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ECE-305: Spring 2015 Carrier Properties: I Professor Mark Lundstrom Electrical and Computer Engineering Purdue University, West Lafayette, IN USA [email protected] 1/19/15 Pierret, Semiconductor Device Fundamentals (SDF) pp. 32-40

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Page 1: Carrier Properties: I - nanoHUB.orgCarrierProperties1_S16.pdf · Carrier Properties: I Professor Mark Lundstrom Electrical and Computer Engineering Purdue University, West Lafayette,

Lundstrom ECE 305 S16

ECE-305: Spring 2015

Carrier Properties: I

Professor Mark Lundstrom Electrical and Computer Engineering

Purdue University, West Lafayette, IN USA [email protected]

1/19/15

Pierret, Semiconductor Device Fundamentals (SDF) pp. 32-40

Page 2: Carrier Properties: I - nanoHUB.orgCarrierProperties1_S16.pdf · Carrier Properties: I Professor Mark Lundstrom Electrical and Computer Engineering Purdue University, West Lafayette,

Lundstrom ECE 305 S16 2

outline

1.  Effective mass and bandstructure

2.  Doping

Page 3: Carrier Properties: I - nanoHUB.orgCarrierProperties1_S16.pdf · Carrier Properties: I Professor Mark Lundstrom Electrical and Computer Engineering Purdue University, West Lafayette,

3

free electron mass

Lundstrom ECE 305 S16 3

F t( ) υ t( )

F = m0 a

x t( )

m0 = 9.11×10−31 kg

q= 1.6×10−19 C

charge= −q

Page 4: Carrier Properties: I - nanoHUB.orgCarrierProperties1_S16.pdf · Carrier Properties: I Professor Mark Lundstrom Electrical and Computer Engineering Purdue University, West Lafayette,

“effective mass” of electrons

Lundstrom ECE 305 S16 4

F = m0 a → mn* a

“effective mass” for electrons

Si: GaAs:

mn* = 1.18m0

mn* = 0.066m0

“crystal potential”

Page 5: Carrier Properties: I - nanoHUB.orgCarrierProperties1_S16.pdf · Carrier Properties: I Professor Mark Lundstrom Electrical and Computer Engineering Purdue University, West Lafayette,

effective mass of holes

Lundstrom ECE 305 S16 5

F = m0 a → mp

* a

effective mass for holes

Si: GaAs:

mp

* = 0.81m0

mp

* = 0.52m0

Page 6: Carrier Properties: I - nanoHUB.orgCarrierProperties1_S16.pdf · Carrier Properties: I Professor Mark Lundstrom Electrical and Computer Engineering Purdue University, West Lafayette,

energy and momentum (free electron)

6 Lundstrom ECE 305 S16

F t( ) υ t( )

F = m0 a

x t( )

E = 1

2m0υ

2 = p2

2m0

E

p = m0υ

Page 7: Carrier Properties: I - nanoHUB.orgCarrierProperties1_S16.pdf · Carrier Properties: I Professor Mark Lundstrom Electrical and Computer Engineering Purdue University, West Lafayette,

energy and “crystal momentum”

7 Lundstrom ECE 305 S16

E

p = !k

E = p2

2m0

→ E = EC +p2

2mn*

“band structure”

EC

EV

E = p2

2m0

→ E = EV −p2

2mp*

“direct bandgap”

k = 2πλ

Page 8: Carrier Properties: I - nanoHUB.orgCarrierProperties1_S16.pdf · Carrier Properties: I Professor Mark Lundstrom Electrical and Computer Engineering Purdue University, West Lafayette,

energy and “crystal momentum”

8 Lundstrom ECE 305 S16

E

p = !k

E = p2

2m0

→ E = EC +p2

2mn*

EC

EV

E = p2

2m0

→ E = EV −p2

2mp*

“indirect bandgap”

Page 9: Carrier Properties: I - nanoHUB.orgCarrierProperties1_S16.pdf · Carrier Properties: I Professor Mark Lundstrom Electrical and Computer Engineering Purdue University, West Lafayette,

charge carriers in semiconductors

9 Lundstrom ECE 305 S16

1) Electrons in the conduction band (“electrons”):

Free to move about within the crystal Can be treated as Newtonian particles with an effective mass.

2) Holes in the conduction band (“holes”):

Free to move about within the crystal Can be treated as Newtonian particles with a different effective mass.

Page 10: Carrier Properties: I - nanoHUB.orgCarrierProperties1_S16.pdf · Carrier Properties: I Professor Mark Lundstrom Electrical and Computer Engineering Purdue University, West Lafayette,

Lundstrom ECE 305 S16 10

outline

1.  Effective mass and bandstructure

2.  Doping

Page 11: Carrier Properties: I - nanoHUB.orgCarrierProperties1_S16.pdf · Carrier Properties: I Professor Mark Lundstrom Electrical and Computer Engineering Purdue University, West Lafayette,

doping

11

Phosphorus or Arsenic

Lundstrom ECE 305 S16

Gallium or boron

Page 12: Carrier Properties: I - nanoHUB.orgCarrierProperties1_S16.pdf · Carrier Properties: I Professor Mark Lundstrom Electrical and Computer Engineering Purdue University, West Lafayette,

dopants

12 Lundstrom ECE 305 S16

column IV

Page 13: Carrier Properties: I - nanoHUB.orgCarrierProperties1_S16.pdf · Carrier Properties: I Professor Mark Lundstrom Electrical and Computer Engineering Purdue University, West Lafayette,

n-type doping

13

Phosphorus or Arsenic

Weakly bound Easily broken at room temperature

EB = −13.6 eV

EB = −m0q

4

2 4πε0!( )2 eV

KS = 11.8

EB ≈ −0.1eV

mn* = 1.18m0

Lundstrom ECE 305 S16

Page 14: Carrier Properties: I - nanoHUB.orgCarrierProperties1_S16.pdf · Carrier Properties: I Professor Mark Lundstrom Electrical and Computer Engineering Purdue University, West Lafayette,

n-type doping

14

Phosphorus or Arsenic

“Ionized donor” + N D cm-3

Lundstrom ECE 305 S16

N D+ ≈ n

Page 15: Carrier Properties: I - nanoHUB.orgCarrierProperties1_S16.pdf · Carrier Properties: I Professor Mark Lundstrom Electrical and Computer Engineering Purdue University, West Lafayette,

energy band view (n-type)

15

n-doped Si

EC

EV

EG = 1.1eV

n ≈1018cm−3

p = ?cm−3

ED ≈ 0.05 eV

1014 ≤ N D ≤1020 cm−3

Lundstrom ECE 305 S16

N D = 1018cm−3

N D+ = 1018cm−3

n ≈ N D+ = 1018cm−3

p ≈ ?

(T = 300 K)

Page 16: Carrier Properties: I - nanoHUB.orgCarrierProperties1_S16.pdf · Carrier Properties: I Professor Mark Lundstrom Electrical and Computer Engineering Purdue University, West Lafayette,

p-type doping

16

Gallium or boron

Lundstrom ECE 305 S16

Page 17: Carrier Properties: I - nanoHUB.orgCarrierProperties1_S16.pdf · Carrier Properties: I Professor Mark Lundstrom Electrical and Computer Engineering Purdue University, West Lafayette,

p-type doping

17

Gallium or boron

Missing bond

Lundstrom ECE 305 S16

Page 18: Carrier Properties: I - nanoHUB.orgCarrierProperties1_S16.pdf · Carrier Properties: I Professor Mark Lundstrom Electrical and Computer Engineering Purdue University, West Lafayette,

p-type doping

18

Gallium or boron

Ionized acceptor

N A cm-3

_

Lundstrom ECE 305 S16

N A− ≈ p ≈ N A

Page 19: Carrier Properties: I - nanoHUB.orgCarrierProperties1_S16.pdf · Carrier Properties: I Professor Mark Lundstrom Electrical and Computer Engineering Purdue University, West Lafayette,

energy band view (p-type)

19

p-doped Si

EC

EV

EG = 1.1eV

n = ?cm−3

EA ≈ 0.05 eV

N A = 1018cm−3

N A− = 1018cm−3

p ≈ N A− = 1018cm−3

n ≈ ?

p ≈1018cm−3

Lundstrom ECE 305 S16

Page 20: Carrier Properties: I - nanoHUB.orgCarrierProperties1_S16.pdf · Carrier Properties: I Professor Mark Lundstrom Electrical and Computer Engineering Purdue University, West Lafayette,

question

20

1) Which of the following atoms would be an n-type dopant in Si?

a) Ga (a column III) element) b) Si (a column IV element) c) As (a column V element) d) O (a column VI element) e) F (a column VII element)

Lundstrom ECE 305 S16

Page 21: Carrier Properties: I - nanoHUB.orgCarrierProperties1_S16.pdf · Carrier Properties: I Professor Mark Lundstrom Electrical and Computer Engineering Purdue University, West Lafayette,

Another question

21

2) What type of dopant is Si in GaAs?

a) n-type b) p-type c) either n-type or p-type d) neither n-type nor p-type e) don’t know

Lundstrom ECE 305 S16

Page 22: Carrier Properties: I - nanoHUB.orgCarrierProperties1_S16.pdf · Carrier Properties: I Professor Mark Lundstrom Electrical and Computer Engineering Purdue University, West Lafayette,

temperature dependence

22 Pierret, SDF, Fig. 2.13

N-type

P-type

Page 23: Carrier Properties: I - nanoHUB.orgCarrierProperties1_S16.pdf · Carrier Properties: I Professor Mark Lundstrom Electrical and Computer Engineering Purdue University, West Lafayette,

carrier concentration vs. temperature

23 23 Fig. 2.22 from R.F. Pierret, Semiconductor Device Fundamentals

Page 24: Carrier Properties: I - nanoHUB.orgCarrierProperties1_S16.pdf · Carrier Properties: I Professor Mark Lundstrom Electrical and Computer Engineering Purdue University, West Lafayette,

Lundstrom ECE 305 S16 24

outline

1.  Effective mass and bandstructure

2.  Doping