble™
2008 Control EngineeringEngineers’ Choice Award –
LaserTurn® 1
2011 Control EngineeringEngineers’ Choice Award –
ANT130-XY
2012 Control Engineering Engineers’ Choice Award Finalist Product –
MotionPAC
Design News2008 Golden Mousetrap Finalist Product –
Nmark™ SSaM
Design News2009 Golden Mousetrap Finalist Product– LaserTurn® 1, AGS15000, ANT95-XY
Design News 2010Golden Mousetrap Winner –
ANT130-XY
EuroAsia IC 2006 Industry Award –WaferMax Z™
Lightwave OFC 2001 Attendees’ Choice Award –
FiberAlign® 130
Design News 2002 Best Product Nominee –
Automation 3200
Machine Design Excellence in Manufacturing Technology –Slides/Ways 1998 and 2000
Aandrijftechniek 2002 Award –
FiberMax®
Product Design and Development 2002 Top 50 Product –
Automation 3200
Lightwave NFOEC 2002Attendees’ Choice Award –
FiberMax®
Awards and Recognition
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★ - Aerotech Headquarters ● - Direct Field Sales Office ▲ - Aerotech Subsidiary ■ - Representative
Dedicated to the Science of Motion
www.aerotech.com CA0312A
Aerotech’s Worldwide Sales and Service Locations