cab-mdc cat sec 4 layout 1erstvak.com/docs/mdc/mdc-sredstva-izmereniya-vakuuma.pdfthermocouple gauge...
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4 Vacuum measurement 208
UHV gauge controllers introduction 208-209
Nude ionization gauge tubes 210-213
Gauge head ion gauges – European style 213
Thermocouple gauge tubes 214-215
Micro pirani transmitters 216
Bourdon gauges 217
Glass envelope ionization gauge tube 218-219
207
Section 4Vacuum measurement
Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk
Vacuum
measurem
ent
n Bourdon gauge
n Thermocouple gauge tube
n Enclosed ionization gauge tube
n Nude ionization gauge tube
Bourdon gaugeDeflection gauges measure truepressure via deflection of a bourdontube, independent of the type of gas ina system. Bourdon tubes areconstructed in either C-tube or helicalcoil geometries and of these two,helical Bourdon tubes provide thegreatest sensitivity.
Caburn-MDC Bourdon gauges aredesigned for rough vacuummeasurements in the range of 30inches of mercury and positivepressures to 30psig. As a general rule,all vacuum components and chambersare rated for vacuum service andshould never be internally pressurized.Bourdon gauges are offered with Del-Seal™ CF metal seal flanges, Kwik-Flange™ ISO KF flanges and maleNPT pipe thread fittings.
Thermocouple gauge tubeMDC thermocouple gauge tubes offerfast and reliable vacuum measurementfrom 1 to 1x10-4 mbar.
Thermocouple gauge tubes consist oftwo basic components, a resistivefilament and a thermocouple junctionused to measure its temperature.Thermocouple gauge tubes operateon the thermal conductivity principle.Basically, they measure the thermalconductivity of a residual gas inside avacuum system, or its ability toconduct heat away from a heatedfilament. The higher the pressureinside a vacuum system the cooler thefilament or conversely, the lower thegas pressure the hotter the filamentbecomes.The thermocouple junctioninside the gauge tube is positioned onthe heated filament and is used to
monitor its temperature duringsystem evacuation. A temperaturerise or drop in the filament producesa potential rise or drop in thethermocouple junction. This potentialin millivolts is then calibrated tomicrons in a thermocouple gaugecontroller.
Because thermocouple gauge tubesand control electronics are availablefrom a multitude of manufacturers, itis important to note that individualthermocouple gauge tubes aredesigned to operate at specificfilament current ratings, which shouldbe carefully matched with a controlinstrument’s specifications. Alwaysrefer to the control electronicsmanufacturer for specifications onfilament current requirements beforepurchasing or installing athermocouple gauge tube.
Caburn-MDC UHV gauge tubesfeature all-welded construction andstainless steel casing tubes that arebakeable to 150°C. Electricalconnections are glass insulated andemploy a standard eight pin interfacewith a polarized centre post. They areoffered with Del-Seal™ CF flanges andSwagelok’s VCR® fittings. HV gaugetubes are supplied with male NPT pipethread fittings and a nickel plated steelshell assembly for maximum corrosionresistance and bakeable to 150°C.
Thermocouple gauge tubes areexpendable vacuum components andmust be replaced periodically. Mostgauges are typically calibrated forservice in air (nitrogen) andexperience extreme variations incalibration when in the presence of
Section 4 Vacuum measurement
208
Vacuum measurementIntroduction
All dimensions are nominal in millimetres unless specified Weights given are approximate
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Vac
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Bourdon type gauges page 217 Thermocouple gauge tube page 214
other gases, subsequently leading toerroneous vacuum measurementreadings. An inexpensive solutionwould be to include a non-gas-dependent gauge such as a Bourdongauge to verify calibration.
Glass enclosed ionizationGauge tubeCaburn-MDC glass enclosedionization gauge tubes are designedfor high and ultrahigh vacuummeasurements between 1x10-3 to2x10-10 mbar. Glass enclosedionization tubes, commonly referredto as a Bayard-Alpert gauge tubes,consist of several componentsincluding a resistive filament, apositively charged grid and anegatively charged collector. Theresistive filament is heated toincandescence for the purpose ofemitting electrons. The grid, apositively charged wire, coiled in theshape of a spiral, attracts andaccelerates filament emitted electrons.The collector, a negatively chargedwire, is strategically placed in the pathof oncoming electrons. As electronscollide with air molecules inside thetube, the air molecules lose anelectron and become positivelycharged or ionized and thus attractedto the negatively charged collector.Upon colliding with the collector airmolecules regain their lost electronand return to their original neutralcharge. The flow of electrons fromthe collector to air molecules ismeasured and calibrated for vacuummeasurement. The number of airmolecules is directly proportional totheir ionization and in directproportion to the flow of electronssurrendered by the collector.
Nude ionization gauge tubeCaburn-MDC nude ionization gaugetubes are designed for high andultrahigh vacuum measurementsbetween 1x10-3 to 2x10-11 mbar. Liketheir glass enclosed counterparts,these are also hot cathode ionizationtypes. The main difference being theirmethod of construction.
Nude gauges allow for easyreplacement of perishable filamentsand the added durability of ceramic-to-metal electrical feedthroughinsulation which makes them bakeableto 450°C. Two nude gauge styles areoffered, these utilize resistive heatingor electron bombardment degas.
Section 4Vacuum measurement
209
Vacuum measurementIntroduction
All dimensions are nominal in millimetres unless specified Weights given are approximate
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Vacuum
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ent
Collector lead
Grid leads
Side arm tubulation
Glass envelope
Filament leads
Iridium filament
Grid
Unique VacOptix® hermetic seal design
Nude ionization gauge tube page 210Glass-enclosed ionization gauge tube page 218 Replacement filaments page 211
Section 4 Vacuum measurement
210
Vacuum measurementNude ionization gauge tubes
All dimensions are nominal in millimetres unless specified Weights given are approximate
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Vac
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mea
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men
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Featuresn 10-3 to 10-11 mbar range
n DN40CF flange mounted
n Resistive heating degas
n Replaceable filament assemblies
n Mount in any position
n Bayard-Alpert type tube
UHV Series
Collector
Grid
Filament
Grid
Filament common
Internal connection
Pin-out pattern
Single filament
Pin-out pattern
Dual filament
Collector
Grid
Filament 1
Grid
Filament Common
Filament 2
n Requires minimum 34.8mm ID clearance for installation
Vacuum specificationsVacuum range 10-3 to 4x10-10 mbar
Maximum operating pressure 1x10-3 mbar
Sensitivity µ20% 10 mbar
X-ray limit 4x10-10 mbar
Construction specificationsFlange 304ss
Grid Tungsten
Filament Dual: Tungsten or iridium
Collector Tungsten
Shield coating Platinum
Base leads Soft nickel 1.5mm dia
Collector lead Soft nickel 1.0mm dia
Operating specificationsCollector -30V DC
Grid +150V DC
Filament +30V DC
Filament voltage 3 - 5V
Filament current 4 – 6A
Degas by I2R 70W
Emission 10mA
Maximum bakeout temperature 450°C
Section 4Vacuum measurement
211
Vacuum measurementNude ionization gauge tubes
All dimensions are nominal in millimetres unless specified Weights given are approximate
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Vacuum
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ent
Sensitivity Collector Filament Grid Applications/ UseModel Range mB Flange Bake °C Filament per Torr voltage voltage voltage Features Controller
UHTT 10-3 to 3 x 10-11 DN40CF 450 2 x W 25 0 30 180 EB Degas Customer own*
UHIR 10-3 to 3 x 10-11 DN40CF 450 2 x Th (Ir) 25 0 30 180 EB Degas Customer own*
BATT 10-3 to 5 x 10-10 DN40CF 450 2 x W 10 -30 30 150 Resistive Customer own*
BAIR 10-3 to 5 x 10-10 DN40CF 450 2 x Th (Ir) 10 -30 30 150 Resistive Customer own*
* These gauge heads are supplied as replacements for customers existing gauges only
Caburn-MDC does not supply a suitable controller for these gauges
83nominal
Knife edge
16nominal
33 nominal
Featuresn High temperature
n UHV compatible
n CF flange
n Replaceable filaments
Several of the Caburn-MDCtubes will directlyinterchange with models ofvarious manufac turers asnoted in the cross referencetable. While tubes may haveidentical electricalspecifications with tubes fromother manufacturers notlisted, pin-out dimensionsmay vary.
1 Each pack contains two filaments
I2R degas
Nominal Wtflange Description kg
DN40CF Twin tungsten filament, Bayard-Alpert gauge 0.3
DN40CF Single iridium filament, Bayard-Alpert gauge 0.3
Replacement Wtfor Description kg
BATT1 Twin tungsten filament, Bayard-Alpert gauge 0.3
BAIR1 Single iridium filament, Bayard-Alpert gauge 0.3
Reference
BATT
BAIR
Partnumber
432000
432002
22
51
Featuresn High temperature
n UHV compatible
n Replacement filamentassemblies for aboveionization gauge tubes
Twin tungsten filamentFilaments
Tube interchange / Cross reference table
Reference
BAIR
BARI
Partnumber
432001
432003
Replacement forDescription Granville-Phillips
Single iridium filament, BA gauge tube 274028
Replacement filament for 432002 274029
Caburn-MDCreference
BART
BAIR
Caburn-MDCpart number
432002
432003
Section 4 Vacuum measurement
212
Vacuum measurementNude ionization gauge tubes
All dimensions are nominal in millimetres unless specified Weights given are approximate
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Vac
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Featuresn 10-3 to 10-11 mbar rangen DN40CF flange mountedn Electron bombardment degasn Replaceable filament assembliesn Mount in any position
UHV Series
Pin-out pattern
Dual filament
Collector
Grid
Filament 1
Grid
Filament Common
Filament 2
n Requires minimum 34.8mm ID clearance for installation
Vacuum specificationsVacuum range 10-3 to 2x10-11 mbar
Maximum operating pressure 1x10-3 mbar
Sensitivity µ20% 25 mbar
X-ray limit 2x10-11 mbar
Construction specificationsFlange 304ss
Grid Tungsten
Filament Dual: Tungsten or iridium
Collector Tungsten
Shield coating Platinum
Base leads Soft nickel 1.5mm dia
Collector lead Soft nickel 1.0mm dia
Operating specificationsCollector 0V DC
Grid +180V DC
Filament +30V DC
Filament voltage 3 – 4.5V
Filament current 2 – 4A
Degas by EB 30 – 40W
Emission 4mA
Maximum bakeout temperature 450°C
Section 4Vacuum measurement
213
Vacuum measurementNude ionization gauge tubes
All dimensions are nominal in millimetres unless specified Weights given are approximate
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Vacuum
measurem
ent
25.496.5Nominal
33.0 Nominal
Knife edge
Nominal17.0
Featuresn High temperature
n UHV compatible
n CF flange
n Stainless steelconstruction
Several of the Caburn-MDCtubes will directlyinterchange with models ofvarious manufac turers asnoted in the cross referencetable. While tubes may haveidentical electricalspecifications with tubes fromother manufacturers notlisted, pin-out dimensionsmay vary.
1 Each pack contains two filaments
EB degas
Nominal Wtflange Description kg
DN40CF Twin tungsten filament, UHV gauge 0.6
DN40CF Single iridium filament, UHV gauge 0.6
Replacement Per Wtfor Description pack kg
UHTT1 Twin tungsten filament, UHV gauge 2 0.3
UHIR1 Single iridium filament, UHV gauge 2 0.3
Reference
UHTT
UHIR
Partnumber
432004
432006
20
51
Featuresn High temperature
n UHV compatible
n Replacement filamentassemblies for aboveionization gauge tubes
Twin tungsten filamentFilaments
Tube interchange / Cross reference table
Reference
UHRT
UHRI
Partnumber
432005
432007
Replacement for Replacement forDescription Granville-Phillips Perkin-Elmer
Twin tungsten filament, UHV gauge tube 274022 605-7673
Replacement filament for 432004 274024 605-7671
Twin iridium filament, UHV gauge tube 274023 605-7672
Replacement filament for 432004 274025 605-7676
Caburn-MDCReference
UHTT
UHRT
UHIR
UHRI
Caburn-MDCpart number
432004
432005
432006
432007
Section 4 Vacuum measurement
214
Vacuum measurementThermocouple gauge tubes
All dimensions are nominal in millimetres unless specified Weights given are approximate
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Vac
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Featuresn 0.1 micron to 1000 micron Hg range
n UHV and HV tubes
n Interchangeable with other brands
n Choice of connectors
UHV and HV series
General descriptionCaburn-MDC thermocouple gauge tubes offer a fast andreliable means of measuring vacuum from 0.1 to 1000 micronHg. They can be read continuously and remotely undersevere operating conditions.
Individual thermocouple gauges operate with specific heatercurrent ratings. Gauge tubes must be matched to theinstrument’s specifications. Refer to the manufacturer’sinstructions for heater current and thermocouple output.Note Although some units are fitted with eight pins, onlyfour pins are actively used. See tube pin-out configurations onpage 215.
UHV Series tubes feature all-welded construction, stainlesssteel casings, and are bakeable to 150°C. Electricalconnections are glass insulated. They are offered with CFmini-flanges and Cajon VCR® fittings.
HV Series tubes are supplied with nickel plated steel shelland stem assemblies for corrosion resistance. They arebakeable to 150°C.
Filamentheater pins
Thermocoupleoutput pins
HeaterThermocouple
Internalvacuum
Casing
Base
Thermocouple gauge parts
Simplified TGT-2AM shown
Tube interchange / Cross reference table
Several of the Caburn-MDC tubes will directly interchangewith models of various manufacturers as noted in thecross reference table. Standard series tubes are equal orsuperior in performance while the high temperature/UHVseries offer even higher specifications. Other models areavailable on request.
Note Although some units are fitted with eight pins, onlyfour pins are actively used.
ModelDescription number
Televac 2A
Varian / NRC 531
Varian / NRC 531
Varian / NRC 531
Consolidated CVC GTC-004
Veeco instruments DV-1M
Hastings-Raydist DV-6M
Caburn-MDCreference
TGT-2A
TGT-5310
TGT-531M
TGT-531W
TGT-5314
TGT-1000
TGT-6000
Caburn-MDCpart number
511013
511008
511001
511003
511005
511006
511007
Section 4Vacuum measurement
215
Vacuum measurementThermocouple gauge tubes
All dimensions are nominal in millimetres unless specified Weights given are approximate
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Vacuum
measurem
ent
Tube pin-out
33
74
Featuresn 150°C bakeout
n UHV compatible
n CF flange
n Stainless steelconstruction
DN16CF
Thermocouple gauge tube pin-out
Generally, for all thermocouple gauge tubes the pin outpatterns employ four active pins. Two of the pins supplycurrent to the heater inside the gauge head and two of thepins provide a return signal which is dependent onpressure inside the vacuum vessel. In the case of gaugetubes having eight pins, four of the pins are active and theother four are used for support only.
Heater Thermocouple pinsReference pins TC+ TC
TGT-2A 1 8 7 2
TGT-2AM 1 8 7 2
TGT-1518 1 7 5 3
TGT-1518M 1 7 5 3
TGT-1518W 1 7 5 3
TGT-5310 1 3 5 7
TGT-531M 1 3 5 7
TGT-531W 1 3 5 7
TGT-531S 1 3 5 7
TGT-1504 1 7 5 3
TGT-10001 3 5 7 –
TGT-60001 3 5 7 –
Partnumber
511013
511010
511004
511000
511002
511008
511001
511003
511009
511005
511006
511007
1 AC connection on heater pins; DC connection on TC pins
Pressure Heater Response Output @ 55Ω WtDescription range (mbar) current (mA) time (sec) and 0.01øHg (mV) kg
DN16CF 0.1 – 1000 95 < 0.2 9.1 0.1
DN16CF 0.1 – 1000 15 - 18.5 < 0.1 10 0.1
DN16CF 0.1 – 2500 163 < 0.1 13.5 – 14.5 0.1
Reference
TGT-2AM
TGT-1518M
TGT-531M
Partnumber
511010
511000
511001
69
33
Featuresn 150°C bakeout
n UHV compatible
n 34” VCR® fitting
n Stainless steelconstruction
19.1 34” VCR®
Pressure Heater Response Output @ 55Ω WtDescription range (mbar) current (mA) time (sec) and 0.01øHg (mV) kg
19 (34”) VCR® 0.1 - 1000 15 - 18.5 < 0.1 10 0.1
19 (34”) VCR® 0.1 - 2500 163 < 0.1 13.5 - 14.5 0.1
Reference
TGT-1518W
TGT-531W
Partnumber
511002
511003
TGT-2AM
TGT-1518W
Section 4 Vacuum measurement
216
Vacuum measurementMicro Pirani transmitters
All dimensions are nominal in millimetres unless specified Weights given are approximate
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Vac
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mea
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men
t Featuresn Fast response
n Very small internal volume
n Integrated electronics
n High temperature stability
n Easy pirani calibration
n Small dimensions
n Accuracy
Micro piraniMeasuring range 1 x 10-5 to 1 x 103 mbar
Maximum pressure 3000 mbar
Output voltage 0-10V
Temperature effect on offset <0.3 mV/°C
Materials exposed to vacuum Silicon, SiO2, Si3N4, gold,
epoxy resin, stainless steel, aluminium
Accuracy ±3% typical in 10-4 to 108 mbar range
DescriptionNew pirani sensor technology incorporating careful designof the temperature compensation circuit has made itpossible to extend the measuring range of the pirani gaugedownwards by an order of magnitude to 1x10-5 mbar.
Thermal conductivity of the gas is measured in a very smallcavity integrated in a 1x1mm silicon chip. The nonlinear 0-10V DC output is easily converted to pressure by using asimple algorithm with only three calibration constants foreach gas.
Micro pirani model MPI is mounted on a DN16KF flange.(Other flange mounts are available to order). All modelsare offered with either aluminium or stainless steel bodies.
Dual trans and dual trans+ models combine the advantagesof a piezo and a micro pirani transmitter in one instrumentmounted on a DN16KF flange.
Transmitters are not supplied with a cable.
Pressure BodyDescription range material
Micro pirani 1 x 10-5 to 1 x 10-3 mbar Aluminium
Dual trans 1 x 10-5 to 1999 mbar Aluminium
Dual trans+ 1 x 10-5 to 3999 mbar Aluminium
Micro pirani 1 x 10-5 to 1 x 10-3 mbar Stainless steel
Dual trans 1 x 10-5 to 1999 mbar Stainless steel
Dual trans+ 1 x 10-5 to 3999 mbar Stainless steel
Reference
MPI-K16
DUT1-K16
DUT2-K16
SMPI-K16
SDUT2-K16
SDUT4-K16
Partnumber
2604010
2604030
2604032
2604015
2604035
2604037
Micro pirani 1 x 10-5 to 1 x 103 mbar
The micro pirani measures the thermal conductivity of theresidual gas. It is based on a 1x1mm micro mechanic chipwith resistors for measuring the thermal conductivity andthe ambient temperature. This technology together withadvanced circuit design offers excellent performance. Themicro pirani cannot be used in corrosive environments.The measured gas must be compatible with silicon, Si02,Si3N4, gold, epoxy resin, Viton®, stainless steel and nickel.Normally a standard pirani cannot be used in explosiveenvironments because the filament is kept at a constanttemperature of 150°C or higher. The sensor element ofthe micro pirani is kept at a temperature only 30°C aboveambient allowing the use in some explosive environments.
Dual trans 1 x 10-5 to 2000 mbar
The dual trans is a combination of a piezo and a micropirani into one transmitter. The advantages of the piezofrom overpressure down to 1 mbar combined with thewide measuring range of the micro pirani results in atransmitter covering more than 8 decades with highaccuracy. For media compatibility of the dual trans refer tothe micro pirani and the piezo.
Dual trans+ 1 x 10-5 to 4000 mbar
The dual trans+ is designed for vacuum applications whereoverpressure may occur. It can measure up to 4000 mbar.
Accuracy
Typical values are normally ±10 to 15% in a range down to10-3 mbar.
Section 4Vacuum measurement
217
Vacuum measurementBourdon gauges
All dimensions are nominal in millimetres unless specified Weights given are approximate
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Vacuum
measurem
ent
Featuresn Large easy-to-read dial
n Measures vacuum to 1bar and overpressure to 1bar
n CF, KF, or NPT mounting
n Stainless steel construction
DescriptionProvides a quick visual check of roughing line pressures.
Note These gauges are intended for vacuum use with other Caburn-MDC components and as such are not ratedfor oxygen service.
30Ø74
67
125
1/4” female to 1/8” male NPTadaptor – supplied withunflanged model only.
A
Low vacuum series
Nominal Flange Ω Wtflange OD A kg
Flanged
DN16CF 34 102 0.1
DN40CF 70 107 0.3
DN16KF 30 107 0.2
DN25KF 40 107 0.2
DN40KF 55 107 0.3
DN50KF 75 107 0.3
Pipe thread
NPT thread Includes one 14” female to 1
8” male air fitting 0.1
Reference
075-VG
150-VG
K075-VG
K100-VG
K150-VG
K200-VG
VG
Partnumber
432014
432016
432010
432011
432012
432013
432020
Pressure / vacuum gauge
n 63.5 diameter gauge face
n On NPT model only, removable adaptor allows either 1/8” or 1/4” NPT thread mounting
Section 4 Vacuum measurement
218
Vacuum measurementGlass envelope ionization gauge tubes
All dimensions are nominal in millimetres unless specified Weights given are approximate
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Vac
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Side arm glass envelope ionization gauge tubes
Featuresn Non-burnout design allows momentary exposure
to atmosphere
n Choice of Pyrex®, Kovar® and CF flange
n ISO KF flange optional
Collector lead
133nominal
57
Grid leads
Filament leads
83or86
nominal
nominal
Pin-out pattern
Vacuum specificationsVacuum range 10-3 to 2x10-10 mbar
Maximum operating pressure 1x10-3 mbar
Pumping speed Ionic 0.06 litres/sec – N2 (1mA)
X-ray limit 2x10-10 mbar – N2 (approx.)
Construction specificationsEnvelope Nonex
Grid “Non-sag” tungsten 0.7mm dia
Filament Hairpin thoria coated iridium
Collector Tungsten, 0.254mm dia
Shield coating Platinum, internally connected to filament
Base leads Soft nickel 1.5mm dia
Collector lead Soft nickel 1.0mm dia
Internal volume 220cm3 (not including tubulation)
Operating ratingsCollector 0V DC (ground)
Shield Internally connected to filament
Grid +150V DC to ground
Filament +30V DC to ground
Filament volts AC 4.0 V
Filament current AC 3.5A (1 mA grid current)
Absolute maximum filament volts AC 6.0V
Absolute maximum filament current AC 6.0A
Absolute maximum filament temperature 1400°C
n For both grid and filament leads, one is positive and the other is ground
– It does not matter which lead is positive and which lead is ground
n All four bottom leads are in a single line
n Pin-out pattern is the same industry-wide
UHV and HV series
Section 4Vacuum measurement
219
Vacuum measurementGlass envelope ionization gauge tubes
All dimensions are nominal in millimetres unless specified Weights given are approximate
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Vacuum
measurem
ent
Several of the Caburn-MDC tubes will directly interchangewith models of various manufac turers as noted in the crossreference table.
While tubes may have identical electrical specificationswith tubes from other manufacturers not listed, pin-outdimensions may vary.
Tube interchange / Cross reference table
Replacement for Replacement for Replacement forDescription Granville-Phillips Perkin-Elmer Varian
DN16CF Nominal size 274020 – –
DN40CF Nominal size 274008 605-7152 571-K2471-303
Pyrex® with graded seal, 19.1 tube 274002 – –
Pyrex® with graded seal, 25.4 tube 274005 – –
Kovar® with graded seal, 19.1 tube 274003 605-7000 571-K2471-305
Kovar® with graded seal, 25.4 tube 274006 – 571-K2471-302
Caburn-MDCReference
IGT-075-D
IGT-100-D
IGT-075-P
IGT-100-P
IGT-075-K
IGT-100-K
Caburn-MDCpartnumber
432023
432026
432021
432024
432022
432025
nominal127
86nominal
70 ODflange on25.4 ODtube
83nominal
nominal11434 OD
flange on19.1 ODtube
Featuresn UHV compatible
n CF flange
CF Flange
Nominal Wtflange Description kg
DN16CF 19.1 tube with DN16CF flange 0.2
DN40CF 25.4 tube with DN40CF flange 0.2
Reference
IGT-075-D
IGT-100-D
Partnumber
432023
432026
Method of Wtconnection Description kg
Pyrex® tube
19.1 19.1 tube 0.2
25.4 25.4 tube 0.2
Kovar® sleeve
19.1 19.1 tube 0.2
25.4 25.4 tube 0.2
Reference
IGT-075-P
IGT-100-P
IGT-075-K
IGT-100-K
Partnumber
432021
432024
432022
432025
45
19.1 OD
45
86nominal
114nominal
114nominal
25.4 OD
83nominal
Featuresn HV compatible
n Pyrex® tube or Kovar®
sleeve
Tubulated
220 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk