2

目錄

四點探針量測系統四點探針量測系統四點探針量測系統四點探針量測系統

Four Point Probe Sheet Resistivity Measurement System 4

高溫四點探針電阻率量測系統高溫四點探針電阻率量測系統高溫四點探針電阻率量測系統高溫四點探針電阻率量測系統

High Temperature Four Point Probe Sheet Resistivity Measurement System 5

四點探針四點探針四點探針四點探針 I-V-R 量測系統量測系統量測系統量測系統

Four Point Probing I-V-R Measurement System 6

多點探針量測系統多點探針量測系統多點探針量測系統多點探針量測系統

Multi-Point Probing Measurement System 7

手動手動手動手動 z 軸氣動軸氣動軸氣動軸氣動四點四點四點四點探針量測系統探針量測系統探針量測系統探針量測系統

Manual Z-Axis Pneumatic Four Point Probing Measurement System 8

L-I-V 探針量測系統探針量測系統探針量測系統探針量測系統

L-I-V Probing Measurement System 9

力與電流量測系統力與電流量測系統力與電流量測系統力與電流量測系統

Force and Current measurement System 10

不同溫度下的自動四點探針台不同溫度下的自動四點探針台不同溫度下的自動四點探針台不同溫度下的自動四點探針台

Automatic Four-Point Prober at Different Temperature 11

自動四點探針變溫量測系統自動四點探針變溫量測系統自動四點探針變溫量測系統自動四點探針變溫量測系統

Four-Point Probe Temperature measurement System 12

三端子元件三端子元件三端子元件三端子元件(MOSFET) IV 量測系統量測系統量測系統量測系統

3-Terminal Device (MOSFET) IV Measurement System 14

低成本高低成本高低成本高低成本高 CP 值值值值 I-V/C-V 量測系統量測系統量測系統量測系統

Low Cost I-V / C-V Measurement System 15

I-V, C-V 一體化探針量測系統一體化探針量測系統一體化探針量測系統一體化探針量測系統

I-V, C-V integrated-in-one Probing Measurement System 16

4” 簡易型手動探針台簡易型手動探針台簡易型手動探針台簡易型手動探針台

4” Simplified Manual Prober 17

太陽能電池效率量測系統太陽能電池效率量測系統太陽能電池效率量測系統太陽能電池效率量測系統

Solar Cell Efficiency Measurement System 18

高電流高電流高電流高電流/電壓電壓電壓電壓 IV 量測量測量測量測 (太陽能太陽能太陽能太陽能)

High Current/Voltage IV Measurement (Solar) 19

遮陽遮陽遮陽遮陽/遮光量測系統遮光量測系統遮光量測系統遮光量測系統

Solar Shading Measurement System 20

柔性元件拉伸時的電阻量測系統柔性元件拉伸時的電阻量測系統柔性元件拉伸時的電阻量測系統柔性元件拉伸時的電阻量測系統

Flexible Element Stretch Resistance Measurement System 21

FED 量測系統量測系統量測系統量測系統

FED Measurement System 22

真空腔體真空腔體真空腔體真空腔體-高壓高壓高壓高壓 I-V 量測系統量測系統量測系統量測系統

Chamber-High Voltage I-V Measurement System 23

TLM 接觸電阻量測接觸電阻量測接觸電阻量測接觸電阻量測/生產線晶圓凸塊量測系統生產線晶圓凸塊量測系統生產線晶圓凸塊量測系統生產線晶圓凸塊量測系統

TLM Contact Resistance Measurement/Production Line Wafer Bump Resistance Measurement 24

3

目錄

霍爾效應量測系統霍爾效應量測系統霍爾效應量測系統霍爾效應量測系統(含電磁鐵含電磁鐵含電磁鐵含電磁鐵)

Hall Probing Measurement System with Electromagnets 25

霍爾探針永久電磁鐵量測系統霍爾探針永久電磁鐵量測系統霍爾探針永久電磁鐵量測系統霍爾探針永久電磁鐵量測系統

Hall Probing Measurement System with Permanent Magnet 26

OLED 面板面板面板面板 AC/DC 驅動測試系統驅動測試系統驅動測試系統驅動測試系統

OLED Panel AC/DC Drive Test System 27

銅線電阻量測系統銅線電阻量測系統銅線電阻量測系統銅線電阻量測系統

Copper Wire Resistance Measurement System 28

用於低溫用於低溫用於低溫用於低溫/高溫測試的真空腔體探針台高溫測試的真空腔體探針台高溫測試的真空腔體探針台高溫測試的真空腔體探針台/低溫探針低溫探針低溫探針低溫探針

Vacuum Chamber Prober for Low-High Temperature Testing, Cryogenic Prober 29

LED Vf/Vr/Il 量測系統量測系統量測系統量測系統

LED Vf/Vr/Il Measurement System 30

電阻電阻電阻電阻-溫度量測系統溫度量測系統溫度量測系統溫度量測系統

R-T Measurement System 31

電流電流電流電流-時間量測系統時間量測系統時間量測系統時間量測系統

I-t Measurement System 32

事件光子到電流效率量測系統事件光子到電流效率量測系統事件光子到電流效率量測系統事件光子到電流效率量測系統

Incident Photon-to Current Efficiency System (IPCE System) 33

射頻探針台和探針座射頻探針台和探針座射頻探針台和探針座射頻探針台和探針座

RF Probe Station & Micropositioner (Manipulator) 34

主動式探針頭主動式探針頭主動式探針頭主動式探針頭/射頻探針射頻探針射頻探針射頻探針/高頻探針高頻探針高頻探針高頻探針

Actrive Probe/Picoprobe RF Probe 35

4

簡介

� 該系統配有手動探針台或四點探針座、歐姆電表/ 電源量測單元、

和量測程式，以量測電阻[Ω]、薄膜電阻[Ω/☐] 、體積電阻率[Ω-

cm] 、電導率[S / cm]測量。

� 該系統適用於 ITO /玻璃、ITO / PET、ITO / Si、Si、導電聚合物薄

膜、金屬合金薄膜/金屬凸塊。

� KeithLink 整合了四點探針座、測量儀器和薄膜量測程式，可幫助

測量導體和半導體的電阻。

� KeithLink IV 量測程式(選配功能)，方便使用者查看不同電壓下的電

阻變化。

INTRODUCTION

� The system is equipped with manual prober or 4 point

prober, Ohmmeter/SMU, and software to realize the

Resistance[Ω] / Sheet Resistance[Ω/☐] /Volume

Resistivity[Ω-cm] / Conductivity[S/cm] measurement.

� The system is applicable to ITO/Glass, ITO/PET, ITO/Si, Si,

Conductive Polymer film, Metal alloy film/bulk.

� KeithLink integrate Four Point Prober, measuring

instruments, and thin film measurement program to help

measure the resistance of conductors and semiconductors.

� KeithLink IV measurement program (option) allows to see

the changes of resistance at different voltage.

四點探針量測系統

Four Point Probe Sheet Resistivity

Measurement System

5

簡介

� 該系統配有手動探針台或四點探針座、歐姆電表/ 電源量測單元、

和量測程式，以量測電阻[Ω] 、薄膜電阻[Ω/☐] 、體積電阻率[Ω-

cm] 、電導率[S / cm]。

� 選配功能：

� 若元件有多個電阻點，可經自動開關箱控制，一次量測多個點。

� 可對 Si（矽）晶片進行 P 型或 N 型的測定，獲取晶片摻雜濃度

(Nd / Na)。不用霍爾效應方法，也可獲取載流子遷移率（μ）。

� 系統可使用電源量測單元，來呈現元件的 IV (電流電壓)。

INTRODUCTION

� The system is equipped with manual prober or 4 point

prober, Ohmmeter/SMU, and software to realize the

Resistance[Ω] / Sheet Resistance[Ω/☐] / Volume Resistivity[Ω

-cm] /Conductivity[S/cm] measurement.

� With option:

� If the device under test has multiple resistance points, it can

be measured through the auto switch control at one

measurement.

� The system can perform the determination of P type or N

type for Si (silicone) wafer, and extract the wafer doping

concentration (Nd/Na). Without using Hall-Effect method,

the system can extract carrier mobility (μ) as well.

� The system can characterize IV (current voltage) of device

under test by the employment of SMU.

高溫四點探針電阻率量測系統

High Temperature Four Point Probe

Sheet Resistivity Measurement

6

簡介

� 四點探針系統由桌面手動四點探針座、四點探針頭、精密儀表

（或選購的 IVR 量測系統、或整合電源電表）與量測程式組成。

� 量測程式可以基於使用者的樣本幾何和樣本厚度，來量測電阻

[Ω]、薄膜電阻[Ω/□]、體積電阻率[Ω-cm]、電導率[S / cm]。

INTRODUCTION

� The 4 Point Probing System is composed of a tabletop

manual 4 point prober with a 4 point probe head, a precision

meter (or optionally an I-V-R Measurement system or an all-

in-one SourceMeter) and a software.

� The program can base on user’s sample geometry and

thickness to measure out Resistance [Ω], Sheet Resistance [Ω

/□], Volume Resistivity [Ω-cm], and Conductivity [S/cm].

四點探針 I-V-R 量測系統 Four Point Probing I-V-R

Measurement System

7

簡介

� 該多點探針量測系統採用操作簡易的測試治具、自動開關箱、電

源電表和量測程式，呈現玻璃上多個 DUT 的四線式電壓電流特

性。

� 該系統還可用於量測太陽能電池的效率，可將測試治具放置在太

陽能模擬器的下方。

INTRODUCTION

� The Multi-point probing measurement system employs easy

of use test fixture, auto switch matrix, SourceMeter and

software to realize the 4-wire I-V characterization for

multiple DUTs on made on a glass.

� The system can also be applicable to the efficiency

measurement of solar cells with fixture placed underneath

the solar simulator.

多多多多點點點點探針量測系統探針量測系統探針量測系統探針量測系統 Multi-Point Probing Measurement

System

8

簡介

� 四點探針系統由氣動控制 Z 軸高度的四點探針座和四點探針頭、

精密儀表（或選配的 IVR 量測系統、或一體化電源電表）組成，

量測程式可以基於使用者的樣品幾何形狀和樣品厚度，量測電阻

[Ω] 、薄膜電阻[Ω/□] 、體積電阻率[Ω-cm] 、和電導率[S / cm]。

� 可選擇測量條件，以便準確地提取信號。測量數據可在線顯示，

並以.csv 格式儲存。

INTRODUCTION

� The 4 Point Probing System is composed of a tabletop Z-

height air control 4 point prober with a 4 Point probe head, a

precision meter (or optionally an I-V-R Measurement system

or an all-in-one SourceMeter) and a software.

� The program can base on user’s sample geometry and

thickness to measure out Resistance [Ω], Sheet Resistance [Ω

/□], Volume Resistivity [Ω-cm], and Conductivity [S/cm].

� The measurement conditions are selectable, so as for

accurate signal extraction. The measured data is on-line

displayed and stored as .csv format.

手動手動手動手動 Z 軸氣動軸氣動軸氣動軸氣動四點四點四點四點探針探針探針探針量測量測量測量測系統系統系統系統 Manual Z-Axis Pneumatic Four Point

Probing Measurement System

9

簡介

� 手動 LIV 探針量測系統，主要由手動探針台、顯微鏡、積分球組

成，在線性軌道上進行點針，量測功率/光譜。

� 該系統配備 4” 真空吸盤，可在 3” – 3” X-Y 軸平台上線性移動、亦

可 Z 軸上下微調高度。探針座和顯微鏡、經校正的功率計、積分

球、快速脈衝電流源、示波器、光學光譜分析儀、加熱盤（選

配）和量測程式。

� 可在 CW 模式和脈衝模式下，進行激光二極管 VSCEL L-I-V 點針和

量測。

INTRODUCTION

� The manual L-I-V Probing Measurement System mainly is

composed of a Manual Prober with the main body,

microscope/integration sphere on linear rails for probing

and power/optical spectrum measurement.

� 4” Vacuum Chuck on 3”-3” linear X-Y stage and fine Z

up/down, Micropositioners and a Microscope, a calibrated

Power Meter with integration sphere, a Fast-Pulsed Current

Source, an Oscilloscope, an Optical Spectral Analyzer, a Hot

Chuck (option), and Software.

� It realizes Laser Diode VSCEL L-I-V probing and

measurement application at CW mode and pulse mode.

L-I-V 探針量測系統 L-I-V Probing Measurement System

10

簡介

� 探針的力和電流量測系統由具負載感測器的測試治具、用於測量

力的力模組、裝載探針的支架、用於精確調節 Z 軸高度的千分尺

組成。整合接觸力測試治具、電源電表、開關箱和量測程式，在

各種過度加載情況下測量力的大小，在特定過度加載情況下進行

電流掃描並測量力的大小。

� 該系統適用於自動量測 3 組加載探針的力度大小，從 1mg 到

100g，電流最大達 7A。 適用的針頭直徑為 50um 和 60um。

INTRODUCTION

� The Force and Current Measurement System for Needle is

composed of Load Cells with fixtures , Force Module for force

measurement, Holders with loaded needles, Micrometers for

fine adjustment in Z height; therefore, contact force, a

SourceMeter, a switching box, and software to realize Force

measurement upon varied Over Drives, Force measurement

upon Current sweep at certain applied Over Drive.

� The system is applicable to automatically measure 3 sets of

loaded needle for the force from 1mg to 100g and current

up to max 7A. Applicable needle diameter to be 50um and

60um.

力與電流量測系統 Force and Current Measurement

System

11

簡介

� 系統自動生成觸發信號後，啟動自動氣動和自動溫度控制的四點

探針電阻量測，並在所有溫度點的電阻量測結束後，顯示 Rs-T 或

其他所需圖形。

� 自動偵測的感測器會確認上下定位，並在確定定位後執行量測。

如果沒有正確定位，則會終止量測並顯示錯誤訊息。

� 相同地，系統會確定上方位置後才開始加熱，以確保安全。

INTRODUCTION

� After the system automatically generates the trigger signal, it

starts the automatic pneumatic and automatic temperature

control four-point probe resistance measurement and

displays the Rs-T or other required graphics after the

resistance measurement of all the temperature points is over.

� The sensor is automatically detected and positioned up and

down, and the measurement is performed after the

positioning is determined. If not, the measurement is

terminated, and the error message is reported.

� In the same way, it is determined that the upper position can

heat up and ensure safety.

不同溫度下的自動四點探針不同溫度下的自動四點探針不同溫度下的自動四點探針不同溫度下的自動四點探針台台台台 Automatic Four-Point Prober at

Different Temperature

12

簡介

� 系統自動產生觸發信號，開始全自動量測四點探針電阻，同時自

動控制溫度。量測完所有溫度點阻值，線上即時顯示各溫度點的

Rs-T 電阻圖形、或其他圖形、與數據。

� 完成任一點高溫電阻量測，探針頭即自動上升，避免探針頭因過

熱受損。

� 具自動偵測上下定位感應器，確定下到定位後才開始量測。如未

到定位，會中止量測、回報錯誤訊息。確定上到定位，才允許升

溫，確保安全。

� 批次化自動進行室溫到高溫的多點四點探針量測。過程由軟體控

制，線上繪圖顯示 Rs-T 或其他圖形。簡化使用者手動升降溫、等

待溫度平衡、下壓探針、上升探針等必要但冗長的手續。

� 軟體支援工程與量產模式，可自建/存取/下載量測資料。並會回

報錯誤訊息，協助使用者偵錯。

� 脈衝模式輸入，自動熱電壓補償。

� 可自動控制三組以上的四點探針，同時、任選、或依序下針，量

測多點變溫電阻。

自動四點探針變溫量測系統 Four-Point Probe Temperature

Measurement System

13

INTRODUCTION

� The system automatically generates a trigger signal and

starts automatic measurement of the four-point probe

resistor with automatic temperature control. After measuring

all the temperature point resistance values, the Rs-T

resistance pattern at each temperature point, or other

graphs, and data are instantly displayed on the line.

� At any point of high temperature resistance measurement,

the probe head automatically rises to avoid damage to the

probe head due to overheating.

� Built-in the up and down positioning sensor. Auto start the

measurement after the probe is down. If it is not positioned,

it will stop the measurement and display the error message.

It allows to rise the temperature after the probe is up to

ensure the safety.

� Batching automatically measure by multi-point four-point

probes from room temperature to high temperature. The

process is controlled by the program, and display Rs-T or

other graphics on-line. It simplifies the necessary but lengthy

procedures to manually raise and lower the temperature,

wait for the temperature balance, push down the probe, and

raise the probe.

� Program supports engineering and mass production mode,

creates / accesses / downloads measurement data. Can

report the error messages for user to debug.

� Pulse mode input, automatic thermal voltage compensation.

� Auto control ≥ 3 sets of four-point probes. The multi-point

temperature-changing resistors can be measured at the

same time, optionally, or sequentially.

自動四點探針變溫量測系統 Four-Point Probe Temperature

Measurement System

14

簡介

� 該系統配備手動探針座、選配的加熱設備、和兩台電源量測單

元，以呈現 MOSFET 或其他相關三端元件的 IV 行為，例如：二極

體的 I-V 特性 Igs 與 Vgs、以及電晶體的 I-V 特性 Ids 與 Vds，Ids 與

Vgs。以及呈現在恆定電壓/脈衝電壓/電流應力一段時間後的那些

行為等。

INTRODUCTION

� The system is equipped with manual prober with optional

heating facility and two SMUs to realize the I-V behaviors of

MOSFET or other related 3-terminal devices, for example, the

diode I-V characteristics Igs vs. Vgs, and the transistor I-V

characteristics of Ids vs. Vds, Ids vs. Vgs. And those behaviors

after constant/pulse voltage/current stress for a period...etc.

三端子元件（MOSFET）IV 量測 3-Terminal Device (MOSFET) IV

Measurement System

15

簡介

� KeithLink 低成本多功能電源電表 I-V 量測系統，是您在 Keithley

2400 以外的另一種選擇。

� 它可以獨立充當電壓源、電流源、電壓表、和電流表，並可輸出

電壓或電流，透過 KeithLink IV 曲線量測程式，量測電流或電壓。

具高 CP 值。

� 低成本的 C-V 系統可量測元件端的實際電容 - 電壓、或電容 - 頻率

特性，以供使用者進一步分析。具高 CP 值。

INTRODUCTION

� KeithLink low-cost multifunction power meter SourceMeter

measurement system is another choice outside of Keithley

2400.

� It can independently act as a voltage source, current source,

voltage meter, and current meter, and can output voltage or

current, measure the current or voltage by KeithLink I-V

Curve measuring program. It’s good value for money.

� The low-cost C-V system measures the real Capacitance-

Voltage or Capacitance-Frequency characterization at device

side, so as for further analysis by user. It’s good value for

money.

低成本高 CP 值 I-V/C-V 量測系統 Low Cost I-V/C-V Measurement

System

16

簡介

� 這是一個由量測程式和硬體整合而成的系統，可量測雙端元件/三

端元件的電壓-電流（I-V）、和電容-電壓（C-V）（直流電壓 0~ +

/ -30V 或以上）。

INTRODUCTION

� This is a software and hardware integration system of the

implementation of double-ended / three-terminal voltage

and current (I-V) measurement and capacitance-voltage (C-

V) (DC voltage 0 ~ + / -30V or above).

I-V，，，，C-V 一體化探針量測系統一體化探針量測系統一體化探針量測系統一體化探針量測系統

I-V, C-V integrated-in-one Probing

Measurement System

17

簡介

� 4” 手動探針台主要由手動探針台主體、3”-3” 線性移動的 X-Y 平

台、4” 真空吸盤、探針座和顯微鏡組成。

� 該系統可應用於各種晶圓探針和量測應用。

INTRODUCTION

� The 4” manual probing system mainly is composed of a

Manual Prober with the main body, a 4” Vacuum Chuck on 3”

-3” linear X-Y stage, the micropositioners, and a microscope.

� The system can be applied to various wafer probing and

measurement applications.

4“簡易型手動探針台 4” Simplified Manual Prober

18

簡介

� 該太陽能模擬系統用於模擬太陽光，其廣泛用於光伏元件和 QC

中。太陽模擬器可以產生准直光束，及均勻的光斑。提供太陽模

擬器系統輻射光譜中的 A 級光譜匹配。

� 太陽能模擬器系統適用於量測單晶矽、多晶矽、非晶薄膜、染料

敏化、有機電池，III-V 族半導體太陽能電池等。

INTRODUCTION

� This solar simulator system is used to simulate the sunlight,

which is used widely in the photovoltaic devices and QC. The

solar simulator can produce the collimation beam, and the

light spot is uniform. Spectral Match is class A of the solar

simulator system radiation spectrum.

� This solar simulator system is suited for the monocrystalline

silicon, polysilicon, amorphous thin film, dye-sensitized,

organic, III-V semiconductors solar cells measurement and

so on.

太陽能電池效率量測 Solar Cell Efficiency Measurement

19

簡介

太陽能電池 I-V 量測系統：

� 輸出電壓 0~100V（@ 10A）

� 解析度：2.5mV

� 電流量測解析度：10uA（最大 10A）

� 兩線式/ 四線式電阻量測

� I-V 測試程式

� 可控制電壓源和電流表

� 提供電壓 - 電流量測的電壓掃描模式

� 可以萃取電壓值和電流值

INTRODUCTION

Solar Cell I-V Measurement System:

� Output with 0~100V (@10A)

� Resolution: 2.5mV

� Current Measurement resolution: 10uA (max.10A)

� 2-wire/4-wire resistance measurement

� I-V Test Program

� Control of Voltage Source and Current Meter

� Voltage sweep mode for voltage-current measurement

� Voltage and current can be extracted

高電流/電壓 IV 量測（太陽能） High Current/Voltage IV

Measurement (Solar)

20

簡介

� 它可以在太陽能玻璃元件上進行多點量測，觀察在照明/非照明情

況下，每個元件的電壓和電流曲線。

INTRODUCTION

� It can measure every single element’s voltage and current

curve under illumination/non-illumination on the solar glass

element with multi-points.

遮陽/遮光量測系統 Solar Shading Measurement system

21

簡介

� 它可以量測柔性元件在拉伸不同距離時的電阻值。

INTRODUCTION

� It can measure the resistance of flexible element when it

stretches at different distances.

柔性元件拉伸時的電阻量測系統 Flexible Element Stretch Resistance

Measurement System

22

簡介

� 該系統配備手動探針台，可選配加熱設備，以及兩台 KV 階的電

源供應器。以監測 FED 在預設的時間內，施加恆定電壓或掃描高

電壓下，其 I-V-W（電流 - 電壓 - 功率）的行為。

INTRODUCTION

� The system is equipped with manual prober with optional

heating facility and two KV ordered power supplies to

monitor the I-V-W (Current-Voltage-Power) behaviors at a

settable time for the FED when constant or sweep high

voltage is applied.

FED 量測系統 FED Measurement System

23

簡介

� 該系統配有高壓適用的真空腔體，可選配加熱設備和電源量測單

元，以呈現元件在高壓範圍內的 I-V 特性。

INTRODUCTION

� The system is equipped with a high voltage applicable

chamber with optional heating facility and SMU to realize the

I-V behavior of the device at high voltage range.

真空腔體 - 高壓 I-V 量測系統 Chamber-High Voltage I-V

Measurement System

24

簡介

� 該系統配備由量測程式控制的精密儀器，和多個粗細間距不一的

線棒的相關測試治具，可量測接觸電阻。同時，嵌入式四點探

針，允許在不改變測試治具的情況下直接線上量測樣品。

� 與傳統多次點針以量測接觸電阻的方式（量測中產生不同的力）

不同，我們的系統採用一次性下壓接觸方式來量測電阻、接觸電

阻和其他參數，從而節省操作時間並減少量測誤差。

INTRODUCTION

� The system is equipped with the software-controlled

precision instrument and relative test fixtures for multiple

line bars with coarse and fine pitch contact resistance

measurement; meanwhile, embedded 4 point probing

measurement allowing to on-line perform without test

fixture changed.

� Unlike conventional multiple probing (causing different

forces in measurements) for contact resistance

measurement, our system employs one-time touch down

measurement for resistances and accordingly contact

resistance and other parameters, so as for operation time

saving and error decreasing from measurements

TLM 接觸電阻量測/生產線晶圓凸塊量測

TLM Contact Resistance Measurement /

Production Line Wafer Bump Resistance

Measurement System

25

簡介

� 系統由霍爾探針台、電磁鐵、離散電源、離散電表（或選配一體

化電源電表，如 Keithyley 2400）、開關箱、高斯計和探針座組

成，在高於 0.5 Tesla 的高磁力下，進行霍爾效應量測。

� 可透過螺桿或電流調節磁力。可輕易改變上下磁場方向。透過 4

個探針座來探測樣品。樣品承載架上的樣品下方嵌有高斯計感測

器，可穩定讀取所施加的力[Gauss]。

� 量測元件上的實際電流和實際壓降，避免元件以外的偏移。採用

Van Der Pauw 的接線和方法進行霍爾效應量測。

INTRODUCTION

� The Hall Probing Measurement System is composed of Hall

Prober, Electrical Magnets, discrete Source, discrete Meter

(or optional all-in-one SourceMeter, such as Keithyley 2400),

Switching Matrix, Gauss meter, and micropositioners to

realize Hall measurement at high magnetic force more than

0.5 Tesla.

� The magnetic force is adjustable by lead screw or current

flow. Easy to change magnetic field direction to upward or

downward. Probing on sample by 4 pcs of micropositioners.

Sensor of Gauss meter is embedded underneath sample on

the sample holder for stable readings of applied force.

� Actual applied current flow and actual voltage drop on

device are measured to reveal device reality and avoid of

offsets other than device. Van Der Pauw connections and

method to realize Hall effect measurement.

霍爾霍爾霍爾霍爾效應效應效應效應量量量量測測測測系統系統系統系統(含含含含電磁鐵電磁鐵電磁鐵電磁鐵)

Hall Probing Measurement System

with Electromagnets

26

霍爾探針永久電磁鐵量測系統

Hall Probing Measurement System with

Permanent Magnet

簡介

� 本系統由霍爾探針台、永久電磁鐵、離散電源、離散電表（或選

配一體式電源電表，如 Keithley 2400）、開關箱、高斯計和探針

座組成，在 0.5 Tesla 高磁場下進行霍爾量測。

� 可透過螺桿調節磁力。可輕鬆改變磁場的上下方向。具四個探針

座對樣品進行點針。在樣品架下方嵌入高斯計感測器，用於穩定

讀取所施加的力[Gauss]。

� 量測實際施加的電流和元件上的實際壓降，以揭示元件的真實性

並避免元件以外的偏移。 採用 Van Der Pauw 的接線和方法進行霍

爾效應量測。

INTRODUCTION

� It is composed of Hall Prober, Permanent Magnets, discrete

Source, discrete Meter (or optional all-in-one SourceMeter,

such as Keithley 2400), Switching Matrix, Gauss meter, and

micropositioners to realize Hall measurement at high

magnetic force 0.5 Tesla.

� The magnetic force is adjustable by a lead screw. Easy to

change magnetic field direction to upward or downward.

Probing on the sample by 4 pcs of micropositioners. The

sensor of Gauss meter is embedded underneath sample on

the sample holder for stable readings of applied force.

� Actual applied current flow and actual voltage drop on the

device are measured to reveal device reality and avoid of

offsets other than the device. Van Der Pauw connections and

method to realize Hall effect measurement.

27

簡介

� 配備定時直流和交流電源產生器，可點亮 OLED 面板和追踪光學

量測。

� 可調直流電源引腳和交流電源引腳的電壓。

� 可調交流電源引腳的頻率（時序寬度/雙時序寬度）。

� 可選擇交流電源引腳的 AC 模式或 DC 模式（H 或 L）。

� 可以選擇執行測試的 RGB 模式。

� 可量測任何指示電源引腳的電流消耗量。

� 可以對 OLED 面板上的測試鍵執行 I-V 量測。

� 可以定義、保存和下載測試程序，以進行精確測試。

INTRODUCTION

� Equipped with DC powers and AC timing generator for

lighting up OLED panel and following optical measurement.

� Voltage is adjustable for DC power pin and AC pin.

� Frequency (timing width/double timing width) for AC pin is

adjustable.

� AC mode or DC mode (H or L) selection for AC pin.

� RGB pattern for the test is selectable for execution.

� Current consumption measurement for any indicated power

pin.

� I-V measurement can be performed for test key on OLED

panel.

� Test task can be defined, saved and loaded for test exact.

OLED 面板 AC / DC 驅動測試系統 OLED Panel AC/DC Drive Test

System

28

簡介

� 該系統配有測試治具和精密歐姆電表，用於夾緊銅線，並在一定

溫度/濕度下量測 1 米長銅線的電阻、體積電阻率和電導率。

� 控制高精度歐姆表進行電阻量測

� 各種輸入條件設置，用於精確的電阻/溫度量測

� 將量測值轉換為體積電阻率和電導率。

INTRODUCTION

� The system is equipped with the test fixture and precision

ohmmeter to clamp the copper wire and measure the

resistance, volume resistivity and conductivity with 1 meter in

length at a certain temperature/humidity.

� Control of high precision Ohmmeter for resistance

measurement

� Various input condition settings for accurate

resistance/temperature measurement

� Conversion of measured values to volume resistivity and

conductivity

銅線電阻量測系統 Copper Wire Resistance

Measurement System

29

簡介

� 以真空腔體的形式配備探針台。量測溫度範圍為攝氏-190 度 C

（攝氏 83 度 K）~200 攝氏度 C，或攝氏-40 度 C~攝氏 300 度 C。

� 具可編程的數位溫度控制器。在腔體和觀察視窗上安裝外部探針

座，使用者可以隨時調整探針位置。

INTRODUCTION

� The prober is equipped in the form of a vacuum chamber.

The measurement temperature range is -190 degrees C (83

degrees K) ~ 200 degrees C, or -40 degrees C ~ 300 degrees

C.

� The digital temperature controller is programmable. With

external micropositioners installed on the chamber and

viewing chamber that the user can adjust the probing

position at any time.

用於低溫/高溫測試的真空腔體探針台/低溫探針

Vacuum Chamber Prober for Low/High

Temperature Testing, Cryogenic Prober

30

簡介

� 將正向/反向偏置電流施加到 LED 並量測電壓。 將反向偏壓施加到

LED 並量測電流。

� 將量測值與特定的最小/最大限制值進行比較，以確定 LED 是否通

過測試。

INTRODUCTION

� Forward/Reverse bias current is applied to the LED and

voltage is measured. The reverse bias voltage is applied to

the LED and current is measured.

� Measurements are compared against a specified

minimum/maximum limit to determine if the LED passes or

fails.

LED Vf/Vr/Il 量測系統 LED Vf/Vr/Il Measurement System

31

簡介

� 該系統配備高真空手動探針談台、加熱設備、和電源量測單元，

以呈現設備的 R-T（電阻 - 溫度）相變行為。

� 溫度可控制，可在真空腔體中加熱至攝氏 500 度。

INTRODUCTION

� The system is equipped with high vacuum manual prober

with heating facility and SMU to realize the R-T (Resistance-

Temperature) phase transition behavior of the device.

� The temperature can be controlled to heat up to 500 degrees

C in the chamber.

電阻-溫度量測系統 R-T Measurement System

32

簡介

� 該系統配備手動探針台、可選配加熱設備、和電源量測單元，呈

現元件在恆定電流/脈衝電流/電壓應力下，I-t（電流-時間）的行

為。

� 可以設定測量時間。

INTRODUCTION

� The system is equipped with manual prober with optional

heating facility and SMU to realize the I-t (Current-Time) the

behavior of the device under constant/pulse current/voltage

stress.

� The time to measure is settable.

電流電流電流電流-時間量測系統時間量測系統時間量測系統時間量測系統

I-t Measurement System

33

簡介

� IPCE 符合 ASTM E1021 和 IEC 60904-8 外部量子標準。

� 效率測量系統包括氙氣或鹵素燈光源、聚焦鏡頭、單色器、

濾光片、反射鏡、光電探測器（選配）、樣品承載台、探針

座（選配）、電源電表（選配），和自動控制 IPCE 量測的程

式。亦可選配偏光燈、光斬波器和鎖定放大器。

� 可選擇 300-1100nm 範圍內的波長。

INTRODUCTION

� The IPCE complies to standards of ASTM E1021 and IEC

60904-8 for External Quantum

� Efficiency measurement mainly consists of Light (Xenon or

Halogen light) Source, Focal Lens, Monochromator, Filters,

Mirrors, Photodetector (option), Sample Stage,

Micropositioners (option), Source Meter (option) and auto

controlled IPCE measurement software. Bias light, optical

chopper, and lock-in amplifier all are optional.

� The wavelength is selectable in the range of 300-1100nm.

事件光子到電流效率事件光子到電流效率事件光子到電流效率事件光子到電流效率量測量測量測量測系統系統系統系統

Incident Photon-to Current

Efficiency System (IPCE System)

34

簡介

� 探針台本體

� 具 250* 300mm 吸盤（可選配真空吸盤）

� 具真空開關，可控制探針座的真空吸附狀態

� 具 8”-8”量測吸盤的 X-Y 軸平台；吸盤 Z 軸移動距離 > 10mm

� 固定平台；可快速拉出 Y 軸平台，便於樣品裝載/卸載

� 顯微鏡安裝在通用軸承機構上，便於拖動和聚焦

� U 型平台覆蓋大面積的點針區域

� 配備立體顯微鏡和射頻微處理器

� 可選購：射頻探針、高頻轉接線和轉接頭、校正片、接觸片和防

振桌

INTRODUCTION

� Main prober stage

� 250*300mm chuck (vacuum is available for option)

� Vacuum ON-OFF switch to control vacuum underneath

micropositioner

� Chuck X-Y stage 8"-8"; Chuck Z >10mm

� Fixed platen; Fast Pull-Out Y stage for easy sample

Load/Unload

� Microscope mount on universal bearing mechanism for easy

drag and focus

� U type platform to cover the big probing square area

� Equipped with Stereo Microscope and RF Micropositioners

� Options: RF Probe, RF Cable and Adapter, Calibration

Substrate, Contact Substrate, and Anti-Vibrational Table

射頻探針台和探針座射頻探針台和探針座射頻探針台和探針座射頻探針台和探針座

RF Probe Station & Micropositioner

35

簡介

� 主動式探針頭（GGB Picoprobe）可以量測高頻信號和低驅動能

力。使用預電路，使 IC 主動式探針的負載信號減低。部分探針在

高輸入阻抗信號下做強化緩衝，不會加載傳輸線和示波器，造成

信號衰減。

INTRODUCTION

� Active Probes (GGB Picoprobe) can measure the high-

frequency signal and a low drive capability. The use of pre-

circuit, so that the load signals fall IC Active Probes, part of a

needle in the high input impedance signals do strengthen

buffer, will not load the transmission line and the

oscilloscope, the signal attenuation caused.

主動式探針頭主動式探針頭主動式探針頭主動式探針頭/射頻探針射頻探針射頻探針射頻探針/高頻探針高頻探針高頻探針高頻探針

Active Probe/Picoprobe RF Probe

36

凱思隆科技股份有限公司

KeithLink Technology Co, Ltd.

Tel: +886 2 2978 6535

Fax: +886 2 2978 2726

service@keithlink.com

www.keithlink.com