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Calibration KitVersion Y-2006.06, June 2006

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Copyright Notice and Proprietary InformationCopyright © 2006 Synopsys, Inc. All rights reserved. This software and documentation contain confidential and proprietary information that is the property of Synopsys, Inc. The software and documentation are furnished under a license agreement and may be used or copied only in accordance with the terms of the license agreement. No part of the software and documentation may be reproduced, transmitted, or translated, in any form or by any means, electronic, mechanical, manual, optical, or otherwise, without prior written permission of Synopsys, Inc., or as expressly provided by the license agreement.

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Calibration Kit, Y-2006.06

CALIBRATION KIT CONTENTS

Calibration KitAbout this manual .................................................................................................................................v

Audience ..............................................................................................................................................................vRelated publications.............................................................................................................................................vTypographic conventions .................................................................................................................................... viCustomer support................................................................................................................................................ vi

Chapter 1 Overview of Calibration Kit.................................................................................................1Introduction ..........................................................................................................................................................1Input modules.......................................................................................................................................................2

Calibration libraries.........................................................................................................................................2Calibration files...............................................................................................................................................3

Advanced Calibration for Sentaurus Process .........................................................................................3Calibration for Sentaurus Process Kinetic Monte Carlo ..........................................................................4Advanced Calibration for TSUPREM-4 ...................................................................................................4Advanced Calibration for Dios.................................................................................................................5

Structure of calibration project .............................................................................................................................6Sentaurus Process .........................................................................................................................................7TSUPREM-4...................................................................................................................................................7Dios ................................................................................................................................................................8Mesh (optional)...............................................................................................................................................9Sentaurus Device (optional) ...........................................................................................................................9Inspect............................................................................................................................................................9Tecplot SV....................................................................................................................................................10

Chapter 2 Operations guide ...............................................................................................................11Manipulating Sentaurus Workbench projects.....................................................................................................11

Project Wizard ..............................................................................................................................................11Scenario Wizard ...........................................................................................................................................15Process Wizard ............................................................................................................................................16Parameter Wizard ........................................................................................................................................18Optimization Wizard .....................................................................................................................................21Merger Editor................................................................................................................................................24Editing variables ...........................................................................................................................................24

Viewers in Sentaurus Workbench ......................................................................................................................25Viewing process files....................................................................................................................................25Viewing profile files.......................................................................................................................................25Viewing layout files.......................................................................................................................................26

Chapter 3 Reference guide.................................................................................................................27Experiment database .........................................................................................................................................27

Environment variable STCALIB....................................................................................................................27Process file syntax .......................................................................................................................................27

Ligament syntax ....................................................................................................................................27Sentaurus Process syntax ....................................................................................................................28TSUPREM-4 syntax ..............................................................................................................................29Dios syntax............................................................................................................................................30

Process searches...............................................................................................................................................30Syntax of QPS list file...................................................................................................................................31Database Process Search............................................................................................................................31Calibration Project Process Search..............................................................................................................32

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CALIBRATION KITCONTENTS

Profiles ...............................................................................................................................................................33Profile visualization.......................................................................................................................................33Profile curve comparison..............................................................................................................................33

Relative logarithmic square difference ..................................................................................................34Relative linear square difference...........................................................................................................34Arithmetic mean of relative error ...........................................................................................................35Quadratic mean or root-mean-square of relative error..........................................................................35

Confidentiality warning .......................................................................................................................................35

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CALIBRATION KIT ABOUT THIS MANUAL

Calibration Kit

About this manual

The Calibration Kit is the calibration environment that is part of Sentaurus Workbench Advanced. It isthe interface to the calibration libraries, which replace the previous TCAD Fab Package database.

This manual describes the functionality of the Calibration Kit and outlines how to use the application.The main chapters are:

Chapter 1 describes the components and program modules of the Calibration Kit.

Chapter 2 provides a detailed operations guide for the graphical user interfaces.

Chapter 3 describes commands, file formats, and examples.

AudienceThis manual is intended for users of the Calibration Kit software package.

Related publicationsFor additional information about Calibration Kit, see:

The documentation installed with the Calibration Kit software and available through the CalibrationKit Help menu.

The Calibration Kit release notes, available on SolvNet (see Accessing SolvNet on page vi).

Documentation on the Web, which is available through SolvNet athttps://solvnet.synopsys.com/DocsOnWeb.

Synopsys Online Documentation (SOLD), which is included with the software for CD users or isavailable to download through the Synopsys Electronic Software Transfer (EST) system.

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http://solvnet.synopsys.com/DocsOnWeb

CALIBRATION KITABOUT THIS MANUAL

Typographic conventions

Customer supportCustomer support is available through SolvNet online customer support and through contacting theSynopsys Technical Support Center.

Accessing SolvNet

SolvNet includes an electronic knowledge base of technical articles and answers to frequently askedquestions about Synopsys tools. SolvNet also gives you access to a wide range of Synopsys onlineservices including software downloads, documentation on the Web, and “Enter a Call to the SupportCenter.”

To access SolvNet:

1. Go to the SolvNet Web page at http://solvnet.synopsys.com.

2. If prompted, enter your user name and password. (If you do not have a Synopsys user name andpassword, follow the instructions to register with SolvNet.)

If you need help using SolvNet, click HELP in the top-right menu bar or in the footer.

Convention Explanation

{ } Braces

[ ] Brackets

( ) Parentheses

Blue text Identifies a cross-reference (only on the screen).

Bold text Identifies a selectable icon, button, menu, or tab. It also indicates the name of a field, window, dialog box, or panel.

Courier font Identifies text that is displayed on the screen or that the user must type. It identifies the names of files, directories, paths, parameters, keywords, and variables.

Italicized text Used for emphasis, the titles of books and journals, and non-English words. It also identifies components of an equation or a formula, a placeholder, or an identifier.

Menu > Command Indicates a menu command, for example, File > New (from the File menu, select New).

NOTE Identifies important information.

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http://solvnet.synopsys.com

CALIBRATION KIT ABOUT THIS MANUAL

Contacting the Synopsys Technical Support Center

If you have problems, questions, or suggestions, you can contact the Synopsys Technical Support Centerin the following ways:

Open a call to your local support center from the Web by going to http://solvnet.synopsys.com(Synopsys user name and password required), then clicking “Enter a Call to the Support Center.”

Send an e-mail message to your local support center:

• E-mail [email protected] from within North America.

• Find other local support center e-mail addresses at http://www.synopsys.com/support/support_ctr.

Telephone your local support center:

• Call (800) 245-8005 from within the continental United States.

• Call (650) 584-4200 from Canada.

• Find other local support center telephone numbers at http://www.synopsys.com/support/support_ctr.

Contacting your local TCAD Support Team directly

Send an e-mail message to:

[email protected] from within North America and South America.

[email protected] from within Europe.

[email protected] from within Asia Pacific (China, Taiwan, Singapore, Malaysia,India, Australia).

[email protected] from Korea.

[email protected] from Japan.

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http://solvnet.synopsys.com

http://www.synopsys.com/support/support_ctr

http://www.synopsys.com/support/support_ctr

CALIBRATION KITABOUT THIS MANUAL

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CALIBRATION KIT CHAPTER 1 OVERVIEW OF CALIBRATION KIT

Calibration Kit

CHAPTER 1 Overview of Calibration Kit

This chapter presents an overview of the Calibration Kit.

IntroductionAs a software package that extends the functionality of Sentaurus Workbench, the Calibration Kit assistsusers to perform efficient calibration of the Synopsys process simulators Sentaurus Process, SentaurusProcess Kinetic Monte Carlo, TSUPREM-4, and Dios in 1D.

In combination with the calibration libraries containing secondary ion mass spectrometry (SIMS) data,the Calibration Kit gives users a fast, accurate, and reliable method of evaluating and optimizing processconditions. It allows a predictive analysis of the influence of process equipment parameters on electricaldevice data. In addition, it helps users to understand the sensitivity of processes to various controlparameters, enabling them to optimize equipment operation quickly.

The Calibration Kit is the calibration environment in the Sentaurus Workbench Advanced. It serves asa database browser, and a simulation and project manager.

The framework tool Sentaurus Workbench in Sentaurus Workbench Advanced contains customizedviewers and wizards for calibration. Sentaurus Workbench is the primary graphical front end ofSynopsys that integrates the simulation programs into one environment (see the Sentaurus WorkbenchUser Guide). The Calibration menu of the Sentaurus Workbench provides software for the specificmanipulation of the simulation flow and report generation (see Chapter 2 on page 11 and Chapter 3 onpage 27).

The software package Optimizer, which is integrated in the Sentaurus Workbench Advanced, is used forthe automatic analysis and optimization of process and calibration parameters (see the Optimizer UserGuide).

The principal software are the process simulators Sentaurus Process, TSUPREM-4, and Dios. To markup the process flows of TSUPREM-4 and Dios with the calibration parameters, the Merger software isused (see the Advanced Calibration User Guide).

In addition to the analytic extraction in the process simulators, the Sentaurus Device software can beintegrated for electrical parameter extraction, preceded by Mesh for mesh generation.

For visualization, Inspect and Tecplot SV are integrated into the Calibration Kit.

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CALIBRATION KITCHAPTER 1 OVERVIEW OF CALIBRATION KIT

Input modulesProcess descriptions and data, which are calibration libraries such as the Calibration Library, as well assimulator calibration such as Advanced Calibration are input to the Calibration Kit. The calibrationlibraries and calibration files are described here.

Calibration librariesThe calibration libraries are experiment databases consisting of three subdirectories: processes_*,experiments, and preferences (see Environment variable STCALIB on page 27).

In the process directory processes_*, each process file contains a recipe for wafer processing and areference to the corresponding secondary ion mass spectrometry (SIMS) measurements. By default,these recipes are written in the simple process representation (SPR) syntax of Ligament and do notcontain any simulator models or parameters. In this case, the directory is called processes_lig.

The file name of the process is the same as the name of the process. The input files of the processsimulators Sentaurus Process, TSUPREM-4, and Dios are created automatically before simulation bytranslating SPR to Sentaurus Process, TSUPREM-4, or Dios, and by calibrating the pure recipes withsimulation models. For Sentaurus Process, the calibration parameters and models are sourced before aprocess recipe is applied. In the case of TSUPREM-4 and Dios, an input file is marked up by mergingthe calibration parameters with a process recipe.

In the process files, the SIMS measurements are represented by insert statements. The insert statementis translated to a SetPltList command for Sentaurus Process, a SELECT command for TSUPREM-4, or a1D command for Dios. In each SetPltList, SELECT, or 1D command, the measured chemical dopant speciesand the file name of the SIMS profile are specified. A process file can have several SetPltList, SELECT,or 1D statements, which correspond to several SIMS profiles.

The experiment directory experiments contains the measured SIMS profiles in xy format. The firstcolumn is the depth [nm] and the second column is the concentration of the chemical dopant [cm–3]. Thefile names match exactly the names specified in the 1D commands of the recipe files.

The preference directory preferences contains additional information. For each SIMS profile name.simsin experiments, there is one preference file name_sims.prf in preferences, which can specify the following(Tcl) variables:

sims_xmin and sims_xmax give the depth [nm] range for which the SIMS profile should be comparedto the simulation results.

vis_xmin and vis_xmax are the preferred minimal and maximal depth [nm], respectively, to be shownin a graphical presentation of the profile.

vis_ymin and vis_ymax are the preferred minimal and maximal concentration [cm–3], respectively, tobe shown in a graphical presentation of the profile.

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In a project of the Sentaurus Workbench generated by the Calibration Kit, the file names of the processflows are changed to b@node@_mer.cmd, the SIMS profiles are named b@node@_[profile].plx, and allpreference files have the name b@node@_[profile].prf, where @node@ is the number of a project node ofSentaurus Workbench. For more details about the project structure of the Sentaurus Workbench, seeChapter 2 on page 11.

Users can add their own experimental data to the measurement database or can create their owndatabase. In the latter case, it is recommended to keep the same directory structure, with process files,profile files, and preference files in three subdirectories (see Environment variable STCALIB onpage 27).

The process recipes can have the syntax of Ligament SPR, Sentaurus Process, TSUPREM-4, or Dioswith specific restrictions for the Calibration Kit (see Process file syntax on page 27). The directoryexperiments can contain SIMS profiles and spreading resistance profiles (SRP).

Calibration filesThe directory $STROOT/tcad/$STRELEASE/lib/fabpackagelib contains text files with physical models andparameters for Sentaurus Process, Sentaurus Process Kinetic Monte Carlo, TSUPREM-4, and Dios.

Advanced Calibration for Sentaurus Process

Two files in $STROOT/tcad/$STRELEASE/lib/fabpackagelib are used for calibrated 1D simulations ofSentaurus Process with the Calibration Kit: AdvCal_2006.06.fps and calib_1d_2006.06.fps.

The file AdvCal_2006.06.fps is the latest version of Advanced Calibration for Sentaurus Process. Itcontains a selection of physical models and parameters that are calibrated for deep submicrontechnology. It has the same contents as the file AdvCal_2006.06.fps in the directory $STROOT/tcad/$STRELEASE/lib/floops/TclLib/AdvCal.

NOTE When improvements to the model calibration are made, between feature releases, the file inthe directory fabpackagelib will contain the latest version. The contents of the fileAdvCal_2006.06.fps is explained in the Advanced Calibration User Guide, which can beaccessed from Sentaurus Workbench (Help > Manuals).

The file calib_1d_2006.06.fps contains the information needed for simulation, which does not belong tothe process flow or the physical models, and includes:

A definition of basic machines for etching and deposition.

The creation of a 1D simulation mesh, which is optimized for accurate 1D simulations.

A procedure for writing 1D profiles in plot (.plt) text format.

A selection of meshing parameters.

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In the last lines of calib_1d_2006.06.fps, the 1D mesh is created and the file AdvCal_2006.06.fps, whichcontains the physical models, is sourced.

NOTE Older versions of the calibration files are also available in $STROOT/tcad/$STRELEASE/lib/fabpackagelib and can be used in combination with Sentaurus Process Version Y-2006.06, forexample, AdvCal_2005.10.fps and calib_1d_2005.10.fps.

Calibration for Sentaurus Process Kinetic Monte Carlo

Two files in $STROOT/tcad/$STRELEASE/lib/fabpackagelib are used for calibrated 1D simulations ofSentaurus Process Kinetic Monte Carlo with the Calibration Kit: Cal_KMC_2006.06.fps andcalib_KMC_2006.06.fps.

The file Cal_KMC_2006.06.fps is a calibration file for Sentaurus Process Kinetic Monte Carlo, containinga selection of physical models and parameters for demonstration purpose only.

The file calib_KMC_2006.06.fps contains the information needed for simulation, which does not belong tothe process flow or the physical models, and includes:

A definition of basic machines for etching and deposition.

The creation of a 3D atomistic simulation cell and a 1D projection mesh, which is optimized foraccurate 1D simulations.

A procedure for writing 1D profiles in plot (.plt) text format.

A selection of atomistic parameters.

In the last lines of calib_KMC_2006.06.fps, the simulation cell is created, the atomistic mode is selected,and the file Cal_KMC_2006.06.fps, which contains the physical models, is sourced.

NOTE No Advanced Calibration is available for Sentaurus Process Kinetic Monte Carlo VersionY-2006.06.

Advanced Calibration for TSUPREM-4

Both calibration files for TSUPREM-4, AdvCal_1d_MC_2006.06.smr and AdvCal_1d_tables_2006.06.smr, havethe format of a Merger Rules file. Merger is integrated in the Calibration Kit. With Merger, these Rulesfiles can be used to create a TSUPREM-4 input file with calibrated models from a raw process flow. Fora detailed description of the syntax of a Merger Rules file, refer to the Advanced Calibration User Guide.

The files AdvCal_1d_MC_2006.06.smr and AdvCal_1d_tables_2006.06.smr are the latest version of AdvancedCalibration for TSUPREM-4. They contain a selection of physical models and parameters that arecalibrated for deep submicron technology. The file AdvCal_1d_MC_2006.06.smr enables the Taurus Monte

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Carlo (MC) implant model. The file AdvCal_1d_tables_2006.06.smr enables the Taurus analytic implantmodel.

Besides the implantation models, the two files have the same contents as the fileAdvCal_1d_tables_2006.06.smr in the TSUPREM-4 library. When improvements to the model calibrationare made, between feature releases, the file in the directory fabpackagelib will contain the latest version.The contents of the file AdvCal_1d_tables_2006.06.smr is explained in the Advanced Calibration UserGuide.

The gridblock of AdvCal_1d_MC_2006.06.smr and AdvCal_1d_tables_2006.06.smr is designed for one-dimensional simulations only. (See the Advanced Calibration User Guide for details about gridblocks.)

NOTE Older versions of the calibration files are also available in $STROOT/tcad/$STRELEASE/lib/fabpackagelib and can be used in combination with TSUPREM-4 and Merger VersionY-2006.06, for example, AdvCal_1d_MC_2004.09.smr and AdvCal_1d_tables_2004.09.smr.

Advanced Calibration for Dios

Both calibration files for Dios, AdvCal_1d_CTRIM_2005.10.dmr and AdvCal_1d_tables_2005.10.dmr, have theformat of a Merger Rules file. Merger is integrated in the Calibration Kit. With Merger, these Rules filescan be used to create a Dios input file with calibrated models from a raw process flow. For a detaileddescription of the syntax of a Merger Rules file, refer to the Advanced Calibration User Guide.

The Merger Rules files AdvCal_1d_CTRIM_2005.10.dmr and AdvCal_1d_tables_2005.10.dmr contain the samephysical models and parameters as the files AdvCal_1d_CTRIM_2005.10.dmr andAdvCal_1d_tables_2005.10.dmr of Dios, which are located in:

$STROOT/tcad/$STRELEASE/lib/dioslib/

The first Rules file specifies parameters for Monte Carlo (Crystal-TRIM) implantation, while the latterspecifies the tables for analytic implantation. Both Rules files contain the same physics. The AdvancedCalibration parameters are documented in the Advanced Calibration User Guide, which can be accessedfrom Sentaurus Workbench (Help > Manuals).

Both Merger Rules files contain a gridblock where a 1D mesh is defined, a startblock where physicalmodels and parameters are set, and a list of pattern-actions that serve to insert Dios model switches orparameters exactly where needed, that is, at process steps for which the conditions are evaluated as true.

The gridblock of AdvCal_1d_CTRIM_2005.10.dmr and AdvCal_1d_tables_2005.10.dmr is designed for one-dimensional simulations only.

See the Advanced Calibration User Guide for details about gridblocks, startblocks, and pattern-actions.

NOTE AdvCal_1d_MC_2006.06.dmr and AdvCal_1d_tables_2006.06.dmr are not available.

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Structure of calibration projectA Calibration Kit project is a certain type of project of Sentaurus Workbench with either three or fivetools, and one to five parameters. For details about Sentaurus Workbench and its general projectstructure, refer to the Sentaurus Workbench User Guide.

Figure 1 Calibration Kit project loaded in Sentaurus Workbench; tool flow is horizontal and experiment flow is vertical

Taking Figure 1 as an example, the first tool in the tool flow can be Sentaurus Process, TSUPREM-4, orDios for process simulation. Optionally, Mesh and Sentaurus Device are used for mesh generation anddevice simulation, respectively. The Inspect step for variable value extraction is followed by Tecplot SVfor visualization.

The parameter nr of Sentaurus Process, TSUPREM-4, and Dios represents the index of the process.Every experiment has a unique process recipe. The process file-naming convention is b@nr@_fps.cmd forSentaurus Process, and b@nr@_mer.cmd for TSUPREM-4 and Dios. In general, files starting with b@nr@_*belong to the experiment of the parameter value @nr@.

The Calibration Kit has several variables of the Sentaurus Workbench. The variable process names theprocess recipe and the variable process_info lists process information. The variable n_profile shows thenumber of profiles per experiment, which are named by the variables profile_@integer@, with integerequal to 1, 2, 3, …, 10. For each profile, the file b@nr@_@{profile_@integer@}@.plx contains the experimentdata and the file b@nr@_@{profile_@integer@}@.prf contains the preferences.

To identify a project of the Sentaurus Workbench as a Calibration Kit project, an empty hiddenfile.fabpackage is included in the project directory. The greadme.txt file (Project > Readme) can be usedto collect project information.

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Sentaurus ProcessThe project structure is the same for Sentaurus Process in continuum or in kinetic Monte Carlo mode.The mode is defined in the calibration files.

The process simulator Sentaurus Process uses the command file n@node@_fps.cmd as input. This commandfile sources the calibration file @calibration@ of Sentaurus Process, evaluates the parameter nr for eachexperiment, and sources the process recipe b@nr@_fps.cmd. Therefore, the parameter nr of SentaurusProcess represents the process.

The output of Sentaurus Process is the xy-plot file b@nr@_@{profile_@integer@}@_simulation.plt, the datafile b@nr@_fps.dat.gz, and the grid file b@nr@_fps.grd.gz. Therefore, the file name of the simulated profileb@nr@_@{profile_@integer@}@_simulation.plt only differs from the file name of the measured profileb@nr@_@{profile_@integer@}@.plx in its ending. The variables process, process_info, calibration, n_profile,and profile_@integer@ are defined for the Sentaurus Process step. Sentaurus Process can have a secondparameter (see Parameter Wizard on page 18).

Sentaurus Process is called with the command-line option -n to switch off the syntax check.

Optionally, the sheet resistance is extracted analytically by the Sentaurus Process commandSheetResistance.

In the case of kinetic Monte Carlo, the atomistic information is stored by the kmc extract tdrWrite

command.

TSUPREM-4The process simulator TSUPREM-4 uses the command file n@node@_ts4.cmd as input. This command fileevaluates the parameter nr for each experiment and includes the process recipe b@nr@_ts4.cmd. Therefore,the TSUPREM-4 parameter nr represents the process.

The process recipe b@nr@_ts4.cmd is created by Merger. For information about Merger, see the AdvancedCalibration User Guide.

In the case of one TSUPREM-4 parameter, Merger is called in batch mode during preprocessing as aTSUPREM-4 setup command. The markup tool takes the process file b@nr@_mer.cmd and a Mergercalibration file as input. The variable calibration defines the name of the Merger calibration file, whichfollows the syntax of the Merger Rules file. By default, the parameter file AdvCal_1d_tables_2006.06.smrof Advanced Calibration is used. The output is the calibrated input command file b@nr@_ts4.cmd ofTSUPREM-4.

In the case of two or more TSUPREM-4 parameters, Merger is called in batch mode duringpreprocessing as a TSUPREM-4 prologue command after the parameter preprocessing of the SentaurusWorkbench. Merger takes the preprocessed pp@node@_ts4.cmd file and the Merger calibration file@calibration@ as input. The output is the calibrated input command file n@node@_ts4.cmd of TSUPREM-4.

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The output of TSUPREM-4 is the xy-plot file b@nr@_@{profile_@integer@}@_simulation.plt and thetechnology interchange format (TIF) file b@nr@_ts4.tif. The TSUPREM-4 epilogue calls the dataconverter Sentaurus Data Explorer to change the TIF file to the TDR file b@nr@_ts4.tdr. The file nameof the simulated profile b@nr@_@{profile_@integer@}@_simulation.plt only differs from the file name of themeasured profile b@nr@_@{profile_@integer@}@.plx in its ending. The variables process, process_info,calibration, n_profile, and profile_@integer@ are defined for the TSUPREM-4 step. TSUPREM-4 canhave up to five parameters (see Parameter Wizard on page 18).

Optionally, the sheet resistance is extracted analytically by the TSUPREM-4 command ELECTRICALRESISTANCE.

DiosThe process simulator Dios uses the command file n@node@_dio.cmd as input. This command file evaluatesthe parameter nr for each experiment and includes the process recipe b@nr@_dio.cmd. Therefore, the Diosparameter nr represents the process.

The process recipe b@nr@_dio.cmd is created by Merger. For details about Merger, see the AdvancedCalibration User Guide.

In the case of one Dios parameter, Merger is called in batch mode during preprocessing as a Dios setupcommand. The markup tool takes the process file b@nr@_mer.cmd and a Merger calibration file as input.The variable calibration defines the name of the Merger calibration file, which follows the syntax of theMerger Rules file. By default, the parameter file AdvCal_1d_tables_2005.10.dmr of Advanced Calibrationis used. The output is the calibrated input command file b@nr@_dio.cmd of Dios.

In the case of two or more Dios parameters, Merger is called in batch mode during preprocessing as aDios prologue command after the parameter preprocessing of the Sentaurus Workbench. Merger takesthe preprocessed pp@node@_dio.cmd file and the Merger calibration file @calibration@ as input. The outputis the calibrated input command file n@node@_dio.cmd of Dios.

The output of Dios is the xy-plot file b@nr@_@{profile_@integer@}@_simulation.plt, the data fileb@nr@_dio.dat.gz, and the grid file b@nr@_dio.grd.gz. Therefore, the file name of the simulated profileb@nr@_@{profile_@integer@}@_simulation.plt only differs from the file name of the measured profileb@nr@_@{profile_@integer@}@.plx in its ending. The variables process, process_info, calibration, n_profile,and profile_@integer@ are defined for the Dios step. Dios can have up to five parameters (see ParameterWizard on page 18).

Optionally, the sheet resistance is extracted analytically by the Dios command 1D(RS).

8


Mesh (optional)Mesh is used for the mesh generation of a 2D device simulation. For the calculation of sheet resistance,a 2D device is defined to represent the sheet of an ultrashallow junction of a transistor. The devicedefinition is taken from the output files b@nr@_fps.dat.gz and b@nr@_fps.grd.gz of Sentaurus Process, orfrom the output file b@nr@_ts4.tdr of TSUPREM-4, or the output files b@nr@_dio.dat.gz andb@nr@_dio.grd.gz of Dios. The geometry is described by the variables y_sheet and y_contact defined forMesh. The variable y_sheet defines the depth [μm] of the sheet; the variable y_contact defines the depth[μm] of the contacts. For each experiment, the default length of the sheet is 20 μm.

The resulting boundaries are stored in n@node@_msh.bnd; the doping information is stored inn@node@_msh.dat; and the grid is stored in n@node@_msh.grd.

Sentaurus Device (optional)Sentaurus Device performs a 2D device simulation on the sheet defined in n@node|mesh@_msh.dat andn@node|mesh@_msh.grd. Voltage and total current distribution of the sheet are computed for a voltage of 2 Vbetween the left and right contacts. The results are saved in n@node@_des.plt. The optional parameter fileof Sentaurus Device is named sdevice.par.

InspectInspect calculates the sheet resistance and the curve differences. From n@node|sdevice@_des.plt, Inspecttakes the voltage and total current distribution, and calculates the sheet resistance. The results are storedin the variable Rs_sim. Users can compare the extracted value with the experimental data for someexperiments. The variable Rs_exp, which is defined by Sentaurus Process, TSUPREM-4, or Dios, keepsthe measured value or is set to zero if no measurement value is present.

For each profile pair, Inspect computes the difference between the measured profileb@nr@_@{profile_@integer@}@.plx and simulated profile b@nr@_@{profile_@integer@}@_simulation.plt. Thepossible methodologies for this curve comparison are relative logarithmic and linear square difference,and arithmetic and quadratic mean of relative error. The variables cv_delta_@integer@, with integer equalto 1, 2, 3, …, 10, hold the extracted curve difference per μm for profile_@integer@ (see Profile curvecomparison on page 33).

In interactive mode, the profiles can be viewed. If users want to save the visualization in the Inspectformat, this must be performed manually.

9


Tecplot SVTecplot SV visualizes all measured and simulated profiles of a process in one xy-plot. To set up the datafor visualization, the Tcl command TecplotSetup is executed as the prologue to Tecplot SV. TecplotSetuptakes all profiles (b@nr@_@{profile_@integer@}@.plx, b@nr@_@{profile_@integer@}@_simulation.plt), curvecomparison results (cv_delta_@integer@), and preferences (b@nr@_@{profile_@integer@}@.prf) and includesthem in Tecplot SV ASCII format in the file n@node@_tec.dat.

Tecplot SV loads the data in n@node@_tec.dat and plots it in one xy-plot. All profiles of the experimentincluded are plotted on top of each other. The curve comparison results cv_delta_@integer@ are listed nextto the curve label of the corresponding simulated profile. The borders of the curve comparison of the lastprofile pair are drawn in dashed style. The Tecplot SV layout is saved as n@node@_tec.lpk.

10

CALIBRATION KIT CHAPTER 2 OPERATIONS GUIDE

Calibration Kit

CHAPTER 2 Operations guide

This chapter provides a detailed operations guide of the graphical user interfaces.

Manipulating Sentaurus Workbench projectsA Calibration Kit project can be manipulated like any other project of the Sentaurus Workbench (fordetails on editing projects, see the Sentaurus Workbench User Guide). However, special wizards of theCalibration Kit are used to guide users through project creation and extension, scenario and experimentgeneration, and parameterization. It is faster and more thorough to manipulate projects through thesewizards rather than standard features of the Sentaurus Workbench. The wizards are accessed through theCalibration menu of Sentaurus Workbench Advanced.

Figure 2 Available wizards from Calibration menu

NOTE The renumbering of nodes of a Calibration Kit project may lead to a reduction offunctionality. It is strongly recommended not to renumber the nodes.

Project WizardTo create a new Calibration Kit project or extend an existing project by a new scenario, use the ProjectWizard from the Sentaurus Workbench menu:

1. Calibration > Project Wizard.The title page of the wizard is displayed.

2. Click Next to start.

3. Select the library and syntax.

This can be the experiment database of the Calibration Library in Ligament (SPR) syntax or a user-specified database (user library) in Ligament, Sentaurus Process, TSUPREM-4, or Dios syntax. Inthe case of a user-specified database, select the process directory, experiment directory, preferencedirectory, and syntax.

11

CALIBRATION KITCHAPTER 2 OPERATIONS GUIDE

Figure 3 Calibration Kit Project Wizard

4. Click Next.

5. Select a process list:

a) Click Browse to select a list or search for a list with the module Database Process Search(DBPS). (For the syntax of a process list file file.qps, see Process searches on page 30.)

b) To search for processes by using DBPS in the previously selected database and syntax (Step 3),type a search pattern in the Process Search Pattern field. Select the alphabetic order of theprocess list file to be either by process names or process recipes. Finally, click Search. Theresult is written to the selected process list file (see Database Process Search on page 31).

c) To edit the selected list, click Edit to open SEdit.

6. Click Next.

7. Select the process simulator and calibration.

Users can select Sentaurus Process, TSUPREM-4, or Dios as the process simulator. For modelingof implantation, users can choose between analytic and Monte Carlo (Taurus Monte Carlo andCrystal-TRIM). In the case of Sentaurus Process, the selection of kinetic Monte Carlo and stressrelaxation modeling is available as well. There is the option to select the parameters of AdvancedCalibration or a user-defined parameter file. For TSUPREM-4 or Dios, the single calibration filemust be in the format of a Merger Rules file, which usually follows the naming scheme *.smr or*.dmr. For Sentaurus Process, users can select up to two calibration files in the Alagator (Tcl) syntaxof Sentaurus Process, which usually follow the naming scheme *.fps.

8. Click Next.

12


9. Select the device simulation to calculate the sheet resistance:

a) By default, the Device Simulation Disabled option is selected.

b) For device simulation, select the Device Simulation Enabled option.

In this case, the Mesh and Sentaurus Device steps are part of the project of the SentaurusWorkbench. To select a parameter file of Sentaurus Device, click Browse. The parameter fileformat of Sentaurus Device usually follows the naming convention *.par and is namedsdevice.par in the project of the Sentaurus Workbench. If no file is selected, Sentaurus Deviceuses the default parameters.

10. Click Next.

11. Select the methodology for simulation and experiment profile comparison. Users can select from:

a) Relative logarithmic square difference (default)

b) Relative linear square difference

c) Arithmetic mean of relative error

d) Quadratic mean or root-mean-square of relative error

12. Click Next.

13. Select a project and scenario name:

a) To create a new project, select Create New Project, enter a scenario name, click Browse toselect a project directory, or enter the project name.

b) To add a new scenario to an existing project, select Add to Project, enter the name of the newscenario, and click Browse to select a project.

If added to an existing project, the new experiments will have the same structure as the rest ofthe project, that is, the selection of device simulation follows the existing project selection.

14. Click Finish.

15. If the project or scenario is successfully created and loaded, click OK.

The generated project has the structure of the Calibration Kit described in Structure of calibration projecton page 6. For every process in the process list, the Project Wizard creates an experiment that followsthe file-naming convention of the Calibration Kit. In the case of a database in the syntax of Ligament,the process is translated to the syntax of the selected process simulator (see Process file syntax onpage 27). In the case of a database in Sentaurus Process, TSUPREM-4, and Dios syntax, the process iscopied; it is not translated. For Dios and TSUPREM-4, the resulting process file is b@nr@_mer.cmd. ForSentaurus Process, the resulting process file is b@nr@_fps.cmd.

The file name of the process sets the variable process. The file names of the profiles set the variablesprofile_@integer@.

13


The variable process_info takes INFO as a value if processinfo appears as a remark or comment in theprocess file. For Ligament, this is:

remark (text : "processinfo 'BF2 2.5keV 1e15'");

For Sentaurus Process, processinfo is:

## processinfo "INFO"

For TSUPREM-4, processinfo is:

$ processinfo "INFO"

For Dios, processinfo is:

!processinfo "INFO"

Analogically, the variable Rs_exp is set to VALUE if sheetresistance appears as a remark or comment in theprocess file. For Ligament, this is:

remark (text : "sheetresistance 'VALUE'")

or:

remark (text : "sheetresistance 'Rs=VALUE'")

For Sentaurus Process, sheetresistance is:

## sheetresistance "VALUE"

or:

## sheetresistance "Rs=VALUE"

For TSUPREM-4, sheetresistance is:

$ sheetresistance "VALUE"

or:

$ sheetresistance "Rs=VALUE"

For Dios, sheetresistance is:

!sheetresistance "VALUE"

or:

!sheetresistance "Rs=VALUE"

The variable y_sheet is set to 1.25 times the valid depth (set as sims_xmax in the preference file) of thedeepest profile. If no preference (sims_xmax) is present, the default value of 0.025 is used. In addition, thevariable y_contact is set to 0.8 times the valid depth (set as sims_xmax in the preference file) of the firstprofile. If no preference (sims_xmax) is present, the default value of 0.008 is used.

14


Scenario WizardTo focus on a specific selection of experiments for a Calibration Kit project, the project can be split intoscenarios. For example, a project can be split into scenarios of different dopant elements.

To split a project, use the Scenario Wizard from the Sentaurus Workbench menu:

1. Open a Calibration Kit project.

2. Calibration > Scenario Wizard.The title page of the wizard is displayed.


4. Select experiments. To search with the Calibration Project Process Search (CPPS) module, type a search pattern in theProcess Search Pattern field, and click Search (see Calibration Project Process Search onpage 32).

Figure 4 Calibration Kit Scenario Wizard

5. Click Next.

6. Type the name of the new scenario in the Scenario Name field.

7. Click Finish.

8. If the scenario is successfully created and loaded, click OK.

The structure of the Calibration Kit is unchanged by the creation of a new scenario.

15


Process WizardTo add a new short loop experiment (in Ligament, Sentaurus Process, TSUPREM-4, or Dios syntax) toa database or to add a new experiment to a Calibration Kit project, use the Process Wizard from theSentaurus Workbench menu:

1. Open a Calibration Kit project.

2. Calibration > Process Wizard.The title page of the wizard is displayed.


4. Select substrate and oxide properties. If the oxide thickness is 0, the oxide deposit step is omitted.

5. Click Next.

6. Select implantation properties of the first and second implantations. If the element is equal to 0, thecorresponding implantation step is omitted.

7. Click Next.

8. Select anneal ramp properties. If the rate or time is equal to 0, the corresponding diffusion step isomitted.

Figure 5 Calibration Kit Process Wizard

16


9. Click Next.

10. Select the measurement properties:

a) If element is equal to 0, the corresponding measurement step is omitted.

b) To select the experimental measurement data (SIMS), click Browse. To view the selected SIMS with Inspect, click View.

c) Select the depth scale of the selected SIMS.

d) To select preferences, click Browse. To create new preferences, click Create to edit them withSEdit.

11. Click Next.

12. Select a process name and syntax, and edit the flow if required:

a) To edit the process flow, click Edit.

The flow is loaded in an editor. For the syntax of Ligament, this is Flow Editor; for SentaurusProcess, TSUPREM-4, and Dios, this is a text editor. If needed, the flow can be further modifiedbeyond the guidelines of the previous pages of the wizard.

When Edit is clicked, the current values of the process steps defined in the previous wizard stepsare considered. Further changes to the process through the previous wizard pages no longer affectthe flow, unless Edit is clicked again.

If Edit is clicked again, the current values of the process steps defined in the previous wizard stepsare considered again, and the previous changes of the flow in the editor are deleted.

13. Click Next.

14. Select whether the process should be added to a database or the currently loaded project:

a) Select Add to Project to add a new experiment with the created process flow to the currentlyloaded Calibration Kit project. This option can only be selected if the currently loaded projectis a Calibration Kit project and contains the same simulator, which was previously selected asthe process syntax.

b) Select Add to User Library to add the process flow permanently to a database. Select theprocess directory for the process recipes, the experiment directory for the measurement data,and the preference directory for the preferences.

15. Click Finish to add the experiment.

16. If the experiment is successfully created, click OK.

If added to a database, the process recipe is stored in the same format as those in the calibration libraries(see Process file syntax on page 27). The process flow includes the correlated profile and process_infoinformation.

If added to a project, the experiment has the same structure as the other experiments of the project. Thevariable process is defined by the process name. If an experiment profile is referenced, the variableprofile_@integer@ is defined by the name of the experiment profile. If no experiment profile is

17


referenced, the variable profile_@integer@ is defined by @process-name@_@integer@. Depending on thedeclared implantation and diffusion steps, the variable process_info is set.

The variable y_sheet is set to 1.25 times the valid depth (set as sims_xmax in the preference file) of thedeepest profile. If no preference (sims_xmax) is present, the default value of 0.025 is used. In addition, thevariable y_contact is set to 0.8 times the valid depth (set as sims_xmax in the preference file) of the firstprofile. If no preference (sims_xmax) is present, the default value of 0.008 is used.

NOTE If the process flow is further edited after the wizard generation, users must ensure that thevariable values (such as the number of profiles n_profile) are correct.

Parameter WizardTo create a new Calibration Kit project with new physical Sentaurus Process, TSUPREM-4, or Diosparameters and an optional input command file of Optimizer, use the Parameter Wizard from theSentaurus Workbench menu:

1. Open a Calibration Kit project and select an experiment.

2. Calibration > Parameter Wizard.The title page of the wizard is displayed.


4. Parameterize the selected process (the name and simulator syntax of the selected process isdisplayed):

a) Select one to four parameter names parameter (for example, energy).

NOTE TSUPREM-4 accepts only alphanumeric parameter names.

b) Click Edit.The flow is loaded in an editor.

c) Edit the flow by replacing the argument values to be parameterized with @parameter@ (forexample, for the parameter energy and the simulator syntax of Sentaurus Process):

implant Arsenic dose=1e+15 energy=@energy@ tilt=0 rot=0

d) Save the file.

e) Select to either Include or Exclude the experiment data. If the experiment data is included, theexperiments of the resulting project contain the experiment profiles (SIMS) of the selectedexperiment.

5. Click Next.

18


6. Select the parameter values of parameter:

a) Select the minimal value of the parameter.

b) Select the iteration step between parameter values.

c) Select the number of parameter values.

If Linear is selected, the difference between the values is equal to the iteration step. If Log isselected, the value of every step is equal to the value of the previous step multiplied by the value ofthe iteration step.

Figure 6 Calibration Kit Parameter Wizard

7. Click Next.

8. Select a calibration parameter file for the process simulator of the parameterized process file.

For modeling of implantation, users can choose between analytic and Monte Carlo (Taurus MonteCarlo and Crystal-TRIM). In the case of Sentaurus Process, the selection of kinetic Monte Carlo andstress relaxation modeling is available as well. There is the option to select the parameters ofAdvanced Calibration or a user-defined parameter file. For TSUPREM-4 or Dios, the singlecalibration file must be in the format of a Merger Rules file, which usually follows the namingscheme *.smr or *.dmr. For Sentaurus Process, users can select up to two calibration files in theAlagator (Tcl) syntax of Sentaurus Process, which follow the naming scheme *.fps.

9. Click Next.

19


10. Select the device simulation to calculate the sheet resistance:

a) By default, the Device Simulation Disabled option is selected.

b) For device simulation, select the Device Simulation Enabled option.

In this case, the Mesh and Sentaurus Device steps are part of the project of the SentaurusWorkbench. To select a parameter file of Sentaurus Device, click Browse. The parameter fileformat of Sentaurus Device usually follows the naming convention *.par and is namedsdevice.par in the project of the Sentaurus Workbench. If no file is selected, Sentaurus Deviceuses the default parameters.

11. Click Next.

12. Select an Optimizer task and the corresponding task conditions.

If the task type is No, no Optimizer task is used. (For information about tasks, see the OptimizerUser Guide.)

13. Click Next.






15. Click Next.


a) Enter a scenario name.

b) Click Browse to select a project directory, or enter the project name.

17. Click Finish.

18. If the project is successfully created and loaded, click OK.

If no Optimizer task is selected, the structure of the generated project is that of a Calibration Kit projectwith two to five parameters, that is, the parameter nr and the selected parameters (for example, energy).The variable process is the selected process name combined with the parameter value. The variableprocess_info contains the parameter name and value. The values of the variables profile_@integer@consist of the process name process and sequential numbering, for example, <process>_1.

The project contains as many experiments as there are possible combinations of parameter values.

If an Optimizer task is selected, the structure of the generated project is that of a Calibration Kit projectwith two to five parameters, that is, the parameter nr is a user-defined Optimizer parameter and theselected parameters (for example, energy) are design of experiments (DoE) Optimizer parameters.

20


The only available variables are the process name process, the calibration file calibration, and thenumber of profiles per process n_profile. The project contains only one experiment with the meanparameter values. For each pair of profiles, a unique curve comparison variablecv_delta_@integer@_@integer@ is evaluated and is used as a response for Optimizer. The correspondinginput command file of Optimizer is included in the project. For information about the Optimizersoftware, refer to the Optimizer User Guide.

Optimization WizardTo create a new Calibration Kit project with new calibration parameters of Sentaurus Process,TSUPREM-4, or Dios, and an optional input command file of Optimizer, use the Optimization Wizardfrom the Sentaurus Workbench menu:

1. Calibration > Optimization Wizard.The title page of the wizard is displayed.


3. Select the library and syntax.

This can be the experiment database of the Calibration Library in Ligament (SPR) syntax or a user-specified database (user library) in Ligament, Sentaurus Process, TSUPREM-4, or Dios syntax. Inthe case of a user-specified database, select the process directory, experiment directory, preferencedirectory, and syntax.

4. Click Next.

5. Select a process list:

a) Click Browse to select a list or search for a list with the module Database Process Search(DBPS). (For the syntax of a process list file file.qps, see Process searches on page 30.)

b) To search for processes by using DBPS in the previously selected database and syntax (Step 3),type a search pattern in the Process Search Pattern field. Select the alphabetic order of theprocess list file to be either by process names or process recipes. Finally, click Search. Theresult is written to the selected process list file (see Database Process Search on page 31).

c) To edit the selected list, click Edit to open a text editor.

6. Click Next.

7. Select the process simulator and calibration.

Users can select Sentaurus Process, TSUPREM-4, or Dios as the process simulator. For modelingof implantation, users can choose between analytic and Monte Carlo (Taurus Monte Carlo andCrystal-TRIM). In the case of Sentaurus Process, the selection of kinetic Monte Carlo and stressrelaxation modeling is available as well. There is the option to select the parameters of AdvancedCalibration or a user-defined parameter file. For TSUPREM-4 or Dios, the single calibration filemust be in the format of a Merger Rules file, which usually follows the naming scheme *.smr or*.dmr. For Sentaurus Process, users can select up to two calibration files in the Alagator (Tcl) syntaxof Sentaurus Process, which usually follows the naming scheme *.fps.

21


8. Click Next.

9. Parameterize the selected calibration file:

a) Select one to four parameter names parameter (for example, ifactor).

NOTE TSUPREM-4 accepts only alphanumeric parameter names.

b) Select the minimal values, the maximal values, and the scale of the parameters.

c) Click Edit.The calibration file is loaded in an editor.

d) Edit the file by replacing the calibration parameter values to be parameterized with SentaurusWorkbench parameter calls @parameter@. (This calibration file will be preprocessed by SentaurusWorkbench as well.)

e) Save the file.

10. Click Next.

11. Select an Optimizer task and the corresponding task conditions.

If the task type is No, no Optimizer task is used, but users must select the number of differentparameter values for each parameter. (For information about tasks, see the Optimizer User Guide.)

Figure 7 Calibration Kit Optimization Wizard

22


12. Click Next.






14. Click Next.


a) Enter a scenario name.

b) Click Browse to select a project directory, or enter the project name.

16. Click Finish.

17. If the project is successfully created and loaded, click OK.

If no Optimizer task is selected, the structure of the generated project is that of a Calibration Kit projectwith two to five parameters, that is, the parameter nr and the selected parameters (for example, ifactor).For every process in the process list and each parameter value combination, the Optimization Wizardcreates an experiment that follows the file-naming convention of the Calibration Kit.

In the case of a database in the syntax of Ligament, the process is translated to the selected processsimulator syntax (see Process file syntax on page 27). In the case of a database in Sentaurus Process,TSUPREM-4, and Dios syntax, the process is copied; it is not translated. For TSUPREM-4 and Dios,the resulting process file is b@nr@_mer.cmd. For Sentaurus Process, the resulting process file isb@nr@_fps.cmd.

If an Optimizer task is selected, the structure of the generated project is that of a Calibration Kit projectwith two to five parameters, that is, the parameter nr is a user-defined Optimizer parameter and theselected parameters (for example, ifactor) are design of experiments (DoE) Optimizer parameters.

The only available variables are the process name process, the calibration file calibration, and thenumber of profiles per process n_profile. The project contains only one experiment per process in theprocess list with mean parameter values. For each pair of profiles, a unique curve comparison variablecv_delta_@integer@_@integer@ is evaluated and is used as a response for Optimizer. The correspondinginput command file of Optimizer is included in the project. For information about the Optimizersoftware, refer to the Optimizer User Guide.

23


Merger EditorTo edit a Merger calibration file, execute Merger from the Sentaurus Workbench:

Extensions > Run Merger.

or:

Tool > Edit Input > Merger Rules.

The graphical user interface of Merger is displayed, in which the Merger calibration file can be loaded(see the Advanced Calibration User Guide).

Editing variablesTo change the variable values of a Calibration Kit experiment, use the standard feature of the SentaurusWorkbench:

1. Select the corresponding node:

a) For the variables process, calibration, process_info, Rs_exp, n_profile, and profile_@integer@(with integer equal to 1, 2, 3,..., 10), the corresponding node is the second Dios node.

b) For the variables y_contact and y_sheet, the corresponding node is the Mesh node.

2. Nodes > Set Variable Value.The variable dialog box is displayed.

or:

Nodes > PropertiesThe node information dialog box is displayed.

3. Change the variable definition.

4. Click OK.

Figure 8 Defined variables in the node information dialog box

24


Viewers in Sentaurus WorkbenchEach Calibration Kit project has dedicated viewers, which are defined in the project tool database(gtooldb.tcl). These viewers are designed to view the specific files of the Calibration Kit.

Figure 9 List of viewers from the visualization icon

Viewing process filesThis viewer shows the selected process files. For Sentaurus Process, the process files are the SentaurusProcess command files (b@node@_fps.cmd or pp@node@_fps.cmd) and general files (*.fps). For TSUPREM-4,the process files are Merger files (b@node@_mer.cmd or pp@node@_ts4.cmd) and TSUPREM-4 command files(b@node@_ts4.cmd or n@node@_ts4.cmd). For Dios, the process files are Merger command files(b@node@_mer.cmd or pp@node@_dio.cmd) and Dios command files (b@node@_dio.cmd or n@node@_dio.cmd).

The editor is SEdit. The selection is restricted to the nr nodes of Sentaurus Process, TSUPREM-4, andDios.

Viewing profile filesThis viewer shows the selected measured profiles (b@node@_*.plx) and simulated profiles (b@node@_*.plt).Inspect is the visualization tool in which all selected profiles are loaded into one xy plot. The selectionis restricted to the nr nodes of Sentaurus Process, TSUPREM-4, and Dios.

25


Figure 10 An experiment visualized in Inspect

Viewing layout filesThis viewer shows the selected layout package files (n@node@_tec.lpk) of Tecplot SV. Tecplot SV is thevisualization tool in which all selected layouts are loaded and arranged next to each other. The title baris added automatically. (For further layout changes, see the Tecplot SV User Guide). The selection isrestricted to Tecplot SV nodes.

Figure 11 Four experiments visualized in Tecplot SV

26

CALIBRATION KIT CHAPTER 3 REFERENCE GUIDE

Calibration Kit

CHAPTER 3 Reference guide

This chapter describes commands, file formats, and examples.

Experiment database

Environment variable STCALIBThe default experiment database of the Calibration Kit – the Calibration Library – is defined by thesystem environment variable STCALIB. By default, STCALIB is set to the directory $STROOT_LIB/

fabpackagelib, which contains a database including process examples for demonstration purpose onlyand without any real experimental relevance.

The STCALIB databases (such as the Calibration Library or user databases) include three directories:

The process directory processes_*, that is, processes_lig that contains the process files in Ligament(SPR) format, or processes_sprocess that contains the process files in the format of SentaurusProcess, or processes_ts4 that contains the process files in TSUPREM-4 format, or processes_diosthat contains the process files in Dios format.

The experiment directory experiments contains the SIMS profile files in xy-plot format.

The preference directory preferences contains the preference files (see Profiles on page 33).

Process file syntaxIn general, the Calibration Kit uses databases of process recipes in Ligament (SPR), Sentaurus Process,TSUPREM-4, and Dios syntax as input. However, the process recipes of the Calibration Library aredelivered in Ligament (SPR) syntax and are translated to Sentaurus Process, TSUPREM-4, or Diossyntax before simulation.

For the Calibration Library (as well as other user databases) to be input to the Calibration Kit, the generalsyntax of Ligament (SPR), Sentaurus Process, TSUPREM-4, and Dios is subject to the followingrestrictions.

Ligament syntax

During the creation of a Calibration Kit project, the process recipes in Ligament syntax are translated toSentaurus Process, TSUPREM-4, or Dios syntax. First, the translator of the Calibration Kit uses the

27

CALIBRATION KITCHAPTER 3 REFERENCE GUIDE

Translator in Ligament. Then, some process flow translations that are specific to the Calibration Kit areapplied (see Dios syntax on page 30 and Sentaurus Process syntax on page 28).

In Ligament process flows, the arguments save, grid, debug, and check1d of the environment statement mustall be set to false. The arguments title, region, and *_grid_* of the environment statement are irrelevant,since they are ignored during translation.

The 1D measurements are stated in an insert statement.

For Sentaurus Process, the 1D measurement statement is specified by the SetPltList statement, which isdefined in calib_1d_*.fps. The SetPltList statement must only contain the species variable and acomment of the corresponding SIMS profile at the end of the same line (see Sentaurus Process syntaxon page 28).

For TSUPREM-4, the 1D measurement statement is specified by the SELECT statement, which must onlycontain the species variable and a comment of the corresponding SIMS profile at the end of the sameline (see TSUPREM-4 syntax on page 29).

For Dios, the 1D measurement statement 1D must only contain the species variable and a comment of thecorresponding SIMS profile at the end of the same line (see Dios syntax on page 30). The 1D profileload statements are stated in an insert statement as well.

For Sentaurus Process, the 1D profile load statement is specified by the profile statement, which mustonly contain the species variable and a comment of the corresponding profile at the end of the same line(see Sentaurus Process syntax on page 28).

For TSUPREM-4, the 1D profile load statement is specified by the PROFILE statement, which must onlycontain the species variable and a comment of the corresponding profile at the end of the same line (seeTSUPREM-4 syntax on page 29).

For Dios, the 1D profile load statement load must only contain the species variable and a comment ofthe corresponding profile at the end of the same line (see Dios syntax on page 30).

The process information <INFO> can be declared in a remark statement with processinfo '<INFO>' as text.

The measured sheet resistance value <VALUE> can be declared in a remark statement with sheetresistance'Rs=<VALUE>' as text.

Sentaurus Process syntax

The process recipes in the syntax of Sentaurus Process in the database must only include process physicsparameters. However, if users include simulator or model parameters in the process recipe files, thereliability of the simulation may be reduced.

The Sentaurus Process recipes must not contain line statements or region statements (the sourced filecalib_1d_2006.06.fps or calib_KMC_2006.06.fps places these statements in the input files of SentaurusProcess). During translation from Ligament to Sentaurus Process, all statements preceding the first initstatement are removed.

28


For the deposition of an oxide layer, the deposit statements must only contain a time [minute] and areference to the machine ox_depo (which is defined in the sourced file calib_1d_2006.06.fps orcalib_KMC_2006.06.fps and has a rate of 1 μm/minute). For example, to deposit a 1.8 nm thick oxide layer:

deposit time=0.0018 machine=ox_depo

The 1D measurement statement is specified by the SetPltList statement, which is defined incalib_1d_2006.06.fps or calib_KMC_2006.06.fps. The SetPltList statement must only contain the speciesvariable and a comment of the corresponding SIMS profile at the end of the same line, for example:

SetPltList BTotal ; # B_sims_profile.sims

The 1D profile load statement is specified by the profile statement, which must only contain the speciesvariable and a comment of the corresponding profile at the end of the same line, for example:

profile name=Boron ; # B_sims_profile.sims

The process information <INFO> can be declared in a comment line with processinfo "<INFO>" as comment,for example:

## processinfo "B 0.5keV 1e15"

The measured sheet resistance value <VALUE> can be declared in a comment line with sheetresistance"Rs=<VALUE>" as a comment, for example:

## sheetresistance "Rs=491"

TSUPREM-4 syntax

The process recipes in TSUPREM-4 syntax in the database must only include process physicsparameters. However, if users include simulator or model parameters in the process recipe files, thereliability of the simulation may be reduced.

The TSUPREM-4 recipes must not contain MESH statements (when the recipes merge with the MergerRules file, the statements are placed in the input files of TSUPREM-4). During translation fromLigament to TSUPREM-4, all statements preceding the first INITIALIZE statement are removed.

The 1D measurement statement is specified by the SELECT statement, which must only contain the speciesvariable and a comment of the corresponding SIMS profile at the end of the same line, for example:

SELECT Z=BORON ; $ B_sims_profile.sims

The 1D profile load statement is specified by the PROFILE statement, which must only contain the speciesvariable and a comment of the corresponding profile at the end of the same line, for example:

PROFILE IMPURITY=BORON ; # $ B_sims_profile.sims


$ processinfo "B 0.5keV 1e15"

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The measured sheet resistance value <VALUE> can be declared in a comment line with sheetresistance"Rs=<VALUE>" as comment, for example:

$ sheetresistance "Rs=491"

Dios syntax

The process recipes in Dios syntax in the database must only include process physics parameters.However, if users include simulator or model parameters in the process recipe files, the reliability of thesimulation may be reduced.

The Dios recipes must not contain a title statement, or a grid statement, or an end statement (when therecipes merge with the Merger Rules file, the statements are placed in the Dios input files). Duringtranslation from Ligament to Dios, all statements preceding the first Substrate statement are removed.

The 1D measurement statement 1D must only contain the species variable and a comment of thecorresponding SIMS profile at the end of the same line, for example:

1D(spec(BTotal)) ! B_sims_profile.sims

The 1D profile load statement is specified by the load statement, which must only contain the speciesvariable and a comment of the corresponding profile at the end of the same line, for example:

load(spec=Boron) ! B_sims_profile.sims


!processinfo "B 0.5keV 1e15"

The measured sheet resistance value <VALUE> can be declared in a comment line with sheetresistance"Rs=<VALUE>" as comment, for example:

!sheetresistance "Rs=491"

Process searchesThe module Quick Process Search (QPS) provides the basic functionality for the process search in theprocess directory of the database. The modules Database Process Search (DBPS) and Calibration ProjectProcess Search (CPPS) are based on QPS.

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Syntax of QPS list fileThe results of DBPS and CPPS as well as the input process list to the Calibration Kit project and scenariowizards are QPS files file.qps. The file contains a header line and a process list. The syntax is:

Processes Profiles Processinfo R_sheet <process> <profile_1> <info> <r_sheet>

<profile_2>

Database Process SearchThe Database Process Search (DBPS) looks for process flows written in the syntax of Ligament,Sentaurus Process, TSUPREM-4 and Merger, or Dios and Merger in a directory (such as $STCALIB/processes_*). The processes that match the search criterion are listed in the process list file.

The search criterion – the process search pattern – consists of conditions connected by logical operators&&, ||, !, and grouped by parentheses. The operator && means and, || means or, and ! means not. Theconditions consist of a keyword and arguments, for example, impl(element==As) or nimpl>0.

In general, the keyword takes only one argument. Only the impl() and diff() keywords can have morethan one argument that are connected by logical operators. Some arguments consist of an argument typeand a value connected by comparators: ==, <=, >=, <, >, or !=. Some arguments do not have comparatorsor argument types.

Table 1 lists the DBPS process flow keywords and their syntax, which are allowed in the DBPS criterion.

Table 1 DBPS keywords and syntax

Keyword Meaning Argument Example

impl() Implantation statement scan, true if (1)

element, elemenergy, endosetiltrotation, rot

impl(elem==as)impl(en>0 && en<100)impl(dose>=1e12)impl(tilt!=0)impl(rot<1)

diff() Diffusion statement scan, true if (1)

maxT (maximum temperature)totaltimepeaktime (time at maximum temperature)pn2 (partial pressure for N2)po2 (partial pressure for O2)ph2o (partial pressure for H2O)

diff(maxT==1000)diff(totaltime>5)diff(peaktime!=0)diff(pn2==1)diff(po2>0 && po2<1)diff(ph2o!=0)

plot() Plot statement scan, true if (2) X, Xtot, Xtotal, Xactive(where X is one of as, p, b, in, ge, sb, ga, al, n)

plot(bactive)

nimpl Number of implantation statements scan, true if (3)

– nimpl==1

ndiff Number of diffusion statement scan, true if (3)

– ndiff>0

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Calibration Project Process SearchThe Calibration Project Process Search (CPPS) looks for experiments in a calibration project ofSentaurus Workbench. The tool scans process flows written in the syntax of Sentaurus Process,TSUPREM-4 and Merger, or Dios and Merger, in the same way as DBPS. However, CPPS scansvariables of the Sentaurus Workbench. The experiments that match the search criterion are listed in theprocess list file.

The search criterion – the process search pattern – consists of conditions connected by logical operators&&, ||, !, and grouped by parentheses. The operator && means and, || means or, and ! means not. Theconditions consist of a keyword and arguments, for example, impl(element==As) or nimpl>0.

In general, the keyword takes only one argument. Only the impl() and diff() keywords can have morethan one argument that are connected by logical operators. Some arguments consist of an argument typeand a value connected by comparators: ==, <=, >=, <, >, or !=. Some arguments do not have comparatorsor argument types.

Table 2 lists the DBPS process flow keywords and their syntax, which are allowed in the CPPS criterion.

file() File name scan, true if (2) <string> file(USJ)

grep() Process file scan, true if (2) <string> grep(comment)

(1) At least one statement exists in the process file, for which the arguments are evaluated as true.(2) At least one statement exists in the process file, for which the argument is evaluated as true.(3) Comparison is evaluated as true.

Table 2 Keywords and syntax for CPPS of DBPS


impl() Implantation statement scan, true if (1)

element, elemenergy, endosetiltrotation, rot

impl(elem==as)impl(en>0 && en<100)impl(dose>=1e12)impl(tilt!=0)impl(rot<1)

diff() Diffusion statement scan, true if (1)

maxT (maximum temperature)totaltimepeaktime (time at maximum temperature)pn2 (partial pressure for N2)po2 (partial pressure for O2)ph2o (partial pressure for H2O)

diff(maxT==1000)diff(totaltime>5)diff(peaktime!=0)diff(pn2==1)diff(po2>0 && po2<1)diff(ph2o!=0)

plot() Plot statement scan, true if (2) X, Xtot, Xtotal, Xactive(where X is one of as, p, b, in, ge, sb, ga, al, n)

plot(bactive)

nimpl Number of implantation statements scan, true if (3)

– nimpl==1

Table 1 DBPS keywords and syntax


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Table 3 lists the Sentaurus Workbench variable keyword and its syntax, which is allowed in the searchcriterion.

Profiles

Profile visualizationThe visualization limits of each profile can be set in the preference file. The depth [nm] is set by:

set vis_xmin [integer]set vis_xmax [integer]

The concentration [cm–3] is set by:

set vis_ymin [integer]set vis_ymax [integer]

These values are the lower and upper limits of the visualization to be shown. A limit is evaluated by thevisualization tool if the corresponding limit is not present in the preference file.

Profile curve comparisonInspect calculates the differences of the measured and computed profile curves, which can be viewed inthe Inspect log file. The difference is processed as the variable cv_delta_@integer@ of SentaurusWorkbench for each profile pair.

ndiff Number of diffusion statement scan, true if (3)

– ndiff>0

grep() Process file scan, true if (2) <string> grep(comment)

(1) At least one statement exists in the process file, for which the arguments are evaluated as true.(2) At least one statement exists in the process file, for which the argument is evaluated as true.(3) Comparison is evaluated as true.

Table 3 Keywords and syntax for CPPS of Sentaurus Workbench variable


process() Process variable scan, true if at least one statement exists in the process file, for which the arguments are evaluated as true

<string> process(USJ)

Table 2 Keywords and syntax for CPPS of DBPS


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The quality limits of each profile can be set in the preference file. The depth [nm] is set by:

set sims_xmin [integer]set sims_xmax [integer]

These values are the lower and upper limits of the profile curve comparison. The default limits are usedas borders if the above limits are not defined. The default values are:

set sims_xmin 5set sims_xmax 50

NOTE If several profile pairs are visualized in one plot, only the comparison borders of the lastprofile pair are showed.

The profile curve comparison can be performed by four different methodologies described here.

Relative logarithmic square difference

The formula used for the total logarithmic square difference for the experiment profile curve and thesimulated profile curve is:

(1)

where the borders of integration and are the lower and upper limits of the profile curvecomparison, respectively. The relative logarithmic square difference is set per depth [μm–1].

Relative linear square difference

The formula used for the total linear square difference for the experiment profile curve and thesimulated profile curve is:

(2)

where the borders of integration and are the lower and upper limits of the profile curvecomparison, respectively. The relative linear square difference is set per depth [μm–1].

fefs

fe x( )( )log fs x( )( )log–( )2 xdxmin

xmax

∫

xmin xmax

fefs

fe x( ) fs x( )–( )2 xdxmin

xmax

∫

xmin xmax

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Arithmetic mean of relative error

The formula used for the arithmetic mean of the relative error for the experiment profile curve andthe simulated profile curve is:

(3)

where the borders of integration and are the lower and upper limits of the profile curvecomparison, respectively. For each measurement point, results in 1, or else in 0.

Quadratic mean or root-mean-square of relative error

The formula used for the quadratic mean, also known as root-mean-square, of the relative error for theexperiment profile curve and the simulated profile curve is:

(4)

where the borders of integration and are the lower and upper limits of the profile curvecomparison, respectively. For each measurement point, results in 1, or else in 0.

Confidentiality warningThe file $STROOT/tcad/$STRELEASE/lib/fabpackagelib/confidentwarning.txt contains the text for theconfidentiality warning that appears on the first page of the Project Wizard, Scenario Wizard, andOptimization Wizard. If the file is empty or does not exist, no confidentiality warning is displayed.

The file $STCALIB/confident.txt contains the text for the confidentiality warning that appears in a separatedialog box when the third page of the Project Wizard and Optimization Wizard is displayed. If the fileis empty or does not exist, no confidentiality warning is displayed.

fefs

P x( ) fe x( ) fs x( )–fe x( )

------------------------------ xdxmin

xmax

∫

P x( ) xdxmin

xmax

∫

---------------------------------------------------------------

xmin xmaxP x( )

fe fs

P x( ) fe x( ) fs x( )–fe x( )

------------------------------2

xdxmin

xmax

∫

P x( ) xdxmin

xmax

∫

------------------------------------------------------------------

xmin xmaxP x( )

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